Edouard Laudrel

Identifiants chercheurs

IdHAL :

edouard-laudrel

ORCID :

0000-0002-5181-3365

IdRef :

231103697

Présentation

Publications

Article dans une revue (1)

The effect of SF 6 addition in a Cl 2 /Ar inductively coupled plasma for deep titanium etching Edouard Laudrel,Thomas Tillocher,Yannick Meric,Philippe Lefaucheux,Bertrand Boutaudet al. Journal of Micromechanics and Microengineering, 2018, 28 (5), ⟨10.1088/1361-6439/aaafe7⟩ Article dans une revue hal-01735469v1

Communication dans un congrès (6)

Design of a Ti-based microsensor for in vivo pressure monitoring Gwenael Becan,Bertrand Boutaud,Edouard Laudrel,Fabien Parrain,Marion Woytasiket al. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-5, ⟨10.1109/DTIP.2019.8752842⟩ Communication dans un congrès hal-02306974v1
Bulk micromachined Titanium MEMS Gwenaël Bécan,Baptiste Rousset,Samson Edmond,Nathalie Isac,Maïté Do Valeet al. 16th NAMIS Workshop (NAMIS 2018), Jun 2018, Oulu, Finland Communication dans un congrès hal-02306373v1
Titanium-based MEMS: Application for a novel implantable feedthrough using TTV (Through Titanium Vias) technologies Bertrand Boutaud,Edouard Laudrel,Marion Woytasik,Elie Lefeuvre,Thomas Tillocheret al. 6th Micro/Nano-Electronics Packaging and Assembly, Design and Manufacturing Forum (MiNaPAD 2018), May 2018, Grenoble, France Communication dans un congrès hal-02306370v1
Microstructuration of titanium for implantable components Edouard Laudrel,Thomas Tillocher,Philippe Lefaucheux,Marion Woytasik,Fabrice Michelet al. Journées Nationales sur les Technologies Emergentes en micro-nanofabrication, Nov 2017, Orléans, France Communication dans un congrès hal-02306063v1
Bulk titanium deep etching by plasma processes Edouard Laudrel,Thomas Tillocher,Philippe Lefaucheux,Bertrand Boutaud,Remi Dussart , 20th International Colloquium on Plasma Processes (CIP), Jun 2015, Saint-Etienne, France Communication dans un congrès hal-01166023v1
DRY DEEP ETCHING OF BULK TITANIUM BY PLASMA PROCESSES Edouard Laudrel,Thomas Tillocher,Philippe Lefaucheux,Bertrand Boutaud,Remi Dussart AVS 62nd International Symposium & Exhibition, Oct 2015, San Jose, United States Communication dans un congrès hal-01228465v1

Poster de conférence (3)

Design of a Ti-based microsensor for in vivo pressure monitoring Gwenael Becan,Bertrand Boutaud,Edouard Laudrel,Fabien Parrain,Marion Woytasiket al. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France Poster de conférence hal-02306964v1
Titanium microstructuring for implantable components Edouard Laudrel,Thomas Tillocher,Yannick Méric,Philippe Lefaucheux,Marion Woytasiket al. Design, Test, Integration and Packaging of MEMS/MOEMS, May 2017, Bordeaux, France Poster de conférence hal-01561245v1
Chlorine-based plasma deep etching of bulk titanium Edouard Laudrel,Thomas Tillocher,Yannick Méric,Philippe Lefaucheux,Bertrand Boutaudet al. International Symposium on Dry Process 2016 (DPS2016), Nov 2016, Sapporo, Japan Poster de conférence hal-01561222v1