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MD

Maxime Darnon

8
Documents
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Présentation

Publications

"serge-ecoffey"

Micro-Scale III-V/Ge Multijunction Solar Cell with Through Cell Via Contacts

Mathieu de Lafontaine , Gay G , E. Pargon , C. Petit-Etienne , R Stricher
49th IEEE Photovoltaic Specialists Conference, Jun 2022, Philadelphia, United States
Communication dans un congrès hal-03686951v1

Micro-Scale III-V/GeMultijunction Solar Cell with Through Cell Via Contacts

M de Lafontaine , G Gay , E Pargon , C Petit-Etienne , Serge Ecoffey
49th IEEE Photovoltaic Specialists Conference, Jun 2022, Philadelphia, United States
Communication dans un congrès hal-03821787v1

Patterning Platinum using BEOL industrially compatible processes; Chemical Mechanical Polishing vs. ICP Plasma etching

A Elshear , R Stricher , Serge Ecoffey , Maxime Darnon , Dominique Drouin
44th International Conference on Micro and Nanoengineering, Sep 2019, Copenhage, Denmark
Communication dans un congrès hal-03178730v1

Patterning Platinum using CMP and plasma etching industrially compatible processes

A Elshaer , R Stricher , M. Darnon , D. Drouin , S. Ecoffey
45th International Conference on Micro and Nano Engineering MNE, Aug 2019, Rhodes, Greece
Communication dans un congrès hal-02320605v1

Selective dry etching of titanium nitride nanostructures with chlorine-based inductively coupled plasma

Bruno Lee Sang , Marie-Josee Gour , Maxime Darnon , Serge Ecoffey , Abdelatif Jaouad
40th Micro and Nano Engineering Conference, Sep 2014, Lausanne, Switzerland
Communication dans un congrès hal-02339986v1

Inductively coupled plasma etching of ultra-shallow Si3N4 and SiO2 nanostructures

Bruno Lee Sang , Abdelatif Jaouad , Serge Ecoffey , Maxime Darnon , Marie-Josee Gour
40th Micro and Nano Engineering Conference, Sep 2014, Lausanne, Switzerland
Communication dans un congrès hal-02339985v1