
Jean-Francois Robillard
127
Documents
Affiliations actuelles
- Microélectronique Silicium - IEMN (MICROELEC SI - IEMN)
- Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN)
Publications
Publications
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Optimisation de la trempe et amélioration de la fiabilité de commutateurs à matériaux à changement de phaseJNM2024 - 23ème Journées Nationales Microondes, Jun 2024, Antibes Juan les-Pins, France
Communication dans un congrès
hal-04618653
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Phonon transport in asymmetric nanostructures in the ballistic regimeEurotherm Nanoscale and Microscale Heat Transfer VIII, Jun 2024, Girona, Spain
Communication dans un congrès
hal-04705896
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Fabrication of silicon based suspended thermometry devices for study of low temperature phononic effectsMNE 2024 - 50th International Micro and Nano Engineering conference, Sep 2024, Montpellier, France
Communication dans un congrès
hal-04706340
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Optimization of the melt and quench behavior of phase-change RF switch to improve power handling19th European Microwave Integrated Circuits Conference (EuMIC 2024), Sep 2024, Paris, France. pp.222-225, ⟨10.23919/EuMIC61603.2024.10732309⟩
Communication dans un congrès
hal-04718738
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Temperature and doping level effect on silicon thermal conductivity measured by 3ω methodNanoscale and Microscale Heat Transfer VIII, Jun 2024, Girona, Catalonia, Spain
Communication dans un congrès
hal-04800680
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Local thermal measurements and scanning thermal microscopyJournées plénières du GDR NAME (NanoMaterials for Energy), Nov 2024, Lille, France
Communication dans un congrès
hal-04792505
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Thermal boundary conductance study at metal-semiconductor interfaces. Influences of electrical properties and temperature.Energy transfer at interfaces, GDR NAMe, Jul 2023, Paris, France
Communication dans un congrès
hal-04435028
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Electrothermal measurements at boundaries including of metal-semiconductor structures ones by scanning thermal microscopy and 3ω methodInterface days, Jul 2023, Paris, France
Communication dans un congrès
hal-04311003
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Phonon transport in asymmetric nanostructures in the ballistic regimeGDR NAME plenary days, Nov 2023, Rennes, France
Communication dans un congrès
hal-04705891
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Thermal contact resistance measurements on metal-semiconductor structures by scanning thermal microscopy and 3ω methodTrends in Nanotechnologies (TNT), Aug 2023, Villeurbanne, France
Communication dans un congrès
hal-04311000
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A sensor for manipulation of heat carried by phonons at the nanoscale and very low temperatureC’Nano The Nanoscience Meeting, Mar 2023, Poitiers, France
Communication dans un congrès
hal-04705886
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Silicon Based Suspended Thermometry Device Fabrication for Phonon Ballistic and Coherent Regimes StudyPHONONICS 2023: 6th International Conference on Phononic Crystals/Metamaterials/Metasurfaces, Phonon Transport, and Topological Phononics, Jun 2023, Manchester, United Kingdom
Communication dans un congrès
hal-04188314
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GeTe thermal characterization with 3-omega and Raman thermometry methodsWorkshop for Multi-Functional Materials 2023, Jun 2023, Valenciennes, France. 1 page
Communication dans un congrès
hal-04188217
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Integrated metrology devices dedicated to transient Harman measurement of silicon nano-meshesWorkshop for Multi-Functional Materials, Université Polytechnique des Hauts-de-France; Université de Mons, Jun 2023, Valenciennes (Nord), France
Communication dans un congrès
hal-04188230
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Raman thermometry characterization of GeSbTe based phase change materialsXVII Conference on Phonon Scattering in Condensed Matter, Phonons 2023, Jul 2023, Paris, France
Communication dans un congrès
hal-04188350
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Thermal Boundary Conductance across metal/semiconductor junction, measurement and electrical influences14ème Journées de la Matière Condensée JMC, Société Française de Physique, Aug 2022, Lyon, France
Communication dans un congrès
hal-04434306
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Highly sensitive resistive SThM probes for nanoscale thermometryEurotherm 114: Nanoscale and Microscale Heat Transfer VII, May 2022, Palermo, Italy
Communication dans un congrès
hal-03863531
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Raman Thermometry Characterization of GeSbTe based Phase Change Materials2022 28th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC), Sep 2022, Dublin, Ireland. pp.1-5, ⟨10.1109/THERMINIC57263.2022.9950662⟩
Communication dans un congrès
hal-03875742
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[Invited] Heat transfer in silicon nano-membranes: application to thermoelectricityThe 20th international symposium on the Physics of Semiconductors and Applications (ISPSA20), Jul 2022, Jaeju, South Korea
Communication dans un congrès
hal-04088371
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Suspended crystalline silicon thermometry devices: towards quantum nanophononicsNanoscale and Microscale Heat Transfer VII - Eurotherm, May 2022, Palermo, Italy
Communication dans un congrès
hal-03870287
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Integrated metrology devices dedicated to transient Harman measurement of silicon nano-meshesNanoscale and Microscale Heat Transfer VII - Eurotherm, May 2022, Palermo, Italy
Communication dans un congrès
hal-03870513
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Scanning thermal microscopy: Probing temperature and heat dissipation down to the few-nanometer scale,Symposium C’Nano 2020 – The Nanoscience Meeting, Thematic session on “Nanoscale Heat Transfer – Measurement”, Nov 2021, Toulouse, France
Communication dans un congrès
hal-03814014
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[Invited] Functional packaging of RF, mmW and photonic functions based on femtosecond laser micromachining19th International Nanotech Symposium NANO KOREA 2021, TS10-Nanofabrication & Measurements, Jul 2021, Seoul, South Korea
Communication dans un congrès
hal-03582878
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Scanning Thermal Microscopy: Probing temperature and heat dissipation down to the few-nanometers scaleMRS Spring Meeting Symposium "Nanoscale Heat Transport: Fundamentals", Apr 2019, Phoenix, United States
Communication dans un congrès
hal-02043092
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Femtosecond laser micromachining of crystalline silicon for ablation of deep macro-sized cavities for silicon-on-insulator applicationsSPIE Photonics West, Conference 10906 - Laser-based Micro- and Nanoprocessing XIII, Feb 2019, San Francisco, United States. 109060K, 13 p., ⟨10.1117/12.2507652⟩
Communication dans un congrès
hal-02317233
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Development of Highly Sensitive Niobium Nitride Resistive Thermal Probes for Nanoscale Thermal MicroscopyE-MRS Fall Meeting Symposium "Nanomaterials thermal transport properties and nanothermodynamics", Sep 2019, Varsovie, Poland
Communication dans un congrès
hal-02379675
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Nanothermometry by Means of Scanning Thermal Microscopy: Investigation of Electro-thermal Devices with Embedded Metallic LinesTHERMINIC 26 (Thermal Investigation of ICs and Systems), Sep 2019, Lecco, Italy
Communication dans un congrès
hal-02379735
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Femtosecond pulsed laser for advanced photonic packaging7th Electronic System-Integration Technology Conference, ESTC 2018, Sep 2018, Dresden, Germany. ⟨10.1109/ESTC.2018.8546374⟩
Communication dans un congrès
hal-01961743
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Artificially-induced anisotropic heat flow in 2D patterned membranesEurotherm 111: Nanoscale and Microscale Heat Transfer VI, Dec 2018, Levi, Finland
Communication dans un congrès
hal-02025449
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Demonstration of low-thermal conductivity silicon nano-patterned membranes as a thermoelectric materialEurotherm 111: Nanoscale and Microscale Heat Transfer VI, Dec 2018, Levi, Finland
Communication dans un congrès
hal-02025459
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[Invited] Phonon heat conduction in phononic crystal membranes18th IEEE International Conference on Nanotechnology, IEEE Nano 2018, Session on “nanophononics”, Jul 2018, Cork, Ireland
Communication dans un congrès
hal-01932516
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Single mode polymer optical waveguides and out-of-plane coupling structure on a glass substrate7th Electronic System-Integration Technology Conference, ESTC 2018, Sep 2018, Dresden, Germany. ⟨10.1109/ESTC.2018.8546461⟩
Communication dans un congrès
hal-01961666
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Large-area femtosecond laser ablation of Silicon to create membrane with high performance CMOS-SOI RF functions2018 7th Electronic System-Integration Technology Conference (ESTC), Sep 2018, Dresden, Germany. pp.801-806, ⟨10.1109/ESTC.2018.8546407⟩
Communication dans un congrès
hal-02317259
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[Invited] Phonon heat conduction in phononic crystal membranesE-MRS Spring Meeting, Symposium "Nanostructures for phononic applications", Jun 2018, Strasbourg, France
Communication dans un congrès
hal-01932523
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Performance evaluation of silicon based thermoelectric generators interest of coupling low thermal conductivity thin films and a planar architecture48th European Solid-State Device Research Conference (ESSDERC 2018), Sep 2018, Dresden, Germany. pp.226-229, ⟨10.1109/ESSDERC.2018.8486919⟩
Communication dans un congrès
hal-02317293
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Native oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopyGDRe Workshop on Thermal Nanosciences and NanoEngineering, Nov 2017, Lille, France
Communication dans un congrès
hal-02031332
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Scanning thermal microscopy and nanoscale heat transfer4th Thermal Probe Workshop, Zurich (Switzerland), Jun 2017, Zurich, Switzerland
Communication dans un congrès
hal-01932572
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Thermal conductivity in Si 2D phononic membranes studied by Raman Thermometry,GDRe Workshop on Thermal Nanosciences and NanoEngineering, Nov 2017, Lille, France
Communication dans un congrès
hal-02030916
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Calibrated scanning thermal microscopy for nanolayered and micropatterned samplesMRS Spring meeting, Symposium NM2 on “Nanoscale Heat Transfer – From fundamentals to devices”, Apr 2017, Phoenix, United States
Communication dans un congrès
hal-01932644
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Heat conduction in 2D phononic structuresWE-Heraeus-Seminar “Heat Transfer and Heat Conduction on the Nanoscale”, Apr 2016, Bad Honnef, Germany
Communication dans un congrès
hal-01475329
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Thermal conductivity of Si 2D phononic membranes studied by MD simulations and Raman thermometryEurotherm 108: Nanoscale and Microscale Heat Transfer V, Sep 2016, Santorini, Greece
Communication dans un congrès
hal-01475281
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Comparative thermal characterization of nanophononic membrane strips by Raman thermometry, scanning thermal microscopy, and an electro-thermal methodEurotherm 108: Nanoscale and Microscale Heat Transfer V, Sep 2016, Santorini, Greece
Communication dans un congrès
hal-01475299
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Improved performance of flexible CMOS technology using ultimate thinning and transfer bonding6th Electronic System-Integration Technology Conference (ESTC), Sep 2016, Grenoble, France. ⟨10.1109/ESTC.2016.7764513⟩
Communication dans un congrès
hal-03272693
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Effective thermal conductivity of nanophononic membrane strips investigated by scanning thermal microscopy and Raman thermometryPhonons 2015 (15th International Conference on Phonon Scattering in Condensed Matter), Jul 2015, Nottingham, United Kingdom
Communication dans un congrès
hal-01464838
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Application-oriented performance of RF CMOS technologies on flexible substratesIEEE International Electron Devices Meeting (IEDM), Dec 2015, Washington, United States. ⟨10.1109/IEDM.2015.7409707⟩
Communication dans un congrès
hal-03272696
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Ultra-foldable/stretchable wideband RF interconnects using laser ablation of metal film on a flexible substrate45th European Microwave Conference (EuMC), Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345902⟩
Communication dans un congrès
hal-03325008
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Thermal Conductivity Reduction in Fully Suspended and Periodically Patterned Membranes Measured by Electro-Thermal MethodMRS Fall meeting, Symposium II on “Phonons”, Nov 2015, Boston, United States
Communication dans un congrès
hal-01464806
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Characterization of flexible CMOS technology tranferred onto a metallic foil2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, Jan 2015, Bologna, Italy. ⟨10.1109/ULIS.2015.7063747⟩
Communication dans un congrès
hal-03272691
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Fabrication of integrated micrometer platform for thermoelectric measurements60th Annual IEEE International Electron Devices Meeting (IEDM), Dec 2014, San Francisco, United States. paper 8.5, 8.5.1-8.5.4, ⟨10.1109/IEDM.2014.7047012⟩
Communication dans un congrès
hal-03325009
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Synthesis and electrical characterisations of a low work function cesium oxide coating for high efficiency thermionic energy converterEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium BB - Materials by design for energy applications through theory and experiment, 2014, Lille, France
Communication dans un congrès
hal-00966136
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Tailoring thermal conductivity of graphene via defect-and-molecular engineeringEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium D - Phonons and fluctuations in low dimensional structures, 2014, Lille, France
Communication dans un congrès
hal-00964528
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Phononic crystals patterning by e-beam lithography "dots on the fly" methodology for integration into thermoelectric energy converters17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p
Communication dans un congrès
hal-01020281
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High performance CMOS with enhanced property of mechanical flexibilityCMOS Emerging Technologies Research Symposium, 2014, Grenoble, France
Communication dans un congrès
hal-00976625
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Integrated measurement platform for thermal conductivity measurements in thin-film crystalline silicon and silicon-germaniumEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium BB - Materials by design for energy applications through theory and experiment, 2014, Lille, France
Communication dans un congrès
hal-00964577
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Efficient reduction of thermal conductivity in silicon using phononic-engineered membranesEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium D - Phonons and fluctuations in low dimensional structures, 2014, Lille, France
Communication dans un congrès
hal-00964542
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Silicon thermoelectrics : a non-conventional approach based on thin-film phononic engineeringCMOS Emerging Technologies Research Symposium, 2014, Grenoble, France
Communication dans un congrès
hal-00976631
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Low work function thin film growth for high efficiency thermionic energy converter : coupled Kelvin probe and photoemission study of potassium oxideEuropean Materials Research Society Spring Meeting, E-MRS Spring 2013, Symposium C - Advanced thermoelectrics : from materials to devices, 2013, Strasbourg, France
Communication dans un congrès
hal-00819702
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Phononic engineering of silicon using dots on the fly 'electron beam lithography and plasma etching39th International Conference on Micro and Nano Engineering, MNE 2013, 2013, London, United Kingdom
Communication dans un congrès
hal-00878809
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[Invited] Unconventional principles of thermoelectric generationNanotechnologies et Matériaux Avancés France-Israël, 2013, Paris, France
Communication dans un congrès
hal-00878808
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Phase-controlling properties in phononic crystals1st International Conference on Phononic Crystals, Metamaterials and Optomechanics, PHONONICS 2011, 2011, Santa Fe, NM, United States. Paper Phononics-2011-0069, 164-165
Communication dans un congrès
hal-00799670
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Acoustic logic gates implemented using a phase controlling phononic crystal1st International Conference on Phononic Crystals, Metamaterials and Optomechanics, PHONONICS 2011, 2011, Santa Fe, NM, United States
Communication dans un congrès
hal-00807116
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Phase-control in phononic crystals10th Anglo-French Physical Acoustics Conference, AFPAC'11, 2011, Fréjus, France
Communication dans un congrès
hal-00574514
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Tunable magnetoelastic phononic crystals13th International Conference on Phonon Scattering in Condensed Matter, PHONONS 2010, 2010, Taipei, Taiwan
Communication dans un congrès
hal-00574030
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Cristaux Phononiques Magneto-élastiques10e Congrès Français d'Acoustique, Apr 2010, Lyon, France
Communication dans un congrès
hal-00546843
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Ultrafast acoustics in 2D phononic crystals15th International Conference on Photoacoustic and Photothermal Phenomena, ICPPP15, 2009, Leuven, Belgium
Communication dans un congrès
hal-00575708
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Towards thin film complete characterization using picosecond ultrasonicsIEEE International Ultrasonics Symposium, 2008 IEEE IUS, 2008, China. pp.1203-1206, ⟨10.1109/ULTSYM.2008.0290⟩
Communication dans un congrès
hal-00375168
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Complete characterization in thin film using picosecond ultrasonics and nanostructured transducerSecond ASA-EAA Joint Conference, ACOUSTICS'08, 2008, Paris, France
Communication dans un congrès
hal-00361485
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A touch of color in picosecond ultrasonicsEcole thématique CNRS : Son et Lumière, from microphotonics to nanophotonics, 2006, Cargèse, France
Communication dans un congrès
hal-00369956
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Time resolved study of 2D nanostructures lattices phonon modesEcole thématique CNRS : Son et Lumière, from microphotonics to nanophotonics, 2006, Cargèse, France
Communication dans un congrès
hal-00369957
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Propriétés élastiques de réseaux de nanostructures sondées par acoustique picoseconde. Sélection de modes en longueur d'onde10èmes Journées de la Matière Condensée, JMC10, 2006, Toulouse, France
Communication dans un congrès
hal-00126496
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Voir vibrer des nanostructures en acoustique picoseconde3èmes Journées Ultrasons-Laser, 2005, Louvain, Belgique
Communication dans un congrès
hal-00125899
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Individual and collective vibrational modes of nanostructures studied by picosecond ultrasonics2005, ThDpm1-08
Communication dans un congrès
hal-00131103
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Propriétés élastiques de nanostructures sondées par acoustique picoseconde7èmes Journées des Phénomènes Ultra-rapides, 2005, Villeneuve d'Ascq, France
Communication dans un congrès
hal-00125906
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Study of phonon ballistic and coherent effects via silicon based suspended measurement platformsEurotherm Nanoscale and Microscale Heat Transfer VIII, Jun 2024, Girona, Catalonia, Spain
Poster de conférence
hal-04706303
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Effet des propriétés électriques sur les conductances thermique d’interface aux jonctions métal/semi-conducteurCongrès français de thermique, May 2023, Reims (51), France
Poster de conférence
hal-04438051
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Electrothermal measurements of metal-semiconductor structures by scanning thermal microscopy and 3ω method17th International Conference on Phonon Scattering in Condensed Matter (Phonons 2023), Jul 2023, Paris, France
Poster de conférence
hal-04310991
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Heat manipulation at the nanoscale in the ballistic regimeEurotherm Nanoscale and Microscale Heat Transfer VII, May 2022, Palermo, Italy
Poster de conférence
hal-04705872
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Thermal design of PCM-RF Switches for 5G and beyond1ères Journées Scientifiques du GDR CHALCO, Jun 2022, Dijon, France. , 2022
Poster de conférence
cea-04528379
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Crystalline silicon based suspended thermometry platforms: study of quantum phononic effects‘Photon, Phonon, and Electron Transitions in Coupled Nanoscale Systems’ 745. WE-Heraeus-Seminar, Sep 2022, Bad Honnef, Germany
Poster de conférence
hal-04706276
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Measurement of Thermal properties by means of Modulated-PhotoThermal Radiometry technic (M-PTR)745. WE-Heraeus Seminar on "Photon, Phonon, and Electron Transitions in Coupled Nanoscale Systems", Sep 2022, Bad Honnef, Germany
Poster de conférence
hal-04438032
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A sensor for manipulation of heat carried by phonons at the nanoscale and very low temperatureGDR NAME plenary days, Oct 2022, Lyon, France
Poster de conférence
hal-04705878
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Nanometer-scale active thermal devices for thermal microscopy probe calibration16èmes Journées de La Matière Condensée (JMC2018), Aug 2018, Grenoble, France. pp.513-513
Poster de conférence
hal-02023911
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Livret Journées Plénières GdR NAME 2024Journées Plénières GdR NAME 2024, Nov 2024, Villeneuve d'Ascq, France. 45 p., 2024
Proceedings/Recueil des communications
hal-04970617
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Invariance of DC and RF characteristics of mechanically flexible CMOS technology on plasticFunctional nanomaterials and devices for electronics, sensors and energy harvesting, 2014
Chapitre d'ouvrage
hal-04249256
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2D-3D phononic crystalsDeymier P.A. Acoustic metamaterials and phononic crystals, Springer Berlin Heidelberg, chapter 4, 95-157, 2013, ISBN 978-3-642-31231-1, e-ISBN 978-3-642-31232-8. ⟨10.1007/978-3-642-31232-8_4⟩
Chapitre d'ouvrage
istex
hal-00800621
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Générateur thermoélectriqueFrance, Patent n° : FR20140061760 20141202. 2016
Brevet
hal-04249485
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Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing2021
Pré-publication, Document de travail
hal-03350081
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Rapport d'activité final du Projet "Unconventional Principles of Thermoelectric GenerationInstitut d'Electonique, Microélectronique et de nanotechnologie - UMR8520. 2024
Rapport
hal-04540093
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Étude par Acoustique Picoseconde des Vibrations Individuelles et Collectives de Nanostructures OrganiséesPhysique [physics]. Université des Sciences et Technologie de Lille - Lille I, 2008. Français. ⟨NNT : ⟩
Thèse
tel-00459422
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Transport thermique dans les nanostructures en silicium cristallin. Applications à la conversion d’énergie thermoélectriqueMatériaux. Université de Lille, 2022
HDR
tel-04528000
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