Bernard Legrand

Publications

Article dans une revue (72)

Suspended tip overhanging from chip edge for atomic force microscopy with an optomechanical resonator Aleksandra Marković,Mathis Lefebvre,Laurent Mazenq,Samuel Charlot,Marc Gélyet al. Journal of Optical Microsystems, 2024, 4 (3), pp.033501. ⟨10.1117/1.JOM.4.3.033501⟩ Article dans une revue hal-04689661v1
Influence of ordering phenomena on carbon segregation in tungsten screw dislocation Fabienne Berthier,Bernard Legrand Acta Materialia, 2023, 245, pp.118610. ⟨10.1016/j.actamat.2022.118610⟩ Article dans une revue hal-03765006v2
Effect of size on the surface energy of noble metal nanoparticles from analytical and numerical approaches Hakim Amara,Jaysen Nelayah,Jérôme Creuze,Adrian Chmielewski,Damien Alloyeauet al. Physical Review B, 2022, 105 (16), pp.165403. ⟨10.1103/PhysRevB.105.165403⟩ Article dans une revue hal-03863659v1
Very high frequency probes for atomic force microscopy with silicon optomechanics L Schwab,P E Allain,Nicolas Mauran,Xavier Dollat,Laurent Mazenqet al. Microsystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩ Article dans une revue hal-03326075v2
Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes Denis Lagrange,Nicolas Mauran,Lucien Schwab,Bernard Legrand IEEE Transactions on Control Systems Technology, 2021, 29 (5), pp.2264 - 2270. ⟨10.1109/TCST.2020.3028737⟩ Article dans une revue hal-02974151v1
Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces Pierre Etienne Allain,Lucien Schwab,Colin Mismer,Marc Gély,Estelle Mairiauxet al. Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/C9NR09690F⟩ Article dans une revue hal-01908683v2
Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation Alexis Front,Bernard Legrand,Guy Tréglia,Christine Mottet Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2019, 679, pp.128-138. ⟨10.1016/j.susc.2018.08.024⟩ Article dans une revue hal-03547785v1
Bidimensional phases in Co–Pt surface alloys: A theoretical study of ordering and surface segregation Alexis Front,Bernard Legrand,G. Tréglia,Christine Mottet Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2018, 679, pp.128 - 138. ⟨10.1016/j.susc.2018.08.024⟩ Article dans une revue hal-03891247v1
Magic compositions in Pd-Au nanoalloys Zhu Beien,Front Alexis,Hazar Guesmi,Jérôme Creuze,Bernard Legrandet al. Computational and Theoretical Chemistry, 2017, 1107, pp.49-56. ⟨10.1016/j.comptc.2016.12.023⟩ Article dans une revue hal-01426928v1
Magic compositions in Pd-Au nanoalloys Beien Zhu,Alexis Front,Hazar Guesmi,Jérôme Creuze,Bernard Legrandet al. Computational and Theoretical Chemistry, 2017, 1107, pp.49-56. ⟨10.1016/j.comptc.2016.12.023⟩ Article dans une revue hal-03547790v1
Multi-MHz micro-electro-mechanical sensors for atomic force microscopy Bernard Legrand,Jean-Paul Salvetat,Benjamin Walter,Marc Faucher,Didier Theronet al. Ultramicroscopy, 2017, 175, pp.46 - 57. ⟨10.1016/j.ultramic.2017.01.005⟩ Article dans une revue hal-01765180v1
A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes Adhitya Bhaswara,Hohyun Keum,Fabrice Mathieu,Bernard Legrand,Seok Kimet al. Frontiers of Mechanical Engineering in China, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩ Article dans une revue hal-01960876v1
CO adsorption-induced surface segregation and formation of Pd chains on AuPd(100) alloy: density functional theory based ising model and Monte Carlo simulations Beien Zhu,Jérôme Creuze,Christine Mottet,Bernard Legrand,Hazar Guesmi Journal of Physical Chemistry C, 2016, 120, pp.350-359. ⟨10.1021/acs.jpcc.5b10158⟩ Article dans une revue hal-01267581v1
Environment dependence of magnetic moment and atomic level shifts within tight-binding approximation: An illustration in the case of cobalt C. Goyhenex,G. Tréglia,Bernard Legrand Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2016, 646 (SI), pp.261-268. ⟨10.1016/j.susc.2015.09.004⟩ Article dans une revue hal-01455014v1
Design and measurement of AFM probe based on MEMS resonator Zhuang Xiong,Bernard Legrand High Power Laser and Particle Beams, 2015, 27 (2), pp.024119-1. ⟨10.11884/HPLPB201527.024119⟩ Article dans une revue hal-01961045v1
Crossover among structural motifs in Pd–Au nanoalloys B. Zhu,H. Guesmi,J. Creuze,Bernard Legrand,C. Mottet Physical Chemistry Chemical Physics, 2015, 17, pp.28129-28136. ⟨10.1039/C5CP00491H⟩ Article dans une revue hal-01222110v1
Surface segregation in AuPd alloys: Ab initio analysis of the driving forces Jérôme Creuze,Hazar Guesmi,Christine Mottet,Beien Zhu,Bernard Legrand Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2015, 639, pp.48 - 53. ⟨10.1016/j.susc.2015.04.017⟩ Article dans une revue istex hal-01378430v1
Environmental microbiology as a mosaic of explored ecosystems and issues Denis Faure,Patricia Bonin,Robert Duran,Pierre Amato,Florence Arsene-Ploetzeet al. Environmental Science and Pollution Research, 2015, 22 (18), pp.13577-13598. ⟨10.1007/s11356-015-5164-5⟩ Article dans une revue hal-01247096v1
A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection Zhuang Xiong,Estelle Mairiaux,Benjamin Walter,Marc Faucher,Lionel Buchaillotet al. Sensors, 2014, 14 (11), pp.20667-20686. ⟨10.3390/s141120667⟩ Article dans une revue hal-01960848v1
Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope Fei Wang,Nicolas Clément,Damien Ducatteau,David Troadec,Hassan Tanbakuchiet al. Nanotechnology, 2014, 25 (40), pp.405703. ⟨10.1088/0957-4484/25/40/405704⟩ Article dans une revue hal-01960609v1
Two types of MEMS-based oscillating AFM probes Zhuang Xiong,Estelle Mairiaux,Benjamin Walter,Marc Faucher,Lionel Buchaillotet al. Journal of Chinese Electron Microscopy Society , 2014, 2, pp.137-141 Article dans une revue hal-01960910v1
Fabrication of nanoplate resonating structures via micro-masonry Adhitya Bhaswara,Hohyun Keum,S Rhee,Bernard Legrand,Fabrice Mathieuet al. Journal of Micromechanics and Microengineering, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩ Article dans une revue hal-01687810v1
Evidence of Pd segregation and stabilization at edges of AuPd nano-clusters in the presence of CO: A combined DFT and DRIFTS study Beien Zhu,Gode Thrimurthulu,Laurent Delannoy,Catherine Louis,Christine Mottetet al. Journal of Catalysis, 2013, 308, pp.272-281. ⟨10.1016/j.jcat.2013.08.022⟩ Article dans une revue istex hal-03184658v1
Piezoresistive ring-shaped AFM sensors with pico-newton force resolution Z. Xiong,B. Walter,E. Mairiaux,M. Faucher,L. Buchaillotet al. International Journal of Intelligent Mechatronics and Robotics, 2013, 3, pp.38-52. ⟨10.4018/ijimr.2013010104⟩ Article dans une revue hal-00871948v1
Detecting response of microelectromechanical resonators by microwave reflectometry Bernard Legrand,D. Ducatteau,D. Theron,B. Walter,H. Tanbakuchi Applied Physics Letters, 2013, 103, pp.053124-1-5. ⟨10.1063/1.4817411⟩ Article dans une revue hal-00871931v1
MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution Z. Xiong,B. Walter,E. Mairiaux,M. Faucher,L. Buchaillotet al. Journal of Micromechanics and Microengineering, 2013, 23, pp.035016-1-10. ⟨10.1088/0960-1317/23/3/035016⟩ Article dans une revue hal-00795965v1
An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements Thomas Dargent,Kamel Haddadi,T. Lasri,N. Clément,D. Ducatteauet al. Review of Scientific Instruments, 2013, 84 (12), pp.123705. ⟨10.1063/1.4848995⟩ Article dans une revue hal-00922585v1
Segregation in bimetallic nanowires: Size and thermodynamic ensemble effects Emile Maras,Fabienne Berthier,Isabelle Braems,Bernard Legrand Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2012, 86 (5), ⟨10.1103/PhysRevB.86.054205⟩ Article dans une revue hal-02990483v1
Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications Etienne Herth,Emmanuelle Algre,Pascal Tilmant,Martin François,Christophe Boyavalet al. IEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩ Article dans une revue hal-00787415v1
MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution Emmanuelle Algre,Zhuang Xiong,Marc Faucher,Benjamin Walter,Lionel Buchaillotet al. Journal of Microelectromechanical Systems, 2012, 21, pp.385-397. ⟨10.1109/JMEMS.2011.2179012⟩ Article dans une revue hal-00787407v1
Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process Etienne Herth,Emmanuelle Algré,Bernard Legrand,Lionel Buchaillot Microelectronic Engineering, 2011, 88 (5), pp.724-728. ⟨10.1016/j.mee.2010.06.032⟩ Article dans une revue istex hal-02300269v1
Multiscale Modelling of the Ageing Kinetics of a 2D Deposit Fabienne Berthier,Emile Maras,Isabelle Braems,Bernard Legrand Solid State Phenomena, 2011, 172-174, pp.664-669. ⟨10.4028/www.scientific.net/SSP.172-174.664⟩ Article dans une revue hal-02990476v1
Materials selection procedure for RF-MEMS G. Guisbiers,E. Herth,Bernard Legrand,N. Rolland,T. Lasriet al. Microelectronic Engineering, 2010, 87, pp.1792-1795. ⟨10.1016/j.mee.2009.10.016⟩ Article dans une revue istex hal-00549627v1
Fabrication of 24-MHz-disk resonators with silicon passive integration technology M. Sworowski,F. Neuilly,Bernard Legrand,A. Summanwar,P. Philippeet al. IEEE Electron Device Letters, 2010, 31, pp.23-25. ⟨10.1109/LED.2009.2034542⟩ Article dans une revue hal-00548984v1
Electron beam nanolithography in AZnLOF 2020 E. Herth,P. Tilmant,M. Faucher,M. François,Christophe Boyavalet al. Microelectronic Engineering, 2010, 87, pp.2057-2060. ⟨10.1016/j.mee.2009.12.079⟩ Article dans une revue istex hal-00548989v1
Development of a new generation of active AFM tools for applications in liquids A.S. Rollier,D.F.L. Jenkins,El Hadj Dogheche,Bernard Legrand,M. Faucheret al. Journal of Micromechanics and Microengineering, 2010, 20, pp.085010-1-11. ⟨10.1088/0960-1317/20/8/085010⟩ Article dans une revue hal-00548990v1
Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications E. Herth,Bernard Legrand,L. Buchaillot,N. Rolland,T. Lasri Microelectronics Reliability, 2010, 50, pp.1103-1106. ⟨10.1016/j.microrel.2010.04.011⟩ Article dans une revue istex hal-00549491v1
Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays M. Ataka,Bernard Legrand,L. Buchaillot,D. Collard,H. Fujita IEEE/ASME Transactions on Mechatronics, 2009, 14, pp.119-125. ⟨10.1109/TMECH.2008.2004770⟩ Article dans une revue hal-00472723v1
Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactions D. Hourlier,Bernard Legrand,Christophe Boyaval,P. Perrot Journal of Nano Research, 2009, 6, pp.215-224. ⟨10.4028/www.scientific.net/JNanoR.6.215⟩ Article dans une revue hal-00471951v1
Design and operation of a silicon ring resonator for force sensing applications above 1 MHz Benjamin Walter,Marc Faucher,Emmanuelle Algre,Bernard Legrand,Rodolphe Boisgardet al. Journal of Micromechanics and Microengineering, 2009, 19 (11), pp.115009-1-7. ⟨10.1088/0960-1317/19/11/115009⟩ Article dans une revue hal-00472725v1
In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives Cédric Durand,Fabrice Casset,Philippe Renaux,Nicolas Abelé,Bernard Legrandet al. IEEE Electron Device Letters, 2008, 29 (5), pp.494-496. ⟨10.1109/LED.2008.919781⟩ Article dans une revue cea-00320837v1
Silicon nanotweezers with subnanometer resolution for the micromanipulation of biomolecules C. Yamahata,D. Collard,Bernard Legrand,T. Takekawa,M. Kumemuraet al. Journal of Microelectromechanical Systems, 2008, 17, pp.623-631. ⟨10.1109/JMEMS.2008.922080⟩ Article dans une revue hal-00357278v1
Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling Philippe Basset,A. Kaiser,Bernard Legrand,D. Collard,L. Buchaillot IEEE/ASME Transactions on Mechatronics, 2007, 12, pp.23-31. ⟨10.1109/TMECH.2006.886245⟩ Article dans une revue hal-00255847v1
SOI-based nanoelectrospray emitter tips for mass spectrometry: a coupled MEMS and microfluidic design Bernard Legrand,Alison Ashcroft,Lionel Buchaillot,S. Arscott Journal of Micromechanics and Microengineering, 2007, 17 (3), pp.509-514. ⟨10.1088/0960-1317/17/3/013⟩ Article dans une revue istex hal-02347438v1
Towards mechanical characterization of biomolecules by MNEMS tools D. Collard,C. Yamahata,Bernard Legrand,T. Takekawa,M. Kumemuraet al. IEEJ Transactions on Electrical and Electronic Engineering, 2007, 2, pp.262-271. ⟨10.1002/tee.20154⟩ Article dans une revue hal-00283054v1
A silicon beam-based microcantilever nanoelectrosprayer S. Arscott,Bernard Legrand,Lionel Buchaillot,Alison Ashcroft Sensors and Actuators B: Chemical, 2007, 125 (1), pp.72-78. ⟨10.1016/j.snb.2007.01.040⟩ Article dans une revue istex hal-02347442v1
Site segregation in size-mismatched nanoalloys: Application to Cu–Ag Virginie Moreno,Jérôme Creuze,Fabienne Berthier,Christine Mottet,Guy Trégliaet al. Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2006, 600 (22), pp.5011-5020. ⟨10.1016/j.susc.2006.08.030⟩ Article dans une revue istex cea-02355772v1
Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology Dimitri Galayko,Andreas Kaiser,Bernard Legrand,Lionel Buchaillot,Dominique Collardet al. Sensors and Actuators A: Physical , 2006, 126 (1), pp.227-240. ⟨10.1016/j.sna.2005.10.033⟩ Article dans une revue istex hal-01195973v1
Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology D. Galayko,A. Kaiser,Bernard Legrand,L. Buchaillot,C. Combiet al. Sensors and Actuators A: Physical , 2006, 126, pp.227-240 Article dans une revue hal-00138651v1
Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids Bernard Legrand,Anne-Sophie Rollier,Dominique Collard,Lionel Buchaillot Applied Physics Letters, 2006, 88 (3), pp.034105-1-3. ⟨10.1063/1.2165282⟩ Article dans une revue hal-00128662v1
Complete miscibility between different crystallographic structures : Monte Carlo simulations of Cu-Ag deposited on Cu(001) Isabelle Braems,Fabienne Berthier,Robert Tétot,Bernard Legrand Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2006, 74 (11), pp.113406 Article dans une revue hal-00108260v1
Silicon surface nano-oxidation using scanning probe microscopy D. Stievenard,Bernard Legrand Progress in Surface Science, 2006, 81, pp.112-140 Article dans une revue hal-00127846v1
Stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions Anne-Sophie Rollier,Bernard Legrand,Dominique Collard,Lionel Buchaillot Journal of Micromechanics and Microengineering, 2006, 16, pp.794-801. ⟨10.1088/0960-1317/16/4/016⟩ Article dans une revue istex hal-00128663v1
Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators D. Galayko,A. Kaiser,Bernard Legrand,L. Buchaillot,D. Collardet al. Sensors and Actuators A: Physical , 2005, 117, pp.115-120 Article dans une revue hal-00125630v1
Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips Vincent Agache,Roger Ringot,Patrice Bigotte,Vincent Senez,Bernard Legrandet al. IEEE Transactions on Nanotechnology, 2005, 4, pp.548-556. ⟨10.1109/TNANO.2005.851386⟩ Article dans une revue hal-00125632v1
Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator Vincent Agache,Bernard Legrand,Dominique Collard,Lionel Buchaillot,Hiroyuki Fujita Applied Physics Letters, 2005, 86, pp.213104-1-3. ⟨10.1063/1.1929873⟩ Article dans une revue hal-00125633v1
Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS O. Millet,Bernard Legrand,D. Collard,L. Buchaillot Japanese Journal of Applied Physics, 2003, 41, pp.L1339-L1341 Article dans une revue hal-00146435v1
Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction D. Galayko,A. Kaiser,L. Buchaillot,Bernard Legrand,D. Collardet al. Journal of Micromechanics and Microengineering, 2003, 13, pp.134-140 Article dans une revue hal-00146391v1
Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS) O. Millet,Bernard Legrand,D. Collard,L. Buchaillot Japanese Journal of Applied Physics, part 2 : Letters, 2002, 41, pp.L1339-L1341 Article dans une revue hal-00250391v1
Electrostatic micro actuators D. Collard,H. Fujita,H. Toshiyoshi,Bernard Legrand,L. Buchaillot Nano et micro technologies, 2002, 2, pp.83-124 Article dans une revue hal-00148761v1
Silicon nanowires with sub 10 nm lateral dimensions : from AFM lithography based fabrication to electrical measurements Bernard Legrand,D. Deresmes,D. Stievenard Journal of Vacuum Science and Technology, 2002, 20, pp.862-870 Article dans une revue hal-00148765v1
Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing Bernard Legrand,E. Quévy,B. Stefanelli,D. Collard,L. Buchaillot Review of Scientific Instruments, 2002, 73, pp.4393-4395 Article dans une revue hal-00148782v1
Thermally assisted formation of silicon islands on a silicon-on-insulator substrate Bernard Legrand,Vincent Agache,Jean-Philippe Nys,Thierry Melin,Vincent Senezet al. Journal of Applied Physics, 2002, 91, pp.106-111. ⟨10.1063/1.1420761⟩ Article dans une revue hal-00149668v1
Surface micro-machining : an overview D. Collard,H. Fujita,H. Toshiyoshi,Bernard Legrand,L. Buchaillot Nano et micro technologies, 2002, 2, pp.35-50 Article dans une revue hal-00148781v1
Adhesive forces investigation on a silicon tip by contact mode atomic force microscope Vincent Agache,Bernard Legrand,Dominique Collard,Lionel Buchaillot Applied Physics Letters, 2002, 81, pp.2623-2625. ⟨10.1063/1.1508806⟩ Article dans une revue hal-00148768v1
Thermally assisted formation of silicon islands on a silicon on insulator substrate Bernard Legrand,Vincent Agache,Thierry Melin,Jean-Philippe Nys,Vincent Senezet al. Journal of Applied Physics, 2001, 91, pp.106-111. ⟨10.1063/1.1420761⟩ Article dans une revue hal-00152464v1
Formation of silicon islands on a silicon on insulator substrate upon thermal annealing Bernard Legrand,Vincent Agache,Jean-Philippe Nys,Vincent Senez,Didier Stiévenard Applied Physics Letters, 2000, 76, pp.3271-3273. ⟨10.1063/1.126603⟩ Article dans une revue hal-00158537v1
Atomic force microscope tip-surface behaviour under continuous bias or pulsed voltages in non contact mode Bernard Legrand,D. Stievenard Applied Physics Letters, 2000, 76, pp.1018-1020 Article dans une revue hal-00158646v1
Imaging the wave function amplitudes in cleaved semiconductor quantum boxes B. Grandidier,Y.M. Niquet,Bernard Legrand,J.P. Nys,C. Priesteret al. Physical Review Letters, 2000, 85, pp.1068-1071 Article dans une revue hal-00158644v1
Les différentes phases du développement des pivots et des premiers bois d'un cerf Bernard Legrand Revue forestière française, 1975, 27 (1), pp.71-73. ⟨10.4267/2042/20920⟩ Article dans une revue hal-03395620v1
Le parc animalier des Yvelines Bernard Legrand Revue forestière française, 1972, 24 (6), pp.460-468. ⟨10.4267/2042/20650⟩ Article dans une revue hal-03395640v1
Effarouchement passif des rapaces et corvidés Bernard Legrand Revue forestière française, 1971, 23 (4), pp.431-435. ⟨10.4267/2042/20510⟩ Article dans une revue hal-03395047v1

Communication dans un congrès (105)

In-sensor computing with contactless MEMS: binary neurons for harsh environment Aleksandra Markovic,Armine Karami,Nicolas Mauran,Philippe Basset,Hervé Fanetet al. 2025 IEEE SENSORS, Oct 2025, Vancouver, Canada. pp.1-4, ⟨10.1109/SENSORS59705.2025.11330918⟩ Communication dans un congrès hal-05532759v1
Modeling of an all-mechanical in-sensor vibration classifier compatible with MEMS implementation Aleksandra Marković,Armine Karami,Hervé Fanet,Dimitri Galayko,Bernard Legrandet al. ISCAS 2026 - 2026 IEEE International Symposium on Circuits and Systems, IEEE, May 2026, Shanghai, China Communication dans un congrès hal-05562234v1
High-Temperature Dual-Rail Contactless MEMS Logic for Industrial Edge Computing Aleksandra Marković,Adrian Laborde,Nicolas Mauran,Hervé Fanet,Gaël Pillonnetet al. 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), IEEE, Jan 2025, Kaohsiung, Taiwan. pp.542-545, ⟨10.1109/MEMS61431.2025.10917966⟩ Communication dans un congrès hal-05227846v1
Pushing AFM Boundaries with Optomechanics: From Ultra-High-Speed to Quantum Sensing Bernard Legrand,Guillaume Jourdan Leti Innovation Days, CEA-LETI, Jun 2025, Grenoble, France Communication dans un congrès hal-05137485v1
Leveraging the chaotic regime of a MEMS oscillator for gas detection Pomme Hirschauer,Fabrice Mathieu,Isabelle Dufour,Martial Defoort,Bernard Legrand Nonlinear Micro-Nanosystems symposium, May 2025, Marne-la-Vallée, France Communication dans un congrès hal-05217868v1
TOWARDS UNVEILING THE HIDDEN DYNAMICS OF BACTERIORHODOPSIN WITH MEMS-BASED ATOMIC FORCE MICROSCOPY Suyambulingam Subramanian,Nicolas Mauran,Guillaume Jourdan,Ignacio Casuso,Bernard Legrand 2025 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Jun 2025, Orlando, United States. pp.817-820, ⟨10.1109/Transducers61432.2025.11110349⟩ Communication dans un congrès hal-05251930v1
Ultra-Low-Power Logic with Contactless Capacitive MEMS Aleksandra Markovic,Laurent Mazenq,Adrian Laborde,Herve Fanet,Gael Pillonnetet al. 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩ Communication dans un congrès hal-03946985v1
Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime Aleksandra Markovic,Gaël Pillonnet,Bernard Legrand Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France Communication dans un congrès hal-03649053v1
130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements Lucien Schwab,Pierre-Etienne Allain,Louise Banniard,Nicolas Mauran,Denis Lagrangeet al. IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩ Communication dans un congrès hal-02371188v1
Optomechanics: a key towards next-generation experiments in atomic force microscopy? Lucien Schwab,Pierre Allain,Didier Theron,Marc Faucher,Benjamin Walteret al. International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France Communication dans un congrès hal-02407634v1
[Invited] MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors Bernard Legrand,Lucien Schwab,Pierre Allain,Ivan Favero,Marc Faucheret al. AVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States Communication dans un congrès hal-01908666v1
Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructures Olivier Thomas,Arthur Givois,Aurélien Grolet,Jean-François Deü,Cécile Fuinelet al. EUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal Communication dans un congrès hal-01962993v1
Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors Lucien Schwab,Pierre Etienne Allain,L Banniard,A Fafin,Marc Gelyet al. 64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States Communication dans un congrès hal-01963015v1
The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectory Régis Hamelin,Géraldine Andrieux,Isabelle Chartier,Bahaa El Roustom,T. Healyet al. International Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018, Apr 2018, Dresden, Germany Communication dans un congrès hal-01962997v1
[Invited] SMM characterization of Au nanodots and FcC11SH molecules Didier Theron,Fei Wang,Thomas Dargent,Damien Ducatteau,Charlene Brillardet al. XX Annual Linz Winter Workshop, Advances in Single-Molecule Research for Biology & Nanoscience, Feb 2018, Linz, Austria Communication dans un congrès hal-01962187v1
Driving and sensing M/NEMS flexural vibration using dielectric transduction Cécile Fuinel,Fabrice Mathieu,Bernard Legrand 31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France Communication dans un congrès hal-01962981v1
High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration Cécile Fuinel,Fabrice Mathieu,Adrian Laborde,Laurent Mazenq,Christian Bergaudet al. 19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩ Communication dans un congrès hal-01962426v1
Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction Adhitya Bhaswara,Hohyun Keum,Fabrice Mathieu,Bernard Legrand,Seok Kimet al. 42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria Communication dans un congrès hal-01962410v1
HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS Cécile Fuinel,Khadim Daffé,Adrian Laborde,Olivier Thomas,Laurent Mazenqet al. The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩ Communication dans un congrès hal-01279717v1
Optimization of length and thickness of smart transduction layers on beam structures for control and M/NEMS applications Olivier Thomas,Bernard Legrand,Cécile Fuinel ASME 2015 Conference on Smart Materials Adaptive Structures and Intelligent Systems (SMASIS 2015), Sep 2015, Colorado Springs, United States. 9p., ⟨10.1115/SMASIS2015-8857⟩ Communication dans un congrès hal-01203144v1
When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency S. Houmadi,Bernard Legrand,J.P. Salvetat,B. Walter,E. Mairiauxet al. 28th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2015, Jan 2015, Estoril, Portugal. ⟨10.1109/MEMSYS.2015.7050908⟩ Communication dans un congrès hal-01962374v1
Determination of the effective mass and stiffness of a micro resonator from a single optical characterization Adhitya Bhaswara,Denis Dezest,Liviu Nicu,Thierry Leichle,Bernard Legrand TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩ Communication dans un congrès hal-01687809v1
Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry F. Wang,Thomas Dargent,D. Ducatteau,Gilles Dambrine,Kamel Haddadiet al. 45th European Microwave Conference EuMC 2015, Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345849⟩ Communication dans un congrès hal-01962399v1
Caractérisation quantitative des capacités sous échelle de 10 nm avec un interférométrique scanning-microwave-microscopy Fei Wang,Nicolas Clément,Damien Ducatteau,David Troadec,Bernard Legrandet al. 17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p Communication dans un congrès hal-01018379v1
Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry Fei Wang,Damien Ducatteau,David Troadec,Hassan Tanbakuchi,Bernard Legrandet al. European Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom Communication dans un congrès hal-01962209v1
A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution A. Grira,C. Rotinat-Libersa,Bernard Legrand,L. Buchaillot 1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417 Communication dans un congrès cea-01844451v1
Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers? Lionel Buchaillot,Estelle Mairiaux,Benjamin Walter,Zhuang Xiong,Marc Faucheret al. IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩ Communication dans un congrès hal-01962163v1
Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators Bernard Legrand,D. Ducatteau,D. Theron,B. Walter,H. Tanbakuchi 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, ⟨10.1109/Transducers.2013.6626829⟩ Communication dans un congrès hal-00877759v1
Interferometric scanning microwave microscope for nanotechnology application N. Clement,Thomas Dargent,H. Tanbakuchi,K. Nishiguchi,R. Sivakumarasamyet al. American Physical Society March Meeting, APS March Meeting 2013, 2013, Baltimore, MD, United States Communication dans un congrès hal-00811777v1
Towards a new generation of MEMS-based AFM probes Z. Xiong,B. Walter,E. Mairiaux,M. Faucher,L. Buchaillotet al. International Scanning Probe Microscopy Conference, ISPM 2013, 2013, Dijon, France Communication dans un congrès hal-00878807v1
5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection Zhuang Xiong,Estelle Mairiaux,Benjamin Walter,Marc Faucher,Lionel Buchaillotet al. 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 2013, Taipei, Taiwan. pp.592-595, ⟨10.1109/MEMSYS.2013.6474311⟩ Communication dans un congrès hal-00809858v1
Nanoscale capacitors study with an interferometric scanning microwave microscope Fei Wang,Nicolas Clément,David Troadec,Bernard Legrand,Gilles Dambrineet al. Materials Research Society Fall Meeting, MRS Fall 2013, Symposium LL : Advances in Scanning Probe Microscopy, 2013, Boston, MA, United States Communication dans un congrès hal-00944017v1
Micro-résonateurs haute fréquence pour la microscopie à force atomique B. Walter,M. Faucher,E. Mairiaux,Z. Xiong,L. Buchaillotet al. 15ème Forum des Microscopies à Sonde Locale, 2012, Saint-Jacut-de-la-Mer, France Communication dans un congrès hal-00797718v1
SOL-like calibrated RF measurements at the nanoscale on a modified scanning microwave microscope Thomas Dargent,D. Ducatteau,Bernard Legrand,H. Tanbakuchi,D. Theron 2nd Nano Measure Scientific Symposium, Nano Measure 2012, 2012, Stanford, CA, United States Communication dans un congrès hal-00797722v1
Conception and fabrication of piezo-resistive ring shaped AFM probe Z. Xiong,B. Walter,E. Mairiaux,M. Faucher,L. Buchaillotet al. 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.547-550, ⟨10.1109/MEMSYS.2012.6170180⟩ Communication dans un congrès hal-00801106v1
[Invité] Apport des microsystèmes pour la microscopie à force atomique B. Walter,M. Faucher,E. Mairiaux,Z. Xiong,L. Buchaillotet al. Journée thématique trans-GDR '' Micromanipulation pour les Micro-Nano Systèmes '', 2012, Besançon, France Communication dans un congrès hal-00797716v1
Piezo-resistive ring-shaped AFM sensors with pico-newton force resolution Z. Xiong,B. Walter,E. Mairiaux,M. Faucher,L. Buchaillotet al. 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 2012, Xi'an, China. Paper ID 1200991, Best application paper award, 184-189 Communication dans un congrès hal-00801105v1
Micro-résonateurs haute fréquence pour la microscopie à force atomique B. Walter,M. Faucher,E. Mairiaux,Z. Xiong,L. Buchaillotet al. Journées Nationales du GDR Micro Nano Systèmes-Micro Nano Fluidique, 2012, Bordeaux, France Communication dans un congrès hal-00797720v1
DNA origami imaging with 10.9 MHz AFM MEMS probes B. Walter,E. Mairiaux,Z. Xiong,M. Faucher,L. Buchaillotet al. 25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, 2012, Paris, France. pp.555-558, ⟨10.1109/MEMSYS.2012.6170236⟩ Communication dans un congrès hal-00801107v1
[Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique Benjamin Walter,Zhuang Xiong,Emmanuelle Algre,Estelle Mairiaux,Marc Faucheret al. Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France Communication dans un congrès hal-00807204v1
IMPROVE-LM - Imaging probe for vacuum environment and liquid medium Bernard Legrand,J.P. Aime,L. Buchaillot Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France Communication dans un congrès hal-00807209v1
Optimal design of non intuitive compliant microgripper with high resolution A. Grira,Bernard Legrand,C. Rotinat-Libersa,E. Mairiaux,L. Buchaillot IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 2011, San Francisco, CA, United States. pp.45-50, ⟨10.1109/IROS.2011.6048665⟩ Communication dans un congrès hal-00800034v1
4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips Benjamin Walter,Estelle Mairiaux,M. Faucher,Zhuang Xiong,L. Buchaillotet al. XXIème Congrès Général de la Société Française de Physique, SFP 2011, Jul 2011, Bordeaux, France Communication dans un congrès hal-00807202v1
4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips Benjamin Walter,M. Faucher,Estelle Mairiaux,Zhuang Xiong,L. Buchaillotet al. 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Jan 2011, Cancun, Mexico. pp.517-520, ⟨10.1109/MEMSYS.2011.5734475⟩ Communication dans un congrès hal-00579045v1
[Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications Marc Faucher,Bernard Legrand,Benjamin Walter,Emmanuelle Algre,A. Ben-Amaret al. TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6 Communication dans un congrès hal-00806730v1
Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications Z. Xiong,B. Walter,E. Mairiaux,M. Faucher,L. Buchaillotet al. ASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, 2011, Denver, CO, United States. pp.IMECE2011-65083-1-5 Communication dans un congrès hal-00800036v1
Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications Z. Xiong,B. Walter,E. Mairiaux,M. Faucher,L. Buchaillotet al. 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France Communication dans un congrès hal-00808200v1
Improve-LM imaging probe for vacuum environment and liquid medium B. Walter,M. Faucher,Bernard Legrand,E. Mairiaux,R. Boisgardet al. Journées du Réseau National en Nanosciences et en Nanotechnologies, J3N 2010, 2010, Lille, France Communication dans un congrès hal-00808210v1
Surface microscopy with laserless MEMS based AFM probes Emmanuelle Algre,Bernard Legrand,Marc Faucher,Benjamin Walter,Lionel Buchaillot 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Jan 2010, Hong Kong, China. pp.292-295, ⟨10.1109/MEMSYS.2010.5442509⟩ Communication dans un congrès hal-00549972v1
Atomic force probe using silicon ring resonator conception B. Walter,E. Mairiaux,M. Faucher,Z. Xiong,L. Buchaillotet al. 5èmes Journées Nationales du GDR Micro et Nano Systèmes, 2010, Lyon, France Communication dans un congrès hal-00808199v1
Tip-matter interaction measurements using MEMS ring resonators Emmanuelle Algre,Bernard Legrand,Marc Faucher,Benjamin Walter,Lionel Buchaillot Forum des Microscopies à Sonde Locale, 2009, Hardelot, France Communication dans un congrès hal-00575264v1
Tip-matter interaction measurements using MEMS ring resonators Emmanuelle Algre,Bernard Legrand,Marc Faucher,Benjamin Walter,Lionel Buchaillot 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Jun 2009, Denver, CO, United States. pp.1638-1641, ⟨10.1109/SENSOR.2009.5285774⟩ Communication dans un congrès hal-00474451v1
High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology M. Sworowski,F. Neuilly,Bernard Legrand,A. Summanwar,F. Lallemandet al. 15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, 2009, USA, United States. pp.2114-2117, ⟨10.1109/SENSOR.2009.5285623⟩ Communication dans un congrès hal-00474452v1
Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques Bernard Legrand,Emmanuelle Algre,Lionel Buchaillot,Marc Faucher,Benjamin Walter 4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France Communication dans un congrès hal-00575271v1
Characterization of IN-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology Cédric Durand,Fabrice Casset,Bernard Legrand,Marc Faucher,Philippe Renauxet al. 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, Jan 2008, Tucson - AZ, United States. pp.1016-1019, ⟨10.1109/MEMSYS.2008.4443831⟩ Communication dans un congrès cea-00320830v1
Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids Jean-Baptiste Bureau,Bernard Legrand,Dominique Collard,Lionel Buchaillot 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Jun 2007, Lyon, France. pp.2267-2270, ⟨10.1109/SENSOR.2007.4300621⟩ Communication dans un congrès hal-00284392v1
Proposition of atomic force probes based on silicon ring-resonators M. Faucher,B. Walter,A.S. Rollier,K. Segueni,Bernard Legrandet al. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, 2007, France. pp.1529-1532, ⟨10.1109/SENSOR.2007.4300436⟩ Communication dans un congrès hal-00284391v1
Résonateurs électromécaniques : principe et applications Bernard Legrand Ecole Thématique CNRS : Microsystèmes acoustiques, 2007, Lille, France Communication dans un congrès hal-00367378v1
High yield grafting of carbon nanotube on ultra-sharp silicon nanotips: Mechanical characterization and AFM imaging A. S. Rollier,C. Bernard,S. Marsaudon,A. M. Bonnot,M. Faucheret al. 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 2007, Unknown, Unknown Region. pp.878-+ Communication dans un congrès hal-01553035v1
High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging A.S. Rollier,C. Bernard,S. Marsaudon,A.M. Bonnot,M. Faucheret al. 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 2007, Japan. pp.851-854, ⟨10.1109/MEMSYS.2007.4433179⟩ Communication dans un congrès hal-00284388v1
Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response A.S. Rollier,M. Faucher,Bernard Legrand,D. Collard,L. Buchaillot 2006, pp.244-249 Communication dans un congrès hal-00128674v1
Micro-machined actuators for the friction driven micro-motor Bernard Legrand,L. Buchaillot,D. Collard 2006, pp.211-214 Communication dans un congrès hal-00128670v1
Micro et nanomécanique, MEMS et NEMS Bernard Legrand,L. Buchaillot,D. Collard Ecole CNRS : Nanosciences et Nanotechnologies, 2006, Autrans, France Communication dans un congrès hal-00128667v1
Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules C. Yamahata,T. Takekawa,K. Ayano,M. Hosogi,M. Kumemuraet al. 2006, 4 pp Communication dans un congrès hal-00147724v1
Ultra-low voltage MEMS resonator based on RSG-MOSFET N. Abele,K. Segueni,K. Boucart,F. Casset,Bernard Legrandet al. 2006, pp.882-885 Communication dans un congrès hal-00128669v1
Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications Bernard Legrand,A.S. Rollier,L. Buchaillot,D. Collard 2006, pp.718-721 Communication dans un congrès hal-00128668v1
ELECTROSTATIC ACTUATORS OPERATING IN LIQUID ENVIRONMENT : SUPPRESSION OF PULL-IN INSTABILITY AND DYNAMIC RESPONSE A.-S. Rollier,Marc Faucher,Bernard Legrand,D. Collard,L. Buchaillot DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p Communication dans un congrès hal-00189294v1
a total miscibility of two metallic elements with different crystallographic structures in the surface Isabelle Braems,Fabienne Berthier,Robert Tétot,Bernard Legrand European Conference on Surface Science ECOSS 24, Sep 2006, PARIS, France Communication dans un congrès hal-00108262v1
Reliability of non-released microstructures : failure analysis and innovative solution process O. Millet,P. Muller,O. Blanrue,Bernard Legrand,D. Collardet al. 2005, pp.840-842 Communication dans un congrès hal-00125662v1
solubilité complète en surface entre deux métaux de structure cristllographique différente Isabelle Braems,Fabienne Berthier,Jérome Creuse,Robert Tétot,Bernard Legrand JSI 2005, 2005, LYON, France Communication dans un congrès hal-00108263v1
1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers Vincent Agache,Bernard Legrand,Dominique Collard,Hiroyuki Fujita,Lionel Buchaillot 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, Jan 2005, Miami Beach, United States. pp.121-124, ⟨10.1109/MEMSYS.2005.1453882⟩ Communication dans un congrès hal-00125628v1
Microsystèmes : principales applications et contexte national L. Buchaillot,D. Collard,Bernard Legrand Ecoles Nanosciences, 2005, Anglet, France Communication dans un congrès hal-00126216v1
MEMS reliability : metrology set-up for investigation of fatigue causes O. Millet,O. Blanrue,Bernard Legrand,D. Collard,L. Buchaillot 2005, pp.483-486 Communication dans un congrès hal-00125627v1
The 2D feedback conveyance with ciliary actuator arrays M. Ataka,Bernard Legrand,L. Buchaillot,D. Collard,H. Fujita 2005, pp.31-34 Communication dans un congrès hal-00125659v1
RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers Vincent Agache,Bernard Legrand,Dominique Collard,Hiroyuki Fujita,Lionel Buchaillot Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31 Communication dans un congrès hal-00128656v1
Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode Vincent Agache,Bernard Legrand,K. Nakamura,H. Kawakatsu,Lionel Buchaillotet al. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, Jun 2005, Seoul, South Korea. pp.2023-2026, ⟨10.1109/SENSOR.2005.1497499⟩ Communication dans un congrès hal-00125631v1
Friction driven micromotors with both clockwise and counterclockwise rotations Bernard Legrand,Lionel Buchaillot,Dominique Collard 17e Congrès Français de Mécanique, 2005, Troyes, France Communication dans un congrès hal-04279573v1
3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress Jean-Baptiste Bureau,Bernard Legrand,Dominique Collard,Lionel Buchaillot 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., Jun 2005, Seoul, South Korea. pp.19-22, ⟨10.1109/SENSOR.2005.1496348⟩ Communication dans un congrès hal-00128655v1
Actionneurs électrostatiques complètement isolés : fabrication, fonctionnement et caractérisation en milieu liquide Anne-Sophie Rollier,Bernard Legrand,Lionel Buchaillot,Dominique Collard 17e Congrès Français de Mécanique, 2005, Troyes, France Communication dans un congrès hal-04203498v1
Microsystèmes, résonateurs électromécaniques : où cela nous mène-t-il ? Vincent Agache,Emmanuel Quévy,Olivier Millet,Anne-Sophie Rollier,Roger Ringotet al. Ecole Nanosciences, 2005, Anglet, France Communication dans un congrès hal-00126215v1
Tensile stress determination in silicon nitride membrane by AFM characterization A.S. Rollier,Bernard Legrand,D. Deresmes,M. Lagouge,D. Collardet al. 2005, pp.828-831 Communication dans un congrès hal-00125660v1
Micromachined actuators for friction driven linear micro-motors Bernard Legrand,L. Buchaillot,D. Collard Proceedings of the Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, 2005, Hyogo, Japan Communication dans un congrès hal-00131348v1
Nanotechnologie, micro et nanosystèmes Bernard Legrand 5ème Colloque International TELECOM'2005 & 4èmes Journées Franco-Magrhébines des Micro-ondes et leurs Applications, JFMMA, 2005, Rabat, Maroc Communication dans un congrès hal-00126233v1
Electrostatic actuators operating in liquid environment : position control without pull-in effect A.S. Rollier,Bernard Legrand,D. Collard,L. Buchaillot 2005, pp.341-346 Communication dans un congrès hal-00128651v1
Stiction drive operation of micromotors : direct and reverse rotation control Bernard Legrand,D. Collard,L. Buchaillot 2005, pp.57-60 Communication dans un congrès hal-00125661v1
An original methodology to assess fatigue behavior in RF MEMS devices O. Millet,Pierre Bertrand,Bernard Legrand,D. Collard,L. Buchaillot European Microwave Week, 2004, Amsterdam, Netherlands Communication dans un congrès hal-00141031v1
Characterization of individual bio-cells with thermally actuated probe arrays Y.H. Cho,Dominique Collard,Lionel Buchaillot,Bernard Legrand,Beomjoon Kim Nonimaging Optics and Efficient Illumination Systems, Aug 2004, Denver, CO, United States. pp.425-429 Communication dans un congrès hal-00141170v1
Reliability of polycrystalline MEMS : prediction of the debugging-time O. Millet,Pierre Bertrand,Bernard Legrand,D. Collard,L. Buchaillot International Symposium for Testing and Failure Analysis, ISTFA 2004, 2004, Worcester, MA, United States Communication dans un congrès hal-00141030v1
TP de nanotechnologie : réalisation et observation de nanofils de silicium à l'aide de l'AFM Bernard Legrand,H. Happy 8èmes Journées Pédagogiques du CNFM, 2004, Saint Malo, France Communication dans un congrès hal-00133919v1
Predictive modelling of the fatigue phenomenon for polycristalline structural layers O. Millet,Pierre Bertrand,Bernard Legrand,D. Collard,L. Buchaillot 2004, pp.145-148 Communication dans un congrès hal-00141028v1
Thermally actuated probe arrays for manipulation and characterization of individual bio-cell Beomjoon Kim,Dominique Collard,Matthieu Lagouge,F. Conseil,Bernard Legrandet al. TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2003, Boston, MA, United States. pp.1255-1258, ⟨10.1109/SENSOR.2003.1217000⟩ Communication dans un congrès hal-00146460v1
Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology D. Galayko,A. Kaiser,Bernard Legrand,L. Buchaillot,D. Collardet al. 2003, pp.F23-F26 Communication dans un congrès hal-00146406v1
Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches Olivier Millet,Vincent Agache,Bernard Legrand,Dominique Collard,Lionel Buchaillot 12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1578-1581, ⟨10.1109/SENSOR.2003.1217081⟩ Communication dans un congrès hal-00146440v1
Ultimate technology for micromachining of nanometric gap HF micromechanical resonators E. Quevy,Bernard Legrand,D. Collard,L. Buchaillot 2003, pp.157-160 Communication dans un congrès hal-00146462v1
Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application Vincent Agache,Patrice Bigotte,Bernard Legrand,Vincent Senez,Lionel Buchaillotet al. 12th International Conference on Solid-State Sensors, Jun 2003, Boston, United States. pp.1287-1290, ⟨10.1109/SENSOR.2003.1217008⟩ Communication dans un congrès hal-00146438v1
Tapping-mode HF nanometric lateral gap resonators : experimental and theory E. Quevy,Bernard Legrand,D. Collard,L. Buchaillot 2003, pp.879-882 Communication dans un congrès hal-00146456v1
Study of adhesive forces on a silicon nanotip force microscope in contact mode Vincent Agache,Bernard Legrand,Dominique Collard,Lionel Buchaillot Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, May 2002, Cannes, France. pp.601-612, ⟨10.1117/12.462861⟩ Communication dans un congrès hal-00148788v1
Conception de résonateurs micromécaniques pour les filtres IF dans la technologie de couches épaisses épitaxiées D. Galayko,A. Kaiser,Bernard Legrand,L. Buchaillot,D. Collardet al. Colloque CAO des Circuits Intégrés et Systèmes, 2002, Paris, France Communication dans un congrès hal-00148748v1
Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology D. Galayko,A. Kaiser,Bernard Legrand,L. Buchaillot,C. Combiet al. 2002, pp.447-450 Communication dans un congrès hal-00148736v1
Architecture level center frequency drift compensation method for micro-mechanical filters used in IF stages of wireless telecommunication receivers Olivier Billoint,Dimitri Galayko,Bernard Legrand,Andreas Kaiser Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2002, May 2002, Canne, France. pp.136-142 Communication dans un congrès hal-00148741v1
High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment D. Galayko,A. Kaiser,Bernard Legrand,C. Combi,D. Collardet al. 2002, pp.665-668 Communication dans un congrès hal-00148737v1
Microsystem technology : trends and possible application for textile D. Collard,L. Buchaillot,Bernard Legrand Conference on Modern Textile Factory, HIGHTEX 2001, 2001, Lille, France Communication dans un congrès hal-00152473v1
IF MEMS filters for mobile communication E. Quevy,D. Galayko,Bernard Legrand,C. Renaux,C. Combiet al. 2001, pp.733-736 Communication dans un congrès hal-00152458v1
Microsystème : enjeux et perspectives D. Collard,L. Buchaillot,Bernard Legrand Journée IMAPS : International Microelectronics and Packaging Society, 2000, Lille, France Communication dans un congrès hal-00158539v1
Microsysteme : un état des lieux, enjeux et perspectives D. Collard,L. Buchaillot,Bernard Legrand 48èmes Journées Nationales de l'Union des Physiciens, 2000, Lille, France Communication dans un congrès hal-00158538v1

Poster de conférence (2)

Unveiling Hidden Dynamics of Biological Process with Optomechanical AFM with sub-µs time resolution Suyambulingham Subramanian,Nicolas Mauran,Chérif Bélacel,Guillaume Jourdan,Ivan Faveroet al. Annual Meeting of the GDR MecaQ, Sep 2024, Grenoble, France. 2024 Poster de conférence hal-04819714v1
High Speed Atomic Force Microscope Nicolas Mauran,Denis Lagrange,Xavier Dollat,Laurent Mazenq,Lucien Schwabet al. NI-Week 2017, May 2017, Austin, TX, United States. , 2017 Poster de conférence hal-01529673v1

Chapitre d'ouvrage (1)

Micro et nanorésonateurs radio-fréquence Bernard Legrand,C. Durand,M. Faucher,L. Buchaillot Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.239-242, 2009 Chapitre d'ouvrage hal-00575789v1

Brevet (6)

Semiconductor infrared detector and method for the production thereof Didier Stievenard,Christophe Delerue,Bernard Legrand United States, Patent n° : US6661073 (B1) 2003-12-09. 2003, N° de priorité : FR19990003835 19990326 - N° de demande : US20020937392 20020401 Brevet hal-05585641v1
Semiconductor infrared detector and method for the production thereof Didier Stievenard,Christophe Delerue,Bernard Legrand Japan, Patent n° : JP2002540634 (A) 2002-11-26. 2002, N° de priorité : FR19990003835 19990326 - N° de demande : JP20000608445T 20000322 Brevet hal-05585634v1
Semiconductor infrared detector and method for the production thereof Bernard Legrand,Christophe Delerue,Didier Stievenard Canada, Patent n° : CA2368388 (A1) 2000-10-05. 2000, N° de priorité : FR19990003835 19990326 - N° de demande : CA20002368388 20000322 Brevet hal-05585636v1
Détecteur infrarouge semi-conducteur et son procédé de fabrication Didier Stievenard,Christophe Delerue,Bernard Legrand France, N° de brevet: FR2791474 (A1) 2000-09-29. 2000, N° de priorité : FR20100000166 20100115 - N° de demande : WO2011FR00020 20110114 Brevet hal-05593529v1
Semiconductor infrared detector and method for the production thereof Didier Stievenard,Christophe Delerue,Bernard Legrand Unknown Region, Patent n° : WO0059042 (A1) 2000-10-05. 2000, N° de priorité : FR19990003835 19990326 - N° de demande : WO2000FR00726 20000322 Brevet hal-05585637v1
Semiconductor infrared detector and method for the production thereof Didier Stievenard,Christophe Delerue,Bernard Legrand Australia, Patent n° : AU3438700 (A) 2000-10-16. 2000, N° de priorité : FR19990003835 19990326 - N° de demande : AU20000034387D 20000322 Brevet hal-05585635v1

Autre publication scientifique (2)

Contribution au domaine des actionneurs et résonateurs microélectromécaniques. Applications à la nanocaractérisation Bernard Legrand 2012 Autre publication scientifique hal-00799254v1
Elaboration et caractérisation physique par microscopie à champ proche de nanostructures semi-conductrices Bernard Legrand 2000 Autre publication scientifique hal-00158616v1

Pré-publication, Document de travail (2)

Is There Really a Size effect on the Surface Energy of Nanoparticles ? Hakim Amara,Jaysen Nelayah,Jérôme Creuze,Adrian Chmielewski,Damien Alloyeauet al. 2021 Pré-publication, Document de travail hal-03310351v1
Magnetism: the Driving Force of Order in CoPt. A First-Principles Study Sondes Karoui,Hakim Amara,Bernard Legrand,François Ducastelle 2012 Pré-publication, Document de travail hal-00691274v1

Rapport (1)

Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide Laurent Mazenq,Lucien Schwab,Nicolas Mauran,Denis Lagrange,Xavier Dollatet al. [Rapport Technique] LAAS-CNRS. 2019 Rapport (rapport technique) hal-03603368v1

HDR (1)

CONTRIBUTION AU DOMAINE DES ACTIONNEURS ET RÉSONATEURS MICRO-‐ÉLECTROMÉCANIQUES. APPLICATIONS À LA NANO­‐CARACTÉRISATION. Bernard Louis Amand Legrand Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2012 HDR tel-00706851v1