Jean-Paul Booth

279
Documents

Présentation

Research interests

Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Development of sensors for in-situ control of industrial plasma processes.
Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.
Gas breakdown in RF fields.

Brief vitae

2000-Present : Directeur de Recherche, CNRS at LPP, except :
2006-2008 : Technical Director, Lam Research Corp, Fremont, CA, USA
1990-2000 : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
1988-1990 : Post-doctoral researcher, CNRS/CNET, Meylan, France
1985-1988 : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
1980-1984 : BA & MA, Chemistry, Oxford University, UK

Distinctions :
2010 : Fellow of AVS
1984 : Physical Chemistry Part II Thesis Prize, Oxford University
1980-1983 : Stapeldon Scholarship to Exeter College, Oxford

Editorial responsabilities and Conference organisation
Associate Editor of IoP journal Plasma Sources, Science and Technology
Chair, International Workshop on Oxygen Plasma Kinetics 2016
Chair, Laser-Aided Plasma Diagnostics 2013& 2015
Program Commitee, ICPP 2014
Secretary, AVS Plasma Science and Technology Division, 2012-13
Chair, International Conference on Phenomena in Ionised Gases, 2009

Publications

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Publications

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On the use of pulsed DC bias for etching high aspect ratio features

Xingyi Shi , Samaneh Sadighi , Shahid Rauf , Han Luo , Jun-Chieh Wang et al.
Journal of Vacuum Science & Technology A, 2025, 43 (1), ⟨10.1116/6.0003943⟩
Article dans une revue hal-04818519 v1
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Oxygen atom and ozone kinetics in the afterglow of a pulse-modulated DC discharge in pure O2 : an experimental and modelling study of surface mechanisms and ozone vibrational kinetics

Jean-Paul Booth , Olivier Guaitella , Shu Zhang , Dmitry Lopaev , S Zyryanov et al.
Plasma Sources Science and Technology, 2023, 32 (9), pp.095016. ⟨10.1088/1361-6595/acf956⟩
Article dans une revue hal-04217064 v1
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Potential stratospheric ozone depletion due to iodine injection from small satellites

Wuhu Feng , John M C Plane , Martyn P. Chipperfield , Alfonso Saiz-Lopez , Jean‐paul Booth
Geophysical Research Letters, 2023, 50 (7), pp.e2022GL102300. ⟨10.1029/2022GL102300⟩
Article dans une revue hal-03976025 v1
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Quenching of O2(b1Σg+) by O(3P) atoms. Effect of gas temperature

Jean-Paul Booth , A Chatterjee , O Guaitella , D Lopaev , S Zyryanov et al.
Plasma Sources Science and Technology, 2022, 31 (6), pp.065012. ⟨10.1088/1361-6595/ac7749⟩
Article dans une revue hal-03721576 v1
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Foundations of plasma surface functionalization of polymers for industrial and biological applications

Jean-Paul Booth , Miran Mozetič , Anton Nikiforov , Christian Oehr
Plasma Sources Science and Technology, 2022, 31 (10), pp.103001. ⟨10.1088/1361-6595/ac70f9⟩
Article dans une revue hal-03822222 v1
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Chemical kinetics and density measurements of OH in an atmospheric pressure He + O2 + H2O radiofrequency plasma

Alexandra Brisset , Andrew Gibson , Sandra Schröter , Kari Niemi , Jean-Paul Booth et al.
Journal of Physics D: Applied Physics, 2021, 54 (28), pp.285201. ⟨10.1088/1361-6463/abefec⟩
Article dans une revue hal-03200547 v1
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Fast quenching of metastable O2 (a 1Δg ) and O2 (b 1Σg+ ) molecules by O( 3P) atoms at high temperature

Andrey Vladimirovich Volynets , Dmitry Lopaev , T Rakhimova , O Proshina , Alexander Chukalovsky et al.
Plasma Sources Science and Technology, 2020, ⟨10.1088/1361-6595/abbf92⟩
Article dans une revue hal-02966916 v1
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Rydberg spectra of singlet metastable states of O2

C. Western , Jean-Paul Booth , A. Chatterjee , N. de Oliveira
Molecular Physics, 2020, pp.e1741714. ⟨10.1080/00268976.2020.1741714⟩
Article dans une revue hal-02544881 v1
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Determination of absolute O(3P) and O2(a1Δg) densities and kinetics in fully modulated O2 dc glow discharges from the O2(X3Σg-) afterglow recovery dynamics

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , João Santos Sousa , Dmitry Lopaev et al.
Plasma Sources Science and Technology, 2020, 29, pp.115009. ⟨10.1088/1361-6595/abb5e7⟩
Article dans une revue hal-02933186 v1
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Oxygen atom kinetics in CO<sub>2</sub> plasmas ignited in a DC glow discharge

A. S Morillo-Candas , Cyril Drag , Jean-Paul Booth , T. C Dias , V. Guerra et al.
Plasma Sources Science and Technology, 2019, 28 (7), pp.075010. ⟨10.1088/1361-6595/ab2b84⟩
Article dans une revue hal-02272107 v1
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Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas

Junkang Wang , Sébastien Diné , Jean-Paul Booth , Erik Johnson
Journal of Vacuum Science & Technology A, 2019, 37 (2), pp.021303. ⟨10.1116/1.5056205⟩
Article dans une revue hal-02081466 v1
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Oxygen (<SUP>3</SUP>P) atom recombination on a Pyrex surface in an O<SUB>2</SUB> plasma

Jean-Paul Booth , Olivier Guaitella , Abhyuday Chatterjee , Cyril Drag , V. Guerra et al.
Plasma Sources Science and Technology, 2019, 28 (5), pp.055005. ⟨10.1088/1361-6595/ab13e8⟩
Article dans une revue hal-02272108 v1

Effect of frequency on the uniformity of symmetrical RF CCP discharges

Yue Liu , Jean-Paul Booth , Pascal Chabert
Plasma Sources Science and Technology, 2018, 27 (5), pp.055012. ⟨10.1088/1361-6595/aabfb4⟩
Article dans une revue hal-01895562 v1
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Chemical kinetics in an atmospheric pressure helium plasma containing humidity

Sandra Schröter , Apiwat Wijaikhum , Andrew Gibson , Andrew West , Helen Davies et al.
Physical Chemistry Chemical Physics, 2018, 20 (37), pp.24263-24286. ⟨10.1039/c8cp02473a⟩
Article dans une revue hal-02266591 v1

Kinetics of highly vibrationally excited O<SUB>2</SUB> (X) molecules in inductively-coupled oxygen plasmas

Adriana Annusova , Daniil Marinov , Jean-Paul Booth , Nishant Sirse , Mrio Lino Da Silva et al.
Plasma Sources Science and Technology, 2018, 27 (4), pp.045006. ⟨10.1088/1361-6595/aab47d⟩
Article dans une revue hal-01895558 v1

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Z. Donkó , A. Derzsi , Ihor Korolov , P. Hartmann , S. Brandt et al.
Plasma Physics and Controlled Fusion, 2018, 60 (1), pp.014010. ⟨10.1088/1361-6587/aa8378⟩
Article dans une revue hal-01895567 v1
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Calculated electron impact dissociation cross sections for molecular chlorine (Cl 2 )

James R. Hamilton , Jonathan Tennyson , Jean-Paul Booth , Timo Gans , Andrew Gibson
Plasma Sources Science and Technology, 2018, 27 (9), pp.095008. ⟨10.1088/1361-6595/aada32⟩
Article dans une revue hal-01890202 v1

Multi frequency matching for voltage waveform tailoring

Frederik Schmidt , J. Schulze , Erik Johnson , Jean-Paul Booth , D. Keil et al.
Plasma Sources Science and Technology, 2018, 27 (9), pp.095012. ⟨10.1088/1361-6595/aad2cd⟩
Article dans une revue hal-02271985 v1

Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation

Yue Liu , Jean-Paul Booth , Pascal Chabert
Plasma Sources Science and Technology, 2018, 27 (2), pp.025006. ⟨10.1088/1361-6595/aaa86e⟩
Article dans une revue hal-01895556 v1

QDB: a new database of plasma chemistries and reactions

Jonathan Tennyson , Sara Rahimi , Christian Hill , Lisa Tse , Anuradha Vibhakar et al.
Plasma Sources Science and Technology, 2017, 26 (5), pp.055014. ⟨10.1088/1361-6595/aa6669⟩
Article dans une revue hal-01895568 v1

Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: vibrational kinetics and negative ions control

P. Diomede , Bastien Bruneau , S. Longo , E.V. Johnson , Jean-Paul Booth
Plasma Sources Science and Technology, 2017, 26 (7), pp.075007. ⟨10.1088/1361-6595/aa752c⟩
Article dans une revue hal-01895582 v1

The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.
Plasma Physics and Controlled Fusion, 2017, 59 (2), pp.024004. ⟨10.1088/1361-6587/59/2/024004⟩
Article dans une revue hal-01895577 v1

Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges

A. Derzsi , Bastien Bruneau , Andrew Gibson , Erik Johnson , D. O'Connell et al.
Plasma Sources Science and Technology, 2017, 26 (3), pp.034002. ⟨10.1088/1361-6595/aa56d6⟩
Article dans une revue hal-01895575 v1

Measurement of the isotope shift of the 2p<SUP>4</SUP> -> 2p<SUP>3</SUP>3p <SUP>3</SUP>P<SUB>2</SUB> two-photon transition of O I and a revision of the triplet energy levels of atomic oxygen

Daniil Marinov , Jean-Paul Booth , Cyril Drag , Christophe Blondel
Journal of Physics B: Atomic, Molecular and Optical Physics, 2017, 50 (6), pp.065003. ⟨10.1088/1361-6455/aa5a88⟩
Article dans une revue hal-01895572 v1

Controlled production of atomic oxygen and nitrogen in a pulsed radio-frequency atmospheric-pressure plasma

J. Dedrick , Sandra Schröter , K. Niemi , A. Wijaikhum , E. Wagenaars et al.
Journal of Physics D: Applied Physics, 2017, 50 (45), pp.455204. ⟨10.1088/1361-6463/aa8da2⟩
Article dans une revue hal-01895585 v1

Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms

A. Derzsi , Trevor Lafleur , Jean-Paul Booth , Ihor Korolov , Zoltan Donko
Plasma Sources Science and Technology, 2016, 25 (1), pp.015004. ⟨10.1088/0963-0252/25/1/015004⟩
Article dans une revue hal-01549577 v1

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF<SUB>4</SUB>

S. Brandt , B. Berger , E. Schüngel , Ihor Korolov , A. Derzsi et al.
Plasma Sources Science and Technology, 2016, 25 (4), pp.045015. ⟨10.1088/0963-0252/25/4/045015⟩
Article dans une revue hal-01549325 v1
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High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma

Daniil Marinov , Mickaël Foucher , Ewen Campbell , Mark Brouard , Pascal Chabert et al.
Plasma Sources Science and Technology, 2016, 25 (3), pp.035019 ⟨10.1088/0963-0252/25/3/035019⟩
Article dans une revue hal-01346016 v1

Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

E. Schüngel , Ihor Korolov , Bastien Bruneau , A. Derzsi , E.V. Johnson et al.
Journal of Physics D: Applied Physics, 2016, 49 (26), pp.265203. ⟨10.1088/0022-3727/49/26/265203⟩
Article dans une revue hal-01549338 v1

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bastien Bruneau , Ihor Korolov , Trevor Lafleur , T. Gans , D. O'Connell et al.
Journal of Applied Physics, 2016, 119 (16), pp.163301. ⟨10.1063/1.4947453⟩
Article dans une revue hal-01549329 v1

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H<SUB>2</SUB> and CF<SUB>4</SUB>

Bastien Bruneau , Trevor Lafleur , T. Gans , D. O'Connell , Arthur Greb et al.
Plasma Sources Science and Technology, 2016, 25 (1), pp.01LT02. ⟨10.1088/0963-0252/25/1/01LT02⟩
Article dans une revue hal-01549332 v1

Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms

Bastien Bruneau , Trevor Lafleur , Jean-Paul Booth , Erik Johnson
Plasma Sources Science and Technology, 2016, 25 (2), pp.025006. ⟨10.1088/0963-0252/25/2/025006⟩
Article dans une revue hal-01549334 v1

Pressure broadening of atomic oxygen two-photon absorption laser induced fluorescence

Daniil Marinov , Cyril Drag , Christophe Blondel , Olivier Guaitella , Judith Golda et al.
Plasma Sources Science and Technology, 2016, 25 (6), pp.06LT03. ⟨10.1088/0963-0252/25/6/06LT03⟩
Article dans une revue hal-01549339 v1

A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma

Efe Kemaneci , Jean-Paul Booth , Pascal Chabert , Jan van Dijk , Thomas Mussenbrock et al.
Plasma Sources Science and Technology, 2016, 25 (2), pp.025025. ⟨10.1088/0963-0252/25/2/025025⟩
Article dans une revue hal-01549335 v1

Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , E.V. Johnson et al.
Physical Review Letters, 2015, 114, pp.125002. ⟨10.1103/PhysRevLett.114.125002⟩
Article dans une revue hal-01549359 v1

Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson
Plasma Sources Science and Technology, 2015, 24 (1), pp.015021. ⟨10.1088/0963-0252/24/1/015021⟩
Article dans une revue hal-01549355 v1

TALIF measurements of oxygen atom density in the afterglow of a capillary nanosecond discharge

A.V. Klochko , J. Lemainque , Jean-Paul Booth , Svetlana Starikovskaia
Plasma Sources Science and Technology, 2015, 24 (2), pp.025010. ⟨10.1088/0963-0252/24/2/025010⟩
Article dans une revue hal-01549360 v1

Gas temperature measurements in oxygen plasmas by high-resolution Two-Photon Absorption Laser-induced Fluorescence

Jean-Paul Booth , Daniil Marinov , Mickaël Foucher , Olivier Guaitella , D. Bresteau et al.
Journal of Instrumentation, 2015, 10 (11), pp.C11003. ⟨10.1088/1748-0221/10/11/C11003⟩
Article dans une revue hal-01549365 v1

Highly vibrationally excited O<SUB>2</SUB> molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy

Mickaël Foucher , Daniil Marinov , Emile Carbone , Pascal Chabert , Jean-Paul Booth
Plasma Sources Science and Technology, 2015, 24 (4), pp.042001. ⟨10.1088/0963-0252/24/4/042001⟩
Article dans une revue hal-01549357 v1

Electron heating in capacitively coupled plasmas revisited

Trevor Lafleur , Pascal Chabert , Jean-Paul Booth
Plasma Sources Science and Technology, 2014, 23 (3), pp.035010. ⟨10.1088/0963-0252/23/3/035010⟩
Article dans une revue hal-01549379 v1

Electron transport parameters in NF<SUB>3</SUB>

V. A. Lisovskiy , V. D. Yegorenkov , P. Ogloblina , Jean-Paul Booth , S. Martins et al.
Journal of Physics D: Applied Physics, 2014, 47 (11), pp.115203. ⟨10.1088/0022-3727/47/11/115203⟩
Article dans une revue hal-01549378 v1

Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments

P. Diomede , D. J. Economou , Trevor Lafleur , Jean-Paul Booth , S. Longo
Plasma Sources Science and Technology, 2014, 23 (6), pp.065049. ⟨10.1088/0963-0252/23/6/065049⟩
Article dans une revue hal-01549381 v1

Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges

Trevor Lafleur , Pascal Chabert , Miles Turner , Jean-Paul Booth
Plasma Sources Science and Technology, 2014, 23 (1), pp.015016. ⟨10.1088/0963-0252/23/1/015016⟩
Article dans une revue hal-01549398 v1

Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Nishant Sirse , Mickaël Foucher , Pascal Chabert , Jean-Paul Booth
Plasma Sources Science and Technology, 2014, 23 (6), pp.062003. ⟨10.1088/0963-0252/23/6/062003⟩
Article dans une revue hal-01549574 v1

Global (volume-averaged) model of inductively coupled chlorine plasma: Influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

Efe Kemaneci , Emile Carbone , Jean-Paul Booth , Wouter Graef , Jan van Dijk et al.
Plasma Sources Science and Technology, 2014, 23 (4), pp.045002. ⟨10.1088/0963-0252/23/4/045002⟩
Article dans une revue hal-01549388 v1

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson
Plasma Sources Science and Technology, 2014, 23 (6), pp.065010. ⟨10.1088/0963-0252/23/6/065010⟩
Article dans une revue hal-01549377 v1

Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
Plasma Physics and Controlled Fusion, 2013, 55 (12), pp.124002. ⟨10.1088/0741-3335/55/12/124002⟩
Article dans une revue hal-01549416 v1

Theory for the self-bias formation in capacitively coupled plasmas excited by arbitrary waveforms

Trevor Lafleur , Pascal Chabert , M.M. Turner , Jean-Paul Booth
Plasma Sources Science and Technology, 2013, 22 (6), pp.065013. ⟨10.1088/0963-0252/22/6/065013⟩
Article dans une revue hal-01549415 v1

Anomalous collisionality in low-pressure plasmas

Trevor Lafleur , Pascal Chabert , M.M. Turner , Jean-Paul Booth
Physics of Plasmas, 2013, 20 (12), pp.124503. ⟨10.1063/1.4859155⟩
Article dans une revue hal-01549421 v1

Chlorine atom densities in the (3p<SUP>5</SUP>)<SUP>2</SUP> P<SUP>0</SUP><SUB>1/2</SUB> excited spin-orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma

Nishant Sirse , Jean-Paul Booth , Pascal Chabert , A. Surzhykov , P. Indelicato
Journal of Physics D: Applied Physics, 2013, 46 (29), pp.295203. ⟨10.1088/0022-3727/46/29/295203⟩
Article dans une revue hal-01549418 v1

Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Pierre-Alexandre Delattre , Trevor Lafleur , Erik Johnson , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2013, 46, pp.235201. ⟨10.1088/0022-3727/46/23/235201⟩
Article dans une revue hal-01549413 v1

Direct observation of ozone formation on SiO<SUB>2</SUB> surfaces in O<SUB>2</SUB> discharges

Daniil Marinov , Olivier Guaitella , Jean-Paul Booth , Antoine Rousseau
Journal of Physics D: Applied Physics, 2013, 46, pp.032001. ⟨10.1088/0022-3727/46/3/032001⟩
Article dans une revue hal-01549402 v1

Fine-structure-resolved electron collisions from chlorine atoms in the (3p<SUP>5</SUP>)<SUP>2</SUP>P<SUB>3/2</SUB><SUP>o</SUP> and (3p<SUP>5</SUP>)<SUP>2</SUP>P<SUB>1/2</SUB><SUP>o</SUP> states

Yang Wang , Oleg Zatsarinny , Klaus Bartschat , Jean-Paul Booth
Physical Review A : Atomic, molecular, and optical physics [1990-2015], 2013, 87, pp.022703. ⟨10.1103/PhysRevA.87.022703⟩
Article dans une revue hal-01549405 v1

Normal regime of the weak-current mode of an rf capacitive discharge

V. A. Lisovskiy , V. D. Yegorenkov , E. Artushenko , Jean-Paul Booth , S. Martins et al.
Plasma Sources Science and Technology, 2013, 22 (1), pp.015018. ⟨10.1088/0963-0252/22/1/015018⟩
Article dans une revue hal-01549408 v1

Secondary electron induced asymmetry in capacitively coupled plasmas

Trevor Lafleur , Pascal Chabert , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2013, 46, pp.135201. ⟨10.1088/0022-3727/46/13/135201⟩
Article dans une revue hal-01549417 v1

Absolute atomic oxygen and nitrogen densities in radio-frequency driven atmospheric pressure cold plasmas: Synchrotron vacuum ultra-violet high-resolution Fourier-transform absorption measurements

K. Niemi , D. O'Connell , N. de Oliveira , D. Joyeux , L. Nahon et al.
Applied Physics Letters, 2013, 103 (3), pp.034102. ⟨10.1063/1.4813817⟩
Article dans une revue hal-01549425 v1

Ozone kinetics in low-pressure discharges: vibrationally excited ozone and molecule formation on surfaces

Daniil Marinov , V. Guerra , Olivier Guaitella , Jean-Paul Booth , Antoine Rousseau
Plasma Sources Science and Technology, 2013, 22, pp.055018. ⟨10.1088/0963-0252/22/5/055018⟩
Article dans une revue hal-01549572 v1

Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges

Jean-Paul Booth , Trevor Lafleur
Applied Physics Letters, 2013, 102, pp.154104. ⟨10.1063/1.4802241⟩
Article dans une revue hal-01549406 v1

Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , Sébastien Diné
Review of Scientific Instruments, 2013, 84, pp.015001. ⟨10.1063/1.4773540⟩
Article dans une revue hal-01549400 v1

Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
Journal of Non-Crystalline Solids, 2012, 358 (17), pp.1974-1977. ⟨10.1016/j.jnoncrysol.2012.01.014⟩
Article dans une revue istex hal-01549432 v1

Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms

Trevor Lafleur , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2012, 45, pp.395203. ⟨10.1088/0022-3727/45/39/395203⟩
Article dans une revue istex hal-01549449 v1

Tailored voltage waveform deposition of Microcrystalline Silicon thin films from hydrogen-diluted silane and silicon tetrafluoride: optoelectronic properties of films

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
Japanese Journal of Applied Physics, 2012, 51, pp.08HF01. ⟨10.1143/JJAP.51.08HF01⟩
Article dans une revue hal-01549433 v1

Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
Applied Physics Letters, 2012, 100, pp.133504. ⟨10.1063/1.3699222⟩
Article dans une revue hal-01549437 v1

Absolute atomic chlorine densities in a Cl<SUB>2</SUB> ICP determined by Two-Photon Laser Induced Fluorescence with a new calibration method

Jean-Paul Booth , Yasmina Azamoum , Nishant Sirse , Pascal Chabert
Journal of Physics D: Applied Physics, 2012, 45, pp.195201. ⟨10.1088/0022-3727/45/19/195201⟩
Article dans une revue istex hal-01549434 v1

Separate control of the ion flux and ion energy in capacitively coupled rf discharges using voltage waveform tailoring

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
Applied Physics Letters, 2012, 101, pp.124104. ⟨10.1063/1.4754692⟩
Article dans une revue hal-01549435 v1

Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

Trevor Lafleur , R.W. Boswell , Jean-Paul Booth
Applied Physics Letters, 2012, 100, pp.194101. ⟨10.1063/1.4712128⟩
Article dans une revue hal-01549438 v1

A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring

V. Samara , Jean-Paul Booth , J.-F. de Marneffe , A.P. Milenin , M. Brouri et al.
Plasma Sources Science and Technology, 2012, 21, pp.065004. ⟨10.1088/0963-0252/21/6/065004⟩
Article dans une revue istex hal-01549444 v1

Control of Nanocrystalline Silicon Growth Phase and Deposition Rate through Voltage Waveform Tailoring during PECVD

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
MRS Online Proceedings Library, 2011, 1339, pp.mrss11-1339-s04-5. ⟨10.1557/opl.2011.993⟩
Article dans une revue hal-01549456 v1

Surface loss rates of H and Cl atoms in an inductively coupled plasma etcher using time-resolved electron density and optical emission measurements

G. A. Curley , L. Gatilova , S. Guilet , S. Bouchoule , G. S. Gogna et al.
Journal of Vacuum Science & Technology A, 2010, 28 (2), pp.360-372. ⟨10.1116/1.3330766⟩
Article dans une revue hal-01549465 v1

Plasmas froids

Jean-Paul Booth , Pascal Chabert
FlashX, 2010, 12, pp.3-5
Article dans une revue hal-02570443 v1

Electron drift velocity in SF<SUB>6</SUB> in strong electric fields determined from rf breakdown curves

V. Lisovskiy , V. Yegorenkov , Jean-Paul Booth , K. Landry , D. Douai et al.
Journal of Physics D: Applied Physics, 2010, 43, pp.385203. ⟨10.1088/0022-3727/43/38/385203⟩
Article dans une revue istex hal-01549464 v1

Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux

Jean-Paul Booth , G. Curley , D. Marić , Pascal Chabert
Plasma Sources Science and Technology, 2010, 19, pp.015005. ⟨10.1088/0963-0252/19/1/015005⟩
Article dans une revue istex hal-01549466 v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

E.V. Johnson , T. Verbeke , J-C Vanel , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2010, 43, pp.412001. ⟨10.1088/0022-3727/43/41/412001⟩
Article dans une revue istex hal-01549485 v1

Electron transport coefficients in mixtures of CF<SUB>4</SUB> and CF<SUB>2</SUB> radicals

Zd Nikitovic , Vd Stojanovic , Jean-Paul Booth , Zl Petrovic
Plasma Sources Science and Technology, 2009, 18, pp.035008. ⟨10.1088/0963-0252/18/3/035008⟩
Article dans une revue istex hal-01549497 v1

Chlorine dissociation fraction in an inductively coupled plasma measured by ultraviolet absorption spectroscopy

F. Neuilly , J.P Booth , L. Vallier
Journal of Vacuum Science and Technology, 2002, pp.A20(1), 225, (2002)
Article dans une revue hal-00475898 v1
Image document

Absolute fluorine atoms concentration in fluorocarbon plasma determined from CF2 loss kinetics

Gilles Cunge , Pascal Chabert , Jean-Paul Booth
Journal of Applied Physics, 2001, 89 (12), pp.7750. ⟨10.1063/1.1371940⟩
Article dans une revue hal-00475790 v1

Reactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2 etch products

Pascal Chabert , G. Cunge , Jean-Paul Booth
Applied Physics Letters, 2001, pp.79, 916
Article dans une revue hal-00475792 v1

Improving our understanding of plasma-surface interactions through in-situ measurements

Jean-Paul Booth
Dry Process Symposium, Nov 2023, Nagoya, Japan
Communication dans un congrès hal-04397985 v1

Probing surface reactivity in plasmas- is it valid to use a constant reaction probability model?

Jean-Paul Booth
GEC Gaseous Electronics Conference, American Physical Society, Oct 2023, Ann Arbor, MI, USA, United States
Communication dans un congrès hal-04398014 v1

What We Still Don't Know About Plasmas in Simple Diatomic Gases- or Using a DC Plasma in Pure O2 as an Ideal Test-Bed for Experimental Validation of Simulations

Jean-Paul Booth
AVS Symposium, Nov 2022, Pittsburgh, PA, United States
Communication dans un congrès hal-04398035 v1

Laser Cavity Ringdown Spectroscopy of Oxygen Plasmas: Direct Measurement of the Densities of Oxygen Atoms, Ozone and Negative Ions and Gas Temperature

Jean-Paul Booth
Online Low Temperature Plasma Seminar, May 2021, On line, United States
Communication dans un congrès hal-03317442 v1

Filling the Gaps in Our Understanding of Plasmas in Simple Diatomic Gases- Combining a DC Plasma in Pure O2 with Multiple Advanced Diagnostics for Experimental Validation of Simulations

Jean-Paul Booth
IS Plasma, University of Nagoya, Mar 2021, Nagoya (on line), Japan
Communication dans un congrès hal-04398109 v1
Image document

Filling the Gaps in Our Understanding of Plasmas in Simple Diatomic Gases-Combining a DC Plasma in Pure O2 with Multiple Advanced Diagnostics for Experimental Validation of Simulations

Jean-Paul Booth , A Chatterjee , O Guaitella , D Lopaev , S Zyryanov et al.
IS Plasma 2021, Mar 2021, Nagoya, Japan
Communication dans un congrès hal-03317344 v1

A new look at oxygen plasmas : Quantitative VUV and IR absorption spectroscopy of reactive intermediates

Jean-Paul Booth
JSM -Journees de Spectroscopie Moleculaire, Universite de Rennes/ Societe Francaise de Physique, Jun 2021, Rennes, France
Communication dans un congrès hal-04398064 v1

Experimental and numerical investigation of an iodine plasma

Florian Marmuse , Benjamin Esteves , Cyril Drag , Jean-Paul Booth , Anne Bourdon et al.
73rd Annual Gaseous Electronics Virtual Conference, Oct 2020, Virtual, United States
Communication dans un congrès hal-03322751 v1

A NEW LOOK AT OXYGEN PLASMAS -QUANTITATIVE SPECTROSCOPY FOR RIGOROUS TESTING OF MODELS

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Dmitry Lopaev , Sergey Zyryanov et al.
International Symposium on the Physics of Ionized Gases, Aug 2020, Sabac, Serbia
Communication dans un congrès hal-03017283 v1

A new look at Oxygen Plasmas – Quantitative Spectroscopy for rigorous testing of models

Jean-Paul Booth
SPIG - Symposium on Physics of Ionised Gases, Aug 2020, Sabac, Serbia. pp.1
Communication dans un congrès hal-04398151 v1

Tailoring OH and O production in an atmospheric-pressure plasma in Helium with O2 and H2O admixtures

Erik Wagenaars , Alexandra Brisset , Sandra Schröter , Kari Niemi , Deborah O'Connell et al.
GEC2020 Meeting of The American Physical Society, Oct 2020, San Diego, United States
Communication dans un congrès hal-03017258 v1

XXXIV ICPIG & ICRP-10

Olivier Guaitella , Ana-Sofia Morillo-Candas , Tiago Dias , Edmond Baratte , P. Ogloblina et al.
Influence of surfaces in the kinetic of CO2 plasma, Jul 2019, Sapporo, Hokkaido, Japan
Communication dans un congrès hal-02371063 v1

Novel diagnostics to unravel fundamental processes in oxygen plasmas

Jean-Paul Booth
ICAPT-7 : 7th International Conference on Advanced Plasma Technologies, Plasmadis, Feb 2019, Hue, Vietnam
Communication dans un congrès hal-04398232 v1

A Comprehensive Diagnostic Study of a DC Positive Column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth
CESPC-Central European Symposium on Plasma Chemistry, May 2019, Gozd Martuljek, Slovenia
Communication dans un congrès hal-04398185 v1

A comprehensive diagnostic study of a DC positive column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Cyril Drag , N. de Oliveira et al.
Frontiers in low Temperature plasma simulation, May 2019, Bad Honnef, Germany
Communication dans un congrès hal-02341779 v1

Experimental Demonstration of Multifrequency Matching for Tailored Voltage Waveform Plasma Excitation

Sebastien Dine , Jean-Paul Booth , E.V. Johnson , Junkang Wang
International Conference on Phenomena in Ionised Gases, Jul 2019, Hokkaido, Japan
Communication dans un congrès hal-02341689 v1

Novel diagnostics to unravel fundamental processes in oxygen plasmas

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Cyril Drag , Dmitry Lopaev et al.
7th International Conference on Advanced Plasma Technologies, Feb 2019, Hue, Vietnam
Communication dans un congrès hal-02341778 v1

A comprehensive diagnostic study of a DC positive column in O<SUB>2</SUB>: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.
7th International Conference on Advanced Plasma Technologies, May 2019, Gozd Martuljek, Slovenia
Communication dans un congrès hal-02341781 v1
Image document

Optical and electrical diagnostics in an iodine plasma

Florian Marmuse , Romain Lucken , Cyril Drag , Jean-Paul Booth , Anne Bourdon et al.
36th International Electric Propulsion Conference (IEPC 2019), Sep 2019, Vienne, Austria
Communication dans un congrès hal-02341690 v1

A Comprehensive Diagnostic Study of a DC Positive Column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth
Frontiers in low Temperature plasma simulation, May 2019, Bad Honnef (Germany), Germany
Communication dans un congrès hal-04398198 v1

Vacuum ultraviolet absorption spectroscopy of oxygen discharges

Jean-Paul Booth
3rd European Conference on Plasma Diagnostics, May 2019, Lisbon, Portugal
Communication dans un congrès hal-02341780 v1

63rd Course of the International School of Quantum Electronics

Olivier Guaitella , Ana-Sofia Morillo-Candas , Cyril Drag , Jean-Paul Booth , Bart Klarenaar et al.
Diagnostics to study vibrational excitation kinetics of CO2, Sep 2019, Erice, Italy
Communication dans un congrès hal-02371062 v1

Effect of high surface-area on CO<SUB>2</SUB> plasma kinetics

Ana-Sofia Morillo-Candas , C. Goncalves , Bart Klarenaar , Jean-Paul Booth , Cyril Drag et al.
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom
Communication dans un congrès hal-02342226 v1

High&#8722;resolution VUV absorption diagnostics of discharges in oxygen

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.
20th Gaseous Electronics Meeting, Jun 2018, Magnetic Island, Townsville, Queensland, Australia
Communication dans un congrès hal-02341777 v1

Diagnostics of plasma neutral species in a very high frequency oxygen plasma with high sensitivity broadband absorption spectroscopy

J. Zhao , Peter L G Ventzek , Barton Lane , Toshihiko Iwao , Kiyotaka Ishibashi et al.
AVS Symposium, Oct 2018, Long Beach, California, United States
Communication dans un congrès hal-02342227 v1

Comparison of gas temperature measurements with Raman, FTIR and HR-TALIF

Ana-Sofia Morillo-Candas , Bart Klarenaar , Marija Grofulovic , Cyril Drag , Jean-Paul Booth et al.
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom
Communication dans un congrès hal-02342225 v1

Oxygen metastable molecule densities in inductively-coupled plasmas in pure O<SUB>2</SUB> measured by VUV absorption

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.
71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States
Communication dans un congrès hal-02342229 v1

Vacuum ultraviolet absorption spectroscopy of oxygen discharges

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.
The 8th International Workshop on Plasma Spectroscopy, Sep 2018, Oxford, United Kingdom
Communication dans un congrès hal-02342224 v1

Multi-species experimental validation of plasma chemistry models at atmospheric pressure

Sandra Schröter , A. Wijiakaum , Andrew Gibson , Jérôme Bredin , K. Niemi et al.
Frontiers in Low temperature Plasma Simulation, May 2018, Dublin, Ireland
Communication dans un congrès hal-02342228 v1

High-resolution VUV absorption diagnostics of discharges in oxygen

Jean-Paul Booth
GEM XX : 10th Gaseous Electronic Meeting, Jun 2018, Magnetic Island, Townsville, Queensland, Australia
Communication dans un congrès hal-04398249 v1

Probing mechanisms in low-temperature reactive gas plasmas: towards improved models of industrial plasma etch processes

Jean-Paul Booth
2nd European Conference on Plasma Diagnostics, Apr 2017, Bordeaux, France
Communication dans un congrès hal-02573369 v1

Kinetics of metastable states and atoms in DC discharges in pure O<SUB>2</SUB>: An experimental study

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.
23rd International Symposium on Plasma Chemistry, Jul 2017, Montréal, Canada
Communication dans un congrès hal-02593710 v1

High resolution Two-photon Absorption Laser-Induced Fluorescence (TALIF) with a single-mode nanosecond Ti:Sapphire laser

Ana-Sofia Morillo-Candas , Pierre Lottigier , Cyril Drag , Christophe Blondel , Jean-Paul Booth et al.
18th, Laser Aided Plasma Diagnostics, Sep 2017, Prague, Czech Republic, Unknown Region
Communication dans un congrès hal-02593711 v1

New methods to determine density, temperature and thermal accommodation coefficient of oxygen atoms

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Andrew Gibson , Cyril Drag et al.
International Workshop on Radio-frequency Plasmas, May 2017, Presqu ile de Giens, France
Communication dans un congrès hal-02593706 v1

The role of translational and vibrational energy in processing plasmas: novel optical diagnostics of low-pressure Cl<SUB>2</SUB> and O<SUB>2</SUB> inductively-coupled plasmas

Jean-Paul Booth
1st Asia-Pacific Conference on Plasma Physics, Sep 2017, Chengdu, China
Communication dans un congrès hal-02573371 v1

Kinetics of atoms and metastable molecules in oxygen plasmas revisited: an experimental study

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Ana-Sofia Morillo-Candas , Cyril Drag et al.
10th EU-Japan Joint Symposium on Plasma Processing, Dec 2017, Okinawa, Japan
Communication dans un congrès hal-02573372 v1

O atom kinetics in CO<SUB>2</SUB> pulsed glow discharges

Ana-Sofia Morillo-Candas , Bart Klarenaar , Richard Engeln , Abhyuday Chatterjee , Jean-Paul Booth et al.
XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal
Communication dans un congrès hal-02593709 v1

Single-mode nanosecond Ti: Sapphire laser for high resolution Two-photon Absorption Laser Induced-Fluorescence (TALIF)

Daniil Marinov , Christophe Blondel , Jean-Paul Booth , Olivier Guaitella , Pierre Lottigier et al.
2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference, Jun 2017, Munich, Germany. Paper# CH_3_3
Communication dans un congrès hal-02588053 v1

2 Dimensional PIC/MCC simulations of RF CCPs with dielectric side wall: non-uniformity in electron heating

Yue Liu , Jean-Paul Booth , Pascal Chabert
International Workshop on Radio-Frequency Plasmas, May 2017, Presqu’ile de Giens, France
Communication dans un congrès hal-02593707 v1

Vibrational excitation and temperature evolution in a pulsed CO<SUB>2</SUB> discharge

Olivier Guaitella , Ana-Sofia Morillo-Candas , David Yap , Cyril Drag , Jean-Paul Booth et al.
70th Annuel Gaseous Electronics Conference (GEC 2017), 2017, Pittsburgh, Pennsylvania, United States
Communication dans un congrès hal-02592107 v1

Plasma-surface interaction: Heterogeneous processes of atmospheric gases

Daniil Marinov , Olivier Guaitella , V. Guerra , Jean-Paul Booth , Antoine Rousseau
ESCAMPIG, Jul 2016, Bratislava, Slovakia
Communication dans un congrès hal-02573354 v1

Vibrational excitation in O<SUB>2</SUB> and Cl<SUB>2 </SUB> inductively-coupled plasmas and DC discharges

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Andrew Gibson , Pascal Chabert et al.
ESCAMPIG Workshop on electron processes active in low temperature plasmas, Jul 2016, Bratislava, Slovakia
Communication dans un congrès hal-02573355 v1

The role of surface interaction probabilities in reactive plasma modelling

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.
ESCAMPIG, Jul 2016, Bratislava, Slovakia
Communication dans un congrès hal-02593684 v1

Quantitative Diagnostics of Inductively-coupled Radiofrequency Plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures

Jean-Paul Booth , Mickaël Foucher , Andrew Gibson , Daniil Marinov
International Symposium on Gas Kinetics and Related Phenomena, Jul 2016, York, United Kingdom
Communication dans un congrès hal-02593687 v1

Charged and neutral particle dynamics in low pressure chlorine and oxygen plasmas: the role of collisional processes

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.
EPS Plasma, Jul 2016, Leuven, Belgium
Communication dans un congrès hal-02573351 v1

Multifrequency impedance matching solutions for plasma excitation by Tailored Voltage Waveforms

Erik Johnson , Sebastien Dine , Jean-Paul Booth
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès hal-02593689 v1

Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary

Yue Liu , Jean-Paul Booth , Pascal Chabert
GEC, Oct 2016, Bochum, Germany
Communication dans un congrès hal-02593691 v1

Gas temperature measuements by high-resolution TALIF

Jean-Paul Booth
Workshop on Oxygen Plasma Kinetics, Sep 2016, Reykjavik, Iceland
Communication dans un congrès hal-02593694 v1

Reactive species in humidity containing atmospheric pressure plasma jets − Numerical and experimental investigations

Sandra Schröter , Jérôme Bredin , A. West , J. Dedrick , K. Niemi et al.
GEC, Oct 2016, Bochum, Germany
Communication dans un congrès hal-02593693 v1

Translational and Vibrational Energy in Cl<SUB>2</SUB> and O<SUB>2</SUB> Plasmas Probed by Innovative Optical Diagnostics

Jean-Paul Booth , Daniil Marinov , Mickaël Foucher , Olivier Guaitella , Cyril Drag et al.
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès hal-02573357 v1

ELECTRON POWER ABSORPTION DYNAMICS AND ION ENERGY DISTRIBUTIONS IN CAPACITIVE DISCHARGES DRIVEN BY CUSTOMIZED VOLTAGE WAVEFORMS IN ARGON AND CF<SUB>4</SUB>

B. Berger , S. Brandt , J. Franek , E. Shuengel , M. Koepke et al.
IEEE-ICOPS, Jun 2016, Banff, Canada
Communication dans un congrès hal-02593683 v1

The importance of surface interaction probabilities in low pressure plasma simulations for process design

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.
PESM (Plasma Etch and Strip for Microelectronics), May 2016, Grenoble, France
Communication dans un congrès hal-02593686 v1

Modelling of tailored ion energy distributions for plasma processing applications

P. Diomede , Trevor Lafleur , Jean-Paul Booth , S. Longo , D. J. Economou
ESCAMPIG, Jul 2016, Bratislava, Slovakia
Communication dans un congrès hal-02573353 v1

Dynamics of inductive plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> and Cl<SUB>2</SUB>/O<SUB>2</SUB> mixtures: quantitative diagnostics and numerical modelling

Daniil Marinov , Mickaël Foucher , Andrew Gibson , Pascal Chabert , Jean-Paul Booth
IVC (International Vacuum Conference), Aug 2016, Busan, Korea, Unknown Region
Communication dans un congrès hal-02573356 v1

Modelling and experimental validation of capacitively coupled plasmas in hydrogen

D. Diomede , Bastien Bruneau , Trevor Lafleur , D. J. Economou , S. Longo et al.
EPS Plasma, Jul 2016, Leuven, Belgium
Communication dans un congrès hal-02573350 v1

Charged Particle Dynamics in Technological Radio Frequency Plasmas Operated in CF<SUB>4</SUB>

J. Schulze , B. Berger , S. Brandt , Bastien Bruneau , Y. Liu et al.
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès hal-02573358 v1

Heating dynamics and control of energy distribution functions in capacitive discharges driven by tailored voltage waveforms

J. Schulze , B. Berger , S. Brandt , M. Koepke , T. Mussenbrock et al.
International Conference on Plasma Physics ICPP, Jun 2016, Kaohsiung, Taiwan
Communication dans un congrès hal-02573352 v1

Vibrational excitation in O<SUB>2</SUB> and Cl<SUB>2</SUB> inductively-coupled plasmas and DC discharges

V. Guerra , Jean-Paul Booth , Daniil Marinov , Mickaël Foucher , Adriana Annusova
GEC, Oct 2016, Bochum, Germany
Communication dans un congrès hal-02593690 v1

Cleaning and doping of CVD graphene using tailored voltage waveform capacitively coupled plasma

Daniil Marinov , Bastien Bruneau , Erik Johnson , Jean-Paul Booth
Plasma Etch and Strip in Microelectronics _PESM, Apr 2015, Louvain, Belgium
Communication dans un congrès hal-02593662 v1

Inductively-coupled plasmas in Cl<SUB>2</SUB> and O<SUB>2</SUB>: Comparing HPEM with advanced diagnostic measurements

Jean-Paul Booth , Mickaël Foucher , Andrew Gibson , Daniil Marinov , Nishant Sirse et al.
Quantumol Workshop -Linking Simulation with Experiment, Sep 2015, London, United Kingdom
Communication dans un congrès hal-02573341 v1

Validation of Inductively Coupled Plasmas Sustained in Halogen Chemistries

Ankur Agarwal , Mickaël Foucher , S. Rauf , Jean-Paul Booth , Pascal Chabert et al.
AVS Annual Symposium, Oct 2015, San Jose, California, United States
Communication dans un congrès hal-02593676 v1

Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures

Jean-Paul Booth
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland
Communication dans un congrès hal-02573339 v1

101 uses of Cold Plasmas: from smartphones to space travel

Jean-Paul Booth
Plas@par International Summer School : Discover Plasmas, Aug 2015, Roscoff, France
Communication dans un congrès hal-02573342 v1

Detection of Biomedically Relevant Reactive Oxygen Species in Atmospheric Pressure Plasmas

Sandra Schröter , Jérôme Bredin , K. Niemi , J. Dedrick , Mickaël Foucher et al.
AVS Symposium, Oct 2015, San Jose, California, United States
Communication dans un congrès hal-02593680 v1

Density and temperature measurements in ICP's of Cl<SUB>2</SUB>/O<SUB>2</SUB> using high sensitivity ultra broad-band absorption spectroscopy

Mickaël Foucher , Daniil Marinov , Emile Carbone , Pascal Chabert , Jean-Paul Booth
International Symposium on Plasma Chemistry, Jul 2015, Anvers, Belgium
Communication dans un congrès hal-02593678 v1

Reactive species generated in atmospheric-pressure plasmas with water admixtures for biomedical applications: Absolute measurements and numerical simulations

Sandra Schröter , Jérôme Bredin , A. West , K. Niemi , J. Dedrick et al.
Gaseaous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès hal-02593672 v1

Vibrational kinetics in Cl<SUB>2</SUB> and O<SUB>2</SUB> low-pressure inductively-coupled plasmas

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Adriana Annusova et al.
Gaseous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès hal-02593669 v1

Modelling the influence of neutral gas heating mechanisms on particle densities in inductively coupled chlorine discharges

Andrew Gibson , T. Gans , Mickaël Foucher , Daniil Marinov , Pascal Chabert et al.
Gaseous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès hal-02593670 v1

Low Pressure Plasma Cleaning and Doping of CVD Graphene

D. Marinov , G. Cunge , D. Ferrah , E.V. Johnson , J.P. Booth
AVS 62nd International Symposium & Exhibition, 2015, San José, United States
Communication dans un congrès hal-01878405 v1

Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl<SUB>2</SUB>/O<SUB>2</SUB> mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert
Frontiers in Low-temperature Plasma Diagnostics FLTPD, May 2015, Porquerolles, France
Communication dans un congrès hal-02593663 v1

Quantitative Diagnostics of Inductive Plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> AND Cl<SUB>2</SUB>/O<SUB>2</SUB> Mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert
Symposium on Application of Plasma Processes, Jan 2015, Vysoké Tatry, Slovakia
Communication dans un congrès hal-02573337 v1

A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> and Mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Ankur Agarwal et al.
AVS Symposium, Oct 2015, San Jose, California, United States
Communication dans un congrès hal-02593682 v1

Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert
MRS-Japan, Dec 2015, Yokohama, Japan
Communication dans un congrès hal-02573344 v1

Gas Temperature Measurements in Plasmas by High-Resolution TALIF

Jean-Paul Booth , Olivier Guaitella , Daniil Marinov , Mickaël Foucher , Cyril Drag et al.
Laser AIded Plasma Diagnostics LAPD, Sep 2015, Sapporo, Japan
Communication dans un congrès hal-02593665 v1

Reactive adsorption of molecules and radicals on surfaces

Daniil Marinov , Olivier Guaitella , Jean-Paul Booth , Antoine Rousseau
22nd International Symposium on Plasma Chemistry, Jul 2015, Antwerp, Belgium
Communication dans un congrès hal-02573340 v1

Capacitively coupled CF<SUB>4</SUB> discharges excited by tailored waveforms: experiments and kinetic simulations

Bastien Bruneau , Erik Johnson , Jean-Paul Booth , Trevor Lafleur , T. Gans et al.
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland
Communication dans un congrès hal-02573343 v1

Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H<SUB>2</SUB>, and CF<SUB>4</SUB> plasmas

Bastien Bruneau , Erik Johnson , T. Gans , Arthur Greb , Ihor Korolov et al.
Gaseaous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès hal-02593667 v1

Ion flux asymmetry obtained by sawtooth-like waveforms: A new degree of freedom in capacitively coupled plasmas

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , Trevor Lafleur et al.
Plasma Etch and Strip in Microelectronics (PESM), Apr 2015, Louvain, Belgium
Communication dans un congrès hal-02593661 v1

Inductively-coupled plasmas of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurement of atoms, Cl<SUB>x</SUB>O<SUB>y</SUB> and electron densities

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
PESM, May 2014, Grenoble, France
Communication dans un congrès hal-02593657 v1

Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , Erik Johnson
AVS Annual Symposium, Nov 2014, Baltimore, Maryland, United States
Communication dans un congrès hal-02593674 v1

Inductively-coupled plasmas of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurement of atoms, Cl<SUB>x</SUB>O<SUB>y</SUB> and electron densities

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert
GEC, Nov 2014, Raleigh, North Carolina, United States
Communication dans un congrès hal-02593658 v1

Diagnostics of Cl<SUB>2</SUB>/O<SUB>2</SUB> Inductively-Coupled Plasmas by Ultra-High sensitivity Broad-Band Absorption Spectroscopy

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert
AVS, Nov 2014, Baltimore, Maryland, United States
Communication dans un congrès hal-02593659 v1

Dynamique des Plasmas à Couplage Inductive dans les gaz HBr, Cl<SUB>2</SUB> et O<SUB>2</SUB> et mixtures: Diagnostiques Laser et Absorption Ultraviolet Large-Bande

Jean-Paul Booth , Mickaël Foucher , Pascal Chabert
Colloque de Plasma-Québec, Jun 2014, Montreal, Canada
Communication dans un congrès hal-02573338 v1

A model for capacitive discharges with arbitrary RF waveform excitation including the electrical asymmetry effect and the associated self-bias

Pascal Chabert , Trevor Lafleur , Jean-Paul Booth , Miles Turner
8th International Conference on reactive Plasma, Feb 2014, Fukuoka, Japan
Communication dans un congrès hal-02573360 v1

Experimental and numerical study of fast gas heating and O atom production in a capillary nanosecond discharge

A.V. Klochko , A. Salmon , J. Lemainque , N.A. Popov , Jean-Paul Booth et al.
52st AIAA Aerospace Sciences Meeting, Jan 2014, National Harbor, Maine, United States. pp.2014-1030
Communication dans un congrès hal-02588024 v1

Diagnostics of Inductively-Coupled Plasmas in Hydrogen Bromide : Bromine Atom and Electron Densities

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Mickaël Foucher
AVS Symposium, Oct 2013, Long Beach, California, United States
Communication dans un congrès hal-02594800 v1

Capacitively coupled plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
EPS Plasma, Jul 2013, Espoo, Finland
Communication dans un congrès hal-02573294 v1

Diagnostics of inductively-coupled plasmas in HBr : Bromine atom and electron densities

Jean-Paul Booth , Nishant Sirse , Robert Soriano , Mickaël Foucher , Pascal Chabert
Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States
Communication dans un congrès hal-02594803 v1

Determining atom and radical surface recombination coefficients in low-pressure plasmas

Jean-Paul Booth
Gaseous Electronics Conference : workshop on plasma-surface interactions, Sep 2013, Princeton, New Jersey, United, Unknown Region
Communication dans un congrès hal-02573332 v1

IN-SITU OBSERVATION OF MICROCRYSTALLINE SILICON THIN FILM GROWTH USING TAILORED VOLTAGE WAVEFORMS

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
International Vacuum Conference, Sep 2013, Paris, France
Communication dans un congrès hal-02594804 v1

Tailoring plasma properties using pulse-shaping technology,

Jean-Paul Booth , E.V. Johnson , Trevor Lafleur , Pierre-Alexandre Delattre , R.W. Boswell
21st ISPC, Aug 2013, Cairns, Australia
Communication dans un congrès hal-02573330 v1

OZONE KINETICS IN LOW-PRESSURE DISCHARGES

V. Guerra , Daniil Marinov , Jean-Paul Booth , Olivier Guaitella , Antoine Rousseau
SAPP, Jan 2013, Malá Fatra, Slovakia
Communication dans un congrès hal-02573288 v1

Electron heating in capacitively coupled plasmas revisited: single and multi-frequency discharges

Trevor Lafleur , Pascal Chabert , Miles Turner , Jean-Paul Booth
Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States
Communication dans un congrès hal-02573333 v1

Study of fast gas heating in a capillary nanosecond discharge in air. TALIF O atoms measurements and kinetic modeling (AIAA 2013-0574)

A.V. Klochko , J. Lemainque , N.A. Popov , Jean-Paul Booth , Svetlana Starikovskaia
51st AIAA Aerospace Sciences Meeting, Jan 2013, Grapevine, Texas, United States
Communication dans un congrès hal-02589147 v1

Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Mickaël Foucher , Nishant Sirse , Jean-Paul Booth , Pascal Chabert
Journées d’Echange du Réseau des Technologies des Plasmas Froids, Oct 2013, La Rochelle, France
Communication dans un congrès hal-02594807 v1

Inductively-coupled plasmas in pure chlorine: comparison of atom density, electron density and gas temperature measurements with the HPEM hybrid model.

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , B. Pruvost , M.J. Kushner
RF Plasma workshop, May 2013, Presqu ile de Giens, France
Communication dans un congrès hal-02573293 v1

Optical diagnostics of low-pressure plasmas in halogen gases

Jean-Paul Booth , Pascal Chabert , Nishant Sirse , P. Indelicato , A. Surzykov et al.
ICPIG, Jul 2013, Granada, Spain
Communication dans un congrès hal-02573296 v1

Dynamics of Cl<SUB>2</SUB> inductively-coupled plasmas: Role of electronic and vibrational excitation

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , P. Indelicato , A. Surzhykov et al.
FLTPD, Apr 2013, Rolduc, Netherlands
Communication dans un congrès hal-02573290 v1

Thin Film Deposition with Tailored Voltage Waveforms: Material Questions and Practical Answers

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
RF Plasma workshop, May 2013, Presqu île de Giens, France
Communication dans un congrès hal-02573291 v1

Practical Aspects of using Tailored Voltage Waveforms for Thin Film Processing of Photovoltaic Devices

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
AVS Symposium, Oct 2013, Long Beach, California, United States
Communication dans un congrès hal-02573331 v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas for IEDF and electron density control: Application to Microcrystalline Si Deposition

Jean-Paul Booth , Erik Johnson , Trevor Lafleur , Pierre-Alexandre Delattre
Semicon Korea, Jan 2013, Seoul, Korea, Unknown Region
Communication dans un congrès hal-02573289 v1

Diagnostics of inductively-coupled plasmas in hydrogen bromide : Bromine atom and electron densities

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Mickaël Foucher
UK Technological Plasmas Workshop, Dec 2013, York, United Kingdom
Communication dans un congrès hal-02594799 v1

Vibrational kinetics in a Cl2 inductively-coupled plasma

B. Pruvost , Jean-Paul Booth , Mickaël Foucher , Pascal Chabert , V. Guerra et al.
Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States
Communication dans un congrès hal-02594801 v1

Cl atom spin-orbit excited densities in a Cl<SUB>2</SUB> ICP determined by TALIF

Jean-Paul Booth , Nishant Sirse , P. Indelicato , A. Surzhykov , Y. Wang et al.
UK TPW, Dec 2012, Milton Keynes, United Kingdom
Communication dans un congrès hal-02594737 v1

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl<SUB>2</SUB>

Jean-Paul Booth , Pascal Chabert , Yasmina Azamoum , Nishant Sirse
Plasma Etch and Strip in Microelectronics (PESM), Mar 2012, Grenoble, France
Communication dans un congrès hal-02594730 v1

Absolute Cl and Cl<SUB>2</SUB> densities in a Cl<SUB>2</SUB> ICP determined by TALIF with a new calibration method

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
Technological Plasmas Workshop, Jan 2012, Manchester, United Kingdom
Communication dans un congrès hal-02594794 v1

Cl atom spin-orbit excited densities in a Cl2 ICP determined by TALIF

Jean-Paul Booth , Nishant Sirse , P. Indelicato , Y. Wang , Oleg Zatsarinny et al.
UK Technological Plasmas Workshop, Dec 2012, Milton Keynes, United Kingdom
Communication dans un congrès hal-02594805 v1

Plasma deposition processes excited using Tailored Voltage Waveforms: from microcrystalline silicon thin films to devices

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
AVS Symposium, Oct 2012, Tampa, Floride, United States
Communication dans un congrès hal-02573299 v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas

Jean-Paul Booth , Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès hal-02594732 v1

Plasma characteristics in non-sinusoidally excited CCP discharges

Trevor Lafleur , Jean-Paul Booth
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès hal-02594733 v1

Plasma deposition of nanocrystalline silicon for solar cells : RF waveform tailoring to optimize deposition rate and film morphology

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre
Gaseous Electronics Meeting, Feb 2012, Murramarang, Australia
Communication dans un congrès hal-02573287 v1

Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control

Jean-Paul Booth
Fusion Frontiers and Interfaces Workshop, Mar 2012, York, United Kingdom
Communication dans un congrès hal-02573297 v1

Mesure de densité électronique dans les plasmas froids par techniques micro-ondes

Jean-Paul Booth
Les Journées du Plasma Froid, Oct 2012, Ecully, France
Communication dans un congrès hal-02573281 v1

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl<SUB>2</SUB>

Jean-Paul Booth , Pascal Chabert , Yasmina Azamoum , Nishant Sirse
International Workshop on Plasma Spectroscopy (IPS), May 2012, Presqu ile de Giens, France
Communication dans un congrès hal-02594731 v1

Plasma Excitation using Tailored Voltage Waveforms for the Deposition of Thin Film Silicon for Photovoltaics: From Plasma Physics to Devices

E.V. Johnson , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
5th International Symposium on Atomically Controlled, Oct 2012, Osaka, Japan
Communication dans un congrès hal-02573298 v1

Inductively-coupled plasmas in pure chlorine: comparison experiments/HPEM

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès hal-02594735 v1

Gas temperature measurement in Ar and Ar-Cl<SUB>2</SUB> based ICP discharge: Comparison between experiments and simulations

Nishant Sirse , Quentin Délivré , Jean-Paul Booth , Pascal Chabert
IEEE International Conference on Plasma Science (ICOPS), Jul 2012, Edinburgh, United Kingdom
Communication dans un congrès hal-02594795 v1

Absolute Cl and Cl<SUB>2</SUB> densities in a Cl<SUB>2</SUB> ICP determined by TALIF with a new calibration method

Nishant Sirse , Yasmina Azamoum , Pascal Chabert , Jean-Paul Booth
UK TPW, Dec 2011, Manchester, United Kingdom
Communication dans un congrès hal-02594750 v1

DEPOSITION OF THIN FILM OF SILICON MICROCRISTALLINE BY RADIO FREQUENCY VOLTAGE WAVEFORM TAILORING

S. Pouliquen , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
AVS, Oct 2011, Nashville, Tennessee, United States
Communication dans un congrès hal-02594748 v1

MESURE DE TEMPERATURE DU GAZ DANS UN RÉACTEUR DE GRAVURE DOUBLE FRÉQUENCES CAPACITIF

Jean-Paul Booth , Wladimir Bjelogrlic , Jérôme Bredin
Journees du Reseau Plasmas Froids, May 2011, Toulouse, France
Communication dans un congrès hal-02573301 v1

Tailored Voltage Waveforms for the Deposition of Microcrystalline Silicon

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
ICANS, Aug 2011, Nara, Japan
Communication dans un congrès hal-02594746 v1

Recombination coefficients of Cl atoms on Al<SUB>2</SUB>O<SUB>3</SUB> walls determined by TALIF

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Mujahid Zaka-Ul-Islam , Pascal Chabert
Plasma Etch and Strip for Microelectronics (PESM), May 2011, Mechelen, Belgium
Communication dans un congrès hal-02594744 v1

Atomic Chlorine absolute densities and surface recombination coefficients in inductively coupled plasmas in Cl<SUB>2</SUB>

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
AVS, Oct 2011, Nashville, Tennessee, United States
Communication dans un congrès hal-02594749 v1

INCLINE - Inductively coupled plasma for CMOS-compatible etching of III-V integrated laser sources

S. Bouchoule , L. Gatilova , G. Patriarche , S. Guilet , L. Le Gratiet et al.
Journées Nationales en Nanosciences et Nanotechnologies, 2011, Ecole Polytechnique, Palaiseau, France
Communication dans un congrès hal-02594797 v1

Absolute atomic chlorine densities in a Cl<SUB>2</SUB> ICP determined by TALIF with a new calibration method

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
30th ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom
Communication dans un congrès hal-02594798 v1

Detection of atomic chlorine in an inductively-coupled plasma by TALIF:Absolute densities and surface recombination coefficients

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
LAPD, Oct 2011, Jeju, Korea, Unknown Region
Communication dans un congrès hal-02573303 v1

VOLTAGE WAVEFORM TAILORING: A PROMISING NEW METHOD FOR SILICON DEPOSITION

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Nishant Sirse , Jean-Paul Booth
CIP (Congres International sur les Plasmas), Jun 2011, Nantes, France
Communication dans un congrès hal-02594747 v1

Planar Langmuir probe in pulsing regime

V. Samara , Jean-Paul Booth , J.-F. de Marneffe , W. Boullart
PESM (Plasma Etch and Strip for Microelectronics), May 2011, Mechelen, Belgium
Communication dans un congrès hal-02594742 v1

Control of Nanocrystalline Growth Phase and Deposition Rate through Voltage Waveform Tailoring

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
MRS spring meeting, Apr 2011, San Francisco, California, United States
Communication dans un congrès hal-02594741 v1

Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control

Jean-Paul Booth , Pascal Chabert , Rodolphe Sarot , Mujahid Zaka-Ul-Islam
IS-Plasma (International Symposium-Plasma), Feb 2011, Nagoya, Japan
Communication dans un congrès hal-02573300 v1

All you ever wanted to know about Fluorocarbon Plasmas but never dared to ask

Jean-Paul Booth
POSMOL (International Symposium on Electron Molecule Collisions and Swarms), Jul 2011, Maynooth, Ireland
Communication dans un congrès hal-02573302 v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre , T. Verbeke , J-C Vanel
International Conference on Plasmas and Nanotechnology (ICPLANTS), Feb 2011, Takayama, Japan
Communication dans un congrès hal-02594739 v1

Cl atom recombination coefficients in a Cl<SUB>2</SUB> ICP determined by TALIF

Jean-Paul Booth , Pascal Chabert , F. Boutaiba , Mujahid Zaka-Ul-Islam
Frontiers in Low Temperature Plasma Diagnostics (FLTPD), May 2011, Zinnowitz, Germany
Communication dans un congrès hal-02594745 v1

Control of Microcrystalline Silicon Deposition by RF Waveform Tailoring

E.V. Johnson , Jean-Paul Booth , J-C Vanel , T. Verbeke
Gaseous Electronics Conference, Oct 2010, Paris, France
Communication dans un congrès hal-02595158 v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel
UK-Technological Plasmas Workshop, Dec 2010, Bristol, United Kingdom
Communication dans un congrès hal-02595161 v1

Time-resolved electron density and OES measurements for studying the surface loss rates of H and Cl atoms in a Cl2-H2 ICP plasma

G. Curley , L. Gatilova , S. Guilet , S. Bouchoule , G. Gogna et al.
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas, 2010, Paris, France. TF4-005, 763-764, Hori M. and Graha W.G. (Eds), Japan Society of Applied Physics
Communication dans un congrès hal-00800895 v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel
AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States
Communication dans un congrès hal-02595160 v1

GAS BREAKDOWN IN RF AND LONGITUDINAL COMBINED ELECTRIC FIELDS

V. A. Lisovskiy , Jean-Paul Booth , V. D. Yegorenkov , N. D. Kharchenko
RF Breakdown Workshop, Oct 2010, Paris, France
Communication dans un congrès hal-02573304 v1

Effect of low-frequency power on electron density and ion flux in dual-frequency capacitive radiofrequency discharges

Jean-Paul Booth , G. Curley , Pascal Chabert
PESM, Mar 2010, Grenoble, France
Communication dans un congrès hal-02595157 v1

Physique et physicochimie des Plasmas excites par radio-frequence

Jean-Paul Booth
Journees Plasma-Photovoltaique, Nov 2010, St Cyprien, France
Communication dans un congrès hal-02611098 v1

Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes

Jérôme Bredin , Jean-Paul Booth
Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States
Communication dans un congrès hal-02595162 v1

Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes

Jean-Paul Booth , Jérôme Bredin
AVS International Symposium, Nov 2009, San Jose, California, United States
Communication dans un congrès hal-02595165 v1

Etch process control with a deposition-tolerant planar electrostatic probe

Jean-Paul Booth , D. Keil , C. Thorgrimsson , M. Nagai , L. Albarede
Radiofrequency Plasma Workshop, May 2009, Presqu ile de Giens, France
Communication dans un congrès hal-02573306 v1

Dual-frequency capacitive radiofrequency discharges : Effect of low-frequency power on electron density and flux

Jean-Paul Booth , G. Curley , Pascal Chabert , D. Maric
Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States
Communication dans un congrès hal-02595163 v1

Etch process control with a deposition-tolerant planar electrostatic probe

Jean-Paul Booth , D. Keil , C. Thorgrimsson , M. Nagai , L. Albarede
Irish Plasma and Beam Processing Group Meeting, May 2009, Belfast, Northern Ireland, United Kingdom
Communication dans un congrès hal-02573307 v1

Etch process control with a deposition-tolerant planar electrostatic probe

Jean-Paul Booth , D. Keil , C. Thorgrimsson , M. Nagai , L. Albarede
PESM, Feb 2009, Louvain, Belgium
Communication dans un congrès hal-02573305 v1

CFX kinetics, gas temperature and instabilities in a CF4 inductively coupled discharge

J.P Booth , H. Abada , P. Chabert , G. Cunge
48th National AVS symposium & Topical conferences, 2001, San Francisco, United States
Communication dans un congrès hal-00494528 v1

CFx kinetics, gas temperatures and instabilities in a CF4 inductively-coupled discharge

J.P Booth , H. Abada , P. Chabert , G. Cunge
48th AVS Annual Symposium, 2001, San Francisco, United States
Communication dans un congrès hal-00486179 v1

Chlorine Inductively- coupled Plasma diagnostics using UV absorption spectroscopy and an ion flux probE

J.P Booth , F. Neuilly , J.M Francou , L. Vallier
International Colloquium on Plasma Processes, CIP, 2001, Antibes, France
Communication dans un congrès hal-00486185 v1

High rate silicon carbide etching

P. Chabert , J. Perrin , J.P Booth , G. Cunge
ISPC, 15th International Symposium on Plasma Chemistry, 2001, Orleans, France
Communication dans un congrès hal-00481964 v1

Kinetics of active species in a DC discharge by synchrotron VUV absorption

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , João Santos Sousa , N. de Oliveira et al.
International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019
Poster de conférence hal-02865808 v1

Oxygen 3P atom and O- ion density and atomic temperature in O<SUB>2</SUB> DC discharge obtained by Cavity Ringdown spectroscopy

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , Cyril Drag , Katherine Manfred et al.
International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019
Poster de conférence hal-02861162 v1

Vacuum ultraviolet absorption spectroscopy of oxygen discharges

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.
Journées de la Spectroscopie Moléculaire, May 2019, Creteil, France. 2019
Poster de conférence hal-02861164 v1

Oxygen 3P atom density and temperature determined by Cavity Ringdown spectroscopy of the forbidden 1D2 <-3P2 transition

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Cyril Drag , Katherine Manfred et al.
Frontiers in Low Temperature Plasma Diagnostics, May 2019, Bad Honnef, Germany. 2019
Poster de conférence hal-02861161 v1

Experimental determination of cross-sections/reaction rates: Methods and difficulties

Jean-Paul Booth
Rencontres scientifiques plasmas froids et lasers, Nov 2019, Toulouse, France. 2019
Poster de conférence hal-02861165 v1

Iodine as propellant for electric propulsion: updated global model and comparisons to experiments

Florian Marmuse , Romain Lucken , Cyril Drag , Jean-Paul Booth , Anne Bourdon et al.
International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019
Poster de conférence hal-02341688 v1

Spectroscopic study of an iodine plasma in a low pressure RF-ICP ion source

Florian Marmuse , Theo Courtois , Jean-Paul Booth , Cyril Drag , Ane Aanesland et al.
71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. 2018
Poster de conférence hal-02864740 v1

Density of metastable O<SUB>2</SUB>(b 1 Sigma g+) molecules in an O<SUB>2</SUB> DC discharge measured by vacuum ultraviolet absorption and optical emission spectroscopy

Jean-Paul Booth , Olivier Guaitella , Abhyuday Chatterjee , Dmitry Lopaev , Sergey Zyryanov et al.
71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. 2018
Poster de conférence hal-02864739 v1

O2 X, a and b densities and kinetics in pure O2 DC discharges: VUV absorption, IR emission and Cavity Ring Down Spectroscopy measurements

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , N. de Oliveira , L. Nahon et al.
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018
Poster de conférence hal-02864738 v1

Oxygen metastable molecule densities in inductively-coupled plasmas in pure O<SUB>2</SUB> measured by VUV absorption

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018
Poster de conférence hal-02864750 v1

Temperature and density measurements in an iodine RF-CCP plasma with emission and absorption spectroscopy

Florian Marmuse , Cyril Drag , Jean-Paul Booth , Ane Aanesland
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018
Poster de conférence hal-02341678 v1

Kinetics of metastable states and atoms in DC discharges in pure O<SUB>2</SUB>: an experimental study

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , Laurent Nahon et al.
REACPLAS Workshop (reactivity, Plasmas, Astrophysics), Nov 2017, Orsay, France. 2017
Poster de conférence hal-02611361 v1

Metastable Molecules in O<SUB>2</SUB> Plasmas probed by High Resolution Fourier Transform Absorption Spectroscopy

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , L. Nahon , Nelson d'Oliveira et al.
XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017
Poster de conférence hal-02611353 v1

O<SUB>2</SUB> dissociation in plasmas and problems of the O<SUB>2</SUB> cross section set

Jean-Paul Booth , Olivier Guaitella , Abhyuday Chatterjee , Sergey Zyryanov , Dmitry Lopaev et al.
XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017
Poster de conférence hal-02611355 v1

Control of charged species dynamics in atmospheric pressure plasmas using tailored voltage waveforms

Andrew Gibson , L. Alelyani , S. Doyle , Jérôme Bredin , Jean-Paul Booth et al.
XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017
Poster de conférence hal-02611352 v1

Experimental Benchmarks and sensitivity analysis of PIC/MC simulations of oxygen CCP's

Z. Donko , Aranka Derszi , Bastien Bruneau , Andrew Gibson , E.V. Johnson et al.
International Workshop on Radio-Frequency Plasmas, May 2017, Presqu'île de Giens, France. 2017
Poster de conférence hal-02611351 v1

Species-dependent thermal energy accommodation in low-pressure plasmas

Andrew Gibson , T. Gans , M.J. Kushner , Jean-Paul Booth
23rd International Symposium on Plasma Chemistry, Jul 2017, Montréal, Canada. 2017
Poster de conférence hal-02611357 v1

Kinetics of Metastable Molecules and O atoms in O<SUB>2</SUB> Plasmas

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , Ana-Sofia Morillo-Candas , Cyril Drag et al.
Masterclass "New approaches for plasma/surface interaction studies", Oct 2017, Bad Honnef, Germany. 2017
Poster de conférence hal-02611360 v1

Iodine atom detection in a plasma thruster by infrared diode laser absorption

Jean-Paul Booth , Theo Courtois
18th, Laser Aided Plasma Diagnostics, Sep 2017, Prague, Czech Republic, Unknown Region. 2017
Poster de conférence hal-02611358 v1

Frequency dependence of the Electrical Asymmetry Effect in electronegative capacitive RF discharges driven by Tailored Voltage Waveforms

J. Schulze , E. Schuengel , Bastien Bruneau , E.V. Johnson , Jean-Paul Booth et al.
GEC, Oct 2016, Bochum, Germany. 2016
Poster de conférence hal-02611341 v1

High-resolution TALIF measurements of atomic oxygen: determination of gas temperature and collisional broadening coefficients

Jean-Paul Booth , Daniil Marinov , Olivier Guaitella , Cyril Drag , Richard Engeln et al.
GEC (Gaseous Electronics Synposium), Oct 2016, Bochum, Germany. 2016
Poster de conférence hal-02611340 v1

Highly vibrationally excited O<SUB>2</SUB> molecules in low pressure oxygen plasmas: 1. Broad-band absorption spectroscopy

Daniil Marinov , Mickaël Foucher , Olivier Guaitella , Richard Engeln , Pascal Chabert et al.
ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016
Poster de conférence hal-02611336 v1

Experimental and simulation study of capacitively coupled oxygen discharges driven by tailored voltage waveforms

A. Derzsi , Bastien Bruneau , Trevor Lafleur , Jean-Paul Booth , Ihor Korolov et al.
ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016
Poster de conférence hal-02611337 v1

Highly vibrationally excited O<SUB>2</SUB> molecules in low pressure oxygen plasmas: 2. Self-consistent model

Adriana Annusova , V. Guerra , M. Lino Da Silva , B. Lopez , Mickaël Foucher et al.
ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016
Poster de conférence hal-02611338 v1

Measuring atomic oxygen densities and electron properties in an Inductively Coupled Plasma for thin film deposition

D. Meehan , Andrew Gibson , Jean-Paul Booth , E. Wagenaars
GEC, Oct 2016, Bochum, Germany. 2016
Poster de conférence hal-02611342 v1

The role of gas kinetics and surface interaction probabilities in simulations of industrial plasma sources at low pressure

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.
International Symposium on Gas Kinetics, Jul 2016, York, United Kingdom. 2016
Poster de conférence hal-02611343 v1

Atmospheric pressure plasmas as sources of reactive oxygen and hydrogen species for biomedical applications

Sandra Schröter , Andrew Gibson , Jérôme Bredin , A. West , A. Wijiaikum et al.
International Symposium on Gas Kinetics, Jul 2016, York, United Kingdom. 2016
Poster de conférence hal-02611339 v1

EXPERIMENTAL AND MODELING STUDIES OF LOW-PRESSURE CAPACITIVE OXYGEN PLASMAS EXCITED BY TAILORED VOLTAGE WAVEFORMS

Aranka Derszi , Trevor Lafleur , Ihor Korolov , Jean-Paul Booth , Zoltan Donko
Symposium on Application of Plasma Processes, Jan 2015, Tatranská Lomnica, Slovakia. 2015
Poster de conférence hal-02611332 v1

Capacitively Coupled Radio-Frequency Plasmas Excited by Tailored Voltage Waveforms: Particle-In-Cell/Monte Carlo Simulations in 1 and 2 Dimensions

Yue Liu , Jean-Paul Booth , Pascal Chabert
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland. 2015
Poster de conférence hal-02611334 v1

Vibrational kinetics in Cl<SUB>2</SUB> and O<SUB>2</SUB> low-pressure inductively-coupled plasmas

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Adriana Annusova et al.
POSMOL, Jul 2015, Lisbon, Portugal. 2015
Poster de conférence hal-02611335 v1

A model for inductively coupled plasmas in O2 including vibrational kinetics

Adriana Annusova , V. Guerra , Jean-Paul Booth , Mickaël Foucher , Daniil Marinov et al.
EPS Plasma, Jun 2015, Lisbon, Portugal. 2015
Poster de conférence hal-02611333 v1

Inductively-coupled plasmas (ICP) of Cl<SUB>2</SUB>,O<SUB>2</SUB> and mixtures : measurements of atoms, ClxOy and electron densities

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
PESM, May 2014, Grenoble, France. 2014
Poster de conférence hal-02611325 v1

High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert
GEC, Nov 2014, Raleigh, North Carolina, United States. 2014
Poster de conférence hal-02611330 v1

Ground-state bromine atoms measurements by Two-Photon Absorption Laser-Induced Fluorescence

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
PESM, May 2014, Grenoble, France. 2014
Poster de conférence hal-02611326 v1

Inductively-coupled plasmas (ICP) of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurements of atoms, ClxOy and electron densities

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert
GEC, Nov 2014, Raleigh, North Carolina, United States. 2014
Poster de conférence hal-02611329 v1

Inductively-coupled plasmas in pure Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures: measurements of atom, Cl<SUB>x</SUB>O<SUB>y</SUB> and electron densities

Mickaël Foucher , Pascal Chabert , Jean-Paul Booth
Plasma Kinetics Master Class, Oct 2014, Bad Honnef, Germany. 2014
Poster de conférence hal-02611331 v1

Inductively-coupled plasmas (ICP) of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurements of atoms, ClxOy and electron densit

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
ESCAMPIG, Jul 2014, Greifswald, Germany. 2014
Poster de conférence hal-02611327 v1

High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert
ESCAMPIG, Jul 2014, Greifswald, Germany. 2014
Poster de conférence hal-02611328 v1

Dynamique des plasmas radio-fréquences pulsés à couplage inductif en gaz halogénés simples

Mickaël Foucher , Jean-Paul Booth , B. Pruvost , Pascal Chabert
Journée de l'industrie Plas@par, Nov 2013, Paris, France. 2013
Poster de conférence hal-02611324 v1

Atomic bromine density measurements in HBr inductively coupled plasma by two-photon absorption laser-induced fluorescence

Jean-Paul Booth , Nishant Sirse , Mickaël Foucher
Laser Aided Plasma Diagnostics, Sep 2013, Madison, Wisconsin, United States. 2013
Poster de conférence hal-02611316 v1

Hybrid Model of Parallel Plate RF Discharges in H<SUB>2</SUB>: Effect of DC and Tailored Voltage Waveforms

P. Diomede , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , S. Longo et al.
ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012
Poster de conférence hal-02611272 v1

Investigation of Voltage Waveform Tailoring Effect in CapacitivelyCoupled H<SUB>2</SUB> Discharge: Fluid Simulations and Experimental Validation

T. Novikova , E.V. Johnson , M. Mao , P. Bulkin , Jean-Paul Booth et al.
EPS Plasma Physics, Jul 2012, Stockholm, Sweden. 2012
Poster de conférence hal-02611270 v1

Gas temperature and electron density measurements in Ar and Ar<SUB>-</SUB>Cl<SUB>2</SUB> ICP discharges

Jean-Paul Booth , Nishant Sirse , Quentin Délivré , Pascal Chabert
ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012
Poster de conférence hal-02611271 v1

Ozone production in O<SUB>2</SUB> plasma at low pressure: evaluation of surface and gas phase mechanisms

Daniil Marinov , Olivier Guaitella , V. Guerra , Nishant Sirse , Jean-Paul Booth et al.
IPS, May 2012, Presqu'île de Giens, France. 2012
Poster de conférence hal-02611269 v1

Electron density comparison between experiments and simulations in Chlorine based ICP discharge

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert
ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011
Poster de conférence hal-02611275 v1

Voltage Waveform Tailoring in a RF-CCP reactor: Exploration of self-bias, electron density and current waveform

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Jean-Paul Booth
ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011
Poster de conférence hal-02611277 v1

Recombination coefficient of Cl atoms on Al<SUB>2</SUB>O<SUB>3</SUB> walls determined byTwo-Photon Laser-Induced Fluorescence

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Yasmina Azamoum , Mujahid Zaka-Ul-Islam
ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011
Poster de conférence hal-02611274 v1

Electron densities and temperatures in a Cl<SUB>2</SUB>/Ar ICP

Jean-Paul Booth , Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , L. Gatilova et al.
Gaseous Electronics Conference, Oct 2010, Paris, France. 2010
Poster de conférence hal-02611281 v1

Inductive plasmas in Cl<SUB>2</SUB>/Ar :Comparison of hybrid model results with experimental measurements

Jean-Paul Booth , Emilie Despiau-Pujo , Pascal Chabert , Rodolphe Sarot
AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States. 2010
Poster de conférence hal-02611282 v1

Inductive plasmas in Cl<SUB>2</SUB>/Ar : Comparison of hybrid model results with experimental measurements

Jean-Paul Booth , Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , L. Gatilova et al.
ESCAMPIG, Jul 2010, Novi Sad, Serbia. 2010
Poster de conférence hal-02611280 v1

Plasma inductif en Cl<SUB>2</SUB>/Ar : comparaison entre simulations hybrides et expériences

Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , Jean-Paul Booth , L. Gatilova et al.
Congres de la Division Plasma du SFP, May 2010, Bordeaux, France. 2010
Poster de conférence hal-02611278 v1

Broadband absorption with UV Light-Emitting Diodes in a dual-frequency capacitively coupled reactor

Jérôme Bredin , Jean-Paul Booth
Radiofrequency Plasma Workshop, May 2009, Presqu ile de Giens, France. 2009
Poster de conférence hal-02611283 v1