Marie Gueunier-Farret
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Structural properties of hydrogenated microcrystalline silicon–carbon alloys deposited by Radio Frequency Plasma Enhanced Chemical Vapor Deposition: Effect of microcrystalline silicon seed layer and methane flow rateThin Solid Films, 2014, 550, pp.312-318. ⟨10.1016/j.tsf.2013.11.081⟩
Article dans une revue
hal-01099597v1
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Device grade hydrogenated polymorphous silicon deposited at high ratesJournal of Non-Crystalline Solids, 2008, 354, pp.2092
Article dans une revue
hal-00350767v1
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Polymorphous silicon thin films deposited at high rate: transport properties and density of statesThin Solid Films, 2008, 516, pp.6888
Article dans une revue
hal-00350886v1
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Density of states measurements of RF-power, SiF4 and CH4 –tuned-hydrogenated microcrystalline silicon carbon alloy thin films using Fourier transform photocurrent spectroscopy (FTPS)European Photovoltaïc Solar Energy Conference, Sep 2015, Hambourg, Germany. Proceedings of the European Photovoltaïc Solar Energy Conference
Poster de conférence
hal-01242764v1
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Density of states measurements of RF-power, SiF4 and CH4 –tuned-hydrogenated microcrystalline silicon carbon alloy thin films using Fourier transform photocurrent spectroscopy (FTPS)Journées Nationales du Photovoltaïque 2015, Dec 2015, Dourdan, France
Poster de conférence
hal-01245742v1
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