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Thomas Defforge

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Présentation

**Thomas DEFFORGE** Born in May 25th 1986 – French nationality Professionnal adresses: GREMAN – site STMicroelectronics 16 rue Pierre et Marie Curie 37071 TOURS, CEDEX 2 - France INSA Centre Val de Loire 3 rue de la Chocolaterie – CS 23410 41034 BLOIS CEDEX – France Associate Professor Position INSA Centre Val de Loire / GREMAN UMR 7347, Université de Tours (France) Education 2009-2012: PhD (electronics) at the GREMAN laboratory, Université de Tours. PhD defended the November 12th 2012. 2009: Masters degree at the Université de Tours. Major: Material science Employment 2012-2014: Post-doc position at the GREMAN laboratory, Université de Tours. 2014-2015: Research engineer at SiLiMiXT®, in Tours. 2015-2017: Post-doc position at the GREMAN laboratory, Université de Tours. Since 2017: Associate Prof. at INSA Centre Val de Loire in Blois (France) and GREMAN in Tours. Research activities Research activities focused on the synthesis and characterization of porous and nanostructured semiconductors obtained by electrochemical or chemical etching (porous silicon thin film, silicon nanowires or nanoparticles) for microelectronics or energy storage applications. Involved in 15 research projects at regional, national and international (European) levels. Publications Authored or co-authored more than 30 publications in international journals since 2011. Also authored 1 book chapter and 25 talks at international conferences (5 invited). Selected publications: \[1\] J. Joo, **T. Defforge**, A. Loni, D. Kim, Z.Y. Li, M.J. Sailor, G. Gautier, L.T. Canham. Enhanced quantum yield of photoluminescent porous silicon prepared by supercritical drying, *Applied Physics Letters*, **108** 153111 (2016). \[2\] B. Bardet, **T. Defforge**, B. Negulescu, D. Valente, J. Billoué, P. Poveda, G. Gautier. Shape-controlled electrochemical synthesis of mesoporous Si/Fe nanocomposites with tailored ferromagnetic properties, *Materials Chemistry Frontiers*, **1**, 190-196 (2017). \[3\] **T. Defforge**, M. Capelle, F. Tran-Van, G. Gautier, Plasma deposited fluoropolymer film mask for local porous silicon formation, *Nanoscale Research Letters*, **7** 344 (2012). \[4\] B. Fodor, E. Agocs, B. Bardet, **T. Defforge**, F. Cayrel, D. Alquier, M. Fried, G. Gautier, P. Petrik. Porosity and thickness characterization of porous Si and oxidized porous Si layers – an ultraviolet-visible-mid infrared ellipsometry study, *Microporous and Mesoporous Materials*, **227**, 112-120 (2016). \[5\] **T. Defforge**, M. Diatta, D. Valente, F. Tran-Van, G. Gautier, Role of Electrolyte Additives during Electrochemical Etching of Macropore Arrays in Low-Doped Silicon, *Journal of the Electrochemical Society*, **160** H247-H251 (2013).

Publications

Localized protection of high aspect ratio trenches based on the anisotropy manipulation of plasma-polymerized fluoropolymer coating

Douglas Silva de Vasconcellos , Romain Dailleau , Virginie Grimal , Thomas Defforge , Jérôme Billoué
Materials Science in Semiconductor Processing, 2023, 156, pp.107275. ⟨10.1016/j.mssp.2022.107275⟩
Article dans une revue hal-04158301v1
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Conductive TiN thin films grown by plasma- enhanced atomic layer deposition: Effects of N-sources and thermal treatments

Clémence Badie , Héloïse Tissot , Beniamino Sciacca , Maïssa K. S. Barr , Julien Bachmann
Journal of Vacuum Science & Technology A, 2023, 41 (3), pp.032401. ⟨10.1116/6.0002288⟩
Article dans une revue hal-04016648v1

Synthesis by solid route and physicochemical characterizations of blends of calcium orthophosphate powders and mesoporous silicon particles

Caroline Richard , Mélissa Alfred-Arulrasa , Harikrishnan Ramadas , Pubudu Tharanga Mahagamage , Thomas Defforge
Frontiers in Bioengineering and Biotechnology, 2023, 11, ⟨10.3389/fbioe.2023.1101513⟩
Article dans une revue hal-04466219v1
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Cell penetrating peptide decorated magnetic porous silicon nanorods for glioblastoma therapy and imaging

Arnaud Chaix , Audrey Griveau , Thomas Defforge , Virginie Grimal , Brice Le Borgne
RSC Advances, 2022, 12 (19), pp.11708-11714. ⟨10.1039/D2RA00508E⟩
Article dans une revue hal-03664758v1

Integrating porous silicon layer backing to capacitive micromachined ultrasonic transducers (CMUT)-based linear arrays for acoustic Lamb wave attenuation

J. Lascaud , Thomas Defforge , L. Colin , C. Meynier , D. Alquier
Journal of Applied Physics, 2022, 131 (10), pp.105107. ⟨10.1063/5.0083052⟩
Article dans une revue hal-03813868v1

The influence of Al 2 O 3 nanolamination in ALD ZrO 2 capacitor on physical and electrical characteristics

Virgil Guillon , Benoit Riou , Jérôme Billoué , Thomas Defforge , Pascal Gardes
Journal of Applied Physics, 2022, 132 (23), pp.234103. ⟨10.1063/5.0128507⟩
Article dans une revue hal-03980029v1

Time‐gated luminescence imaging of positively charged poly‐ l‐ lysine‐coated highly microporous silicon nanoparticles in living Hydra polyp

Chiara Schiattarella , Rosalba Moretta , Thomas Defforge , Gaël Gautier , Bartolomeo Della Ventura
Journal of Biophotonics, 2020, ⟨10.1002/jbio.202000272⟩
Article dans une revue hal-02962524v1
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Investigation of ultrasonic absorption in the MHz frequency range by silicon substrates with a built-in porous silicon layer

Julie Lascaud , Thomas Defforge , G. Gautier , Dominique Certon
Ultrasonics, 2019, 96, pp.196-202. ⟨10.1016/j.ultras.2019.01.006⟩
Article dans une revue hal-02382070v1

Improved cycling performances of binder-free macroporous silicon Li-ion negative electrodes using room temperature ionic liquid electrolyte

Erwann Luais , Fouad Ghamouss , Joe Sakai , Thomas Defforge , Gaël Gautier
Journal of Solid State Electrochemistry, 2019, ⟨10.1007/s10008-019-04197-6⟩
Article dans une revue hal-02043176v1

Photoemissive properties and stability of undecylenic acid-modified porous silicon nanoparticles in physiological medium

Chiara Schiattarella , Monica Terracciano , Thomas Defforge , Gaël Gautier , Bartolomeo Della Ventura
Applied Physics Letters, 2019, 114 (11), pp.113701. ⟨10.1063/1.5079469⟩
Article dans une revue hal-02382067v1
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Impregnation of High-Magnetization FeCo Nanoparticles in Mesoporous Silicon: An Experimental Approach

Mathieu Lepesant , Benjamin Bardet , Lise-Marie Lacroix , Pierre Fau , Cyril Garnero
Frontiers in Chemistry, 2018, 6, pp.609. ⟨10.3389/fchem.2018.00609⟩
Article dans une revue hal-02001841v1

Structural, Optical and Thermo-physical Properties of Mesoporous Silicon Layers: Influence of Substrate Characteristics

Amer Melhem , Domingos de Sousa Meneses , Caroline Andreazza-Vignolle , Thomas Defforge , Gael Gautier
Journal of Physical Chemistry C, 2017, 121 (14), pp.7821. ⟨10.1021/acs.jpcc.6b13101⟩
Article dans une revue hal-01495490v1

In-depth porosity control of mesoporous silicon layers by an anodization current adjustment

Julie Lascaud , Thomas Defforge , Dominique Certon , Damien Valente , Gaël Gautier
Journal of Applied Physics, 2017, 122 (21), ⟨10.1063/1.4997228⟩
Article dans une revue hal-01741078v1

Spectroscopic ellipsometry of columnar porous Si thin films and Si nanowires

Bálint Fodor , Thomas Defforge , Emil Agócs , Miklós Fried , Gaël Gautier
Applied Surface Science, 2017, 421, pp.397 - 404. ⟨10.1016/j.apsusc.2016.12.063⟩
Article dans une revue hal-01792014v1

Shape-controlled electrochemical synthesis of mesoporous Si/Fe nanocomposites with tailored ferromagnetic properties

Benjamin Bardet , Thomas Defforge , Beatrice Negulescu , Damien Valente , Jérôme Billoue
Materials Chemistry Frontiers, 2017, 1 (1), pp.190 - 196. ⟨10.1039/c6qm00040a⟩
Article dans une revue hal-01741022v1

Enhanced quantum yield of photoluminescent porous silicon prepared by supercritical drying

Jinmyoung Joo , Thomas Defforge , Armando Loni , Dokyoung Kim , Z.Y. Li
Applied Physics Letters, 2016, 108 (15), ⟨10.1063/1.4947084⟩
Article dans une revue hal-01792031v1
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In situ investigation of mesoporous silicon oxidation kinetics using infrared emittance spectroscopy

Benjamin Bardet , Domingos de Sousa Meneses , Thomas Defforge , Jérôme Billoue , Gaël Gautier
Physical Chemistry Chemical Physics, 2016, 18, pp.18201-18208. ⟨10.1039/c6cp02086k⟩
Article dans une revue hal-01740923v1

Optimized plasma-polymerized fluoropolymer mask for local porous silicon formation

Bin Lu , Thomas Defforge , Bálint Fodor , Benjamin Morillon , Daniel Alquier
Journal of Applied Physics, 2016, 119 (21), ⟨10.1063/1.4953088⟩
Article dans une revue hal-01792035v1

Porosity and Thickness Characterization of Porous Si and Oxidized Porous Si layers – an ultraviolet-visible-mid Infrared Ellipsometry Study

Balint Fodor , Emil Agocs , Benjamin Bardet , Thomas Defforge , Frederic Cayrel
Microporous and Mesoporous Materials, 2016, 227, pp.112-120. ⟨10.1016/j.micromeso.2016.02.039⟩
Article dans une revue hal-01784759v1

Porous Silicon Formation by Hole Injection from a Back Side p + /n Junction for Electrical Insulation Applications

Angélique Fèvre , Samuel Menard , Thomas Defforge , Gaël Gautier
Semiconductor Science and Technology, 2016, 31 (1), pp.014001. ⟨10.1088/0268-1242/31/1/014001⟩
Article dans une revue hal-01784761v1

Nanoparticles based laser-induced surface structures formation on mesoporous silicon by picosecond laser beam interaction

Abderazek Talbi , Agnès Petit , Amer Melhem , Arnaud Stolz , Chantal Boulmer-Leborgne
Applied Surface Science, 2016, 374, pp.31. ⟨10.1016/j.apsusc.2015.09.003⟩
Article dans une revue hal-01214265v1

Anode Based on Porous Silicon Films Using Polymer Electrolyte for Lithium-Ion Microbatteries

Vincent Chaudoy , Erwann Luais , Fouad Ghamouss , Thomas Defforge , Sébastien Desplobain
ECS Transactions, 2015, 66 (8), pp.31-39. ⟨10.1149/06608.0031ecst⟩
Article dans une revue hal-01831016v1

Supercritically-Dried Porous Silicon Powders with Surface Areas Exceeding 1000 M2/G

Armando Loni , L. T. Canham , Thomas Defforge , Gael Gautier
ECS Journal of Solid State Science and Technology, 2015, 4 (8), pp.289-292. ⟨10.1149/2.0031508jss⟩
Article dans une revue hal-01784765v1

Porous Silicon Fabrication by Anodisation: Progress towards the Realisation of Layers and Powders with High Surface Area and Micropore Content

Armando Loni , Thomas Defforge , E. Caffull , Gael Gautier , L.T. Canham
Microporous and Mesoporous Materials, 2015, 213, pp.188-191. ⟨10.1016/j.micromeso.2015.03.006⟩
Article dans une revue hal-01784772v1

Evaluation of Mesoporous Silicon Substrates Strain for the Integration of Radio Frequency Circuits

Marie Capelle , Jérôme Billoue , Thomas Defforge , Patrick Poveda , Gael Gautier
Thin Solid Films, 2015, 585, pp.66-71. ⟨10.1016/j.tsf.2015.04.022⟩
Article dans une revue hal-01784771v1

Structural, Optical, and Thermal Analysis of n-Type Mesoporous Silicon Prepared by Electrochemical Etching

Amer Melhem , Thomas Defforge , Domingos de Sousa Meneses , Caroline Andreazza-Vignolle , Gael Gautier
Journal of Physical Chemistry C, 2015, ⟨10.1021/acs.jpcc.5b04984⟩
Article dans une revue hal-01214262v1

Investigation of Direct Current Electrical Properties of Electrochemically Etched Mesoporous Silicon Carbide

Gaël Gautier , Jérôme Biscarrat , Thomas Defforge , Angélique Fèvre , Damien Valente
Journal of Applied Physics, 2014, 116 (22), pp.223705. ⟨10.1063/1.4904085⟩
Article dans une revue hal-01784775v1

Role of Electrolyte Additives during Electrochemical Etching of Macropore Arrays in Low-Doped Silicon

Thomas Defforge , Marianne Diatta , Damien Valente , François Tran-Van , Gaël Gautier
Journal of The Electrochemical Society, 2013, 160 (4), pp.H247-H251. ⟨10.1149/2.013306jes⟩
Article dans une revue hal-01810901v1

Systematic Study of Anodic Etching of Highly Doped N-Type 4H-SiC in Various HF Based Electrolytes

Gaël Gautier , Jérôme Biscarrat , Damien Valente , Thomas Defforge , A. Gary
Journal of The Electrochemical Society, 2013, 160 (9), pp.D372-D379. ⟨10.1149/2.082309jes⟩
Article dans une revue hal-01810897v1

Copper Electrodeposition into Macroporous Silicon Arrays for through Silicon via Applications

Thomas Defforge , Loïc Coudron , Olivier Ménard , Virginie Grimal , Gaël Gautier
Microelectronic Engineering, 2013, 106, pp.160-163. ⟨10.1016/j.mee.2013.01.014⟩
Article dans une revue hal-01810902v1

Copper-selective electrochemical filling of macropore arrays for through-silicon via applications

Thomas Defforge , Jérôme Billoue , Marianne Diatta , François Tran-Van , Gaël Gautier
Nanoscale Research Letters, 2012, 7 (1), pp.375. ⟨10.1186/1556-276X-7-375⟩
Article dans une revue hal-01810906v1

Plasma-deposited fluoropolymer film mask for local porous silicon formation

Thomas Defforge , Marie Capelle , François Tran-Van , Gaël Gautier
Nanoscale Research Letters, 2012, 7 (1), pp.344. ⟨10.1186/1556-276X-7-344⟩
Article dans une revue hal-01810905v1

Elaboration of high aspect ratio monocrystalline silicon suspended nanobridges by low temperature alkaline treatment of dry etched trenches

Thomas Defforge , Gaël Gautier , Thomas Tillocher , Remi Dussart , François Tran-Van
Journal of Vacuum Science & Technology A, 2012, 30 (1), pp.010601. ⟨10.1116/1.3665217⟩
Article dans une revue hal-00655000v1

Scalloping removal on DRIE via using low concentrated alkaline solutions at low temperature

Thomas Defforge , Xi Song , Gaël Gautier , Thomas Tillocher , Remi Dussart
Sensors and Actuators A: Physical , 2011, 170 (1-2), pp.114. ⟨10.1016/j.sna.2011.05.028⟩
Article dans une revue hal-00655001v1

Grafting of salen complexes on macroporous silicon by controlled polymerization for applications in asymmetric catalysis

Rafaela da Silva Bechara Soares , Erigène Bakangura , Nadine Aubry-Barroca , Philippe Roger , Mohamed Mellah
Congrès SCF 2023, Jun 2023, Nantes, France
Communication dans un congrès hal-04466320v1

Ultrathin TiO2 coating of nanostructured porous silicon towards the fabrication of large-area electrodes for artificial photosynthesis applications.

Bachar Al Chimali , Romain Dailleau , Thomas Defforge , Gaël Gautier , Brice Le Borgne
NANOCON 2022, Oct 2022, Brno, Czech Republic
Communication dans un congrès hal-03980983v1

Elaboration of Polymeric Membrane for the precise localization of Porous Silicon

Lisa Monnier , Marylène Vayer , Thomas Defforge , Gaël Gautier , Christophe Sinturel
Journées d’Etude des Polymères, Oct 2022, Bussang (Vosges), France
Communication dans un congrès hal-03980894v1

Structural and electrical properties of ZrO2/Al2O3/ZrO2 3D MIM capacitor deposited by Atomic Layer Deposition

Virgil Guillon , Jérôme Billoué , Thomas Defforge , Benoit Riou , Gaël Gautier
International Conference on Electronics, Communications and Control Engineering (ICECC 2022), Mar 2022, Fukuoka (virtual event), Japan
Communication dans un congrès hal-03980956v1

Development of advanced sensing materials and interface structures for in-situ bioellipsometry

Benjamin Kalas , Thomas Defforge , Gaël Gautier , Arnaud Chaix , Miklos Fried
Label-free Biomedical Imaging and Sensing (LBIS) 2022, Jan 2022, San Francisco, United States. pp.62, ⟨10.1117/12.2609882⟩
Communication dans un congrès hal-03813905v1

MAGNETIC CHARACTERIZATION OF POROUS SILICON – COBALT NANOPARTICLE COMPOSITE FOR RF DEVICE APPLICATION

Thomas Defforge , Petra Granitzer , Jérôme Billoué , Brice Le Borgne , Gaël Gautier
Porous Semiconductors - Science and Technology, Mar 2022, Lido Di Camaiore, Italy
Communication dans un congrès hal-03980717v1

Elaboration of polymeric membrane for the precise localization of porous silicon

Lisa Monnier , Thomas Defforge , Marylène Vayer , Sébastien Desplobain , Gaël Gautier
Séminaire estival MatV2L 2022, Jun 2022, Limoges, France
Communication dans un congrès hal-03980877v1

CELL PENETRATING PEPTIDE DECORATED-MAGNETIC POROUS SILICON NANORODS FOR GLIOBLASTOMA IMAGING AND THERAPY

Arnaud Chaix , Audrey Griveau , Thomas Defforge , Virginie Grimal , Brice Le Borgne
Porous Semiconductors - Science and Technology, Mar 2022, Lido Di Camaiore, Italy
Communication dans un congrès hal-03980738v1
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Titanium nitride / porous silicon electrode for microsupercapacitor applications

Romain Dailleau , Thomas Defforge , François Tran Van , Gaël Gautier
Porous semiconductors science and technology, Mar 2022, Lido di Camaiore, Italy
Communication dans un congrès hal-03980611v1

PLANAR-TYPE TRIAC WITH POROUS SILICON-BASED EDGE STRUCTURE

Sylvain Audière , Thomas Defforge , Benjamin Morillon , Emmanuel Collard , Jérôme Billoue
Porous Semiconductors - Science and Technology, Mar 2022, Lido Di Camaiore, Italy
Communication dans un congrès hal-03980838v1

Development of silicon nanoparticles for plasmonic sensing

Thomas Defforge , Arnaud Chaix , Benjamin Kalas , Miklos Fried , Peter Petrik
Colloidal Nanoparticles for Biomedical Applications XVII, Jan 2022, San Francisco, United States. pp.19, ⟨10.1117/12.2609814⟩
Communication dans un congrès hal-03813915v1

POLY-L-LYSINE-CONJUGATED POROUS SILICON NANOPARTICLES AS LABEL-FREE LUMINESCENT PROBES FOR IN VIVO TIME-GATED IMAGING OF HYDRA VULGARIS

Chiara Schiattarella , Rosalba Moretta , Thomas Defforge , Gaël Gautier , Claudia Tortiglione
Porous semiconductors - Science and technology, Mar 2022, Lido Di Camaiore, Italy
Communication dans un congrès hal-03980702v1

Ultrathin TiO2 coating of nanostructured porous silicon towards the fabrication of large-area electrodes for artificial photosynthesis applications

Bachar Al Chimali , Irene Carrasco , Romain Dailleau , Lisa Monnier , Thomas Defforge
RAFALD 2022, Oct 2022, Caen, France
Communication dans un congrès hal-03981885v1

Fabrication d’électrodes de microsupercondensateurs à base de silicium poreux fonctionnalisé par ALD

Romain Dailleau , Thomas Defforge , François Tran Van , Gaël Gautier
RAFALD 2022, Oct 2022, Caen, France
Communication dans un congrès hal-03981867v1

Hybrid Porous Silicon - Silicon substrate for RF devices integration

Jérôme Billoue , Gaël Gautier , Thomas Defforge
Workshop, European Microwave Week 2019, Sep 2019, Paris, France
Communication dans un congrès hal-02481278v1

Nanostructured silicon-based nanoparticles as label-free photoluminescent probes for in vivo imaging

C. Schiattarella , M. Terracciano , Thomas Defforge , G. Gautier , B. Della Ventura
20th Italian National Conference on Photonic Technologies (Fotonica 2018), May 2018, Lecce, Italy. 51 (4pp.), ⟨10.1049/cp.2018.1660⟩
Communication dans un congrès hal-02382072v1

(Invited) Recent Advances in Porous Silicon Based Microelectronic Devices

Gaël Gautier , Jérôme Billoue , Thomas Defforge , Bin Lu , Benjamin Bardet
AiMES 2018, Sep 2018, Cancùn, Mexico. pp.47-52, ⟨10.1149/08601.0047ecst⟩
Communication dans un congrès hal-02382064v1

Electrochemical Formation of Porous Silicon Carbide for Micro-Device Applications

Gaël Gautier , Thomas Defforge , Guillaume Gommé , Damien Valente , Daniel Alquier
ICSCRM 2017, Sep 2017, Washington, United States. pp.943-946, ⟨10.4028/www.scientific.net/MSF.924.943⟩
Communication dans un congrès hal-02382075v1

Investigation of surface interference between LIPSS and nano-pores in case of mesopouros silicon induced by pico and femto-second laser beams

Abderazek Talbi , Amer Melhem , Agnes Petit , Sostaine Kaya-Boussougou , Chantal Boulmer-Leborgne
1st International Conference on Applied Surface Science (ICASS), Jul 2015, Shangai, China
Communication dans un congrès hal-01147788v1