Marc Sansa
- Département Composants Silicium (DCOS)
Publications
Publications
Single Crystal LiNbO 3 and LiTaO 3 Bulk Acoustic Wave Resonator2023 IEEE International Ultrasonics Symposium (IUS), Sep 2023, Montreal, France. pp.1-9, ⟨10.1109/IUS51837.2023.10308137⟩ |
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Enabling high efficiency sensing with optomechanical devicesMEMS & Imaging sensors submit 2023, Sep 2023, Grenoble, France |
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8 inch Surface and Bulk Acoustic Wave devices based on POI substrate for 5GIEEE IFCS-EFTF 2023 - Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, held with ATF, the Asia-Pacific Workshop on Time and Frequency, May 2023, Toyama, Japan |
BAW Filter for space applications at 4.2 GHzEuropean Microwave Week, Sep 2022, Milan, Italy. ⟨10.23919/EuMC54642.2022.9924339⟩ |
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Very Large Scale Integration Optomechanics: a cure for loneliness of NEMS resonators?2018 IEEE International Electron Devices Meeting (IEDM), Dec 2018, San Francisco, United States. pp.12.4.1-12.4.3, ⟨10.1109/IEDM.2018.8614532⟩ |
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Ultra sensitive optomechanical microdisk resonators with very large scale integration process2018 IEEE Micro Electro Mechanical Systems (MEMS), Jan 2018, Belfast, United Kingdom. pp.844-845, ⟨10.1109/MEMSYS.2018.8346687⟩ |
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A 30-to-80MHz simultaneous dual-mode heterodyne oscillator targeting NEMS array gravimetric sensing applications with a 300zg mass resolution2017 IEEE International Solid- State Circuits Conference - (ISSCC), Feb 2017, San Francisco, United States. pp.266-267 |
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Real time sensing in the non linear regime of NEMs resonatorsIEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421814⟩ |
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Simultaneous mode tracking for sensing applications with dual-mode heterodyne NEMS oscillator2016 IEEE SENSORS, Oct 2016, Orlando, United States. 3 p., ⟨10.1109/ICSENS.2016.7808662⟩ |
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Charge-independent mass spectrometry of single virus capsids above 100MDa with nanomechanical resonators2018 |