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Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regimeWorkshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France
Communication dans un congrès
hal-03649053v1
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Ultra-Low-Power Logic with Contactless Capacitive MEMS21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩
Communication dans un congrès
hal-03946985v1
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Optomechanics: a key towards next-generation experiments in atomic force microscopy?International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France
Communication dans un congrès
hal-02407634v1
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130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive MeasurementsIEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩
Communication dans un congrès
hal-02371188v1
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The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectoryInternational Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018, Apr 2018, Dresden, Germany
Communication dans un congrès
hal-01962997v1
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[Invited] SMM characterization of Au nanodots and FcC11SH moleculesXX Annual Linz Winter Workshop, Advances in Single-Molecule Research for Biology & Nanoscience, Feb 2018, Linz, Austria
Communication dans un congrès
hal-01962187v1
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Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructuresEUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal
Communication dans un congrès
hal-01962993v1
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[Invited] MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensorsAVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States
Communication dans un congrès
hal-01908666v1
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Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States
Communication dans un congrès
hal-01963015v1
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Driving and sensing M/NEMS flexural vibration using dielectric transduction31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France
Communication dans un congrès
hal-01962981v1
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High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩
Communication dans un congrès
hal-01962426v1
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Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria
Communication dans un congrès
hal-01962410v1
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HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORSThe 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩
Communication dans un congrès
hal-01279717v1
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Optimization of length and thickness of smart transduction layers on beam structures for control and M/NEMS applicationsASME 2015 Conference on Smart Materials Adaptive Structures and Intelligent Systems (SMASIS 2015), Sep 2015, Colorado Springs, United States. 9p., ⟨10.1115/SMASIS2015-8857⟩
Communication dans un congrès
hal-01203144v1
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Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry45th European Microwave Conference EuMC 2015, Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345849⟩
Communication dans un congrès
hal-01962399v1
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Determination of the effective mass and stiffness of a micro resonator from a single optical characterizationTRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩
Communication dans un congrès
hal-01687809v1
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When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency28th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2015, Jan 2015, Estoril, Portugal. ⟨10.1109/MEMSYS.2015.7050908⟩
Communication dans un congrès
hal-01962374v1
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A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417
Communication dans un congrès
cea-01844451v1
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Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩
Communication dans un congrès
hal-01962163v1
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Caractérisation quantitative des capacités sous échelle de 10 nm avec un interférométrique scanning-microwave-microscopy17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p
Communication dans un congrès
hal-01018379v1
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Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometryEuropean Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom
Communication dans un congrès
hal-01962209v1
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Towards a new generation of MEMS-based AFM probesInternational Scanning Probe Microscopy Conference, ISPM 2013, 2013, Dijon, France
Communication dans un congrès
hal-00878807v1
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5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, ⟨10.1109/MEMSYS.2013.6474311⟩
Communication dans un congrès
hal-00809858v1
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Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, ⟨10.1109/Transducers.2013.6626829⟩
Communication dans un congrès
hal-00877759v1
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Nanoscale capacitors study with an interferometric scanning microwave microscopeMaterials Research Society Fall Meeting, MRS Fall 2013, Symposium LL : Advances in Scanning Probe Microscopy, 2013, Boston, MA, United States
Communication dans un congrès
hal-00944017v1
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Interferometric scanning microwave microscope for nanotechnology applicationAmerican Physical Society March Meeting, APS March Meeting 2013, 2013, Baltimore, MD, United States
Communication dans un congrès
hal-00811777v1
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SOL-like calibrated RF measurements at the nanoscale on a modified scanning microwave microscope2nd Nano Measure Scientific Symposium, Nano Measure 2012, 2012, Stanford, CA, United States
Communication dans un congrès
hal-00797722v1
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DNA origami imaging with 10.9 MHz AFM MEMS probes25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.555-558, ⟨10.1109/MEMSYS.2012.6170236⟩
Communication dans un congrès
hal-00801107v1
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Micro-résonateurs haute fréquence pour la microscopie à force atomique15ème Forum des Microscopies à Sonde Locale, 2012, Saint-Jacut-de-la-Mer, France
Communication dans un congrès
hal-00797718v1
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[Invité] Apport des microsystèmes pour la microscopie à force atomiqueJournée thématique trans-GDR '' Micromanipulation pour les Micro-Nano Systèmes '', 2012, Besançon, France
Communication dans un congrès
hal-00797716v1
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Conception and fabrication of piezo-resistive ring shaped AFM probe25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.547-550, ⟨10.1109/MEMSYS.2012.6170180⟩
Communication dans un congrès
hal-00801106v1
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Micro-résonateurs haute fréquence pour la microscopie à force atomiqueJournées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France
Communication dans un congrès
hal-00797720v1
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Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189
Communication dans un congrès
hal-00801105v1
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Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applicationsASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, 2011, Denver, CO, United States. pp.IMECE2011-65083-1-5
Communication dans un congrès
hal-00800036v1
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4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotipsXXIème Congrès Général de la Société Française de Physique, SFP 2011, Jul 2011, Bordeaux, France
Communication dans un congrès
hal-00807202v1
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[Invité] Apport des micro et nano-systèmes pour la microscopie à force atomiqueJournées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France
Communication dans un congrès
hal-00807204v1
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IMPROVE-LM - Imaging probe for vacuum environment and liquid mediumJournées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France
Communication dans un congrès
hal-00807209v1
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[Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applicationsTELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6
Communication dans un congrès
hal-00806730v1
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4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Jan 2011, Cancun, Mexico. pp.517-520, ⟨10.1109/MEMSYS.2011.5734475⟩
Communication dans un congrès
hal-00579045v1
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Optimal design of non intuitive compliant microgripper with high resolutionIEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 2011, San Francisco, CA, United States. pp.45-50, ⟨10.1109/IROS.2011.6048665⟩
Communication dans un congrès
hal-00800034v1
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Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France
Communication dans un congrès
hal-00808200v1
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Atomic force probe using silicon ring resonator conception5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France
Communication dans un congrès
hal-00808199v1
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Improve-LM imaging probe for vacuum environment and liquid mediumJournées du Réseau National en Nanosciences et en Nanotechnologies, J3N 2010, 2010, Lille, France
Communication dans un congrès
hal-00808210v1
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Surface microscopy with laserless MEMS based AFM probes23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Jan 2010, Hong Kong, China. pp.292-295, ⟨10.1109/MEMSYS.2010.5442509⟩
Communication dans un congrès
hal-00549972v1
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Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France
Communication dans un congrès
hal-00575271v1
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High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, USA, United States. pp.2114-2117, ⟨10.1109/SENSOR.2009.5285623⟩
Communication dans un congrès
hal-00474452v1
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Tip-matter interaction measurements using MEMS ring resonators15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Jun 2009, Denver, CO, United States. pp.1638-1641, ⟨10.1109/SENSOR.2009.5285774⟩
Communication dans un congrès
hal-00474451v1
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Tip-matter interaction measurements using MEMS ring resonatorsForum des Microscopies à Sonde Locale, 2009, Hardelot, France
Communication dans un congrès
hal-00575264v1
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Characterization of IN-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, Jan 2008, Tucson - AZ, United States. pp.1016-1019, ⟨10.1109/MEMSYS.2008.4443831⟩
Communication dans un congrès
cea-00320830v1
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High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. pp.851-854, ⟨10.1109/MEMSYS.2007.4433179⟩
Communication dans un congrès
hal-00284388v1
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Proposition of atomic force probes based on silicon ring-resonators14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. pp.1529-1532, ⟨10.1109/SENSOR.2007.4300436⟩
Communication dans un congrès
hal-00284391v1
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High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 2007, Unknown, Unknown Region. pp.878-+
Communication dans un congrès
hal-01553035v1
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Résonateurs électromécaniques : principe et applicationsEcole Thématique CNRS : Microsystèmes acoustiques, 2007, Lille, France
Communication dans un congrès
hal-00367378v1
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Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Jun 2007, Lyon, France. pp.2267-2270, ⟨10.1109/SENSOR.2007.4300621⟩
Communication dans un congrès
hal-00284392v1
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a total miscibility of two metallic elements with different crystallographic structures in the surfaceEuropean Conference on Surface Science ECOSS 24, Sep 2006, PARIS, France
Communication dans un congrès
hal-00108262v1
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Micro-machined actuators for the friction driven micro-motor2006, pp.211-214
Communication dans un congrès
hal-00128670v1
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Micro et nanomécanique, MEMS et NEMSEcole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France
Communication dans un congrès
hal-00128667v1
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Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response2006, pp.244-249
Communication dans un congrès
hal-00128674v1
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Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules2006, 4 pp
Communication dans un congrès
hal-00147724v1
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ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSEDTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p
Communication dans un congrès
hal-00189294v1
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Ultra-low voltage MEMS resonator based on RSG-MOSFET2006, pp.882-885
Communication dans un congrès
hal-00128669v1
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Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications2006, pp.718-721
Communication dans un congrès
hal-00128668v1
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Nanotechnologie, micro et nanosystèmes5ème Colloque International TELECOM'2005 & 4èmes Journées Franco-Magrhébines des Micro-ondes et leurs Applications, JFMMA, 2005, Rabat, Maroc
Communication dans un congrès
hal-00126233v1
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MEMS reliability : metrology set-up for investigation of fatigue causes2005, pp.483-486
Communication dans un congrès
hal-00125627v1
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Electrostatic actuators operating in liquid environment : position control without pull-in effect2005, pp.341-346
Communication dans un congrès
hal-00128651v1
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Stiction drive operation of micromotors : direct and reverse rotation control2005, pp.57-60
Communication dans un congrès
hal-00125661v1
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Reliability of non-released microstructures : failure analysis and innovative solution process2005, pp.840-842
Communication dans un congrès
hal-00125662v1
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Friction driven micromotors with both clockwise and counterclockwise rotations17e Congrès Français de Mécanique, 2005, Troyes, France
Communication dans un congrès
hal-04279573v1
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The 2D feedback conveyance with ciliary actuator arrays2005, pp.31-34
Communication dans un congrès
hal-00125659v1
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Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact modeThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩
Communication dans un congrès
hal-00125631v1
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RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducersSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31
Communication dans un congrès
hal-00128656v1
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Micromachined actuators for friction driven linear micro-motorsProceedings of the Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, 2005, Hyogo, Japan
Communication dans un congrès
hal-00131348v1
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Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ?Ecole Nanosciences, 2005, Anglet, France
Communication dans un congrès
hal-00126215v1
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3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Jun 2005, Seoul, South Korea. pp.19-22, ⟨10.1109/SENSOR.2005.1496348⟩
Communication dans un congrès
hal-00128655v1
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Tensile stress determination in silicon nitride membrane by AFM characterization2005, pp.828-831
Communication dans un congrès
hal-00125660v1
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Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide17e Congrès Français de Mécanique, 2005, Troyes, France
Communication dans un congrès
hal-04203498v1
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1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, Jan 2005, Miami Beach, United States. pp.121-124, ⟨10.1109/MEMSYS.2005.1453882⟩
Communication dans un congrès
hal-00125628v1
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Microsystèmes : principales applications et contexte nationalEcoles Nanosciences, 2005, Anglet, France
Communication dans un congrès
hal-00126216v1
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solubilité complète en surface entre deux métaux de structure cristllographique différenteJSI 2005, 2005, LYON, France
Communication dans un congrès
hal-00108263v1
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Reliability of polycrystalline MEMS : prediction of the debugging-timeInternational Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States
Communication dans un congrès
hal-00141030v1
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Predictive modelling of the fatigue phenomenon for polycristalline structural layers2004, pp.145-148
Communication dans un congrès
hal-00141028v1
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TP de nanotechnologie : réalisation et observation de nanofils de silicium à l'aide de l'AFM8èmes Journées Pédagogiques du CNFM, 2004, Saint Malo, France
Communication dans un congrès
hal-00133919v1
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An original methodology to assess fatigue behavior in RF MEMS devicesEuropean Microwave Week, 2004, Amsterdam, Netherlands
Communication dans un congrès
hal-00141031v1
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Characterization of individual bio-cells with thermally actuated probe arraysNonimaging Optics and Efficient Illumination Systems, Aug 2004, Denver, CO, United States. pp.425-429
Communication dans un congrès
hal-00141170v1
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Ultimate technology for micromachining of nanometric gap HF micromechanical resonators2003, pp.157-160
Communication dans un congrès
hal-00146462v1
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Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1287-1290, ⟨10.1109/SENSOR.2003.1217008⟩
Communication dans un congrès
hal-00146438v1
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Tapping-mode HF nanometric lateral gap resonators : experimental and theory2003, pp.879-882
Communication dans un congrès
hal-00146456v1
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Thermally actuated probe arrays for manipulation and characterization of individual bio-cellTRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩
Communication dans un congrès
hal-00146460v1
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Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology2003, pp.F23-F26
Communication dans un congrès
hal-00146406v1
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Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1578-1581, ⟨10.1109/SENSOR.2003.1217081⟩
Communication dans un congrès
hal-00146440v1
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High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment2002, pp.665-668
Communication dans un congrès
hal-00148737v1
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Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology2002, pp.447-450
Communication dans un congrès
hal-00148736v1
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Architecture level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receiversDesign, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2002, May 2002, Canne, France. pp.136-142
Communication dans un congrès
hal-00148741v1
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Study of adhesive forces on a silicon nanotip force microscope in contact modeDesign, Test, Integration, and Packaging of MEMS/MOEMS 2002, May 2002, Cannes, France. pp.601-612, ⟨10.1117/12.462861⟩
Communication dans un congrès
hal-00148788v1
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Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiéesColloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France
Communication dans un congrès
hal-00148748v1
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IF MEMS filters for mobile communication2001, pp.733-736
Communication dans un congrès
hal-00152458v1
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Microsystem technology : trends and possible application for textileConference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France
Communication dans un congrès
hal-00152473v1
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Microsysteme : un état des lieux, enjeux et perspectives48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France
Communication dans un congrès
hal-00158538v1
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Microsystème : enjeux et perspectivesJournée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France
Communication dans un congrès
hal-00158539v1
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High Speed Atomic Force MicroscopePoster de conférence hal-01529673v1 |
Micro et nanorésonateurs radio-fréquenceLeray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.239-242, 2009
Chapitre d'ouvrage
hal-00575789v1
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Système pour détecter des réponses d'un dispositif résonateur micro-électromécanique (MEMS)N° de brevet: FR2985251 (A1). 2013
Brevet
hal-00846338v1
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Sonde pour microscopie à force atomiqueN° de brevet: FR2915803 (A1). 2008
Brevet
hal-00372090v1
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Circuit superhétérodyne à filtre passe-bande de sélection de canalN° de brevet: FR2836765 (A1). 2003
Brevet
hal-00372460v1
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Détecteur infrarouge semi-conducteur et son procédé de fabricationFrance, N° de brevet: FR2791474 (A1) 2000-09-29. 2000
Brevet
hal-00372676v1
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Contribution au domaine des actionneurs et résonateurs microélectromécaniques. Applications à la nanocaractérisation2012
Autre publication scientifique
hal-00799254v1
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Elaboration et caractérisation physique par microscopie à champ proche de nanostructures semi-conductrices2000
Autre publication scientifique
hal-00158616v1
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Is There Really a Size effect on the Surface Energy of Nanoparticles ?2021
Pré-publication, Document de travail
hal-03310351v1
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Magnetism: the Driving Force of Order in CoPt. A First-Principles Study2012
Pré-publication, Document de travail
hal-00691274v1
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Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide[Rapport Technique] LAAS-CNRS. 2019
Rapport
hal-03603368v1
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CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO‐CARACTÉRISATION.Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2012
HDR
tel-00706851v1
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