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Emmanuelle Algre

32
Documents

Presentation

Développement de microdispositifs pour l'analyse de polluants d'origine particulaire

Publications

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Equivalent Circuit Modeling of Air-Coupled Laterally Actuated Electrostatic Bulk-Mode MEMS

Tony Merrien , Pierre Didier , Emmanuelle Algré
IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control, 2024, 4, pp.63-76. ⟨10.1109/ojuffc.2024.3413603⟩
Journal articles hal-04676623v1

Exploring deposition pattern characteristics of aerosols and bioaerosols by inertial impaction for the development of real-time silicon MEMS mass detection systems

Ugur Soysal , Evelyne Géhin , Frédéric Marty , Emmanuelle Algré , Enric Robine
Aerosol Science and Technology, 2021, 55 (4), pp.414-422. ⟨10.1080/02786826.2020.1861211⟩
Journal articles hal-04274907v1
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Fabrication, electrical characterization and sub-ng mass resolution of sub-μm air-gap bulk mode MEMS mass sensors for the detection of airborne particles

Ugur Soysal , Frédéric Marty , Evelyne Géhin , Charles Motzkus , Emmanuelle Algré
Microelectronic Engineering, 2020, 221, pp.111190 -. ⟨10.1016/j.mee.2019.111190⟩
Journal articles hal-03488622v1

Aerosol mass concentration measurements: Recent advancements of real-time nano/micro systems

Evelyne Géhin , U. Soysal , E. Algré , B. Berthelot , G. Da
Journal of Aerosol Science, 2017, 114, pp.42 - 54. ⟨10.1016/j.jaerosci.2017.09.008⟩
Journal articles hal-01647397v1

Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer

Etienne Herth , Laurie Valbin , Franck Lardet-Vieudrin , Emmanuelle Algre
Microsystem Technologies, 2017, 23 (9), pp.3873 - 3880. ⟨10.1007/s00542-015-2727-9⟩
Journal articles hal-01771659v1

Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer

Etienne Herth , E. Algré , Jean-Yves Rauch , Jean-Claude Gerbedoen , N. Defrance
Physica Status Solidi A (applications and materials science), 2016, 213 (1), pp.114 - 121. ⟨10.1002/pssa.201532302⟩
Journal articles hal-01446379v1

Investigation of optical and chemical bond properties of hydrogenated amorphous silicon nitride for optoelectronics applications

Etienne Herth , H Desré , Emmanuelle Algré , Christiane I. Legrand , Tuami Lasri
Microelectronics Reliability, 2012, 52 (1), pp.141-146. ⟨10.1016/j.microrel.2011.09.004⟩
Journal articles hal-02300326v1

Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications

Etienne Herth , Emmanuelle Algre , Pascal Tilmant , Martin François , Christophe Boyaval
IEEE Transactions on Nanotechnology, 2012, 11 (4), pp.854-859. ⟨10.1109/TNANO.2012.2196802⟩
Journal articles hal-00787415v1

MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution

Emmanuelle Algre , Zhuang Xiong , Marc Faucher , Benjamin Walter , Lionel Buchaillot
Journal of Microelectromechanical Systems, 2012, 21, pp.385-397. ⟨10.1109/JMEMS.2011.2179012⟩
Journal articles hal-00787407v1

Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process

Etienne Herth , Emmanuelle Algré , Bernard Legrand , Lionel Buchaillot
Microelectronic Engineering, 2011, 88 (5), pp.724-728. ⟨10.1016/j.mee.2010.06.032⟩
Journal articles hal-02300269v1

Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

Benjamin Walter , Marc Faucher , Emmanuelle Algre , Bernard Legrand , Rodolphe Boisgard
Journal of Micromechanics and Microengineering, 2009, 19 (11), pp.115009-1-7. ⟨10.1088/0960-1317/19/11/115009⟩
Journal articles hal-00472725v1

Improved patterned media for probe-based heat assisted magnetic recording

E. Algré , G. Gaudin , A. Bsiesy , J.P. Nozieres
IEEE Transactions on Magnetics, 2005, 41 (10), pp.2857 - 2859. ⟨10.1109/TMAG.2005.854680⟩
Journal articles hal-01772554v1
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Effets des surfaces micro-nanostructurées sur l'impaction monodispersée de billes de latex

Antonella Al Najjar , Frédéric Marty , Emmanuelle Algré , Pierre Didier , Evelyne Gehin
35ème congrès français sur les aérosols, Asfera, May 2022, Paris, France. ⟨10.25576/ASFERA-CFA2022-28326⟩
Conference papers hal-04298881v1

Développement de capteurs de type MEMS dédiés à la mesure en temps réel de la concentration massique en aérosols

Pierre Didier , Uğur Soysal , Emmanuelle Algre , Charles Motzkus , Evelyne Gehin
35eme congrès francais sur les aérosols, ASFERA, May 2022, Paris, France. ⟨10.25576/ASFERA-CFA2022-28276⟩
Conference papers hal-04298880v1
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Développement et optimisation de capteurs de type MEMS pour la détection d’aérosol

Pierre Didier , Emmanuelle Algre , Charles Motzkus , Stéphane Moularat , Evelyne Gehin
Instrumentation pour le suivi environnemental : cycle d'ateliers nationaux 2021, EFLUVE; ESYCOM, Sep 2021, Paris, France
Conference papers hal-03956509v1

Développement et optimisation de capteurs de type MEMS pour la détection d'aérsol

Pierre Didier , Emmanuelle Algre , Charles Motzkus , Stéphane Moularat , Evelyne Gehin
Instrumentation pour le suivi environnemental Cycle d’ateliers nationaux 2021 - Atelier 2 - Mesures de la qualité de l'air, CNRS, Sep 2021, Paris, France
Conference papers hal-04298884v1
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Sub-µm air-gap resonant MEMS mass sensors fabrication and electrical characterization for the detection of airborne particles

Ugur Soysal , Frédéric Marty , Emmanuelle Algre , Evelyne Gehin , Charles Motzkus
2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2018, ROMA, France. ⟨10.1109/DTIP.2018.8394231⟩
Conference papers hal-01841627v1

Detection of out-of-plane and in-plane (XYZ) motions of piezoelectric microcantilever by 3D-Laser Doppler Vibrometry

Etienne Herth , Franck Lardet-Vieudrin , Florent Deux , Laurie Valbin , Emmanuelle Algre
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), May 2016, Budapest, France. ⟨10.1109/DTIP.2016.7514876⟩
Conference papers hal-01771668v1
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Design optimisation of silicon-based MEMS sensors dedicated to bioaerosols monitoring

Brice Berthelot , Emmanuelle Algre , Stéphane Moularat , Enric Robine , Evelyne Gehin
2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Apr 2015, Montpellier, France. ⟨10.1109/DTIP.2015.7161009⟩
Conference papers hal-01771681v1

Detecting response of square and circular Si/AlN/Al membranes transducers by Laser Vibrometry Doppler and Impedancemeter

Etienne Herth , Franck Lardet-Vieudrin , Laurie Valbin , Emmanuelle Algre
2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Apr 2015, Montpellier, France. ⟨10.1109/DTIP.2015.7160996⟩
Conference papers hal-01771676v1

Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?

Lionel Buchaillot , Estelle Mairiaux , Benjamin Walter , Zhuang Xiong , Marc Faucher
IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩
Conference papers hal-01962163v1

[Invité] Apport des micro et nano-systèmes pour la microscopie à force atomique

Benjamin Walter , Zhuang Xiong , Emmanuelle Algre , Estelle Mairiaux , Marc Faucher
Journées Nationales Nanosciences et Nanotechnologies, J3N 2011, 2011, Strasbourg, France
Conference papers hal-00807204v1

[Invité] Micro et nanorésonateurs électromécaniques radio-fréquences. Principes et applications

Marc Faucher , Bernard Legrand , Benjamin Walter , Emmanuelle Algre , A. Ben-Amar
TELECOM'2011 & 7èmes Journées Franco-Maghrébines des Micro-ondes et leurs Applications, 2011, Tanger, Maroc. CDROM, papier 554, 1-6
Conference papers hal-00806730v1

Surface microscopy with laserless MEMS based AFM probes

Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot
23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Jan 2010, Hong Kong, China. pp.292-295, ⟨10.1109/MEMSYS.2010.5442509⟩
Conference papers hal-00549972v1

Tip-matter interaction measurements using MEMS ring resonators

Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot
15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Jun 2009, Denver, CO, United States. pp.1638-1641, ⟨10.1109/SENSOR.2009.5285774⟩
Conference papers hal-00474451v1

Tip-matter interaction measurements using MEMS ring resonators

Emmanuelle Algre , Bernard Legrand , Marc Faucher , Benjamin Walter , Lionel Buchaillot
Forum des Microscopies à Sonde Locale, 2009, Hardelot, France
Conference papers hal-00575264v1

Vers une nouvelle génération de sonde de microscopie à force atomique à base de micro et nano-systèmes électromécaniques

Bernard Legrand , Emmanuelle Algre , Lionel Buchaillot , Marc Faucher , Benjamin Walter
4èmes Journées Nationales en Nanosciences et Nanotechnologies, J3N 2009, 2009, Toulouse, France
Conference papers hal-00575271v1

Improved patterned media for probe-based HAMR

E. Algre , G. Gaudin , A. Bsiesy , J.P. Nozieres
INTERMAG Asia 2005: Digest of the IEEE International Magnetics Conference, Apr 2005, Nagoya, Japan. ⟨10.1109/INTMAG.2005.1463552⟩
Conference papers hal-01771633v1
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Enregistrement thermomagnétique sous pointe AFM: vers les ultrahautes densités d'enregistrement

Emmanuelle Algre
Matière Condensée [cond-mat]. Université Joseph-Fourier - Grenoble I, 2006. Français. ⟨NNT : ⟩
Theses tel-00089261v1