Remi Dussart
2
Documents
Présentation
Publications et communications
Publications
- 2
- 2
- 2
- 2
- 1
- 1
- 1
- 1
- 1
- 1
Elaboration of high aspect ratio monocrystalline silicon suspended nanobridges by low temperature alkaline treatment of dry etched trenchesJournal of Vacuum Science & Technology A, 2012, 30 (1), pp.010601. ⟨10.1116/1.3665217⟩
Article dans une revue
hal-00655000v1
|
|
Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperatureSensors and Actuators A: Physical , 2011, 170 (1-2), pp.114. ⟨10.1016/j.sna.2011.05.028⟩
Article dans une revue
hal-00655001v1
|