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Bernard Legrand
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Ultra-Low-Power Logic with Contactless Capacitive MEMS21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩
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Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria
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Proposition of atomic force probes based on silicon ring-resonators14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. pp.1529-1532, ⟨10.1109/SENSOR.2007.4300436⟩
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Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Jun 2007, Lyon, France. pp.2267-2270, ⟨10.1109/SENSOR.2007.4300621⟩
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High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. pp.851-854, ⟨10.1109/MEMSYS.2007.4433179⟩
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High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 2007, Unknown, Unknown Region. pp.878-+
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Micro et nanomécanique, MEMS et NEMSEcole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France
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Micro-machined actuators for the friction driven micro-motor2006, pp.211-214
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Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules2006, 4 pp
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a total miscibility of two metallic elements with different crystallographic structures in the surfaceEuropean Conference on Surface Science ECOSS 24, Sep 2006, PARIS, France
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Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response2006, pp.244-249
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ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSEDTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p
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Ultra-low voltage MEMS resonator based on RSG-MOSFET2006, pp.882-885
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MEMS reliability : metrology set-up for investigation of fatigue causes2005, pp.483-486
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solubilité complète en surface entre deux métaux de structure cristllographique différenteJSI 2005, 2005, LYON, France
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Tensile stress determination in silicon nitride membrane by AFM characterization2005, pp.828-831
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Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ?Ecole Nanosciences, 2005, Anglet, France
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Reliability of polycrystalline MEMS : prediction of the debugging-timeInternational Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States
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Predictive modelling of the fatigue phenomenon for polycristalline structural layers2004, pp.145-148
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Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology2003, pp.F23-F26
Conference papers
hal-00146406v1
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Ultimate technology for micromachining of nanometric gap HF micromechanical resonators2003, pp.157-160
Conference papers
hal-00146462v1
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Thermally actuated probe arrays for manipulation and characterization of individual bio-cellTRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩
Conference papers
hal-00146460v1
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Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1287-1290, ⟨10.1109/SENSOR.2003.1217008⟩
Conference papers
hal-00146438v1
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Tapping-mode HF nanometric lateral gap resonators : experimental and theory2003, pp.879-882
Conference papers
hal-00146456v1
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Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1578-1581, ⟨10.1109/SENSOR.2003.1217081⟩
Conference papers
hal-00146440v1
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Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology2002, pp.447-450
Conference papers
hal-00148736v1
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Study of adhesive forces on a silicon nanotip force microscope in contact modeDesign, Test, Integration, and Packaging of MEMS/MOEMS 2002, May 2002, Cannes, France. pp.601-612, ⟨10.1117/12.462861⟩
Conference papers
hal-00148788v1
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Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiéesColloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France
Conference papers
hal-00148748v1
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Architecture level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receiversDesign, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2002, May 2002, Canne, France. pp.136-142
Conference papers
hal-00148741v1
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High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment2002, pp.665-668
Conference papers
hal-00148737v1
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IF MEMS filters for mobile communication2001, pp.733-736
Conference papers
hal-00152458v1
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Microsystem technology : trends and possible application for textileConference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France
Conference papers
hal-00152473v1
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Microsysteme : un état des lieux, enjeux et perspectives48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France
Conference papers
hal-00158538v1
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Microsystème : enjeux et perspectivesJournée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France
Conference papers
hal-00158539v1
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High Speed Atomic Force MicroscopeConference poster hal-01529673v1 |
Micro et nanorésonateurs radio-fréquenceLeray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.239-242, 2009
Book sections
hal-00575789v1
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Système pour détecter des réponses d'un dispositif résonateur micro-électromécanique (MEMS)N° de brevet: FR2985251 (A1). 2013
Patents
hal-00846338v1
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Sonde pour microscopie à force atomiqueN° de brevet: FR2915803 (A1). 2008
Patents
hal-00372090v1
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Circuit superhétérodyne à filtre passe-bande de sélection de canalN° de brevet: FR2836765 (A1). 2003
Patents
hal-00372460v1
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Détecteur infrarouge semi-conducteur et son procédé de fabricationFrance, N° de brevet: FR2791474 (A1) 2000-09-29. 2000
Patents
hal-00372676v1
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Is There Really a Size effect on the Surface Energy of Nanoparticles ?2021
Preprints, Working Papers, ...
hal-03310351v1
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Magnetism: the Driving Force of Order in CoPt. A First-Principles Study2012
Preprints, Working Papers, ...
hal-00691274v1
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Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide[Rapport Technique] LAAS-CNRS. 2019
Reports
hal-03603368v1
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CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO‐CARACTÉRISATION.Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2012
Habilitation à diriger des recherches
tel-00706851v1
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