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Dominique CERTON

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Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures

Isabelle Dufour , Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier
2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩
Communication dans un congrès hal-02481928v1