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Maria Dolores MANRIQUE JUAREZ

4
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Publications

"laurent-mazenq"
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A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding

Maria Dolores Manrique-Juarez , Fabrice Mathieu , Guillaume Libaude , Véronique Conédéra , David Bourrier
The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany
Communication dans un congrès hal-03951363v1
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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility

Isabelle Dufour , Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Laurent Colin
Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France
Communication dans un congrès hal-03778623v1
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Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures

Isabelle Dufour , Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier
2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩
Communication dans un congrès hal-02481928v1

Spin crossover materials for MEMS actuation: Film integration and characterization

Maria Dolores Manrique-Juarez , Sylvain Rat , Laurent Mazenq , Fabrice Mathieu , Isabelle Séguy
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994294⟩
Communication dans un congrès hal-01816366v1