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Bertrand Vilquin

59
Documents

Présentation

Reader (HDR) in condensed matters Bertrand Vilquin (reader, HDR, Ecole Centrale de Lyon) has been working on integration of perovskite materials since the beginning of his PhD in 1999 at Université de Caen (France). In 2002, he joined the Institute for Scientific and Industrial Research at Osaka University (Japan) for a JSPS post doctorate fellowship. In 2005, he moved to Université Paris XI to work on an industrial project with ALTIS Semiconductors to realize New Generation of nanoscale MRAM devices. In 2006, he became lecturer at Ecole Centrale de Lyon working on the integration of perovskite materials on silicon though academic and industrial projects. He has a rich experience in both national and international research projects and had been the coordinator of 2 ANR projects. He was invited professor at Osaka University (Japan) in 2012 and at the University of Tokyo (Japan) in 2016. He became associate professor at Université de Sherbrooke (Canada) in 2016. He is the coordinator of the “nanoscale engineering” master course of University of Lyon. He successfully obtained his habilitation to conduct research (HDR) in 2018 and he is member of IEEE and SFP. **Project leader:** \- ANR MINOS (2007-2011) \- ANR SURFFER (2010-2013) **WorkPackage coordinator:** \- ANR PIEZO2POWER (2011-2015) \- ANR INTENSE (2015-2017) \- H2020 ICT 3eFERRO (2018-2021)

Publications

guillaume-saint-girons
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Structural studies of epitaxial BaTiO3 thin film on silicon

B. Wagué , J.-B. - B Brubach , G. Niu , G. Dong , L. Dai
Thin Solid Films, 2020, 693, pp.137636. ⟨10.1016/j.tsf.2019.137636⟩
Article dans une revue hal-02324723v1

Large anisotropy of ferroelectric and pyroelectric properties in heteroepitaxial oxide layers

R. Moalla , S. Cueff , J. Penuelas , B. Vilquin , G. Saint-Girons
Scientific Reports, 2018, 8 (1), ⟨10.1038/s41598-018-22349-y⟩
Article dans une revue hal-01848663v1
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Huge gain in pyroelectric energy conversion through epitaxy for integrated self-powered nanodevices

Rahma Moalla , Bertrand Vilquin , Guillaume Saint-Girons , Gwenaël Le Rhun , Emmanuel Defay
Nano Energy, 2017, 41, pp.43 - 48. ⟨10.1016/j.nanoen.2017.09.001⟩
Article dans une revue hal-01848668v1
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Dramatic effect of thermal expansion mismatch on the structural, dielectric, ferroelectric and pyroelectric properties of low-cost epitaxial PZT films on SrTiO 3 and Si (001) subtrates.

Rahma Moalla , B. Vilquin , G. Saint-Girons , Gaël Sebald , N. Baboux
CrystEngComm, 2016, 18 (11), pp.1887 - 1891. ⟨10.1039/C5CE02311D⟩
Article dans une revue hal-01848710v1

Chemical reactivity between sol–gel deposited Pb(Zr,Ti)O3 layers and their GaAs substrates

Benjamin Meunier , L. Largeau , Philippe Regreny , Jose Penuelas , Romain Bachelet
CrystEngComm, 2016, 18, pp.7494
Article dans une revue hal-01489114v1

Epitaxial manganite freestanding bridges for low power pressure sensors

D. Le Bourdais , G. Agnus , T. Maroutian , V. Pillard , P. Aubert
Journal of Applied Physics, 2015, 118 (12), ⟨10.1063/1.4931885⟩
Article dans une revue hal-01848720v1

X-ray photoelectron spectroscopy and diffraction investigation of a metal–oxide-semiconductor heterostructure: Pt/Gd2O3/Si(111)

D. Ferrah , M. El Kazzi , G. Niu , Claude Botella , J. Penuelas
Journal of Crystal Growth, 2015, 416, pp.118 - 125. ⟨10.1016/j.jcrysgro.2015.02.001⟩
Article dans une revue hal-01848746v1
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Chemistry and structure of BaTiO3 ultra-thin films grown by different O2 plasma power

J.L. Wang , J. Leroy , G. Niu , G. Saint-Girons , B. Gautier
Chemical Physics Letters, 2014, 592, pp.206 - 210. ⟨10.1016/j.cplett.2013.12.030⟩
Article dans une revue cea-01376789v1

Phase transitions in [001]-oriented morphotropic PbZr0.52Ti0.48O3 thin film deposited onto SrTiO3-buffered Si substrate

Y. Shi , M. Cueff , G. Niu , G. Le Rhun , B. Vilquin
Journal of Applied Physics, 2014, 115, pp.214108. ⟨10.1063/1.4881818⟩
Article dans une revue hal-01053264v1

Electromechanical response of amorphous LaAlO 3 thin film probed by scanning probe microscopies

Alexis Borowiak , Nicolas Baboux , David Albertini , Bertrand Vilquin , Guillaume Saint Girons
Applied Physics Letters, 2014, 105 (1), ⟨10.1063/1.4889853⟩
Article dans une revue hal-01848759v1

Functional spinel oxide heterostructures on silicon

Romain Bachelet , Patricia de Coux , Bénédicte Warot-Fonrose , Vassil Skumryev , Gang Niu
CrystEngComm, 2014, 16 (47), pp.10741 - 10745. ⟨10.1039/C4CE01817F⟩
Article dans une revue hal-01848780v1

Morphological and structural properties of InP/Gd2O3 nanowires grown by molecular beam epitaxy on silicon substrate

J. Penuelas , X. Lu , N.P. Blanchard , Guillaume Saint-Girons , B. Vilquin
Journal of Crystal Growth, 2012, 347 (1), pp.49-52. ⟨10.1016/j.jcrysgro.2012.03.003⟩
Article dans une revue hal-01939995v1

Molecular beam epitaxy growth of BaTiO3 thin films and crucial impact of oxygen content conditions on the electrical characteristics

G. Niu , B. Gautier , S. Yin , Guillaume Saint-Girons , P. Lecoeur
Thin Solid Films, 2012, 520 (14), pp.4595-4599
Article dans une revue hal-01939992v1

Direct epitaxial growth of SrTiO3 on Si (001): Interface, crystallization and IR evidence of phase transition

G. Niu , W. W. Peng , G. Saint-Girons , J. Penuelas , Pascal Roy
Thin Solid Films, 2011, 519 (17), pp.5722-5725. ⟨10.1016/J.TSF.2010.12.208⟩
Article dans une revue hal-00753321v1

Epitaxy of BaTiO3 thin film on Si(001) using a SrTiO3 buffer layer for non-volatile memory application

G. Niu , S. Yin , Guillaume Saint-Girons , B. Gautier , P. Lecoeur
Microelectronic Engineering, 2011, 88 (7), pp.1232-1235
Article dans une revue hal-01939990v1
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Evidence for the formation of two phases during the growth of SrTiO3 on silicon

G. Niu , J. Penuelas , L. Largeau , B. Vilquin , J.-L. Maurice
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2011, 83, pp.054105. ⟨10.1103/PhysRevB.83.054105⟩
Article dans une revue hal-00601296v1

Heteroepitaxy of SrTiO3 thin films on Si (001) using different growth strategies: Toward substratelike quality

G. Niu , B. Vilquin , J. Penuelas , C. Botella , G. Hollinger
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2011, 29 (4), pp.041207. ⟨10.1116/1.3609813⟩
Article dans une revue hal-01892239v1

Epitaxial growth of germanium on silicon using a Gd2O3/Si (111) crystalline template

C. Dubourdieu , I. Gelard , O. Salicio , G. Saint Girons , A. Chettaoui
Journal of Vacuum Science & Technology A, 2010, 28 (5), pp.1187-1190. ⟨10.1116/1.3478301⟩
Article dans une revue hal-01939983v1
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Oxides heterostructures for nanoelectronics

Catherine Dubourdieu , Isabelle Gélard , Olivier Salicio , Guillaume Saint-Girons , Bertrand Vilquin
International Journal of Nanotechnology, 2010, 7 (4-8), pp.320-347. ⟨10.1504/IJNT.2010.031723⟩
Article dans une revue hal-01067589v1
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Impact of a γ-Al2O3(001) barrier on LaAlO3 metal-oxide-semiconductor capacitor electrical properties

L. Becerra , C. Merckling , M. El-Kazzi , N. Baboux , B. Vilquin
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2009, 27 (1), pp.384-388. ⟨10.1116/1.3065437⟩
Article dans une revue hal-01939927v1

Molecular beam epitaxy of SrTiO3 on Si (001): Early stages of the growth and strain relaxation

Gang Niu , Guillaume Saint-Girons , Bertrand Vilquin , Gabriel Delhaye , Jean-Luc Maurice
Applied Physics Letters, 2009, 95 (6), pp.2902. ⟨10.1063/1.3193548⟩
Article dans une revue hal-00663481v1

Growth temperature dependence of epitaxial Gd2O3 films on Si(111)

Guillaume Saint-Girons , G. Niu , B. Vilquin , N. Baboux , C. Plossu
Microelectronic Engineering, 2009, 86 (7-9), pp.1700-1702
Article dans une revue hal-01940600v1

Epitaxial growth of high-κ oxides on silicon

C. Merckling , Guillaume Saint-Girons , G. Delhaye , G. Patriarche , L. Largeau
Thin Solid Films, 2008, 517 (1), pp.197-200
Article dans une revue hal-01939925v1

Ultralow equivalent oxide thickness obtained for thin amorphous LaAlO3 layers grown on Si(001)

L. Becerra , C. Merckling , N. Baboux , C. Plossu , O. Marty
Applied Physics Letters, 2007, 91 (19), pp.192909
Article dans une revue hal-01939919v1

Contrôle dynamique de la lumière par des matériaux fonctionnels

Sébastien Cueff , Regis Orobtchouk , Pedro Rojo Romeo , Bertrand Vilquin , Guillaume Saint-Girons
Workshop du GDR Ondes, Oct 2017, sophia-antipolis, France
Communication dans un congrès hal-01965364v1

Growth of hybrid GaAs core / shell nanowires

Xin Guan , Jeanne Becdelievre , Guillaume Saint-Girons , Romain Bachelet , Philippe Regreny
GDR PULSE, 2016, Marseille, France
Communication dans un congrès hal-01489098v1

Functional oxides on silicon for on-chip thermal management

Ramah Moalla , M. Apreutesei , Bertrand Vilquin , Philippe Regreny , Claude Botella
XVth Electroceramics conference, Jun 2016, Limoges, France
Communication dans un congrès hal-01965438v1

Functional oxides for optical devices

Guillaume Saint-Girons , Sébastien Cueff , Benjamin Meunier , Romain Bachelet , Jose Penuelas
E-MRS 2016 Fall Meeting, Sep 2016, Warsaw, Poland
Communication dans un congrès hal-01965369v1

Interface reactivity and epitaxial growth of SrTiO3 and other functional oxides on Si and GaAs

Benjamin Meunier , Rahma Moalla , Adrien Carretero-Genevrier , L. Largeau , J. Gazquez
IC-MBE 2016 international conference, 2016, Montpellier, France
Communication dans un congrès hal-01489068v1

Ferroelectric oxide slot waveguide electro-optic modulator on Silicon

Sébastien Cueff , Régis Orobtchouk , Pedro Rojo-Romeo , A. Gutierrez , P. Castéra
SPIE Photonic West 2016 Conference, 2016, San-Francisco (USA), United States
Communication dans un congrès hal-01489100v1

Hybrid silicon-ferroelectric oxide platform for tunable nanophotonics on silicon

S. Cueff , P. Castera , A. Gutierrez , P. Romeo , R. Orobtchouk
2016 18th International Conference on Transparent Optical Networks (ICTON), Jul 2016, Trento, Italy. ⟨10.1109/ICTON.2016.7550429⟩
Communication dans un congrès hal-01848690v1

Oxydes fonctionnels intégrés sur Si pour des applications en énergie et photonique

Romain Bachelet , Mihai Apreutesei , Rahma Moalla , Benjamin Meunier , Sébastien Cueff
JNMO, Jun 2016, Les Issambres, France
Communication dans un congrès hal-01965366v1

Semiconducting core / piezoelectric shell nanowires

Jose Penuelas , Xin Guan , Jeanne Becdelievre , Guillaume Saint-Girons , Romain Bachelet
PiezoNEMS workshop, 2016, Grenoble, France
Communication dans un congrès hal-01489081v1

Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on silicon

Rahma Moalla , Qiang Liu , J. Vila-Fungueiriño , Adrien Carretero-Genevrier , B. Rivas-Murias
EMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489612v1

Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application

Benjamin Meunier , Romain Bachelet , Bertrand Vilquin , Pedro Rojo-Romeo , Geneviève Grenet
EMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489362v1

Functional oxide pressure sensor

D. Le Bourdais , G. Agnus , T. Maroutian , V. Pillard , Guillaume Saint-Girons
EMRS Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489374v1

Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvesting

Rahma Moalla , Qiang Liu , Guillaume Saint-Girons , Bertrand Vilquin , Nicolas Baboux
EMRS 2015 Spring Meeting, 2015, Lille, France
Communication dans un congrès hal-01489367v1

Epitaxial growth of SrTiO3 on GaAs : Towards opto-mechanical applications

Benjamin Meunier , Geneviève Grenet , Claude Botella , Philippe Regreny , Romain Bachelet
Europ. Material research Society EMRS, 2015, Lille, France
Communication dans un congrès hal-01489364v1

Perovskite Oxide MEMS: Strain Control and Sensor Applications

P. Lecoeur , D. Le Bourdais , G. Agnus , T. Maroutian , M. Matzen
MRS 2015 Fall Meeting, 2015, Boston (USA), United States
Communication dans un congrès hal-01489582v1

Functional spinel oxide heterostructures on silicon

Romain Bachelet , Patricia de Coux , Bénédicte Warot-Fonrose , Vassil Skumryev , G. Niu
MRS 2015 Spring Meeting, Apr 2015, San-Francisco, United States
Communication dans un congrès hal-01965452v1

Strong electrocaloric anisotropy in epitaxial Pb(Zr,Ti)O3 heterostructures

Rahma Moalla , Bertrand Vilquin , Guillaume Saint-Girons , Nicolas Baboux , G. Sebald
EMRS 2015 Fall Meeting, Sep 2015, Varsovie, Poland
Communication dans un congrès hal-01489353v1

Electromechanical response of amorphous LaAlO3 thin film probed by scanning probe microscopies

Alexis Borowiak , H. Tanaka , Nicolas Baboux , David Albertini , Bertrand Vilquin
ISAF 2015 conference, 2015, Singapour, Singapore
Communication dans un congrès hal-01489365v1

Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application

Benjamin Meunier , Romain Bachelet , Bertrand Vilquin , Pedro Rojo-Romeo , Geneviève Grenet
EuroMBE 2015 conference, 2015, Canazei, Italy
Communication dans un congrès hal-01489363v1

Monolithic integration of pyroelectric oxide films on silicon for thermal energy harvesting and cooling applications

Rahma Moalla , Nicolas Baboux , G. Sebald , Bertrand Vilquin , Guillaume Saint-Girons
EMRS 2015 Fall Meeting, 2015, Varsovie, Poland
Communication dans un congrès hal-01489342v1

Hybrid silicon-ferroelectric oxide slot waveguide for on-chip optoelectronics

Sébastien Cueff , Regis Orobtchouk , Pedro Rojo-Romeo , Baba Wague , Xuan Hu
MRS Fall Meeting, 2015, Boston (USA), United States
Communication dans un congrès hal-01489369v1

SrTiO3 thin layers on Si: epitaxy and use as templates for thermal energy management and photonic integrated devices

Sébastien Cueff , Mihai Apreutesei , R. Moalla , B. Meunier , X. Hu
Journees Nationales sur les Technologies Emergentes en micro/nanofabrication (JNTE), Nov 2015, Ecully, France
Communication dans un congrès hal-01291404v1

Slot waveguide electro-optic modulator with ferroelectric oxide BaTiO3 on silicon

X. Hu , R. Orobtchouk , S. Cueff , Pedro Rojo Romeo , P. Regreny
2014 IEEE 11th International Conference on Group IV Photonics, Aug 2014, Paris, France. ⟨10.1109/Group4.2014.6961944⟩
Communication dans un congrès hal-01848756v1

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Rahma Moalla , Lucie Mazet , Lamis Louahadj , Qiang Liu , Jose Penuelas
Nanotech MEET conference 2014, Apr 2014, Hammamet, Tunisia
Communication dans un congrès hal-01489914v1

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Rahma Moalla , Lucie Mazet , Lamis Louahadj , Qiang Liu , Jose Penuelas
European Materials Research Society (E-MRS), Spring Meeting, 2014, Lille, France
Communication dans un congrès hal-01489913v1

Heterostructures combining functional oxides and semiconductors for integrated photonics

Guillaume Saint-Girons , Sébastien Cueff , Benjamin Meunier , Xuan Hu , Lamis Louahadj
Workshop “Les oxydes pour l’optique et la photonique”, Dec 2014, Meudon, France
Communication dans un congrès hal-01490286v1

Integration of functional oxides on silicon for nanoelectronics and energy

Romain Bachelet , Lamis Louahadj , Lucie Mazet , Rahma Moalla , Gang Niu
International Conference on Materials and Characterization Techniques (ICMCT), 2014, VIT Univ., Vellore, Chennai, India
Communication dans un congrès hal-01490283v1

Electro-optic modulation using hybrid silicon-ferroelectric oxide slot waveguide

Sébastien Cueff , Xuan Hu , Regis Orobtchouk , Pedro Rojo Romeo , Romain Bachelet
Workshop “Les oxydes pour l’optique et la photonique”, 2014, Meudon, France
Communication dans un congrès hal-01489872v1
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Silicon CMOS compatible transition metal dioxide technology for boosting highly integrated photonic devices with disruptive performance

P. Sanchis , L. Sanchez , P. Castera , A. Rosa , A. Gutierrez
ICTON 2014 -16th International Conference on Transparent Optical Networks, Jul 2014, Graz, Austria. pp.1-4, ⟨10.1109/ICTON.2014.6876505⟩
Communication dans un congrès hal-01848763v1

Electro-optic modulation with functional oxides monolithically integrated on silicon

Sébastien Cueff , Xuan Hu , Regis Orobtchouk , Pédro Rojo Romeo , C. Bachelet
Silicon Photonics Summer School organized by PLAT4M project, 2014, Ghent, Belgium
Communication dans un congrès hal-01489917v1

Young modulus and Poisson ratio of polycrystalline and single crystal PZT thin-film measured by picosecond ultrasonics

F. Casset , Arnaud Devos , J. Abergel , G. Le Rhun , B. Vilquin
IEEE International Ultrasonics Symposium, IUS 2013, 2013, Prague, Czech Republic
Communication dans un congrès hal-00944050v1

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Rahma Moalla , Lucie Mazet , Lamis Louahadj , Qiang Liu , Jose Penuelas
Nanotech MEET conference 2014, Apr 2014, Hammamet, Tunisia. , 2014
Poster de conférence hal-01489793v1

Epitaxial Systems Combining Oxides and Semiconductors

Gang Niu , Guillaume Saint-Girons , Bertrand Vilquin
Molecular Beam Epitaxy (Second Edition) From Research to Mass Production, Elsevier, pp.377-402, 2018
Chapitre d'ouvrage hal-02273400v1

Epitaxial systems combining oxides and semiconductors

Gang Niu , Guillaume Saint-Girons , Bertrand Vilquin
Molecular Beam Epitaxy, Elsevier, pp.451-475, 2013
Chapitre d'ouvrage hal-02273398v1

Vers l'intégration monolithique d'hétérostructures et de nanostructures III-V et Ge sur silicium pour la microélectronique et l'optoélectronique

G. Saint-Girons , M. Gendry , H. Dumont , P. Regreny , J. Cheng
Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.179-182, 2009
Chapitre d'ouvrage hal-00575787v1