Bernard Legrand

183

Documents

Publications

	Suspended tip overhanging from chip edge for atomic force microscopy with an optomechanical resonator Aleksandra Marković , Mathis Lefebvre , Laurent Mazenq , Samuel Charlot , Marc Gély Journal of Optical Microsystems, 2024, 4 (3), pp.033501. ⟨10.1117/1.JOM.4.3.033501⟩ Journal articles hal-04689661v1
	Influence of ordering phenomena on carbon segregation in tungsten screw dislocation Fabienne Berthier , Bernard Legrand Acta Materialia, 2023, 245, pp.118610. ⟨10.1016/j.actamat.2022.118610⟩ Journal articles hal-03765006v2
	Effect of size on the surface energy of noble metal nanoparticles from analytical and numerical approaches Hakim Amara , Jaysen Nelayah , Jérôme Creuze , Adrian Chmielewski , Damien Alloyeau Physical Review B, 2022, 105 (16), pp.165403. ⟨10.1103/PhysRevB.105.165403⟩ Journal articles hal-03863659v1
	Very high frequency probes for atomic force microscopy with silicon optomechanics L Schwab , P E Allain , Nicolas Mauran , Xavier Dollat , Laurent Mazenq Microsystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩ Journal articles hal-03326075v2
	Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes Denis Lagrange , Nicolas Mauran , Lucien Schwab , Bernard Legrand IEEE Transactions on Control Systems Technology, 2021, 29 (5), pp.2264 - 2270. ⟨10.1109/TCST.2020.3028737⟩ Journal articles hal-02974151v1
	Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces Pierre Etienne Allain , Lucien Schwab , Colin Mismer , Marc Gély , Estelle Mairiaux Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/C9NR09690F⟩ Journal articles hal-01908683v2
	Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation Alexis Front , Bernard Legrand , Guy Tréglia , Christine Mottet Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2019, 679, pp.128-138. ⟨10.1016/j.susc.2018.08.024⟩ Journal articles hal-03547785v1
	Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation Alexis Front , Bernard Legrand , G. Tréglia , Christine Mottet Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2018, 679, pp.128 - 138. ⟨10.1016/j.susc.2018.08.024⟩ Journal articles hal-03891247v1
	Magic compositions in Pd-Au nanoalloys Christine Mottet , Beien Zhu , Alexis Front , Hazar Guesmi , Jérôme Creuze Computational and Theoretical Chemistry, 2017, 1107, pp.49-56. ⟨10.1016/j.comptc.2016.12.023⟩ Journal articles hal-03547790v1
	Magic compositions in Pd-Au nanoalloys Zhu Beien , Front Alexis , Hazar Guesmi , Jérôme Creuze , Bernard Legrand Computational and Theoretical Chemistry, 2017, 1107, pp.49-56. ⟨10.1016/j.comptc.2016.12.023⟩ Journal articles hal-01426928v1
	Multi-MHz micro-electro-mechanical sensors for atomic force microscopy Bernard Legrand , Jean-Paul Salvetat , Benjamin Walter , Marc Faucher , Didier Theron Ultramicroscopy, 2017, 175, pp.46 - 57. ⟨10.1016/j.ultramic.2017.01.005⟩ Journal articles hal-01765180v1
	A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes Adhitya Bhaswara , Hohyun Keum , Fabrice Mathieu , Bernard Legrand , Seok Kim Frontiers of Mechanical Engineering in China, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩ Journal articles hal-01960876v1
	Environment dependence of magnetic moment and atomic level shifts within tight-binding approximation: An illustration in the case of cobalt C. Goyhenex , G. Tréglia , Bernard Legrand Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2016, 646 (SI), pp.261-268. ⟨10.1016/j.susc.2015.09.004⟩ Journal articles hal-01455014v1
	CO adsorption-induced surface segregation and formation of Pd chains on AuPd(100) alloy: density functional theory based ising model and Monte Carlo simulations Beien Zhu , Jérôme Creuze , Christine Mottet , Bernard Legrand , Hazar Guesmi Journal of Physical Chemistry C, 2016, 120, pp.350-359. ⟨10.1021/acs.jpcc.5b10158⟩ Journal articles hal-01267581v1
	Environmental microbiology as a mosaic of explored ecosystems and issues Denis Faure , Patricia Bonin , Robert Duran , Pierre Amato , Florence Arsene-Ploetze Environmental Science and Pollution Research, 2015, 22 (18), pp.13577-13598. ⟨10.1007/s11356-015-5164-5⟩ Journal articles hal-01247096v1
	Surface segregation in AuPd alloys: Ab initio analysis of the driving forces Jérôme Creuze , Hazar Guesmi , Christine Mottet , Beien Zhu , Bernard Legrand Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2015, 639, pp.48 - 53. ⟨10.1016/j.susc.2015.04.017⟩ Journal articles hal-01378430v1
	Design and measurement of AFM probe based on MEMS resonator Zhuang Xiong , Bernard Legrand High Power Laser and Particle Beams, 2015, 27 (2), pp.024119-1. ⟨10.11884/HPLPB201527.024119⟩ Journal articles hal-01961045v1
	Crossover among structural motifs in Pd–Au nanoalloys B. Zhu , H. Guesmi , J. Creuze , Bernard Legrand , C. Mottet Physical Chemistry Chemical Physics, 2015, 17, pp.28129-28136. ⟨10.1039/C5CP00491H⟩ Journal articles hal-01222110v1
	Two types of MEMS-based oscillating AFM probes Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot Journal of Chinese Electron Microscopy Society , 2014, 2, pp.137-141 Journal articles hal-01960910v1
	Fabrication of nanoplate resonating structures via micro-masonry Adhitya Bhaswara , Hohyun Keum , S Rhee , Bernard Legrand , Fabrice Mathieu Journal of Micromechanics and Microengineering, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩ Journal articles hal-01687810v1
	A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot Sensors, 2014, 14 (11), pp.20667-20686. ⟨10.3390/s141120667⟩ Journal articles hal-01960848v1
	Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope Fei Wang , Nicolas Clément , Damien Ducatteau , David Troadec , Hassan Tanbakuchi Nanotechnology, 2014, 25 (40), pp.405703. ⟨10.1088/0957-4484/25/40/405704⟩ Journal articles hal-01960609v1
	Evidence of Pd segregation and stabilization at edges of AuPd nano-clusters in the presence of CO: A combined DFT and DRIFTS study Beien Zhu , Gode Thrimurthulu , Laurent Delannoy , Catherine Louis , Christine Mottet Journal of Catalysis, 2013, 308, pp.272-281. ⟨10.1016/j.jcat.2013.08.022⟩ Journal articles hal-03184658v1
	Piezoresistive ring-shaped AFM sensors with pico-newton force resolution Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot International Journal of Intelligent Mechatronics and Robotics, 2013, 3, pp.38-52. ⟨10.4018/ijimr.2013010104⟩ Journal articles hal-00871948v1
	Detecting response of microelectromechanical resonators by microwave reflectometry Bernard Legrand , D. Ducatteau , D. Theron , B. Walter , H. Tanbakuchi Applied Physics Letters, 2013, 103, pp.053124-1-5. ⟨10.1063/1.4817411⟩ Journal articles hal-00871931v1
	MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot Journal of Micromechanics and Microengineering, 2013, 23, pp.035016-1-10. ⟨10.1088/0960-1317/23/3/035016⟩ Journal articles hal-00795965v1
	An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements Thomas Dargent , Kamel Haddadi , T. Lasri , N. Clément , D. Ducatteau Review of Scientific Instruments, 2013, 84 (12), pp.123705. ⟨10.1063/1.4848995⟩ Journal articles hal-00922585v1
	MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution Emmanuelle Algre , Zhuang Xiong , Marc Faucher , Benjamin Walter , Lionel Buchaillot Journal of Microelectromechanical Systems, 2012, 21, pp.385-397. ⟨10.1109/JMEMS.2011.2179012⟩ Journal articles hal-00787407v1
	Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications Etienne Herth , Emmanuelle Algre , Pascal Tilmant , Martin François , Christophe Boyaval IEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩ Journal articles hal-00787415v1
	Segregation in bimetallic nanowires: Size and thermodynamic ensemble effects Emile Maras , Fabienne Berthier , Isabelle Braems , Bernard Legrand Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2012, 86 (5), ⟨10.1103/PhysRevB.86.054205⟩ Journal articles hal-02990483v1
	Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process Etienne Herth , Emmanuelle Algré , Bernard Legrand , Lionel Buchaillot Microelectronic Engineering, 2011, 88 (5), pp.724-728. ⟨10.1016/j.mee.2010.06.032⟩ Journal articles hal-02300269v1
	Multiscale Modelling of the Ageing Kinetics of a 2D Deposit Fabienne Berthier , Emile Maras , Isabelle Braems , Bernard Legrand Solid State Phenomena, 2011, 172-174, pp.664-669. ⟨10.4028/www.scientific.net/SSP.172-174.664⟩ Journal articles hal-02990476v1
	Electron beam nanolithography in AZnLOF 2020 E. Herth , P. Tilmant , M. Faucher , M. François , Christophe Boyaval Microelectronic Engineering, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩ Journal articles hal-00548989v1
	Materials selection procedure for RF-MEMS G. Guisbiers , E. Herth , Bernard Legrand , N. Rolland , T. Lasri Microelectronic Engineering, 2010, 87, pp.1792-1795. ⟨10.1016/j.mee.2009.10.016⟩ Journal articles hal-00549627v1
	Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications E. Herth , Bernard Legrand , L. Buchaillot , N. Rolland , T. Lasri Microelectronics Reliability, 2010, 50, pp.1103-1106. ⟨10.1016/j.microrel.2010.04.011⟩ Journal articles hal-00549491v1
	Development of a new generation of active AFM tools for applications in liquids A.S. Rollier , D.F.L. Jenkins , El Hadj Dogheche , Bernard Legrand , M. Faucher Journal of Micromechanics and Microengineering, 2010, 20, pp.085010-1-11. ⟨10.1088/0960-1317/20/8/085010⟩ Journal articles hal-00548990v1
	Fabrication of 24-MHz-disk resonators with silicon passive integration technology M. Sworowski , F. Neuilly , Bernard Legrand , A. Summanwar , P. Philippe IEEE Electron Device Letters, 2010, 31, pp.23-25. ⟨10.1109/LED.2009.2034542⟩ Journal articles hal-00548984v1
	Design and operation of a silicon ring resonator for force sensing applications above 1 MHz Benjamin Walter , Marc Faucher , Emmanuelle Algre , Bernard Legrand , Rodolphe Boisgard Journal of Micromechanics and Microengineering, 2009, 19 (11), pp.115009-1-7. ⟨10.1088/0960-1317/19/11/115009⟩ Journal articles hal-00472725v1
	Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays M. Ataka , Bernard Legrand , L. Buchaillot , D. Collard , H. Fujita IEEE/ASME Transactions on Mechatronics, 2009, 14, pp.119-125. ⟨10.1109/TMECH.2008.2004770⟩ Journal articles hal-00472723v1
	Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactions D. Hourlier , Bernard Legrand , Christophe Boyaval , P. Perrot Journal of Nano Research, 2009, 6, pp.215-224. ⟨10.4028/www.scientific.net/JNanoR.6.215⟩ Journal articles hal-00471951v1
	In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives Cédric Durand , Fabrice Casset , Philippe Renaux , Nicolas Abelé , Bernard Legrand IEEE Electron Device Letters, 2008, 29 (5), pp.494-496. ⟨10.1109/LED.2008.919781⟩ Journal articles cea-00320837v1
	Silicon nanotweezers with subnanometer resolution for the micromanipulation of biomolecules C. Yamahata , D. Collard , Bernard Legrand , T. Takekawa , M. Kumemura Journal of Microelectromechanical Systems, 2008, 17, pp.623-631. ⟨10.1109/JMEMS.2008.922080⟩ Journal articles hal-00357278v1
	Towards mechanical characterization of biomolecules by MNEMS tools D. Collard , C. Yamahata , Bernard Legrand , T. Takekawa , M. Kumemura IEEJ Transactions on Electrical and Electronic Engineering, 2007, 2, pp.262-271. ⟨10.1002/tee.20154⟩ Journal articles hal-00283054v1
	Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling Philippe Basset , A. Kaiser , Bernard Legrand , D. Collard , L. Buchaillot IEEE/ASME Transactions on Mechatronics, 2007, 12, pp.23-31. ⟨10.1109/TMECH.2006.886245⟩ Journal articles hal-00255847v1
	A silicon beam-based microcantilever nanoelectrosprayer S. Arscott , Bernard Legrand , Lionel Buchaillot , Alison Ashcroft Sensors and Actuators B: Chemical, 2007, 125 (1), pp.72-78. ⟨10.1016/j.snb.2007.01.040⟩ Journal articles hal-02347442v1
	SOI-based nanoelectrospray emitter tips for mass spectrometry: a coupled MEMS and microfluidic design Bernard Legrand , Alison Ashcroft , Lionel Buchaillot , S. Arscott Journal of Micromechanics and Microengineering, 2007, 17 (3), pp.509-514. ⟨10.1088/0960-1317/17/3/013⟩ Journal articles hal-02347438v1
	Complete miscibility between different crystallographic structures : Monte Carlo simulations of Cu-Ag deposited on Cu(001) Isabelle Braems , Fabienne Berthier , Robert Tétot , Bernard Legrand Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2006, 74 (11), pp.113406 Journal articles hal-00108260v1
	Silicon surface nano-oxidation using scanning probe microscopy D. Stievenard , Bernard Legrand Progress in Surface Science, 2006, 81, pp.112-140 Journal articles hal-00127846v1
	Site segregation in size-mismatched nanoalloys: Application to Cu–Ag Virginie Moreno , Jérôme Creuze , Fabienne Berthier , Christine Mottet , Guy Tréglia Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2006, 600 (22), pp.5011-5020. ⟨10.1016/j.susc.2006.08.030⟩ Journal articles cea-02355772v1
	Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology Dimitri Galayko , Andreas Kaiser , Bernard Legrand , Lionel Buchaillot , Dominique Collard Sensors and Actuators A: Physical , 2006, 126 (1), pp.227-240. ⟨10.1016/j.sna.2005.10.033⟩ Journal articles hal-01195973v1
	Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions Anne-Sophie Rollier , Bernard Legrand , Dominique Collard , Lionel Buchaillot Journal of Micromechanics and Microengineering, 2006, 16, pp.794-801. ⟨10.1088/0960-1317/16/4/016⟩ Journal articles hal-00128663v1
	Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , C. Combi Sensors and Actuators A: Physical , 2006, 126, pp.227-240 Journal articles hal-00138651v1
	Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids Bernard Legrand , Anne-Sophie Rollier , Dominique Collard , Lionel Buchaillot Applied Physics Letters, 2006, 88 (3), pp.034105-1-3. ⟨10.1063/1.2165282⟩ Journal articles hal-00128662v1
	Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , D. Collard Sensors and Actuators A: Physical , 2005, 117, pp.115-120 Journal articles hal-00125630v1
	Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot , Hiroyuki Fujita Applied Physics Letters, 2005, 86, pp.213104-1-3. ⟨10.1063/1.1929873⟩ Journal articles hal-00125633v1
	Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips Vincent Agache , Roger Ringot , Patrice Bigotte , Vincent Senez , Bernard Legrand IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩ Journal articles hal-00125632v1
	Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction D. Galayko , A. Kaiser , L. Buchaillot , Bernard Legrand , D. Collard Journal of Micromechanics and Microengineering, 2003, 13, pp.134-140 Journal articles hal-00146391v1
	Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS O. Millet , Bernard Legrand , D. Collard , L. Buchaillot Japanese Journal of Applied Physics, 2003, 41, pp.L1339-L1341 Journal articles hal-00146435v1
	Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS) O. Millet , Bernard Legrand , D. Collard , L. Buchaillot Japanese Journal of Applied Physics, part 2 : Letters, 2002, 41, pp.L1339-L1341 Journal articles hal-00250391v1
	Surface micro-machining : an overview D. Collard , H. Fujita , H. Toshiyoshi , Bernard Legrand , L. Buchaillot Nano et micro technologies, 2002, 2, pp.35-50 Journal articles hal-00148781v1
	Adhesive forces investigation on a silicon tip by contact mode atomic force microscope Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot Applied Physics Letters, 2002, 81, pp.2623-2625. ⟨10.1063/1.1508806⟩ Journal articles hal-00148768v1
	Silicon nanowires with sub 10 nm lateral dimensions : from AFM lithography based fabrication to electrical measurements Bernard Legrand , D. Deresmes , D. Stievenard Journal of Vacuum Science and Technology, 2002, 20, pp.862-870 Journal articles hal-00148765v1
	Electrostatic micro actuators D. Collard , H. Fujita , H. Toshiyoshi , Bernard Legrand , L. Buchaillot Nano et micro technologies, 2002, 2, pp.83-124 Journal articles hal-00148761v1
	Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing Bernard Legrand , E. Quévy , B. Stefanelli , D. Collard , L. Buchaillot Review of Scientific Instruments, 2002, 73, pp.4393-4395 Journal articles hal-00148782v1
	Thermally assisted formation of silicon islands on a silicon-on-insulator substrate Bernard Legrand , Vincent Agache , Jean-Philippe Nys , Thierry Melin , Vincent Senez Journal of Applied Physics, 2002, 91, pp.106-111. ⟨10.1063/1.1420761⟩ Journal articles hal-00149668v1
	Thermally assisted formation of silicon islands on a silicon on insulator substrate Bernard Legrand , Vincent Agache , Thierry Melin , Jean-Philippe Nys , Vincent Senez Journal of Applied Physics, 2001, 91, pp.106-111. ⟨10.1063/1.1420761⟩ Journal articles hal-00152464v1
	Formation of silicon islands on a silicon on insulator substrate upon thermal annealing Bernard Legrand , Vincent Agache , Jean-Philippe Nys , Vincent Senez , Didier Stiévenard Applied Physics Letters, 2000, 76, pp.3271-3273. ⟨10.1063/1.126603⟩ Journal articles hal-00158537v1
	Atomic force microscope tip-surface behaviour under continuous bias or pulsed voltages in non contact mode Bernard Legrand , D. Stievenard Applied Physics Letters, 2000, 76, pp.1018-1020 Journal articles hal-00158646v1
	Imaging the wave function amplitudes in cleaved semiconductor quantum boxes B. Grandidier , Y.M. Niquet , Bernard Legrand , J.P. Nys , C. Priester Physical Review Letters, 2000, 85, pp.1068-1071 Journal articles hal-00158644v1
	Les différentes phases du développement des pivots et des premiers bois d'un cerf Bernard Legrand Revue forestière française, 1975, 27 (1), pp.71-73. ⟨10.4267/2042/20920⟩ Journal articles hal-03395620v1
	Le parc animalier des Yvelines Bernard Legrand Revue forestière française, 1972, 24 (6), pp.460-468. ⟨10.4267/2042/20650⟩ Journal articles hal-03395640v1
	Effarouchement passif des rapaces et corvidés Bernard Legrand Revue forestière française, 1971, 23 (4), pp.431-435. ⟨10.4267/2042/20510⟩ Journal articles hal-03395047v1

	Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime Aleksandra Markovic , Gaël Pillonnet , Bernard Legrand Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France Conference papers hal-03649053v1
	Ultra-Low-Power Logic with Contactless Capacitive MEMS Aleksandra Markovic , Laurent Mazenq , Adrian Laborde , Herve Fanet , Gael Pillonnet 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩ Conference papers hal-03946985v1
	Optomechanics: a key towards next-generation experiments in atomic force microscopy? Lucien Schwab , Pierre Allain , Didier Theron , Marc Faucher , Benjamin Walter International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France Conference papers hal-02407634v1
	130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements Lucien Schwab , Pierre-Etienne Allain , Louise Banniard , Nicolas Mauran , Denis Lagrange IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩ Conference papers hal-02371188v1
	The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectory Régis Hamelin , Géraldine Andrieux , Isabelle Chartier , Bahaa El Roustom , T. Healy International Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018, Apr 2018, Dresden, Germany Conference papers hal-01962997v1
	Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors Lucien Schwab , Pierre Etienne Allain , L Banniard , A Fafin , Marc Gely 64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States Conference papers hal-01963015v1
	Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructures Olivier Thomas , Arthur Givois , Aurélien Grolet , Jean-François Deü , Cécile Fuinel EUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal Conference papers hal-01962993v1
	[Invited] MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors Bernard Legrand , Lucien Schwab , Pierre Allain , Ivan Favero , Marc Faucher AVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States Conference papers hal-01908666v1
	[Invited] SMM characterization of Au nanodots and FcC11SH molecules Didier Theron , Fei Wang , Thomas Dargent , Damien Ducatteau , Charlene Brillard XX Annual Linz Winter Workshop, Advances in Single-Molecule Research for Biology & Nanoscience, Feb 2018, Linz, Austria Conference papers hal-01962187v1
	High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration Cécile Fuinel , Fabrice Mathieu , Adrian Laborde , Laurent Mazenq , Christian Bergaud 19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩ Conference papers hal-01962426v1
	Driving and sensing M/NEMS flexural vibration using dielectric transduction Cécile Fuinel , Fabrice Mathieu , Bernard Legrand 31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France Conference papers hal-01962981v1
	Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction Adhitya Bhaswara , Hohyun Keum , Fabrice Mathieu , Bernard Legrand , Seok Kim 42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria Conference papers hal-01962410v1
	HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS Cécile Fuinel , Khadim Daffé , Adrian Laborde , Olivier Thomas , Laurent Mazenq The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩ Conference papers hal-01279717v1
	Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry F. Wang , Thomas Dargent , D. Ducatteau , Gilles Dambrine , Kamel Haddadi 45th European Microwave Conference EuMC 2015, Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345849⟩ Conference papers hal-01962399v1
	Optimization of length and thickness of smart transduction layers on beam structures for control and M/NEMS applications Olivier Thomas , Bernard Legrand , Cécile Fuinel ASME 2015 Conference on Smart Materials Adaptive Structures and Intelligent Systems (SMASIS 2015), Sep 2015, Colorado Springs, United States. 9p., ⟨10.1115/SMASIS2015-8857⟩ Conference papers hal-01203144v1
	Determination of the effective mass and stiffness of a micro resonator from a single optical characterization Adhitya Bhaswara , Denis Dezest , Liviu Nicu , Thierry Leichle , Bernard Legrand TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩ Conference papers hal-01687809v1
	When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency S. Houmadi , Bernard Legrand , J.P. Salvetat , B. Walter , E. Mairiaux 28th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2015, Jan 2015, Estoril, Portugal. ⟨10.1109/MEMSYS.2015.7050908⟩ Conference papers hal-01962374v1
	A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution A. Grira , C. Rotinat-Libersa , Bernard Legrand , L. Buchaillot 1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417 Conference papers cea-01844451v1
	Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers? Lionel Buchaillot , Estelle Mairiaux , Benjamin Walter , Zhuang Xiong , Marc Faucher IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩ Conference papers hal-01962163v1
	Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry Fei Wang , Damien Ducatteau , David Troadec , Hassan Tanbakuchi , Bernard Legrand European Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom Conference papers hal-01962209v1
	Caractérisation quantitative des capacités sous échelle de 10 nm avec un interférométrique scanning-microwave-microscopy Fei Wang , Nicolas Clément , Damien Ducatteau , David Troadec , Bernard Legrand 17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p Conference papers hal-01018379v1
	Interferometric scanning microwave microscope for nanotechnology application N. Clement , Thomas Dargent , H. Tanbakuchi , K. Nishiguchi , R. Sivakumarasamy American Physical Society March Meeting, APS March Meeting 2013, 2013, Baltimore, MD, United States Conference papers hal-00811777v1
	Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators Bernard Legrand , D. Ducatteau , D. Theron , B. Walter , H. Tanbakuchi 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, ⟨10.1109/Transducers.2013.6626829⟩ Conference papers hal-00877759v1
	Nanoscale capacitors study with an interferometric scanning microwave microscope Fei Wang , Nicolas Clément , David Troadec , Bernard Legrand , Gilles Dambrine Materials Research Society Fall Meeting, MRS Fall 2013, Symposium LL : Advances in Scanning Probe Microscopy, 2013, Boston, MA, United States Conference papers hal-00944017v1
	5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, ⟨10.1109/MEMSYS.2013.6474311⟩ Conference papers hal-00809858v1
	Towards a new generation of MEMS-based AFM probes Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot International Scanning Probe Microscopy Conference, ISPM 2013, 2013, Dijon, France Conference papers hal-00878807v1
	Micro-résonateurs haute fréquence pour la microscopie à force atomique B. Walter , M. Faucher , E. Mairiaux , Z. Xiong , L. Buchaillot 15ème Forum des Microscopies à Sonde Locale, 2012, Saint-Jacut-de-la-Mer, France Conference papers hal-00797718v1
	DNA origami imaging with 10.9 MHz AFM MEMS probes B. Walter , E. Mairiaux , Z. Xiong , M. Faucher , L. Buchaillot 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.555-558, ⟨10.1109/MEMSYS.2012.6170236⟩ Conference papers hal-00801107v1
	Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189 Conference papers hal-00801105v1
	SOL-like calibrated RF measurements at the nanoscale on a modified scanning microwave microscope Thomas Dargent , D. Ducatteau , Bernard Legrand , H. Tanbakuchi , D. Theron 2nd Nano Measure Scientific Symposium, Nano Measure 2012, 2012, Stanford, CA, United States Conference papers hal-00797722v1
	[Invité] Apport des microsystèmes pour la microscopie à force atomique B. Walter , M. Faucher , E. Mairiaux , Z. Xiong , L. Buchaillot Journée thématique trans-GDR '' Micromanipulation pour les Micro-Nano Systèmes '', 2012, Besançon, France Conference papers hal-00797716v1
	Conception and fabrication of piezo-resistive ring shaped AFM probe Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.547-550, ⟨10.1109/MEMSYS.2012.6170180⟩ Conference papers hal-00801106v1
	Micro-résonateurs haute fréquence pour la microscopie à force atomique B. Walter , M. Faucher , E. Mairiaux , Z. Xiong , L. Buchaillot Journées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France Conference papers hal-00797720v1
	Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot ASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, 2011, Denver, CO, United States. pp.IMECE2011-65083-1-5 Conference papers hal-00800036v1
	Optimal design of non intuitive compliant microgripper with high resolution A. Grira , Bernard Legrand , C. Rotinat-Libersa , E. Mairiaux , L. Buchaillot IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 2011, San Francisco, CA, United States. pp.45-50, ⟨10.1109/IROS.2011.6048665⟩ Conference papers hal-00800034v1
	[Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique Benjamin Walter , Zhuang Xiong , Emmanuelle Algre , Estelle Mairiaux , Marc Faucher Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France Conference papers hal-00807204v1
	IMPROVE-LM - Imaging probe for vacuum environment and liquid medium Bernard Legrand , J.P. Aime , L. Buchaillot Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France Conference papers hal-00807209v1
	4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips Benjamin Walter , Estelle Mairiaux , M. Faucher , Zhuang Xiong , L. Buchaillot XXIème Congrès Général de la Société Française de Physique, SFP 2011, Jul 2011, Bordeaux, France Conference papers hal-00807202v1
	[Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications Marc Faucher , Bernard Legrand , Benjamin Walter , Emmanuelle Algre , A. Ben-Amar TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6 Conference papers hal-00806730v1
	4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips Benjamin Walter , M. Faucher , Estelle Mairiaux , Zhuang Xiong , L. Buchaillot 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Jan 2011, Cancun, Mexico. pp.517-520, ⟨10.1109/MEMSYS.2011.5734475⟩ Conference papers hal-00579045v1
	Atomic force probe using silicon ring resonator conception B. Walter , E. Mairiaux , M. Faucher , Z. Xiong , L. Buchaillot 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France Conference papers hal-00808199v1
	Surface microscopy with laserless MEMS based AFM probes Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Jan 2010, Hong Kong, China. pp.292-295, ⟨10.1109/MEMSYS.2010.5442509⟩ Conference papers hal-00549972v1
	Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications Z. Xiong , B. Walter , E. Mairiaux , M. Faucher , L. Buchaillot 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France Conference papers hal-00808200v1
	Improve-LM imaging probe for vacuum environment and liquid medium B. Walter , M. Faucher , Bernard Legrand , E. Mairiaux , R. Boisgard Journées du Réseau National en Nanosciences et en Nanotechnologies, J3N 2010, 2010, Lille, France Conference papers hal-00808210v1
	Tip-matter interaction measurements using MEMS ring resonators Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Jun 2009, Denver, CO, United States. pp.1638-1641, ⟨10.1109/SENSOR.2009.5285774⟩ Conference papers hal-00474451v1
	Tip-matter interaction measurements using MEMS ring resonators Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot Forum des Microscopies à Sonde Locale, 2009, Hardelot, France Conference papers hal-00575264v1
	High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology M. Sworowski , F. Neuilly , Bernard Legrand , A. Summanwar , F. Lallemand 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, USA, United States. pp.2114-2117, ⟨10.1109/SENSOR.2009.5285623⟩ Conference papers hal-00474452v1
	Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques Bernard Legrand , Emmanuelle Algre , Lionel Buchaillot , Marc Faucher , Benjamin Walter 4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France Conference papers hal-00575271v1
	Characterization of IN-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology Cédric Durand , Fabrice Casset , Bernard Legrand , Marc Faucher , Philippe Renaux 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, Jan 2008, Tucson - AZ, United States. pp.1016-1019, ⟨10.1109/MEMSYS.2008.4443831⟩ Conference papers cea-00320830v1
	High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging A.S. Rollier , C. Bernard , S. Marsaudon , A.M. Bonnot , M. Faucher 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. pp.851-854, ⟨10.1109/MEMSYS.2007.4433179⟩ Conference papers hal-00284388v1
	Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids Jean-Baptiste Bureau , Bernard Legrand , Dominique Collard , Lionel Buchaillot 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Jun 2007, Lyon, France. pp.2267-2270, ⟨10.1109/SENSOR.2007.4300621⟩ Conference papers hal-00284392v1
	Résonateurs électromécaniques : principe et applications Bernard Legrand Ecole Thématique CNRS : Microsystèmes acoustiques, 2007, Lille, France Conference papers hal-00367378v1
	High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging A. S. Rollier , C. Bernard , S. Marsaudon , A. M. Bonnot , M. Faucher 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 2007, Unknown, Unknown Region. pp.878-+ Conference papers hal-01553035v1
	Proposition of atomic force probes based on silicon ring-resonators M. Faucher , B. Walter , A.S. Rollier , K. Segueni , Bernard Legrand 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. pp.1529-1532, ⟨10.1109/SENSOR.2007.4300436⟩ Conference papers hal-00284391v1
	a total miscibility of two metallic elements with different crystallographic structures in the surface Isabelle Braems , Fabienne Berthier , Robert Tétot , Bernard Legrand European Conference on Surface Science ECOSS 24, Sep 2006, PARIS, France Conference papers hal-00108262v1
	Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response A.S. Rollier , M. Faucher , Bernard Legrand , D. Collard , L. Buchaillot 2006, pp.244-249 Conference papers hal-00128674v1
	Ultra-low voltage MEMS resonator based on RSG-MOSFET N. Abele , K. Segueni , K. Boucart , F. Casset , Bernard Legrand 2006, pp.882-885 Conference papers hal-00128669v1
	Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications Bernard Legrand , A.S. Rollier , L. Buchaillot , D. Collard 2006, pp.718-721 Conference papers hal-00128668v1
	Micro et nanomécanique, MEMS et NEMS Bernard Legrand , L. Buchaillot , D. Collard Ecole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France Conference papers hal-00128667v1
	Micro-machined actuators for the friction driven micro-motor Bernard Legrand , L. Buchaillot , D. Collard 2006, pp.211-214 Conference papers hal-00128670v1
	Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules C. Yamahata , T. Takekawa , K. Ayano , M. Hosogi , M. Kumemura 2006, 4 pp Conference papers hal-00147724v1
	ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSE A.-S. Rollier , Marc Faucher , Bernard Legrand , D. Collard , L. Buchaillot DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p Conference papers hal-00189294v1
	Nanotechnologie, micro et nanosystèmes Bernard Legrand 5ème Colloque International TELECOM'2005 & 4èmes Journées Franco-Magrhébines des Micro-ondes et leurs Applications, JFMMA, 2005, Rabat, Maroc Conference papers hal-00126233v1
	solubilité complète en surface entre deux métaux de structure cristllographique différente Isabelle Braems , Fabienne Berthier , Jérome Creuse , Robert Tétot , Bernard Legrand JSI 2005, 2005, LYON, France Conference papers hal-00108263v1
	Microsystèmes : principales applications et contexte national L. Buchaillot , D. Collard , Bernard Legrand Ecoles Nanosciences, 2005, Anglet, France Conference papers hal-00126216v1
	1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers Vincent Agache , Bernard Legrand , Dominique Collard , Hiroyuki Fujita , Lionel Buchaillot 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, Jan 2005, Miami Beach, United States. pp.121-124, ⟨10.1109/MEMSYS.2005.1453882⟩ Conference papers hal-00125628v1
	Reliability of non-released microstructures : failure analysis and innovative solution process O. Millet , P. Muller , O. Blanrue , Bernard Legrand , D. Collard 2005, pp.840-842 Conference papers hal-00125662v1
	Stiction drive operation of micromotors : direct and reverse rotation control Bernard Legrand , D. Collard , L. Buchaillot 2005, pp.57-60 Conference papers hal-00125661v1
	Electrostatic actuators operating in liquid environment : position control without pull-in effect A.S. Rollier , Bernard Legrand , D. Collard , L. Buchaillot 2005, pp.341-346 Conference papers hal-00128651v1
	Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ? Vincent Agache , Emmanuel Quévy , Olivier Millet , Anne-Sophie Rollier , Roger Ringot Ecole Nanosciences, 2005, Anglet, France Conference papers hal-00126215v1
	Tensile stress determination in silicon nitride membrane by AFM characterization A.S. Rollier , Bernard Legrand , D. Deresmes , M. Lagouge , D. Collard 2005, pp.828-831 Conference papers hal-00125660v1
	3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress Jean-Baptiste Bureau , Bernard Legrand , Dominique Collard , Lionel Buchaillot 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Jun 2005, Seoul, South Korea. pp.19-22, ⟨10.1109/SENSOR.2005.1496348⟩ Conference papers hal-00128655v1
	Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide Anne-Sophie Rollier , Bernard Legrand , Lionel Buchaillot , Dominique Collard 17e Congrès Français de Mécanique, 2005, Troyes, France Conference papers hal-04203498v1
	MEMS reliability : metrology set-up for investigation of fatigue causes O. Millet , O. Blanrue , Bernard Legrand , D. Collard , L. Buchaillot 2005, pp.483-486 Conference papers hal-00125627v1
	Friction driven micromotors with both clockwise and counterclockwise rotations Bernard Legrand , Lionel Buchaillot , Dominique Collard 17e Congrès Français de Mécanique, 2005, Troyes, France Conference papers hal-04279573v1
	Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode Vincent Agache , Bernard Legrand , K. Nakamura , H. Kawakatsu , Lionel Buchaillot The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩ Conference papers hal-00125631v1
	The 2D feedback conveyance with ciliary actuator arrays M. Ataka , Bernard Legrand , L. Buchaillot , D. Collard , H. Fujita 2005, pp.31-34 Conference papers hal-00125659v1
	RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers Vincent Agache , Bernard Legrand , Dominique Collard , Hiroyuki Fujita , Lionel Buchaillot Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31 Conference papers hal-00128656v1
	Micromachined actuators for friction driven linear micro-motors Bernard Legrand , L. Buchaillot , D. Collard Proceedings of the Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, 2005, Hyogo, Japan Conference papers hal-00131348v1
	Characterization of individual bio-cells with thermally actuated probe arrays Y.H. Cho , Dominique Collard , Lionel Buchaillot , Bernard Legrand , Beomjoon Kim Nonimaging Optics and Efficient Illumination Systems, Aug 2004, Denver, CO, United States. pp.425-429 Conference papers hal-00141170v1
	An original methodology to assess fatigue behavior in RF MEMS devices O. Millet , Pierre Bertrand , Bernard Legrand , D. Collard , L. Buchaillot European Microwave Week, 2004, Amsterdam, Netherlands Conference papers hal-00141031v1
	Predictive modelling of the fatigue phenomenon for polycristalline structural layers O. Millet , Pierre Bertrand , Bernard Legrand , D. Collard , L. Buchaillot 2004, pp.145-148 Conference papers hal-00141028v1
	TP de nanotechnologie : réalisation et observation de nanofils de silicium à l'aide de l'AFM Bernard Legrand , H. Happy 8èmes Journées Pédagogiques du CNFM, 2004, Saint Malo, France Conference papers hal-00133919v1
	Reliability of polycrystalline MEMS : prediction of the debugging-time O. Millet , Pierre Bertrand , Bernard Legrand , D. Collard , L. Buchaillot International Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States Conference papers hal-00141030v1
	Ultimate technology for micromachining of nanometric gap HF micromechanical resonators E. Quevy , Bernard Legrand , D. Collard , L. Buchaillot 2003, pp.157-160 Conference papers hal-00146462v1
	Thermally actuated probe arrays for manipulation and characterization of individual bio-cell Beomjoon Kim , Dominique Collard , Matthieu Lagouge , F. Conseil , Bernard Legrand TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩ Conference papers hal-00146460v1
	Tapping-mode HF nanometric lateral gap resonators : experimental and theory E. Quevy , Bernard Legrand , D. Collard , L. Buchaillot 2003, pp.879-882 Conference papers hal-00146456v1
	Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application Vincent Agache , Patrice Bigotte , Bernard Legrand , Vincent Senez , Lionel Buchaillot 12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1287-1290, ⟨10.1109/SENSOR.2003.1217008⟩ Conference papers hal-00146438v1
	Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches Olivier Millet , Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot 12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1578-1581, ⟨10.1109/SENSOR.2003.1217081⟩ Conference papers hal-00146440v1
	Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , D. Collard 2003, pp.F23-F26 Conference papers hal-00146406v1
	High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment D. Galayko , A. Kaiser , Bernard Legrand , C. Combi , D. Collard 2002, pp.665-668 Conference papers hal-00148737v1
	Study of adhesive forces on a silicon nanotip force microscope in contact mode Vincent Agache , Bernard Legrand , Dominique Collard , Lionel Buchaillot Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, May 2002, Cannes, France. pp.601-612, ⟨10.1117/12.462861⟩ Conference papers hal-00148788v1
	Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiées D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , D. Collard Colloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France Conference papers hal-00148748v1
	Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology D. Galayko , A. Kaiser , Bernard Legrand , L. Buchaillot , C. Combi 2002, pp.447-450 Conference papers hal-00148736v1
	Architecture level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receivers Olivier Billoint , Dimitri Galayko , Bernard Legrand , Andreas Kaiser Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2002, May 2002, Canne, France. pp.136-142 Conference papers hal-00148741v1
	Microsystem technology : trends and possible application for textile D. Collard , L. Buchaillot , Bernard Legrand Conference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France Conference papers hal-00152473v1
	IF MEMS filters for mobile communication E. Quevy , D. Galayko , Bernard Legrand , C. Renaux , C. Combi 2001, pp.733-736 Conference papers hal-00152458v1
	Microsysteme : un état des lieux, enjeux et perspectives D. Collard , L. Buchaillot , Bernard Legrand 48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France Conference papers hal-00158538v1
	Microsystème : enjeux et perspectives D. Collard , L. Buchaillot , Bernard Legrand Journée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France Conference papers hal-00158539v1

	High Speed Atomic Force Microscope Nicolas Mauran , Denis Lagrange , Xavier Dollat , Laurent Mazenq , Lucien Schwab NI-Week 2017, May 2017, Austin, TX, United States. , 2017 Conference poster hal-01529673v1

	Micro et nanorésonateurs radio-fréquence Bernard Legrand , C. Durand , M. Faucher , L. Buchaillot Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.239-242, 2009 Book sections hal-00575789v1

	Système pour détecter des réponses d'un dispositif résonateur micro-électromécanique (MEMS) H. Tanbakuchi , Bernard Legrand , D. Theron , D. Ducatteau N° de brevet: FR2985251 (A1). 2013 Patents hal-00846338v1
	Sonde pour microscopie à force atomique M. Faucher , L. Buchaillot , J.P. Aime , Bernard Legrand , G. Couturier N° de brevet: FR2915803 (A1). 2008 Patents hal-00372090v1
	Circuit superhétérodyne à filtre passe-bande de sélection de canal A. Kaiser , O. Billoint , D. Galayko , Bernard Legrand N° de brevet: FR2836765 (A1). 2003 Patents hal-00372460v1
	Détecteur infrarouge semi-conducteur et son procédé de fabrication D. Stievenard , C. Delerue , Bernard Legrand France, N° de brevet: FR2791474 (A1) 2000-09-29. 2000 Patents hal-00372676v1

	Contribution au domaine des actionneurs et résonateurs microélectromécaniques. Applications à la nanocaractérisation Bernard Legrand 2012 Other publications hal-00799254v1
	Elaboration et caractérisation physique par microscopie à champ proche de nanostructures semi-conductrices Bernard Legrand 2000 Other publications hal-00158616v1

	Is There Really a Size effect on the Surface Energy of Nanoparticles ? Hakim Amara , Jaysen Nelayah , Jérôme Creuze , Adrian Chmielewski , Damien Alloyeau 2021 Preprints, Working Papers, ... hal-03310351v1
	Magnetism: the Driving Force of Order in CoPt. A First-Principles Study Sondes Karoui , Hakim Amara , Bernard Legrand , François Ducastelle 2012 Preprints, Working Papers, ... hal-00691274v1

	Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide Laurent Mazenq , Lucien Schwab , Nicolas Mauran , Denis Lagrange , Xavier Dollat [Rapport Technique] LAAS-CNRS. 2019 Reports hal-03603368v1

	CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO‐CARACTÉRISATION. Bernard Louis Amand Legrand Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2012 Habilitation à diriger des recherches tel-00706851v1

Bernard Legrand

Publications

Suspended tip overhanging from chip edge for atomic force microscopy with an optomechanical resonator

Influence of ordering phenomena on carbon segregation in tungsten screw dislocation

Effect of size on the surface energy of noble metal nanoparticles from analytical and numerical approaches

Very high frequency probes for atomic force microscopy with silicon optomechanics

Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes

Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces

Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation

Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation

Magic compositions in Pd-Au nanoalloys

Magic compositions in Pd-Au nanoalloys

Multi-MHz micro-electro-mechanical sensors for atomic force microscopy

A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes

Environment dependence of magnetic moment and atomic level shifts within tight-binding approximation: An illustration in the case of cobalt

CO adsorption-induced surface segregation and formation of Pd chains on AuPd(100) alloy: density functional theory based ising model and Monte Carlo simulations

Environmental microbiology as a mosaic of explored ecosystems and issues

Surface segregation in AuPd alloys: Ab initio analysis of the driving forces

Design and measurement of AFM probe based on MEMS resonator

Crossover among structural motifs in Pd–Au nanoalloys

Two types of MEMS-based oscillating AFM probes

Fabrication of nanoplate resonating structures via micro-masonry

A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope

Evidence of Pd segregation and stabilization at edges of AuPd nano-clusters in the presence of CO: A combined DFT and DRIFTS study

Piezoresistive ring-shaped AFM sensors with pico-newton force resolution

Detecting response of microelectromechanical resonators by microwave reflectometry

MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution

An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements

MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution

Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications

Segregation in bimetallic nanowires: Size and thermodynamic ensemble effects

Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process

Multiscale Modelling of the Ageing Kinetics of a 2D Deposit

Electron beam nanolithography in AZnLOF 2020

Materials selection procedure for RF-MEMS

Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications

Development of a new generation of active AFM tools for applications in liquids

Fabrication of 24-MHz-disk resonators with silicon passive integration technology

Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays

Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactions

In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives

Silicon nanotweezers with subnanometer resolution for the micromanipulation of biomolecules

Towards mechanical characterization of biomolecules by MNEMS tools

Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling

A silicon beam-based microcantilever nanoelectrosprayer

SOI-based nanoelectrospray emitter tips for mass spectrometry: a coupled MEMS and microfluidic design

Complete miscibility between different crystallographic structures : Monte Carlo simulations of Cu-Ag deposited on Cu(001)

Silicon surface nano-oxidation using scanning probe microscopy

Site segregation in size-mismatched nanoalloys: Application to Cu–Ag

Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology

Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions

Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology

Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids

Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators

Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator

Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips

Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction

Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS

Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS)

Surface micro-machining : an overview

Adhesive forces investigation on a silicon tip by contact mode atomic force microscope

Silicon nanowires with sub 10 nm lateral dimensions : from AFM lithography based fabrication to electrical measurements

Electrostatic micro actuators

Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing

Thermally assisted formation of silicon islands on a silicon-on-insulator substrate

Thermally assisted formation of silicon islands on a silicon on insulator substrate

Formation of silicon islands on a silicon on insulator substrate upon thermal annealing

Atomic force microscope tip-surface behaviour under continuous bias or pulsed voltages in non contact mode

Imaging the wave function amplitudes in cleaved semiconductor quantum boxes

Les différentes phases du développement des pivots et des premiers bois d'un cerf

Le parc animalier des Yvelines

Effarouchement passif des rapaces et corvidés

Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime

Ultra-Low-Power Logic with Contactless Capacitive MEMS

Optomechanics: a key towards next-generation experiments in atomic force microscopy?

130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements

The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectory

Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors