
Thomas Souvignet
10
Documents
Publications
Publications
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Two-step ALD process for non-oxide ceramic deposition: the example of boron nitrideJournal of Physics: Materials, 2024, 7 (3), pp.035006. ⟨10.1088/2515-7639/ad561e⟩
Article dans une revue
hal-04638836
v1
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Tuning the crystallinity of Boron Nitride using Chemical Vapor DepositionTrends in Nanotechnology 2023 (TNT 2023), Aug 2023, Lyon, France
Poster de conférence
hal-04919463
v1
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