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Improving our understanding of plasma-surface interactions through in-situ measurements
Jean-Paul Booth
Dry Process Symposium, Nov 2023, Nagoya, Japan
Communication dans un congrès
hal-04397985
v1
|
|
Probing surface reactivity in plasmas- is it valid to use a constant reaction probability model?
Jean-Paul Booth
GEC Gaseous Electronics Conference, American Physical Society, Oct 2023, Ann Arbor, MI, USA, United States
Communication dans un congrès
hal-04398014
v1
|
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What We Still Don't Know About Plasmas in Simple Diatomic Gases- or Using a DC Plasma in Pure O2 as an Ideal Test-Bed for Experimental Validation of Simulations
Jean-Paul Booth
AVS Symposium, Nov 2022, Pittsburgh, PA, United States
Communication dans un congrès
hal-04398035
v1
|
|
Laser Cavity Ringdown Spectroscopy of Oxygen Plasmas: Direct Measurement of the Densities of Oxygen Atoms, Ozone and Negative Ions and Gas Temperature
Jean-Paul Booth
Online Low Temperature Plasma Seminar, May 2021, On line, United States
Communication dans un congrès
hal-03317442
v1
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Filling the Gaps in Our Understanding of Plasmas in Simple Diatomic Gases- Combining a DC Plasma in Pure O2 with Multiple Advanced Diagnostics for Experimental Validation of Simulations
Jean-Paul Booth
IS Plasma, University of Nagoya, Mar 2021, Nagoya (on line), Japan
Communication dans un congrès
hal-04398109
v1
|
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Filling the Gaps in Our Understanding of Plasmas in Simple Diatomic Gases-Combining a DC Plasma in Pure O2 with Multiple Advanced Diagnostics for Experimental Validation of Simulations
Jean-Paul Booth
,
A Chatterjee
,
O Guaitella
,
D Lopaev
,
S Zyryanov
et al.
IS Plasma 2021, Mar 2021, Nagoya, Japan
Communication dans un congrès
hal-03317344
v1
|
|
A new look at oxygen plasmas : Quantitative VUV and IR absorption spectroscopy of reactive intermediates
Jean-Paul Booth
JSM -Journees de Spectroscopie Moleculaire, Universite de Rennes/ Societe Francaise de Physique, Jun 2021, Rennes, France
Communication dans un congrès
hal-04398064
v1
|
|
Experimental and numerical investigation of an iodine plasma
Florian Marmuse
,
Benjamin Esteves
,
Cyril Drag
,
Jean-Paul Booth
,
Anne Bourdon
et al.
73rd Annual Gaseous Electronics Virtual Conference, Oct 2020, Virtual, United States
Communication dans un congrès
hal-03322751
v1
|
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A NEW LOOK AT OXYGEN PLASMAS -QUANTITATIVE SPECTROSCOPY FOR RIGOROUS TESTING OF MODELS
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
Dmitry Lopaev
,
Sergey Zyryanov
et al.
International Symposium on the Physics of Ionized Gases, Aug 2020, Sabac, Serbia
Communication dans un congrès
hal-03017283
v1
|
|
A new look at Oxygen Plasmas – Quantitative Spectroscopy for rigorous testing of models
Jean-Paul Booth
SPIG - Symposium on Physics of Ionised Gases, Aug 2020, Sabac, Serbia. pp.1
Communication dans un congrès
hal-04398151
v1
|
|
Tailoring OH and O production in an atmospheric-pressure plasma in Helium with O2 and H2O admixtures
Erik Wagenaars
,
Alexandra Brisset
,
Sandra Schröter
,
Kari Niemi
,
Deborah O'Connell
et al.
GEC2020 Meeting of The American Physical Society, Oct 2020, San Diego, United States
Communication dans un congrès
hal-03017258
v1
|
|
XXXIV ICPIG & ICRP-10
Olivier Guaitella
,
Ana-Sofia Morillo-Candas
,
Tiago Dias
,
Edmond Baratte
,
P. Ogloblina
et al.
Influence of surfaces in the kinetic of CO2 plasma, Jul 2019, Sapporo, Hokkaido, Japan
Communication dans un congrès
hal-02371063
v1
|
|
Novel diagnostics to unravel fundamental processes in oxygen plasmas
Jean-Paul Booth
ICAPT-7 : 7th International Conference on Advanced Plasma Technologies, Plasmadis, Feb 2019, Hue, Vietnam
Communication dans un congrès
hal-04398232
v1
|
|
A Comprehensive Diagnostic Study of a DC Positive Column in O2: a test-bed for models of plasmas in a diatomic gas
Jean-Paul Booth
CESPC-Central European Symposium on Plasma Chemistry, May 2019, Gozd Martuljek, Slovenia
Communication dans un congrès
hal-04398185
v1
|
|
A comprehensive diagnostic study of a DC positive column in O2: a test-bed for models of plasmas in a diatomic gas
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
Cyril Drag
,
N. de Oliveira
et al.
Frontiers in low Temperature plasma simulation, May 2019, Bad Honnef, Germany
Communication dans un congrès
hal-02341779
v1
|
|
Experimental Demonstration of Multifrequency Matching for Tailored Voltage Waveform Plasma Excitation
Sebastien Dine
,
Jean-Paul Booth
,
E.V. Johnson
,
Junkang Wang
International Conference on Phenomena in Ionised Gases, Jul 2019, Hokkaido, Japan
Communication dans un congrès
hal-02341689
v1
|
|
Novel diagnostics to unravel fundamental processes in oxygen plasmas
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
Cyril Drag
,
Dmitry Lopaev
et al.
7th International Conference on Advanced Plasma Technologies, Feb 2019, Hue, Vietnam
Communication dans un congrès
hal-02341778
v1
|
|
A comprehensive diagnostic study of a DC positive column in O<SUB>2</SUB>: a test-bed for models of plasmas in a diatomic gas
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
N. de Oliveira
,
L. Nahon
et al.
7th International Conference on Advanced Plasma Technologies, May 2019, Gozd Martuljek, Slovenia
Communication dans un congrès
hal-02341781
v1
|
|
Optical and electrical diagnostics in an iodine plasma
Florian Marmuse
,
Romain Lucken
,
Cyril Drag
,
Jean-Paul Booth
,
Anne Bourdon
et al.
36th International Electric Propulsion Conference (IEPC 2019), Sep 2019, Vienne, Austria
Communication dans un congrès
hal-02341690
v1
|
|
A Comprehensive Diagnostic Study of a DC Positive Column in O2: a test-bed for models of plasmas in a diatomic gas
Jean-Paul Booth
Frontiers in low Temperature plasma simulation, May 2019, Bad Honnef (Germany), Germany
Communication dans un congrès
hal-04398198
v1
|
|
Vacuum ultraviolet absorption spectroscopy of oxygen discharges
Jean-Paul Booth
3rd European Conference on Plasma Diagnostics, May 2019, Lisbon, Portugal
Communication dans un congrès
hal-02341780
v1
|
|
63rd Course of the International School of Quantum Electronics
Olivier Guaitella
,
Ana-Sofia Morillo-Candas
,
Cyril Drag
,
Jean-Paul Booth
,
Bart Klarenaar
et al.
Diagnostics to study vibrational excitation kinetics of CO2, Sep 2019, Erice, Italy
Communication dans un congrès
hal-02371062
v1
|
|
Effect of high surface-area on CO<SUB>2</SUB> plasma kinetics
Ana-Sofia Morillo-Candas
,
C. Goncalves
,
Bart Klarenaar
,
Jean-Paul Booth
,
Cyril Drag
et al.
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom
Communication dans un congrès
hal-02342226
v1
|
|
High−resolution VUV absorption diagnostics of discharges in oxygen
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
N. de Oliveira
,
L. Nahon
et al.
20th Gaseous Electronics Meeting, Jun 2018, Magnetic Island, Townsville, Queensland, Australia
Communication dans un congrès
hal-02341777
v1
|
|
Diagnostics of plasma neutral species in a very high frequency oxygen plasma with high sensitivity broadband absorption spectroscopy
J. Zhao
,
Peter L G Ventzek
,
Barton Lane
,
Toshihiko Iwao
,
Kiyotaka Ishibashi
et al.
AVS Symposium, Oct 2018, Long Beach, California, United States
Communication dans un congrès
hal-02342227
v1
|
|
Comparison of gas temperature measurements with Raman, FTIR and HR-TALIF
Ana-Sofia Morillo-Candas
,
Bart Klarenaar
,
Marija Grofulovic
,
Cyril Drag
,
Jean-Paul Booth
et al.
ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom
Communication dans un congrès
hal-02342225
v1
|
|
Oxygen metastable molecule densities in inductively-coupled plasmas in pure O<SUB>2</SUB> measured by VUV absorption
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
N. de Oliveira
,
L. Nahon
et al.
71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States
Communication dans un congrès
hal-02342229
v1
|
|
Vacuum ultraviolet absorption spectroscopy of oxygen discharges
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
N. de Oliveira
,
L. Nahon
et al.
The 8th International Workshop on Plasma Spectroscopy, Sep 2018, Oxford, United Kingdom
Communication dans un congrès
hal-02342224
v1
|
|
Multi-species experimental validation of plasma chemistry models at atmospheric pressure
Sandra Schröter
,
A. Wijiakaum
,
Andrew Gibson
,
Jérôme Bredin
,
K. Niemi
et al.
Frontiers in Low temperature Plasma Simulation, May 2018, Dublin, Ireland
Communication dans un congrès
hal-02342228
v1
|
|
High-resolution VUV absorption diagnostics of discharges in oxygen
Jean-Paul Booth
GEM XX : 10th Gaseous Electronic Meeting, Jun 2018, Magnetic Island, Townsville, Queensland, Australia
Communication dans un congrès
hal-04398249
v1
|
|
Probing mechanisms in low-temperature reactive gas plasmas: towards improved models of industrial plasma etch processes
Jean-Paul Booth
2nd European Conference on Plasma Diagnostics, Apr 2017, Bordeaux, France
Communication dans un congrès
hal-02573369
v1
|
|
Kinetics of metastable states and atoms in DC discharges in pure O<SUB>2</SUB>: An experimental study
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
N. de Oliveira
,
L. Nahon
et al.
23rd International Symposium on Plasma Chemistry, Jul 2017, Montréal, Canada
Communication dans un congrès
hal-02593710
v1
|
|
High resolution Two-photon Absorption Laser-Induced Fluorescence (TALIF) with a single-mode nanosecond Ti:Sapphire laser
Ana-Sofia Morillo-Candas
,
Pierre Lottigier
,
Cyril Drag
,
Christophe Blondel
,
Jean-Paul Booth
et al.
18th, Laser Aided Plasma Diagnostics, Sep 2017, Prague, Czech Republic, Unknown Region
Communication dans un congrès
hal-02593711
v1
|
|
New methods to determine density, temperature and thermal accommodation coefficient of oxygen atoms
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
Andrew Gibson
,
Cyril Drag
et al.
International Workshop on Radio-frequency Plasmas, May 2017, Presqu ile de Giens, France
Communication dans un congrès
hal-02593706
v1
|
|
The role of translational and vibrational energy in processing plasmas: novel optical diagnostics of low-pressure Cl<SUB>2</SUB> and O<SUB>2</SUB> inductively-coupled plasmas
Jean-Paul Booth
1st Asia-Pacific Conference on Plasma Physics, Sep 2017, Chengdu, China
Communication dans un congrès
hal-02573371
v1
|
|
Kinetics of atoms and metastable molecules in oxygen plasmas revisited: an experimental study
Jean-Paul Booth
,
Abhyuday Chatterjee
,
Olivier Guaitella
,
Ana-Sofia Morillo-Candas
,
Cyril Drag
et al.
10th EU-Japan Joint Symposium on Plasma Processing, Dec 2017, Okinawa, Japan
Communication dans un congrès
hal-02573372
v1
|
|
O atom kinetics in CO<SUB>2</SUB> pulsed glow discharges
Ana-Sofia Morillo-Candas
,
Bart Klarenaar
,
Richard Engeln
,
Abhyuday Chatterjee
,
Jean-Paul Booth
et al.
XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal
Communication dans un congrès
hal-02593709
v1
|
|
Single-mode nanosecond Ti: Sapphire laser for high resolution Two-photon Absorption Laser Induced-Fluorescence (TALIF)
Daniil Marinov
,
Christophe Blondel
,
Jean-Paul Booth
,
Olivier Guaitella
,
Pierre Lottigier
et al.
2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference, Jun 2017, Munich, Germany. Paper# CH_3_3
Communication dans un congrès
hal-02588053
v1
|
|
2 Dimensional PIC/MCC simulations of RF CCPs with dielectric side wall: non-uniformity in electron heating
Yue Liu
,
Jean-Paul Booth
,
Pascal Chabert
International Workshop on Radio-Frequency Plasmas, May 2017, Presquile de Giens, France
Communication dans un congrès
hal-02593707
v1
|
|
Vibrational excitation and temperature evolution in a pulsed CO<SUB>2</SUB> discharge
Olivier Guaitella
,
Ana-Sofia Morillo-Candas
,
David Yap
,
Cyril Drag
,
Jean-Paul Booth
et al.
70th Annuel Gaseous Electronics Conference (GEC 2017), 2017, Pittsburgh, Pennsylvania, United States
Communication dans un congrès
hal-02592107
v1
|
|
Plasma-surface interaction: Heterogeneous processes of atmospheric gases
Daniil Marinov
,
Olivier Guaitella
,
V. Guerra
,
Jean-Paul Booth
,
Antoine Rousseau
ESCAMPIG, Jul 2016, Bratislava, Slovakia
Communication dans un congrès
hal-02573354
v1
|
|
Vibrational excitation in O<SUB>2</SUB> and Cl<SUB>2 </SUB> inductively-coupled plasmas and DC discharges
Jean-Paul Booth
,
Mickaël Foucher
,
Daniil Marinov
,
Andrew Gibson
,
Pascal Chabert
et al.
ESCAMPIG Workshop on electron processes active in low temperature plasmas, Jul 2016, Bratislava, Slovakia
Communication dans un congrès
hal-02573355
v1
|
|
The role of surface interaction probabilities in reactive plasma modelling
Andrew Gibson
,
Mickaël Foucher
,
Daniil Marinov
,
Pascal Chabert
,
T. Gans
et al.
ESCAMPIG, Jul 2016, Bratislava, Slovakia
Communication dans un congrès
hal-02593684
v1
|
|
Quantitative Diagnostics of Inductively-coupled Radiofrequency Plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures
Jean-Paul Booth
,
Mickaël Foucher
,
Andrew Gibson
,
Daniil Marinov
International Symposium on Gas Kinetics and Related Phenomena, Jul 2016, York, United Kingdom
Communication dans un congrès
hal-02593687
v1
|
|
Charged and neutral particle dynamics in low pressure chlorine and oxygen plasmas: the role of collisional processes
Andrew Gibson
,
Mickaël Foucher
,
Daniil Marinov
,
Pascal Chabert
,
T. Gans
et al.
EPS Plasma, Jul 2016, Leuven, Belgium
Communication dans un congrès
hal-02573351
v1
|
|
Multifrequency impedance matching solutions for plasma excitation by Tailored Voltage Waveforms
Erik Johnson
,
Sebastien Dine
,
Jean-Paul Booth
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès
hal-02593689
v1
|
|
Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary
Yue Liu
,
Jean-Paul Booth
,
Pascal Chabert
GEC, Oct 2016, Bochum, Germany
Communication dans un congrès
hal-02593691
v1
|
|
Gas temperature measuements by high-resolution TALIF
Jean-Paul Booth
Workshop on Oxygen Plasma Kinetics, Sep 2016, Reykjavik, Iceland
Communication dans un congrès
hal-02593694
v1
|
|
Reactive species in humidity containing atmospheric pressure plasma jets − Numerical and experimental investigations
Sandra Schröter
,
Jérôme Bredin
,
A. West
,
J. Dedrick
,
K. Niemi
et al.
GEC, Oct 2016, Bochum, Germany
Communication dans un congrès
hal-02593693
v1
|
|
Translational and Vibrational Energy in Cl<SUB>2</SUB> and O<SUB>2</SUB> Plasmas Probed by Innovative Optical Diagnostics
Jean-Paul Booth
,
Daniil Marinov
,
Mickaël Foucher
,
Olivier Guaitella
,
Cyril Drag
et al.
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès
hal-02573357
v1
|
|
ELECTRON POWER ABSORPTION DYNAMICS AND ION ENERGY DISTRIBUTIONS IN CAPACITIVE DISCHARGES DRIVEN BY CUSTOMIZED VOLTAGE WAVEFORMS IN ARGON AND CF<SUB>4</SUB>
B. Berger
,
S. Brandt
,
J. Franek
,
E. Shuengel
,
M. Koepke
et al.
IEEE-ICOPS, Jun 2016, Banff, Canada
Communication dans un congrès
hal-02593683
v1
|
|
The importance of surface interaction probabilities in low pressure plasma simulations for process design
Andrew Gibson
,
Mickaël Foucher
,
Daniil Marinov
,
Pascal Chabert
,
T. Gans
et al.
PESM (Plasma Etch and Strip for Microelectronics), May 2016, Grenoble, France
Communication dans un congrès
hal-02593686
v1
|
|
Modelling of tailored ion energy distributions for plasma processing applications
P. Diomede
,
Trevor Lafleur
,
Jean-Paul Booth
,
S. Longo
,
D. J. Economou
ESCAMPIG, Jul 2016, Bratislava, Slovakia
Communication dans un congrès
hal-02573353
v1
|
|
Dynamics of inductive plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> and Cl<SUB>2</SUB>/O<SUB>2</SUB> mixtures: quantitative diagnostics and numerical modelling
Daniil Marinov
,
Mickaël Foucher
,
Andrew Gibson
,
Pascal Chabert
,
Jean-Paul Booth
IVC (International Vacuum Conference), Aug 2016, Busan, Korea, Unknown Region
Communication dans un congrès
hal-02573356
v1
|
|
Modelling and experimental validation of capacitively coupled plasmas in hydrogen
D. Diomede
,
Bastien Bruneau
,
Trevor Lafleur
,
D. J. Economou
,
S. Longo
et al.
EPS Plasma, Jul 2016, Leuven, Belgium
Communication dans un congrès
hal-02573350
v1
|
|
Charged Particle Dynamics in Technological Radio Frequency Plasmas Operated in CF<SUB>4</SUB>
J. Schulze
,
B. Berger
,
S. Brandt
,
Bastien Bruneau
,
Y. Liu
et al.
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès
hal-02573358
v1
|
|
Heating dynamics and control of energy distribution functions in capacitive discharges driven by tailored voltage waveforms
J. Schulze
,
B. Berger
,
S. Brandt
,
M. Koepke
,
T. Mussenbrock
et al.
International Conference on Plasma Physics ICPP, Jun 2016, Kaohsiung, Taiwan
Communication dans un congrès
hal-02573352
v1
|
|
Vibrational excitation in O<SUB>2</SUB> and Cl<SUB>2</SUB> inductively-coupled plasmas and DC discharges
V. Guerra
,
Jean-Paul Booth
,
Daniil Marinov
,
Mickaël Foucher
,
Adriana Annusova
GEC, Oct 2016, Bochum, Germany
Communication dans un congrès
hal-02593690
v1
|
|
Cleaning and doping of CVD graphene using tailored voltage waveform capacitively coupled plasma
Daniil Marinov
,
Bastien Bruneau
,
Erik Johnson
,
Jean-Paul Booth
Plasma Etch and Strip in Microelectronics _PESM, Apr 2015, Louvain, Belgium
Communication dans un congrès
hal-02593662
v1
|
|
Inductively-coupled plasmas in Cl<SUB>2</SUB> and O<SUB>2</SUB>: Comparing HPEM with advanced diagnostic measurements
Jean-Paul Booth
,
Mickaël Foucher
,
Andrew Gibson
,
Daniil Marinov
,
Nishant Sirse
et al.
Quantumol Workshop -Linking Simulation with Experiment, Sep 2015, London, United Kingdom
Communication dans un congrès
hal-02573341
v1
|
|
Validation of Inductively Coupled Plasmas Sustained in Halogen Chemistries
Ankur Agarwal
,
Mickaël Foucher
,
S. Rauf
,
Jean-Paul Booth
,
Pascal Chabert
et al.
AVS Annual Symposium, Oct 2015, San Jose, California, United States
Communication dans un congrès
hal-02593676
v1
|
|
Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures
Jean-Paul Booth
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland
Communication dans un congrès
hal-02573339
v1
|
|
101 uses of Cold Plasmas: from smartphones to space travel
Jean-Paul Booth
Plas@par International Summer School : Discover Plasmas, Aug 2015, Roscoff, France
Communication dans un congrès
hal-02573342
v1
|
|
Detection of Biomedically Relevant Reactive Oxygen Species in Atmospheric Pressure Plasmas
Sandra Schröter
,
Jérôme Bredin
,
K. Niemi
,
J. Dedrick
,
Mickaël Foucher
et al.
AVS Symposium, Oct 2015, San Jose, California, United States
Communication dans un congrès
hal-02593680
v1
|
|
Density and temperature measurements in ICP's of Cl<SUB>2</SUB>/O<SUB>2</SUB> using high sensitivity ultra broad-band absorption spectroscopy
Mickaël Foucher
,
Daniil Marinov
,
Emile Carbone
,
Pascal Chabert
,
Jean-Paul Booth
International Symposium on Plasma Chemistry, Jul 2015, Anvers, Belgium
Communication dans un congrès
hal-02593678
v1
|
|
Reactive species generated in atmospheric-pressure plasmas with water admixtures for biomedical applications: Absolute measurements and numerical simulations
Sandra Schröter
,
Jérôme Bredin
,
A. West
,
K. Niemi
,
J. Dedrick
et al.
Gaseaous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès
hal-02593672
v1
|
|
Vibrational kinetics in Cl<SUB>2</SUB> and O<SUB>2</SUB> low-pressure inductively-coupled plasmas
Jean-Paul Booth
,
Mickaël Foucher
,
Daniil Marinov
,
Pascal Chabert
,
Adriana Annusova
et al.
Gaseous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès
hal-02593669
v1
|
|
Modelling the influence of neutral gas heating mechanisms on particle densities in inductively coupled chlorine discharges
Andrew Gibson
,
T. Gans
,
Mickaël Foucher
,
Daniil Marinov
,
Pascal Chabert
et al.
Gaseous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès
hal-02593670
v1
|
|
Low Pressure Plasma Cleaning and Doping of CVD Graphene
D. Marinov
,
G. Cunge
,
D. Ferrah
,
E.V. Johnson
,
J.P. Booth
AVS 62nd International Symposium & Exhibition, 2015, San José, United States
Communication dans un congrès
hal-01878405
v1
|
|
Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl<SUB>2</SUB>/O<SUB>2</SUB> mixtures
Jean-Paul Booth
,
Mickaël Foucher
,
Daniil Marinov
,
Pascal Chabert
Frontiers in Low-temperature Plasma Diagnostics FLTPD, May 2015, Porquerolles, France
Communication dans un congrès
hal-02593663
v1
|
|
Quantitative Diagnostics of Inductive Plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> AND Cl<SUB>2</SUB>/O<SUB>2</SUB> Mixtures
Jean-Paul Booth
,
Mickaël Foucher
,
Daniil Marinov
,
Pascal Chabert
Symposium on Application of Plasma Processes, Jan 2015, Vysoké Tatry, Slovakia
Communication dans un congrès
hal-02573337
v1
|
|
A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> and Mixtures
Jean-Paul Booth
,
Mickaël Foucher
,
Daniil Marinov
,
Pascal Chabert
,
Ankur Agarwal
et al.
AVS Symposium, Oct 2015, San Jose, California, United States
Communication dans un congrès
hal-02593682
v1
|
|
Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures
Jean-Paul Booth
,
Mickaël Foucher
,
Daniil Marinov
,
Pascal Chabert
MRS-Japan, Dec 2015, Yokohama, Japan
Communication dans un congrès
hal-02573344
v1
|
|
Gas Temperature Measurements in Plasmas by High-Resolution TALIF
Jean-Paul Booth
,
Olivier Guaitella
,
Daniil Marinov
,
Mickaël Foucher
,
Cyril Drag
et al.
Laser AIded Plasma Diagnostics LAPD, Sep 2015, Sapporo, Japan
Communication dans un congrès
hal-02593665
v1
|
|
Reactive adsorption of molecules and radicals on surfaces
Daniil Marinov
,
Olivier Guaitella
,
Jean-Paul Booth
,
Antoine Rousseau
22nd International Symposium on Plasma Chemistry, Jul 2015, Antwerp, Belgium
Communication dans un congrès
hal-02573340
v1
|
|
Capacitively coupled CF<SUB>4</SUB> discharges excited by tailored waveforms: experiments and kinetic simulations
Bastien Bruneau
,
Erik Johnson
,
Jean-Paul Booth
,
Trevor Lafleur
,
T. Gans
et al.
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland
Communication dans un congrès
hal-02573343
v1
|
|
Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H<SUB>2</SUB>, and CF<SUB>4</SUB> plasmas
Bastien Bruneau
,
Erik Johnson
,
T. Gans
,
Arthur Greb
,
Ihor Korolov
et al.
Gaseaous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès
hal-02593667
v1
|
|
Ion flux asymmetry obtained by sawtooth-like waveforms: A new degree of freedom in capacitively coupled plasmas
Bastien Bruneau
,
T. Gans
,
D. O'Connell
,
Arthur Greb
,
Trevor Lafleur
et al.
Plasma Etch and Strip in Microelectronics (PESM), Apr 2015, Louvain, Belgium
Communication dans un congrès
hal-02593661
v1
|
|
Inductively-coupled plasmas of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurement of atoms, Cl<SUB>x</SUB>O<SUB>y</SUB> and electron densities
Mickaël Foucher
,
Emile Carbone
,
Jean-Paul Booth
,
Pascal Chabert
PESM, May 2014, Grenoble, France
Communication dans un congrès
hal-02593657
v1
|
|
Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas
Bastien Bruneau
,
T. Novikova
,
Trevor Lafleur
,
Jean-Paul Booth
,
Erik Johnson
AVS Annual Symposium, Nov 2014, Baltimore, Maryland, United States
Communication dans un congrès
hal-02593674
v1
|
|
Inductively-coupled plasmas of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurement of atoms, Cl<SUB>x</SUB>O<SUB>y</SUB> and electron densities
Mickaël Foucher
,
Daniil Marinov
,
Emile Carbone
,
Jean-Paul Booth
,
Pascal Chabert
GEC, Nov 2014, Raleigh, North Carolina, United States
Communication dans un congrès
hal-02593658
v1
|
|
Diagnostics of Cl<SUB>2</SUB>/O<SUB>2</SUB> Inductively-Coupled Plasmas by Ultra-High sensitivity Broad-Band Absorption Spectroscopy
Mickaël Foucher
,
Daniil Marinov
,
Emile Carbone
,
Jean-Paul Booth
,
Pascal Chabert
AVS, Nov 2014, Baltimore, Maryland, United States
Communication dans un congrès
hal-02593659
v1
|
|
Dynamique des Plasmas à Couplage Inductive dans les gaz HBr, Cl<SUB>2</SUB> et O<SUB>2</SUB> et mixtures: Diagnostiques Laser et Absorption Ultraviolet Large-Bande
Jean-Paul Booth
,
Mickaël Foucher
,
Pascal Chabert
Colloque de Plasma-Québec, Jun 2014, Montreal, Canada
Communication dans un congrès
hal-02573338
v1
|
|
A model for capacitive discharges with arbitrary RF waveform excitation including the electrical asymmetry effect and the associated self-bias
Pascal Chabert
,
Trevor Lafleur
,
Jean-Paul Booth
,
Miles Turner
8th International Conference on reactive Plasma, Feb 2014, Fukuoka, Japan
Communication dans un congrès
hal-02573360
v1
|
|
Experimental and numerical study of fast gas heating and O atom production in a capillary nanosecond discharge
A.V. Klochko
,
A. Salmon
,
J. Lemainque
,
N.A. Popov
,
Jean-Paul Booth
et al.
52st AIAA Aerospace Sciences Meeting, Jan 2014, National Harbor, Maine, United States. pp.2014-1030
Communication dans un congrès
hal-02588024
v1
|
|
Diagnostics of Inductively-Coupled Plasmas in Hydrogen Bromide : Bromine Atom and Electron Densities
Jean-Paul Booth
,
Nishant Sirse
,
Pascal Chabert
,
Mickaël Foucher
AVS Symposium, Oct 2013, Long Beach, California, United States
Communication dans un congrès
hal-02594800
v1
|
|
Capacitively coupled plasmas excited by tailored voltage waveforms
Trevor Lafleur
,
Pierre-Alexandre Delattre
,
E.V. Johnson
,
Jean-Paul Booth
EPS Plasma, Jul 2013, Espoo, Finland
Communication dans un congrès
hal-02573294
v1
|
|
Diagnostics of inductively-coupled plasmas in HBr : Bromine atom and electron densities
Jean-Paul Booth
,
Nishant Sirse
,
Robert Soriano
,
Mickaël Foucher
,
Pascal Chabert
Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States
Communication dans un congrès
hal-02594803
v1
|
|
Determining atom and radical surface recombination coefficients in low-pressure plasmas
Jean-Paul Booth
Gaseous Electronics Conference : workshop on plasma-surface interactions, Sep 2013, Princeton, New Jersey, United, Unknown Region
Communication dans un congrès
hal-02573332
v1
|
|
IN-SITU OBSERVATION OF MICROCRYSTALLINE SILICON THIN FILM GROWTH USING TAILORED VOLTAGE WAVEFORMS
E.V. Johnson
,
Bastien Bruneau
,
Pierre-Alexandre Delattre
,
Trevor Lafleur
,
Jean-Paul Booth
International Vacuum Conference, Sep 2013, Paris, France
Communication dans un congrès
hal-02594804
v1
|
|
Tailoring plasma properties using pulse-shaping technology,
Jean-Paul Booth
,
E.V. Johnson
,
Trevor Lafleur
,
Pierre-Alexandre Delattre
,
R.W. Boswell
21st ISPC, Aug 2013, Cairns, Australia
Communication dans un congrès
hal-02573330
v1
|
|
OZONE KINETICS IN LOW-PRESSURE DISCHARGES
V. Guerra
,
Daniil Marinov
,
Jean-Paul Booth
,
Olivier Guaitella
,
Antoine Rousseau
SAPP, Jan 2013, Malá Fatra, Slovakia
Communication dans un congrès
hal-02573288
v1
|
|
Electron heating in capacitively coupled plasmas revisited: single and multi-frequency discharges
Trevor Lafleur
,
Pascal Chabert
,
Miles Turner
,
Jean-Paul Booth
Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States
Communication dans un congrès
hal-02573333
v1
|
|
Study of fast gas heating in a capillary nanosecond discharge in air. TALIF O atoms measurements and kinetic modeling (AIAA 2013-0574)
A.V. Klochko
,
J. Lemainque
,
N.A. Popov
,
Jean-Paul Booth
,
Svetlana Starikovskaia
51st AIAA Aerospace Sciences Meeting, Jan 2013, Grapevine, Texas, United States
Communication dans un congrès
hal-02589147
v1
|
|
Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence
Mickaël Foucher
,
Nishant Sirse
,
Jean-Paul Booth
,
Pascal Chabert
Journées dEchange du Réseau des Technologies des Plasmas Froids, Oct 2013, La Rochelle, France
Communication dans un congrès
hal-02594807
v1
|
|
Inductively-coupled plasmas in pure chlorine: comparison of atom density, electron density and gas temperature measurements with the HPEM hybrid model.
Jean-Paul Booth
,
Nishant Sirse
,
Pascal Chabert
,
B. Pruvost
,
M.J. Kushner
RF Plasma workshop, May 2013, Presqu ile de Giens, France
Communication dans un congrès
hal-02573293
v1
|
|
Optical diagnostics of low-pressure plasmas in halogen gases
Jean-Paul Booth
,
Pascal Chabert
,
Nishant Sirse
,
P. Indelicato
,
A. Surzykov
et al.
ICPIG, Jul 2013, Granada, Spain
Communication dans un congrès
hal-02573296
v1
|
|
Dynamics of Cl<SUB>2</SUB> inductively-coupled plasmas: Role of electronic and vibrational excitation
Jean-Paul Booth
,
Nishant Sirse
,
Pascal Chabert
,
P. Indelicato
,
A. Surzhykov
et al.
FLTPD, Apr 2013, Rolduc, Netherlands
Communication dans un congrès
hal-02573290
v1
|
|
Thin Film Deposition with Tailored Voltage Waveforms: Material Questions and Practical Answers
E.V. Johnson
,
Bastien Bruneau
,
Pierre-Alexandre Delattre
,
Trevor Lafleur
,
Jean-Paul Booth
RF Plasma workshop, May 2013, Presqu île de Giens, France
Communication dans un congrès
hal-02573291
v1
|
|
Practical Aspects of using Tailored Voltage Waveforms for Thin Film Processing of Photovoltaic Devices
E.V. Johnson
,
Bastien Bruneau
,
Pierre-Alexandre Delattre
,
Trevor Lafleur
,
Jean-Paul Booth
AVS Symposium, Oct 2013, Long Beach, California, United States
Communication dans un congrès
hal-02573331
v1
|
|
Tailored Voltage Waveform Capacitively-Coupled Plasmas for IEDF and electron density control: Application to Microcrystalline Si Deposition
Jean-Paul Booth
,
Erik Johnson
,
Trevor Lafleur
,
Pierre-Alexandre Delattre
Semicon Korea, Jan 2013, Seoul, Korea, Unknown Region
Communication dans un congrès
hal-02573289
v1
|
|
Diagnostics of inductively-coupled plasmas in hydrogen bromide : Bromine atom and electron densities
Jean-Paul Booth
,
Nishant Sirse
,
Pascal Chabert
,
Mickaël Foucher
UK Technological Plasmas Workshop, Dec 2013, York, United Kingdom
Communication dans un congrès
hal-02594799
v1
|
|
Vibrational kinetics in a Cl2 inductively-coupled plasma
B. Pruvost
,
Jean-Paul Booth
,
Mickaël Foucher
,
Pascal Chabert
,
V. Guerra
et al.
Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States
Communication dans un congrès
hal-02594801
v1
|
|
Cl atom spin-orbit excited densities in a Cl<SUB>2</SUB> ICP determined by TALIF
Jean-Paul Booth
,
Nishant Sirse
,
P. Indelicato
,
A. Surzhykov
,
Y. Wang
et al.
UK TPW, Dec 2012, Milton Keynes, United Kingdom
Communication dans un congrès
hal-02594737
v1
|
|
Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl<SUB>2</SUB>
Jean-Paul Booth
,
Pascal Chabert
,
Yasmina Azamoum
,
Nishant Sirse
Plasma Etch and Strip in Microelectronics (PESM), Mar 2012, Grenoble, France
Communication dans un congrès
hal-02594730
v1
|
|
Absolute Cl and Cl<SUB>2</SUB> densities in a Cl<SUB>2</SUB> ICP determined by TALIF with a new calibration method
Jean-Paul Booth
,
Nishant Sirse
,
Yasmina Azamoum
,
Pascal Chabert
Technological Plasmas Workshop, Jan 2012, Manchester, United Kingdom
Communication dans un congrès
hal-02594794
v1
|
|
Cl atom spin-orbit excited densities in a Cl2 ICP determined by TALIF
Jean-Paul Booth
,
Nishant Sirse
,
P. Indelicato
,
Y. Wang
,
Oleg Zatsarinny
et al.
UK Technological Plasmas Workshop, Dec 2012, Milton Keynes, United Kingdom
Communication dans un congrès
hal-02594805
v1
|
|
Plasma deposition processes excited using Tailored Voltage Waveforms: from microcrystalline silicon thin films to devices
E.V. Johnson
,
S. Pouliquen
,
Pierre-Alexandre Delattre
,
Jean-Paul Booth
AVS Symposium, Oct 2012, Tampa, Floride, United States
Communication dans un congrès
hal-02573299
v1
|
|
Tailored Voltage Waveform Capacitively-Coupled Plasmas
Jean-Paul Booth
,
Trevor Lafleur
,
Pierre-Alexandre Delattre
,
E.V. Johnson
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès
hal-02594732
v1
|
|
Plasma characteristics in non-sinusoidally excited CCP discharges
Trevor Lafleur
,
Jean-Paul Booth
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès
hal-02594733
v1
|
|
Plasma deposition of nanocrystalline silicon for solar cells : RF waveform tailoring to optimize deposition rate and film morphology
Jean-Paul Booth
,
E.V. Johnson
,
Pierre-Alexandre Delattre
Gaseous Electronics Meeting, Feb 2012, Murramarang, Australia
Communication dans un congrès
hal-02573287
v1
|
|
Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control
Jean-Paul Booth
Fusion Frontiers and Interfaces Workshop, Mar 2012, York, United Kingdom
Communication dans un congrès
hal-02573297
v1
|
|
Mesure de densité électronique dans les plasmas froids par techniques micro-ondes
Jean-Paul Booth
Les Journées du Plasma Froid, Oct 2012, Ecully, France
Communication dans un congrès
hal-02573281
v1
|
|
Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl<SUB>2</SUB>
Jean-Paul Booth
,
Pascal Chabert
,
Yasmina Azamoum
,
Nishant Sirse
International Workshop on Plasma Spectroscopy (IPS), May 2012, Presqu ile de Giens, France
Communication dans un congrès
hal-02594731
v1
|
|
Plasma Excitation using Tailored Voltage Waveforms for the Deposition of Thin Film Silicon for Photovoltaics: From Plasma Physics to Devices
E.V. Johnson
,
Pierre-Alexandre Delattre
,
Trevor Lafleur
,
Jean-Paul Booth
5th International Symposium on Atomically Controlled, Oct 2012, Osaka, Japan
Communication dans un congrès
hal-02573298
v1
|
|
Inductively-coupled plasmas in pure chlorine: comparison experiments/HPEM
Jean-Paul Booth
,
Nishant Sirse
,
Yasmina Azamoum
,
Pascal Chabert
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès
hal-02594735
v1
|
|
Gas temperature measurement in Ar and Ar-Cl<SUB>2</SUB> based ICP discharge: Comparison between experiments and simulations
Nishant Sirse
,
Quentin Délivré
,
Jean-Paul Booth
,
Pascal Chabert
IEEE International Conference on Plasma Science (ICOPS), Jul 2012, Edinburgh, United Kingdom
Communication dans un congrès
hal-02594795
v1
|
|
Absolute Cl and Cl<SUB>2</SUB> densities in a Cl<SUB>2</SUB> ICP determined by TALIF with a new calibration method
Nishant Sirse
,
Yasmina Azamoum
,
Pascal Chabert
,
Jean-Paul Booth
UK TPW, Dec 2011, Manchester, United Kingdom
Communication dans un congrès
hal-02594750
v1
|
|
DEPOSITION OF THIN FILM OF SILICON MICROCRISTALLINE BY RADIO FREQUENCY VOLTAGE WAVEFORM TAILORING
S. Pouliquen
,
Pierre-Alexandre Delattre
,
E.V. Johnson
,
Jean-Paul Booth
AVS, Oct 2011, Nashville, Tennessee, United States
Communication dans un congrès
hal-02594748
v1
|
|
MESURE DE TEMPERATURE DU GAZ DANS UN RÉACTEUR DE GRAVURE DOUBLE FRÉQUENCES CAPACITIF
Jean-Paul Booth
,
Wladimir Bjelogrlic
,
Jérôme Bredin
Journees du Reseau Plasmas Froids, May 2011, Toulouse, France
Communication dans un congrès
hal-02573301
v1
|
|
Tailored Voltage Waveforms for the Deposition of Microcrystalline Silicon
E.V. Johnson
,
Pierre-Alexandre Delattre
,
Jean-Paul Booth
ICANS, Aug 2011, Nara, Japan
Communication dans un congrès
hal-02594746
v1
|
|
Recombination coefficients of Cl atoms on Al<SUB>2</SUB>O<SUB>3</SUB> walls determined by TALIF
Jean-Paul Booth
,
Nishant Sirse
,
Yasmina Azamoum
,
Mujahid Zaka-Ul-Islam
,
Pascal Chabert
Plasma Etch and Strip for Microelectronics (PESM), May 2011, Mechelen, Belgium
Communication dans un congrès
hal-02594744
v1
|
|
Atomic Chlorine absolute densities and surface recombination coefficients in inductively coupled plasmas in Cl<SUB>2</SUB>
Jean-Paul Booth
,
Nishant Sirse
,
Yasmina Azamoum
,
Pascal Chabert
AVS, Oct 2011, Nashville, Tennessee, United States
Communication dans un congrès
hal-02594749
v1
|
|
INCLINE - Inductively coupled plasma for CMOS-compatible etching of III-V integrated laser sources
S. Bouchoule
,
L. Gatilova
,
G. Patriarche
,
S. Guilet
,
L. Le Gratiet
et al.
Journées Nationales en Nanosciences et Nanotechnologies, 2011, Ecole Polytechnique, Palaiseau, France
Communication dans un congrès
hal-02594797
v1
|
|
Absolute atomic chlorine densities in a Cl<SUB>2</SUB> ICP determined by TALIF with a new calibration method
Jean-Paul Booth
,
Nishant Sirse
,
Yasmina Azamoum
,
Pascal Chabert
30th ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom
Communication dans un congrès
hal-02594798
v1
|
|
Detection of atomic chlorine in an inductively-coupled plasma by TALIF:Absolute densities and surface recombination coefficients
Jean-Paul Booth
,
Nishant Sirse
,
Yasmina Azamoum
,
Pascal Chabert
LAPD, Oct 2011, Jeju, Korea, Unknown Region
Communication dans un congrès
hal-02573303
v1
|
|
VOLTAGE WAVEFORM TAILORING: A PROMISING NEW METHOD FOR SILICON DEPOSITION
Pierre-Alexandre Delattre
,
S. Pouliquen
,
E.V. Johnson
,
Nishant Sirse
,
Jean-Paul Booth
CIP (Congres International sur les Plasmas), Jun 2011, Nantes, France
Communication dans un congrès
hal-02594747
v1
|
|
Planar Langmuir probe in pulsing regime
V. Samara
,
Jean-Paul Booth
,
J.-F. de Marneffe
,
W. Boullart
PESM (Plasma Etch and Strip for Microelectronics), May 2011, Mechelen, Belgium
Communication dans un congrès
hal-02594742
v1
|
|
Control of Nanocrystalline Growth Phase and Deposition Rate through Voltage Waveform Tailoring
E.V. Johnson
,
Pierre-Alexandre Delattre
,
Jean-Paul Booth
MRS spring meeting, Apr 2011, San Francisco, California, United States
Communication dans un congrès
hal-02594741
v1
|
|
Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control
Jean-Paul Booth
,
Pascal Chabert
,
Rodolphe Sarot
,
Mujahid Zaka-Ul-Islam
IS-Plasma (International Symposium-Plasma), Feb 2011, Nagoya, Japan
Communication dans un congrès
hal-02573300
v1
|
|
All you ever wanted to know about Fluorocarbon Plasmas but never dared to ask
Jean-Paul Booth
POSMOL (International Symposium on Electron Molecule Collisions and Swarms), Jul 2011, Maynooth, Ireland
Communication dans un congrès
hal-02573302
v1
|
|
RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD
Jean-Paul Booth
,
E.V. Johnson
,
Pierre-Alexandre Delattre
,
T. Verbeke
,
J-C Vanel
International Conference on Plasmas and Nanotechnology (ICPLANTS), Feb 2011, Takayama, Japan
Communication dans un congrès
hal-02594739
v1
|
|
Cl atom recombination coefficients in a Cl<SUB>2</SUB> ICP determined by TALIF
Jean-Paul Booth
,
Pascal Chabert
,
F. Boutaiba
,
Mujahid Zaka-Ul-Islam
Frontiers in Low Temperature Plasma Diagnostics (FLTPD), May 2011, Zinnowitz, Germany
Communication dans un congrès
hal-02594745
v1
|
|
Control of Microcrystalline Silicon Deposition by RF Waveform Tailoring
E.V. Johnson
,
Jean-Paul Booth
,
J-C Vanel
,
T. Verbeke
Gaseous Electronics Conference, Oct 2010, Paris, France
Communication dans un congrès
hal-02595158
v1
|
|
RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD
Jean-Paul Booth
,
E.V. Johnson
,
T. Verbeke
,
J-C Vanel
UK-Technological Plasmas Workshop, Dec 2010, Bristol, United Kingdom
Communication dans un congrès
hal-02595161
v1
|
|
Time-resolved electron density and OES measurements for studying the surface loss rates of H and Cl atoms in a Cl2-H2 ICP plasma
G. Curley
,
L. Gatilova
,
S. Guilet
,
S. Bouchoule
,
G. Gogna
et al.
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas, 2010, Paris, France. TF4-005, 763-764, Hori M. and Graha W.G. (Eds), Japan Society of Applied Physics
Communication dans un congrès
hal-00800895
v1
|
|
Nanocrystalline silicon film growth morphology control through RF waveform tailoring
Jean-Paul Booth
,
E.V. Johnson
,
T. Verbeke
,
J-C Vanel
AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States
Communication dans un congrès
hal-02595160
v1
|
|
GAS BREAKDOWN IN RF AND LONGITUDINAL COMBINED ELECTRIC FIELDS
V. A. Lisovskiy
,
Jean-Paul Booth
,
V. D. Yegorenkov
,
N. D. Kharchenko
RF Breakdown Workshop, Oct 2010, Paris, France
Communication dans un congrès
hal-02573304
v1
|
|
Effect of low-frequency power on electron density and ion flux in dual-frequency capacitive radiofrequency discharges
Jean-Paul Booth
,
G. Curley
,
Pascal Chabert
PESM, Mar 2010, Grenoble, France
Communication dans un congrès
hal-02595157
v1
|
|
Physique et physicochimie des Plasmas excites par radio-frequence
Jean-Paul Booth
Journees Plasma-Photovoltaique, Nov 2010, St Cyprien, France
Communication dans un congrès
hal-02611098
v1
|
|
Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes
Jérôme Bredin
,
Jean-Paul Booth
Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States
Communication dans un congrès
hal-02595162
v1
|
|
Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes
Jean-Paul Booth
,
Jérôme Bredin
AVS International Symposium, Nov 2009, San Jose, California, United States
Communication dans un congrès
hal-02595165
v1
|
|
Etch process control with a deposition-tolerant planar electrostatic probe
Jean-Paul Booth
,
D. Keil
,
C. Thorgrimsson
,
M. Nagai
,
L. Albarede
Radiofrequency Plasma Workshop, May 2009, Presqu ile de Giens, France
Communication dans un congrès
hal-02573306
v1
|
|
Dual-frequency capacitive radiofrequency discharges : Effect of low-frequency power on electron density and flux
Jean-Paul Booth
,
G. Curley
,
Pascal Chabert
,
D. Maric
Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States
Communication dans un congrès
hal-02595163
v1
|
|
Etch process control with a deposition-tolerant planar electrostatic probe
Jean-Paul Booth
,
D. Keil
,
C. Thorgrimsson
,
M. Nagai
,
L. Albarede
Irish Plasma and Beam Processing Group Meeting, May 2009, Belfast, Northern Ireland, United Kingdom
Communication dans un congrès
hal-02573307
v1
|
|
Etch process control with a deposition-tolerant planar electrostatic probe
Jean-Paul Booth
,
D. Keil
,
C. Thorgrimsson
,
M. Nagai
,
L. Albarede
PESM, Feb 2009, Louvain, Belgium
Communication dans un congrès
hal-02573305
v1
|
|
CFX kinetics, gas temperature and instabilities in a CF4 inductively coupled discharge
J.P Booth
,
H. Abada
,
P. Chabert
,
G. Cunge
48th National AVS symposium & Topical conferences, 2001, San Francisco, United States
Communication dans un congrès
hal-00494528
v1
|
|
CFx kinetics, gas temperatures and instabilities in a CF4 inductively-coupled discharge
J.P Booth
,
H. Abada
,
P. Chabert
,
G. Cunge
48th AVS Annual Symposium, 2001, San Francisco, United States
Communication dans un congrès
hal-00486179
v1
|
|
Chlorine Inductively- coupled Plasma diagnostics using UV absorption spectroscopy and an ion flux probE
J.P Booth
,
F. Neuilly
,
J.M Francou
,
L. Vallier
International Colloquium on Plasma Processes, CIP, 2001, Antibes, France
Communication dans un congrès
hal-00486185
v1
|
|
High rate silicon carbide etching
P. Chabert
,
J. Perrin
,
J.P Booth
,
G. Cunge
ISPC, 15th International Symposium on Plasma Chemistry, 2001, Orleans, France
Communication dans un congrès
hal-00481964
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