Bernard Legrand
Publications
Publications
Pushing AFM Boundaries with Optomechanics: From Ultra-High-Speed to Quantum SensingLeti Innovation Days, CEA-LETI, Jun 2025, Grenoble, France |
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Leveraging the chaotic regime of a MEMS oscillator for gas detectionNonlinear Micro-Nanosystems symposium, May 2025, Marne-la-Vallée, France |
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High-Temperature Dual-Rail Contactless MEMS Logic for Industrial Edge Computing2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE, Jan 2025, Kaohsiung, Taiwan. pp.542-545, ⟨10.1109/MEMS61431.2025.10917966⟩ |
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TOWARDS UNVEILING THE HIDDEN DYNAMICS OF BACTERIORHODOPSIN WITH MEMS-BASED ATOMIC FORCE MICROSCOPY2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2025, Orlando, United States. pp.817-820, ⟨10.1109/Transducers61432.2025.11110349⟩ |
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Ultra-Low-Power Logic with Contactless Capacitive MEMS21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩ |
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Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regimeWorkshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France |
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130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive MeasurementsIEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩ |
Optomechanics: a key towards next-generation experiments in atomic force microscopy?International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France |
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Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States |
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Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructuresEUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal |
[Invited] MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensorsAVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States |
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The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectoryInternational Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018, Apr 2018, Dresden, Germany |
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[Invited] SMM characterization of Au nanodots and FcC11SH moleculesXX Annual Linz Winter Workshop, Advances in Single-Molecule Research for Biology & Nanoscience, Feb 2018, Linz, Austria |
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Driving and sensing M/NEMS flexural vibration using dielectric transduction31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France |
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High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩ |
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HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORSThe 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩ |
Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria |
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Optimization of length and thickness of smart transduction layers on beam structures for control and M/NEMS applicationsASME 2015 Conference on Smart Materials Adaptive Structures and Intelligent Systems (SMASIS 2015), Sep 2015, Colorado Springs, United States. 9p., ⟨10.1115/SMASIS2015-8857⟩ |
When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency28th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2015, Jan 2015, Estoril, Portugal. ⟨10.1109/MEMSYS.2015.7050908⟩ |
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Determination of the effective mass and stiffness of a micro resonator from a single optical characterizationTRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩ |
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Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry45th European Microwave Conference EuMC 2015, Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345849⟩ |
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Caractérisation quantitative des capacités sous échelle de 10 nm avec un interférométrique scanning-microwave-microscopy17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p |
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Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometryEuropean Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom |
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A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417 |
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Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩ |
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Towards a new generation of MEMS-based AFM probesInternational Scanning Probe Microscopy Conference, ISPM 2013, 2013, Dijon, France |
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Interferometric scanning microwave microscope for nanotechnology applicationAmerican Physical Society March Meeting, APS March Meeting 2013, 2013, Baltimore, MD, United States |
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Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, ⟨10.1109/Transducers.2013.6626829⟩ |
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Nanoscale capacitors study with an interferometric scanning microwave microscopeMaterials Research Society Fall Meeting, MRS Fall 2013, Symposium LL : Advances in Scanning Probe Microscopy, 2013, Boston, MA, United States |
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5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, ⟨10.1109/MEMSYS.2013.6474311⟩ |
SOL-like calibrated RF measurements at the nanoscale on a modified scanning microwave microscope2nd Nano Measure Scientific Symposium, Nano Measure 2012, 2012, Stanford, CA, United States |
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[Invité] Apport des microsystèmes pour la microscopie à force atomiqueJournée thématique trans-GDR '' Micromanipulation pour les Micro-Nano Systèmes '', 2012, Besançon, France |
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Conception and fabrication of piezo-resistive ring shaped AFM probe25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.547-550, ⟨10.1109/MEMSYS.2012.6170180⟩ |
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Micro-résonateurs haute fréquence pour la microscopie à force atomique15ème Forum des Microscopies à Sonde Locale, 2012, Saint-Jacut-de-la-Mer, France |
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Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189 |
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Micro-résonateurs haute fréquence pour la microscopie à force atomiqueJournées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France |
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DNA origami imaging with 10.9 MHz AFM MEMS probes25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.555-558, ⟨10.1109/MEMSYS.2012.6170236⟩ |
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4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotipsXXIème Congrès Général de la Société Française de Physique, SFP 2011, Jul 2011, Bordeaux, France |
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Optimal design of non intuitive compliant microgripper with high resolutionIEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 2011, San Francisco, CA, United States. pp.45-50, ⟨10.1109/IROS.2011.6048665⟩ |
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IMPROVE-LM - Imaging probe for vacuum environment and liquid mediumJournées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France |
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[Invité] Apport des micro et nano-systèmes pour la microscopie à force atomiqueJournées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France |
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4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Jan 2011, Cancun, Mexico. pp.517-520, ⟨10.1109/MEMSYS.2011.5734475⟩ |
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[Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applicationsTELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6 |
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Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applicationsASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, 2011, Denver, CO, United States. pp.IMECE2011-65083-1-5 |
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Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France |
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Improve-LM imaging probe for vacuum environment and liquid mediumJournées du Réseau National en Nanosciences et en Nanotechnologies, J3N 2010, 2010, Lille, France |
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Surface microscopy with laserless MEMS based AFM probes23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Jan 2010, Hong Kong, China. pp.292-295, ⟨10.1109/MEMSYS.2010.5442509⟩ |
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Atomic force probe using silicon ring resonator conception5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France |
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Tip-matter interaction measurements using MEMS ring resonatorsForum des Microscopies à Sonde Locale, 2009, Hardelot, France |
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Tip-matter interaction measurements using MEMS ring resonators15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Jun 2009, Denver, CO, United States. pp.1638-1641, ⟨10.1109/SENSOR.2009.5285774⟩ |
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High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, USA, United States. pp.2114-2117, ⟨10.1109/SENSOR.2009.5285623⟩ |
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Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France |
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Characterization of IN-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, Jan 2008, Tucson - AZ, United States. pp.1016-1019, ⟨10.1109/MEMSYS.2008.4443831⟩ |
Proposition of atomic force probes based on silicon ring-resonators14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. pp.1529-1532, ⟨10.1109/SENSOR.2007.4300436⟩ |
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Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Jun 2007, Lyon, France. pp.2267-2270, ⟨10.1109/SENSOR.2007.4300621⟩ |
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High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 2007, Unknown, Unknown Region. pp.878-+ |
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Résonateurs électromécaniques : principe et applicationsEcole Thématique CNRS : Microsystèmes acoustiques, 2007, Lille, France |
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High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. pp.851-854, ⟨10.1109/MEMSYS.2007.4433179⟩ |
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Micro et nanomécanique, MEMS et NEMSEcole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France |
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Micro-machined actuators for the friction driven micro-motor2006, pp.211-214 |
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Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules2006, 4 pp |
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Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response2006, pp.244-249 |
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Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications2006, pp.718-721 |
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Ultra-low voltage MEMS resonator based on RSG-MOSFET2006, pp.882-885 |
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ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSEDTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p |
a total miscibility of two metallic elements with different crystallographic structures in the surfaceEuropean Conference on Surface Science ECOSS 24, Sep 2006, PARIS, France |
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MEMS reliability : metrology set-up for investigation of fatigue causes2005, pp.483-486 |
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Microsystèmes : principales applications et contexte nationalEcoles Nanosciences, 2005, Anglet, France |
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1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, Jan 2005, Miami Beach, United States. pp.121-124, ⟨10.1109/MEMSYS.2005.1453882⟩ |
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solubilité complète en surface entre deux métaux de structure cristllographique différenteJSI 2005, 2005, LYON, France |
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Friction driven micromotors with both clockwise and counterclockwise rotations17e Congrès Français de Mécanique, 2005, Troyes, France |
The 2D feedback conveyance with ciliary actuator arrays2005, pp.31-34 |
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Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact modeThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩ |
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RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducersSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31 |
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Reliability of non-released microstructures : failure analysis and innovative solution process2005, pp.840-842 |
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Tensile stress determination in silicon nitride membrane by AFM characterization2005, pp.828-831 |
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Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ?Ecole Nanosciences, 2005, Anglet, France |
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3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Jun 2005, Seoul, South Korea. pp.19-22, ⟨10.1109/SENSOR.2005.1496348⟩ |
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Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide17e Congrès Français de Mécanique, 2005, Troyes, France |
Micromachined actuators for friction driven linear micro-motorsProceedings of the Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, 2005, Hyogo, Japan |
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Nanotechnologie, micro et nanosystèmes5ème Colloque International TELECOM'2005 & 4èmes Journées Franco-Magrhébines des Micro-ondes et leurs Applications, JFMMA, 2005, Rabat, Maroc |
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Electrostatic actuators operating in liquid environment : position control without pull-in effect2005, pp.341-346 |
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Stiction drive operation of micromotors : direct and reverse rotation control2005, pp.57-60 |
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Reliability of polycrystalline MEMS : prediction of the debugging-timeInternational Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States |
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Characterization of individual bio-cells with thermally actuated probe arraysNonimaging Optics and Efficient Illumination Systems, Aug 2004, Denver, CO, United States. pp.425-429 |
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An original methodology to assess fatigue behavior in RF MEMS devicesEuropean Microwave Week, 2004, Amsterdam, Netherlands |
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TP de nanotechnologie : réalisation et observation de nanofils de silicium à l'aide de l'AFM8èmes Journées Pédagogiques du CNFM, 2004, Saint Malo, France |
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Predictive modelling of the fatigue phenomenon for polycristalline structural layers2004, pp.145-148 |
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Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology2003, pp.F23-F26 |
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Thermally actuated probe arrays for manipulation and characterization of individual bio-cellTRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩ |
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Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1578-1581, ⟨10.1109/SENSOR.2003.1217081⟩ |
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Ultimate technology for micromachining of nanometric gap HF micromechanical resonators2003, pp.157-160 |
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Tapping-mode HF nanometric lateral gap resonators : experimental and theory2003, pp.879-882 |
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Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1287-1290, ⟨10.1109/SENSOR.2003.1217008⟩ |
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Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology2002, pp.447-450 |
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Study of adhesive forces on a silicon nanotip force microscope in contact modeDesign, Test, Integration, and Packaging of MEMS/MOEMS 2002, May 2002, Cannes, France. pp.601-612, ⟨10.1117/12.462861⟩ |
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Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiéesColloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France |
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Architecture level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receiversDesign, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2002, May 2002, Canne, France. pp.136-142 |
High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment2002, pp.665-668 |
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IF MEMS filters for mobile communication2001, pp.733-736 |
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Microsystem technology : trends and possible application for textileConference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France |
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Microsystème : enjeux et perspectivesJournée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France |
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Microsysteme : un état des lieux, enjeux et perspectives48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France |
Unveiling Hidden Dynamics of Biological Process with Optomechanical AFM with sub-µs time resolutionAnnual Meeting of the GDR MecaQ, Sep 2024, Grenoble, France. 2024 |
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High Speed Atomic Force MicroscopeNI-Week 2017, May 2017, Austin, TX, United States. , 2017 |
Micro et nanorésonateurs radio-fréquenceLeray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.239-242, 2009 |
Système pour détecter des réponses d'un dispositif résonateur micro-électromécanique (MEMS)N° de brevet: FR2985251 (A1). 2013 |
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Sonde pour microscopie à force atomiqueN° de brevet: FR2915803 (A1). 2008 |
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Circuit superhétérodyne à filtre passe-bande de sélection de canalN° de brevet: FR2836765 (A1). 2003 |
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Détecteur infrarouge semi-conducteur et son procédé de fabricationFrance, N° de brevet: FR2791474 (A1) 2000-09-29. 2000 |
Contribution au domaine des actionneurs et résonateurs microélectromécaniques. Applications à la nanocaractérisation2012 |
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Elaboration et caractérisation physique par microscopie à champ proche de nanostructures semi-conductrices2000 |
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Is There Really a Size effect on the Surface Energy of Nanoparticles ?2021 |
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Magnetism: the Driving Force of Order in CoPt. A First-Principles Study2012 |
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Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide[Rapport Technique] LAAS-CNRS. 2019 |
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CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO‐CARACTÉRISATION.Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2012 |