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Maria Dolores MANRIQUE JUAREZ

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A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding

Maria Dolores Manrique-Juarez , Fabrice Mathieu , Guillaume Libaude , Véronique Conédéra , David Bourrier
The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany
Communication dans un congrès hal-03951363v1