Access content directly

Christophe Malhaire

32
Documents

Presentation

Christophe Malhaire est né en 1967. En 1998, il obtient le grade de docteur ès sciences de l’INSA de Lyon pour ses travaux au Laboratoire de Physique de la Matière sur le comportement thermomécanique de capteurs de pression piézorésistifs pour environnements sévères. Nommé maître de conférences en 1998, il poursuit ses recherches au LPM dans le domaine des Micro-Systèmes ElectroMécaniques dans l’équipe Micro-Nano-Systèmes et Intégration Fonctionnelle du Pr. Daniel Barbier. Il développe une spécificité dans l’étude des propriétés mécaniques des matériaux en films minces et du comportement de microstructures déformables. Il s’intéresse aussi aux actionneurs et capteurs MEMS piézoélectriques, à la fiabilité des capteurs pour environnements sévères et à l’intégration du silicium nanostructuré dans des dispositifs microfluidiques. Il soutient son HDR en 2006. En 2009, après la création de l’Institut des Nanotechnologies de Lyon (UMR 5270), il rejoint l’équipe Dispositifs Électroniques. Il y développe de nouvelles méthodes de caractérisation et structures de tests mécaniques originales et étend ses recherches aux actionneurs à films polymères nanocomposites, aux MEMS pour la récupération d’énergie et aux jauges de déformations à haute sensibilité. Ses compétences concernent le développement de bancs de mesures, la profilométrie optique, la vibrométrie, les simulations par éléments finis, les microtechnologies silicium. Il a (co)encadré 10 thèses, a été rapporteur de 9 thèses, a porté ou participé à une vingtaine de projets de recherche, et est (co)auteur d'une trentaine d'articles de revues internationales et d'une trentaine d'articles de conférences avec comité de lecture.
Christophe MALHAIRE was born in 1967. He is assistant professor at the engineers school INSA Lyon, France, and researcher at the Department of Electronic, in the Electronic Devices research group, of the Lyon Institute of Nanotechnology (INL, CNRS UMR 5270). He received his PhD from INSA Lyon in 1998. He contributed to the study of the thermomechanical behaviour of piezoresistive pressure sensors for harsh environments. His research activities involve the development and the modeling of various micro-electromechanical systems (MEMS) with main focus on finite element modeling, thin film stress and elastic parameters measurements, piezoelectric actuators, MEMS reliability and thermomecanical studies of suspended microstructures.

Publications

Image document

Five simultaneous artificial intelligence data challenges on ultrasound, CT, and MRI

N. Lassau , T. Estienne , P. de Vomecourt , M. Azoulay , John Cagnol et al.
Diagnostic and Interventional Imaging, 2019, 100 (4), pp.199-209. ⟨10.1016/j.diii.2019.02.001⟩
Journal articles hal-02528753v1

Ultrahigh Sensitivity to Strain of Cracked Thin Films Based on Metallic Nanoparticles in a Dielectric Matrix

Etienne Puyoo , Solene Brottet , Rémi Rafael , Christophe Malhaire
IEEE Sensors Letters, 2018, 2 (3), pp.1 - 4. ⟨10.1109/LSENS.2018.2865883⟩
Journal articles hal-01885535v1

Porous Silicon as Soft Material in Low-Frequency MEMS (MicroElectro-Mechanical Systems) Resonators

Christophe Malhaire , A. Danescu , V. Lysenko , A. Sabac
World journal of mechanics, 2018, 08 (11), pp.431 - 443. ⟨10.4236/wjm.2018.811031⟩
Journal articles hal-01914576v1

Immunohistochemical evaluation of two antibodies against PD-L1 and prognostic significance of PD-L1 expression in epithelioid peritoneal malignant mesothelioma: A RENAPE study

S. Valmary-Degano , P. Colpart , L. Villeneuve , F. Monnien , L. M'Hamdi et al.
EJSO - European Journal of Surgical Oncology, 2017, 43 (10), pp.1915-1923. ⟨10.1016/j.ejso.2017.05.009⟩
Journal articles hal-02269932v1

Piezo-tunnel effect in Al/Al2O3/Al junctions elaborated by atomic layer deposition

Rémi Rafael , Etienne Puyoo , Christophe Malhaire
Journal of Applied Physics, 2017, 122, pp.184501
Journal articles hal-01701523v1
Image document

Metallic nanoparticle-based strain sensors elaborated by atomic layer deposition

Etienne Puyoo , Christophe Malhaire , Daniel Thomas , Rémi Rafael , Mohamed R'Mili et al.
Applied Physics Letters, 2017, 110, pp.123103. ⟨10.1063/1.4978778⟩
Journal articles hal-01701521v1

ALL-organic electrostrictive polymer composites with low driving electrical voltages for micro-fluidic pump applications

Minh-Quyen Le , J. Capsal , Jérémy Galineau , F. Ganet , Y. Xunquian et al.
Scientific Reports, 2015, 5, pp.11814. ⟨10.1038/srep11814⟩
Journal articles hal-01489396v1

Temperature dependence of the electromechanical characteristics of superconducting RF‐MEMS switches

N. Alcheikh , P. Xavier , J. Duchamp , K. Schuster , Christophe Malhaire et al.
Microsystem Technologies, 2015, 21(1), pp.301-307
Journal articles hal-01489333v1

Electromechanical study of polyurethane films with carbon black nanoparticles for MEMS actuators

M. Roussel , Christophe Malhaire , Anne-Laure Deman , Jean-François Chateaux , L Petit et al.
Journal of Micromechanics and Microengineering, 2014, 24 (5), pp.055011. ⟨10.1088/0960-1317/24/5/055011⟩
Journal articles hal-01091260v1

Comparison of two experimental methods for the mechanical characterization of thin or thick films from the study of micromachined circular diaphragms

Christophe Malhaire
Review of Scientific Instruments, 2012, 83 (5), ⟨10.1063/1.4719964⟩
Journal articles hal-01893587v1

Influence of microstructure and internal stress on the mechanical behavior of electroplated gold freestanding thin films

J. Martegoutte , C. Seguineau , T. Fourcade , Christophe Malhaire , P. Martins et al.
EPJ Web of Conferences, 2010, 14th International Conference on Experimental Mechanics (ICEM14) Jul 2010 Poitiers, 6, pp.26009. ⟨10.1051/epjconf/20100626009⟩
Journal articles hal-02020653v1
Image document

Preoperative staging of liver metastases from uveal melanoma by magnetic resonance imaging (MRI) and fluorodeoxyglucose-positron emission tomography (FDG-PET)

V. Servois , P. Mariani , C. Malhaire , S. Petras , S. Piperno-Neumann et al.
EJSO - European Journal of Surgical Oncology, 2010, 36 (2), pp.189. ⟨10.1016/j.ejso.2009.08.010⟩
Journal articles hal-00557766v1
Image document

Bulge test and AFM point deflection method, two technics for the mechanical characterisation of very low stiffness freestanding films

P. Martins , P. Delobelle , C. Malhaire , S. Brida , Damien Barbier et al.
European Physical Journal: Applied Physics, 2009, 45 (1), pp.10501. ⟨10.1051/epjap:2008187⟩
Journal articles hal-00480182v1

On the determination of Poisson’s ratio of stressed monolayer and bilayer submicron thick films

P. Martins , Christophe Malhaire , S. Brida , Damien Barbier
Microsystem Technologies, 2009, 15 (9), pp.1343-1348
Journal articles hal-02015814v1

Experimental setup and realization of thin film specimens for microtensile tests

C. Malhaire , C. Seguineau , M. Ignat , C. Josserond , L. Debove et al.
Review of Scientific Instruments, 2009, 80 (2), pp.023901 1-5. ⟨10.1063/1.3077153⟩
Journal articles hal-00437164v1

Micro Tensile Tests on Aluminium Thin Films: Tensile Device and In Situ Observations

Michel Ignat , Sabine Lay , Francine Roussel d'Herbey , Cédric Seguineau , Christophe Malhaire et al.
MRS Proceedings, 2008, 1139
Journal articles hal-02051377v1

Mechanical cross-characterisation of sputtered inconel thin films for MEMS applications

G. Fleury , C. Malhaire , C. Populaire , Mireille Verdier , Arnaud Devos et al.
Sensors and Actuators B: Chemical, 2007, 126 (1), pp.48-51. ⟨10.1016/j.snb.2006.10.038⟩
Journal articles hal-00293917v1

Design of bossed silicon membranes for high sensitivity microphone applications

P. Martins , S. Beclin , S. Brida , S. Metivet , O. Stojanovic et al.
Microsystem Technologies, 2007, 13 (11-12), pp.1495-1500
Journal articles hal-02051243v1
Image document

Portable device integrating an ultrasensitive mechanical crack-based sensor for the wireless monitoring of cardiac activity

Nicolas de Pinho Ferreira , Etienne Puyoo , Bertrand Massot , Solène Brottet , Christophe Malhaire et al.
2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Jun 2020, Lyon, France. pp.1-5, ⟨10.1109/DTIP51112.2020.9139156⟩
Conference papers hal-03344474v1

PEALD of Pt nanoparticles: towards the development of single electron transistors and flexible strain sensors

Etienne Puyoo , Daniel Thomas , Martine Le Berre , Liviu Militaru , Christophe Malhaire et al.
RAFALD (Réseau des Acteurs Français de l’ALD), Nov 2018, Lyon, France
Conference papers hal-02075020v1

Flexible Platinum Nanoparticle-based Piezoresistive Transducers Elaborated by Atomic Layer Deposition

Etienne Puyoo , Christophe Malhaire , Daniel Thomas , Rémi Rafael , Mohamed R'Mili et al.
AVS 17th International Conference on Atomic Layer Deposition, Jan 2017, Denver, United States
Conference papers hal-01701470v1

Study of piezo-tunnel effect in Metal/Al2O3/Metal junctions

Rémi Rafael , Etienne Puyoo , Christophe Malhaire
1st International Conference on Dielectrics (ICD 2016), 2016, Montpellier, France
Conference papers hal-01489071v1

Improved MEMS energy harvesters by localized nanostructuring

H.D. Mousselmal , L. Petit , C. Malhaire , Skandar Basrour , B. Remaki et al.
Journées Nano Micro Technologies au service de l’Energie, Nov 2012, Lyon, France
Conference papers hal-01432105v1

Nanoindentation experiments with small tip radii: an experimental method

Julien Martegoutte , Cédric Seguineau , Christophe Malhaire , Thibaut Fourcade , Jean-Michel Desmarres et al.
2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), May 2010, Seville, Spain
Conference papers hal-02049369v1
Image document

On the determination of Poisson’s ratio of stressed monolayer and bilayer submicron thick films

P. Martins , C. Malhaire , S. Brida , Damien Barbier
DTIP 2008, Apr 2008, Nice, France. pp.197-200
Conference papers hal-00277708v1
Image document

Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture

C. Seguineau , M. Ignat , C. Malhaire , S. Brida , X. Lafontan et al.
DTIP 2008, Apr 2008, Nice, France. pp.8-10
Conference papers hal-00277669v1

Realization of Thin Film Specimens for Micro Tensile Tests

Christophe Malhaire , Michel Ignat , Karim Dogheche , Sebastiano Brida , Charles Josserond et al.
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2007, Lyon, France
Conference papers hal-02049375v1

Comparison of bulge test and point deflection methods for the mechanical characterisation of submicron thick composite membranes

P. Martins , Patrick Delobelle , C. Malhaire , S. Brida , B. Barbier et al.
Transducers'07 and Eurosensors XXI, 2007, Lyon, France
Conference papers hal-00330548v1

Mechanical cross-characterization of sputtered Inconel thin films for MEMS applications

G. Fleury , C. Malhaire , C. Populaire , M. Verdier , Arnaud Devos et al.
Proceedings of the 2006 European Material Research Society Spring Meeting, 2006, Nice, France
Conference papers hal-00369948v1
Image document

DESIGN OF BOSSED SILICON MEMBRANES FOR HIGH SENSITIVITY MICROPHONE APPLICATIONS

P. Martins , S. Beclin , S. Metivet , O. Stojanovic , C. Malhaire et al.
DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 5 p
Conference papers hal-00189255v1

Effet Piezo-Tunnel dans des jonctions Al/Al2O3/Al fabriquées par Atomic Layer Deposition

Rémi Rafael , Etienne Puyoo , Christophe Malhaire
Effet Piezo-Tunnel dans des jonctions Al/Al2O3/Al fabriquées par Atomic Layer Deposition, 2017, Strasbourg, France. 2017
Conference poster hal-01701475v1

Les jonctions MIM comme jauge de contrainte

Rémi Rafael , Etienne Puyoo , Christophe Malhaire
Les jonctions MIM comme jauge de contrainte, 2016, Grenoble, France. 2016
Conference poster hal-01701380v1