Olivier Thomas
3
Documents
Identifiants chercheurs
- olivier-thomas
- 0000-0001-7240-5259
- IdRef : 061423793
Présentation
Publications
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Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)Journal of Micromechanics and Microengineering, 2015, 25 (3), pp.35002-35013. ⟨10.1088/0960-1317/25/3/035002⟩
Article dans une revue
hal-01169283v1
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PZT Nanofilm-Based Wafer Scale NanoresonatorsIEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p
Communication dans un congrès
hal-01144194v1
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Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators2013 Nanomechanical Sensing Workshop, May 2013, Stanford, USA, United States. pp.0
Communication dans un congrès
hal-03165172v1
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