Jean-Francois Robillard
- Microélectronique Silicium - IEMN (MICROELEC SI - IEMN)
- Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN)
Publications
Publications
Temperature and doping level effect on silicon thermal conductivityPhonons 2025 (International Conference on Phonon Scattering in Condensed Matter), Dec 2025, Buenos Aires, Argentina |
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Phase-field simulations for RF switches: highlighting the benefits of GeTe over GSTSISPAD - International Conference on Simulation of Semiconductor Processes and Devices, Sep 2025, Grenoble, France |
Thermal properties of nano-objects by means of scanning thermal microscopyFisMat 2025 biennial conference on condensed matter physics - Ultrafast Mechanical and Thermal Dynamics thematic workshop, Jul 2025, Venise, Italy |
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Phonon transport in asymmetric nanostructures in the ballistic regimeEurotherm Nanoscale and Microscale Heat Transfer VIII, Jun 2024, Girona, Spain |
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Fabrication of silicon based suspended thermometry devices for study of low temperature phononic effectsMNE 2024 - 50th International Micro and Nano Engineering conference, Sep 2024, Montpellier, France |
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Optimization of the melt and quench behavior of phase-change RF switch to improve power handling19th European Microwave Integrated Circuits Conference (EuMIC 2024), Sep 2024, Paris, France. pp.222-225, ⟨10.23919/EuMIC61603.2024.10732309⟩ |
Temperature and doping level effect on silicon thermal conductivity measured by 3ω methodNanoscale and Microscale Heat Transfer VIII, Jun 2024, Girona, Catalonia, Spain |
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Local thermal measurements and scanning thermal microscopyJournées plénières du GDR NAME (NanoMaterials for Energy), Nov 2024, Lille, France |
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Optimisation de la trempe et amélioration de la fiabilité de commutateurs à matériaux à changement de phaseJNM2024 - 23ème Journées Nationales Microondes, Jun 2024, Antibes Juan les-Pins, France |
Thermal contact resistance measurements on metal-semiconductor structures by scanning thermal microscopy and 3ω methodTrends in Nanotechnologies (TNT), Aug 2023, Villeurbanne, France |
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Phonon transport in asymmetric nanostructures in the ballistic regimeGDR NAME plenary days, Nov 2023, Rennes, France |
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Electrothermal measurements at boundaries including of metal-semiconductor structures ones by scanning thermal microscopy and 3ω methodInterface days, Jul 2023, Paris, France |
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A sensor for manipulation of heat carried by phonons at the nanoscale and very low temperatureC’Nano The Nanoscience Meeting, Mar 2023, Poitiers, France |
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Silicon Based Suspended Thermometry Device Fabrication for Phonon Ballistic and Coherent Regimes StudyPHONONICS 2023: 6th International Conference on Phononic Crystals/Metamaterials/Metasurfaces, Phonon Transport, and Topological Phononics, Jun 2023, Manchester, United Kingdom |
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Integrated metrology devices dedicated to transient Harman measurement of silicon nano-meshesWorkshop for Multi-Functional Materials, Université Polytechnique des Hauts-de-France; Université de Mons, Jun 2023, Valenciennes (Nord), France |
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Raman thermometry characterization of GeSbTe based phase change materialsXVII Conference on Phonon Scattering in Condensed Matter, Phonons 2023, Jul 2023, Paris, France |
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GeTe thermal characterization with 3-omega and Raman thermometry methodsWorkshop for Multi-Functional Materials 2023, Jun 2023, Valenciennes, France. 1 page |
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Thermal boundary conductance study at metal-semiconductor interfaces. Influences of electrical properties and temperature.Energy transfer at interfaces, GDR NAMe, Jul 2023, Paris, France |
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[Invited] Heat transfer in silicon nano-membranes: application to thermoelectricityThe 20th international symposium on the Physics of Semiconductors and Applications (ISPSA20), Jul 2022, Jaeju, South Korea |
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Raman Thermometry Characterization of GeSbTe based Phase Change Materials2022 28th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC), Sep 2022, Dublin, Ireland. pp.1-5, ⟨10.1109/THERMINIC57263.2022.9950662⟩ |
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Suspended crystalline silicon thermometry devices: towards quantum nanophononicsNanoscale and Microscale Heat Transfer VII - Eurotherm, May 2022, Palermo, Italy |
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Integrated metrology devices dedicated to transient Harman measurement of silicon nano-meshesNanoscale and Microscale Heat Transfer VII - Eurotherm, May 2022, Palermo, Italy |
Highly sensitive resistive SThM probes for nanoscale thermometryEurotherm 114: Nanoscale and Microscale Heat Transfer VII, May 2022, Palermo, Italy |
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Thermal Boundary Conductance across metal/semiconductor junction, measurement and electrical influences14ème Journées de la Matière Condensée JMC, Société Française de Physique, Aug 2022, Lyon, France |
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[Invited] Functional packaging of RF, mmW and photonic functions based on femtosecond laser micromachining19th International Nanotech Symposium NANO KOREA 2021, TS10-Nanofabrication & Measurements, Jul 2021, Seoul, South Korea |
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Scanning thermal microscopy: Probing temperature and heat dissipation down to the few-nanometer scale,Symposium C’Nano 2020 – The Nanoscience Meeting, Thematic session on “Nanoscale Heat Transfer – Measurement”, Nov 2021, Toulouse, France |
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Femtosecond laser micromachining of crystalline silicon for ablation of deep macro-sized cavities for silicon-on-insulator applicationsSPIE Photonics West, Conference 10906 - Laser-based Micro- and Nanoprocessing XIII, Feb 2019, San Francisco, United States. 109060K, 13 p., ⟨10.1117/12.2507652⟩ |
Nanothermometry by Means of Scanning Thermal Microscopy: Investigation of Electro-thermal Devices with Embedded Metallic LinesTHERMINIC 26 (Thermal Investigation of ICs and Systems), Sep 2019, Lecco, Italy |
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Development of Highly Sensitive Niobium Nitride Resistive Thermal Probes for Nanoscale Thermal MicroscopyE-MRS Fall Meeting Symposium "Nanomaterials thermal transport properties and nanothermodynamics", Sep 2019, Varsovie, Poland |
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Scanning Thermal Microscopy: Probing temperature and heat dissipation down to the few-nanometers scaleMRS Spring Meeting Symposium "Nanoscale Heat Transport: Fundamentals", Apr 2019, Phoenix, United States |
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Large-area femtosecond laser ablation of Silicon to create membrane with high performance CMOS-SOI RF functions2018 7th Electronic System-Integration Technology Conference (ESTC), Sep 2018, Dresden, Germany. pp.801-806, ⟨10.1109/ESTC.2018.8546407⟩ |
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[Invited] Phonon heat conduction in phononic crystal membranesE-MRS Spring Meeting, Symposium "Nanostructures for phononic applications", Jun 2018, Strasbourg, France |
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[Invited] Phonon heat conduction in phononic crystal membranes18th IEEE International Conference on Nanotechnology, IEEE Nano 2018, Session on “nanophononics”, Jul 2018, Cork, Ireland |
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Demonstration of low-thermal conductivity silicon nano-patterned membranes as a thermoelectric materialEurotherm 111: Nanoscale and Microscale Heat Transfer VI, Dec 2018, Levi, Finland |
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Single mode polymer optical waveguides and out-of-plane coupling structure on a glass substrate7th Electronic System-Integration Technology Conference, ESTC 2018, Sep 2018, Dresden, Germany. ⟨10.1109/ESTC.2018.8546461⟩ |
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Artificially-induced anisotropic heat flow in 2D patterned membranesEurotherm 111: Nanoscale and Microscale Heat Transfer VI, Dec 2018, Levi, Finland |
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Performance evaluation of silicon based thermoelectric generators interest of coupling low thermal conductivity thin films and a planar architecture48th European Solid-State Device Research Conference (ESSDERC 2018), Sep 2018, Dresden, Germany. pp.226-229, ⟨10.1109/ESSDERC.2018.8486919⟩ |
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Femtosecond pulsed laser for advanced photonic packaging7th Electronic System-Integration Technology Conference, ESTC 2018, Sep 2018, Dresden, Germany. ⟨10.1109/ESTC.2018.8546374⟩ |
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Scanning thermal microscopy and nanoscale heat transfer4th Thermal Probe Workshop, Zurich (Switzerland), Jun 2017, Zurich, Switzerland |
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Native oxide limited cross-plane thermal transport in suspended silicon membranes revealed by scanning thermal microscopyGDRe Workshop on Thermal Nanosciences and NanoEngineering, Nov 2017, Lille, France |
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Calibrated scanning thermal microscopy for nanolayered and micropatterned samplesMRS Spring meeting, Symposium NM2 on “Nanoscale Heat Transfer – From fundamentals to devices”, Apr 2017, Phoenix, United States |
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Thermal conductivity in Si 2D phononic membranes studied by Raman Thermometry,GDRe Workshop on Thermal Nanosciences and NanoEngineering, Nov 2017, Lille, France |
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Thermal conductivity of Si 2D phononic membranes studied by MD simulations and Raman thermometryEurotherm 108: Nanoscale and Microscale Heat Transfer V, Sep 2016, Santorini, Greece |
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Heat conduction in 2D phononic structuresWE-Heraeus-Seminar “Heat Transfer and Heat Conduction on the Nanoscale”, Apr 2016, Bad Honnef, Germany |
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Improved performance of flexible CMOS technology using ultimate thinning and transfer bonding6th Electronic System-Integration Technology Conference (ESTC), Sep 2016, Grenoble, France. ⟨10.1109/ESTC.2016.7764513⟩ |
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Comparative thermal characterization of nanophononic membrane strips by Raman thermometry, scanning thermal microscopy, and an electro-thermal methodEurotherm 108: Nanoscale and Microscale Heat Transfer V, Sep 2016, Santorini, Greece |
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Application-oriented performance of RF CMOS technologies on flexible substratesIEEE International Electron Devices Meeting (IEDM), Dec 2015, Washington, United States. ⟨10.1109/IEDM.2015.7409707⟩ |
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Ultra-foldable/stretchable wideband RF interconnects using laser ablation of metal film on a flexible substrate45th European Microwave Conference (EuMC), Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345902⟩ |
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Thermal Conductivity Reduction in Fully Suspended and Periodically Patterned Membranes Measured by Electro-Thermal MethodMRS Fall meeting, Symposium II on “Phonons”, Nov 2015, Boston, United States |
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Characterization of flexible CMOS technology tranferred onto a metallic foil2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, Jan 2015, Bologna, Italy. ⟨10.1109/ULIS.2015.7063747⟩ |
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Effective thermal conductivity of nanophononic membrane strips investigated by scanning thermal microscopy and Raman thermometryPhonons 2015 (15th International Conference on Phonon Scattering in Condensed Matter), Jul 2015, Nottingham, United Kingdom |
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High performance CMOS with enhanced property of mechanical flexibilityCMOS Emerging Technologies Research Symposium, 2014, Grenoble, France |
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Phononic crystals patterning by e-beam lithography "dots on the fly" methodology for integration into thermoelectric energy converters17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p |
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Tailoring thermal conductivity of graphene via defect-and-molecular engineeringEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium D - Phonons and fluctuations in low dimensional structures, 2014, Lille, France |
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Integrated measurement platform for thermal conductivity measurements in thin-film crystalline silicon and silicon-germaniumEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium BB - Materials by design for energy applications through theory and experiment, 2014, Lille, France |
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Efficient reduction of thermal conductivity in silicon using phononic-engineered membranesEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium D - Phonons and fluctuations in low dimensional structures, 2014, Lille, France |
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Silicon thermoelectrics : a non-conventional approach based on thin-film phononic engineeringCMOS Emerging Technologies Research Symposium, 2014, Grenoble, France |
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Fabrication of integrated micrometer platform for thermoelectric measurements60th Annual IEEE International Electron Devices Meeting (IEDM), Dec 2014, San Francisco, United States. paper 8.5, 8.5.1-8.5.4, ⟨10.1109/IEDM.2014.7047012⟩ |
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Synthesis and electrical characterisations of a low work function cesium oxide coating for high efficiency thermionic energy converterEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium BB - Materials by design for energy applications through theory and experiment, 2014, Lille, France |
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[Invited] Unconventional principles of thermoelectric generationNanotechnologies et Matériaux Avancés France-Israël, 2013, Paris, France |
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Phononic engineering of silicon using dots on the fly 'electron beam lithography and plasma etching39th International Conference on Micro and Nano Engineering, MNE 2013, 2013, London, United Kingdom |
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Low work function thin film growth for high efficiency thermionic energy converter : coupled Kelvin probe and photoemission study of potassium oxideEuropean Materials Research Society Spring Meeting, E-MRS Spring 2013, Symposium C - Advanced thermoelectrics : from materials to devices, 2013, Strasbourg, France |
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Acoustic logic gates implemented using a phase controlling phononic crystal1st International Conference on Phononic Crystals, Metamaterials and Optomechanics, PHONONICS 2011, 2011, Santa Fe, NM, United States |
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Phase-controlling properties in phononic crystals1st International Conference on Phononic Crystals, Metamaterials and Optomechanics, PHONONICS 2011, 2011, Santa Fe, NM, United States. Paper Phononics-2011-0069, 164-165 |
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Phase-control in phononic crystals10th Anglo-French Physical Acoustics Conference, AFPAC'11, 2011, Fréjus, France |
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Cristaux Phononiques Magneto-élastiques10e Congrès Français d'Acoustique, Apr 2010, Lyon, France |
Tunable magnetoelastic phononic crystals13th International Conference on Phonon Scattering in Condensed Matter, PHONONS 2010, 2010, Taipei, Taiwan |
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Ultrafast acoustics in 2D phononic crystals15th International Conference on Photoacoustic and Photothermal Phenomena, ICPPP15, 2009, Leuven, Belgium |
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Towards thin film complete characterization using picosecond ultrasonicsIEEE International Ultrasonics Symposium, 2008 IEEE IUS, 2008, China. pp.1203-1206, ⟨10.1109/ULTSYM.2008.0290⟩ |
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Complete characterization in thin film using picosecond ultrasonics and nanostructured transducerSecond ASA-EAA Joint Conference, ACOUSTICS'08, 2008, Paris, France |
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Time resolved study of 2D nanostructures lattices phonon modesEcole thématique CNRS : Son et Lumière, from microphotonics to nanophotonics, 2006, Cargèse, France |
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A touch of color in picosecond ultrasonicsEcole thématique CNRS : Son et Lumière, from microphotonics to nanophotonics, 2006, Cargèse, France |
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Propriétés élastiques de réseaux de nanostructures sondées par acoustique picoseconde. Sélection de modes en longueur d'onde10èmes Journées de la Matière Condensée, JMC10, 2006, Toulouse, France |
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Voir vibrer des nanostructures en acoustique picoseconde3èmes Journées Ultrasons-Laser, 2005, Louvain, Belgique |
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Individual and collective vibrational modes of nanostructures studied by picosecond ultrasonics2005, ThDpm1-08 |
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Propriétés élastiques de nanostructures sondées par acoustique picoseconde7èmes Journées des Phénomènes Ultra-rapides, 2005, Villeneuve d'Ascq, France |
Electrical eFFects on InterfaCiAl thermal resistance (EFICACE)C’Nano 2025: The Nanoscience Meeting, Mar 2025, Paris, France |
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Study of phonon ballistic and coherent effects via silicon based suspended measurement platformsEurotherm Nanoscale and Microscale Heat Transfer VIII, Jun 2024, Girona, Catalonia, Spain |
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Effet des propriétés électriques sur les conductances thermique d’interface aux jonctions métal/semi-conducteurCongrès français de thermique, May 2023, Reims (51), France |
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Electrothermal measurements of metal-semiconductor structures by scanning thermal microscopy and 3ω method17th International Conference on Phonon Scattering in Condensed Matter (Phonons 2023), Jul 2023, Paris, France |
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Measurement of Thermal properties by means of Modulated-PhotoThermal Radiometry technic (M-PTR)745. WE-Heraeus Seminar on "Photon, Phonon, and Electron Transitions in Coupled Nanoscale Systems", Sep 2022, Bad Honnef, Germany |
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Crystalline silicon based suspended thermometry platforms: study of quantum phononic effects‘Photon, Phonon, and Electron Transitions in Coupled Nanoscale Systems’ 745. WE-Heraeus-Seminar, Sep 2022, Bad Honnef, Germany |
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A sensor for manipulation of heat carried by phonons at the nanoscale and very low temperatureGDR NAME plenary days, Oct 2022, Lyon, France |
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Heat manipulation at the nanoscale in the ballistic regimeEurotherm Nanoscale and Microscale Heat Transfer VII, May 2022, Palermo, Italy |
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Thermal design of PCM-RF Switches for 5G and beyond1ères Journées Scientifiques du GDR CHALCO, Jun 2022, Dijon, France. , 2022 |
Nanometer-scale active thermal devices for thermal microscopy probe calibration16èmes Journées de La Matière Condensée (JMC2018), Aug 2018, Grenoble, France. pp.513-513 |
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Livret Journées Plénières GdR NAME 2024Journées Plénières GdR NAME 2024, Nov 2024, Villeneuve d'Ascq, France. 45 p., 2024 |
Invariance of DC and RF characteristics of mechanically flexible CMOS technology on plasticFunctional nanomaterials and devices for electronics, sensors and energy harvesting, 2014 |
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2D-3D phononic crystalsDeymier P.A. Acoustic metamaterials and phononic crystals, Springer Berlin Heidelberg, chapter 4, 95-157, 2013, ISBN 978-3-642-31231-1, e-ISBN 978-3-642-31232-8. ⟨10.1007/978-3-642-31232-8_4⟩ |
Générateur thermoélectriqueFrance, Patent n° : FR20140061760 20141202. 2016 |
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Competing effects of charge-carrier and impurity scattering limiting phonon heat conduction in heavily-doped silicon2026 |
Influence of electric properties on thermal boundary conductance at metal/semiconductor interface2025 |
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Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing2021 |
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Rapport d'activité final du Projet "Unconventional Principles of Thermoelectric GenerationInstitut d'Electonique, Microélectronique et de nanotechnologie - UMR8520. 2024 |
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Étude par Acoustique Picoseconde des Vibrations Individuelles et Collectives de Nanostructures OrganiséesPhysique [physics]. Université des Sciences et Technologie de Lille - Lille I, 2008. Français. ⟨NNT : ⟩ |
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Transport thermique dans les nanostructures en silicium cristallin. Applications à la conversion d’énergie thermoélectriqueMatériaux. Université de Lille, 2022 |