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Bertrand Vilquin

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Presentation

Reader (HDR) in condensed matters Bertrand Vilquin (reader, HDR, Ecole Centrale de Lyon) has been working on integration of perovskite materials since the beginning of his PhD in 1999 at Université de Caen (France). In 2002, he joined the Institute for Scientific and Industrial Research at Osaka University (Japan) for a JSPS post doctorate fellowship. In 2005, he moved to Université Paris XI to work on an industrial project with ALTIS Semiconductors to realize New Generation of nanoscale MRAM devices. In 2006, he became lecturer at Ecole Centrale de Lyon working on the integration of perovskite materials on silicon though academic and industrial projects. He has a rich experience in both national and international research projects and had been the coordinator of 2 ANR projects. He was invited professor at Osaka University (Japan) in 2012 and at the University of Tokyo (Japan) in 2016. He became associate professor at Université de Sherbrooke (Canada) in 2016. He is the coordinator of the “nanoscale engineering” master course of University of Lyon. He successfully obtained his habilitation to conduct research (HDR) in 2018 and he is member of IEEE and SFP. **Project leader:** \- ANR MINOS (2007-2011) \- ANR SURFFER (2010-2013) **WorkPackage coordinator:** \- ANR PIEZO2POWER (2011-2015) \- ANR INTENSE (2015-2017) \- H2020 ICT 3eFERRO (2018-2021)

Publications

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Insertion of an Ultra‐thin Interfacial Aluminium Layer for the Realisation of a Hf0.5Zr0.5O2 Ferroelectric Tunnel Junction.

Benoît Manchon , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo , Rabei Barhoumi et al.
physica status solidi (RRL) - Rapid Research Letters, 2022, 16 (10), pp.2100585. ⟨10.1002/pssr.202100585⟩
Journal articles hal-03609773v1
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Ferroelectricity Improvement in Ultra-Thin Hf0.5Zr0.5O2 Capacitors by the Insertion of a Ti Interfacial Layer

Greta Segantini , Rabei Barhoumi , Benoît Manchon , Ingrid Cañero Infante , Pedro Rojo Romeo et al.
physica status solidi (RRL) - Rapid Research Letters, In press, 2100583, pp.2100583. ⟨10.1002/pssr.202100583⟩
Journal articles hal-03759538v1
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First principles study on the lattice thermal conductivity of α-phase Ga 2 O 3

Gang Yang , Pedro Rojo Romeo , Aleksandra Apostoluk , Bertrand Vilquin
Journal of Vacuum Science & Technology A, 2022, 40 (5), pp.052801. ⟨10.1116/6.0001870⟩
Journal articles hal-03735982v1
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Mechanical Switching of Ferroelectric Domains in 33‐200 nm‐Thick Sol‐Gel‐Grown PbZr 0.2 Ti 0.8 O 3 Films Assisted by Nanocavities

Sergio Gonzalez Casal , Xiaofei Bai , Kevin Alhada‐lahbabi , Bruno Canut , Bertrand Vilquin et al.
Advanced Electronic Materials, 2022, pp.2200077. ⟨10.1002/aelm.202200077⟩
Journal articles hal-03662877v1
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Impact of the channel length on molybdenum disulfide field effect transistors with hafnia-based high- k dielectric gate

Yanxiao Sun , Gang Niu , Wei Ren , Jinyan Zhao , Yankun Wang et al.
AIP Advances, 2021, 11 (6), pp.065229. ⟨10.1063/5.0055574⟩
Journal articles hal-03269195v1
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Imprint issue during retention tests for HfO2 -based FRAM: An industrial challenge?

Jordan Bouaziz , Pedro Rojo Romeo , N. Baboux , Bertrand Vilquin
Applied Physics Letters, 2021, 118 (8), pp.082901. ⟨10.1063/5.0035687⟩
Journal articles hal-03177059v1

Effect of strain and stoichiometry on the ferroelectric and pyroelectric properties of the epitaxial Pb(Zr0.2Ti0.8)O-3 films deposited on Si wafers

Cristina Chirila , Georgia Andra Boni , Lucian Dragos Filip , Marius Husanu , Stefan Neatu et al.
Materials Science and Engineering: B, 2021, 266, ⟨10.1016/j.mseb.2021.115042⟩
Journal articles hal-03622158v1
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Strain dependence of dissociative adsorption of H 2 O on epitaxially strained, out-of-plane polarized, BaTiO 3 (001) thin films

J.L. L Wang , S.J. J She , F. Gaillard , G. Niu , Bertrand Vilquin et al.
Thin Solid Films, 2021, 717, pp.138428. ⟨10.1016/j.tsf.2020.138428⟩
Journal articles hal-03035211v1
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Low-voltage, broadband graphene-coated Bragg mirror electro-optic modulator at telecom wavelengths

Thomas Wood , Jérémy Lhuillier , Malik Kemiche , Pierre Demongodin , Bertrand Vilquin et al.
Optics Express, 2020, 28 (19), pp.27506. ⟨10.1364/OE.398480⟩
Journal articles hal-02961285v1
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Towards low-power near-infrared modulators operating at telecom wavelengths: when graphene plasmons frustrate their metallic counterparts

Thomas Wood , Malik Kemiche , Jérémy Lhuillier , Pierre Demongodin , Bertrand Vilquin et al.
Journal of the Optical Society of America B, 2020, 37 (5), pp.1563. ⟨10.1364/JOSAB.391277⟩
Journal articles hal-02618631v1

Photo-induced metal-like phase of VO 2 with sub-ns recovery

J. Kenji Clark , Ya-Lun Ho , Hiroaki Matsui , Bertrand Vilquin , Hitoshi Tabata et al.
Journal articles hal-02923475v1

Comparison of Epitaxial and Textured Ferroelectric BaTiO<sub>3</sub> Thin Films

Baba Wague , Nicolas Baboux , Pedro Rojo Romeo , Yves Robach , Bertrand Vilquin et al.
International Journal of Modern Physics A, 2020, 11 (04), pp.509-516. ⟨10.4236/jmp.2020.114033⟩
Journal articles hal-02536344v1
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Structural studies of epitaxial BaTiO3 thin film on silicon

B. Wagué , J.-B. - B Brubach , G. Niu , G. Dong , L. Dai et al.
Thin Solid Films, 2020, 693, pp.137636. ⟨10.1016/j.tsf.2019.137636⟩
Journal articles hal-02324723v1
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Dramatic impact of pressure and annealing temperature on the properties of sputtered ferroelectric HZO layers

Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux , Raluca Negrea , Lucian Pintilie et al.
APL Materials, 2019, 7 (8), pp.081109. ⟨10.1063/1.5110894⟩
Journal articles hal-02273286v1
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Huge Reduction of the Wake-Up Effect in Ferroelectric HZO Thin Films

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Bertrand Vilquin
ACS Applied Electronic Materials, 2019, 1 (9), pp.1740-1745. ⟨10.1021/acsaelm.9b00367⟩
Journal articles hal-02303151v1
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Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Bertrand Vilquin
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2019, 37 (2), pp.021203. ⟨10.1116/1.5060643⟩
Journal articles hal-02062583v1

Narrowband thermal emission from Tamm plasmons of a modified distributed Bragg reflector

Zhiyu Wang , J. Kenji Clark , Ya-Lun Ho , Bertrand Vilquin , Hirofumi Daiguji et al.
Applied Physics Letters, 2018, 113 (16), ⟨10.1063/1.5048950⟩
Journal articles hal-01919589v1

Narrowband Thermal Emission Realized through the Coupling of Cavity and Tamm Plasmon Resonances

Zhiyu Wang , J. Kenji Clark , Ya-Lun Ho , Bertrand Vilquin , Hirofumi Daiguji et al.
ACS photonics, 2018, 5 (6), pp.2446 - 2452. ⟨10.1021/acsphotonics.8b00236⟩
Journal articles hal-01885715v1

Large anisotropy of ferroelectric and pyroelectric properties in heteroepitaxial oxide layers

R. Moalla , S. Cueff , J. Penuelas , B. Vilquin , G. Saint-Girons et al.
Scientific Reports, 2018, 8 (1), ⟨10.1038/s41598-018-22349-y⟩
Journal articles hal-01848663v1

Barium titanate (BaTiO_3) RF characterization for application in electro-optic modulators

Alvaro Rosa , Domenico Tulli , Pau Castera , Ana Gutierrez , Amadeu Griol et al.
Optical Materials Express, 2017, 7 (12), ⟨10.1364/OME.7.004328⟩
Journal articles hal-01885719v1
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Huge gain in pyroelectric energy conversion through epitaxy for integrated self-powered nanodevices

Rahma Moalla , Bertrand Vilquin , Guillaume Saint-Girons , Gwenaël Le Rhun , Emmanuel Defay et al.
Nano Energy, 2017, 41, pp.43 - 48. ⟨10.1016/j.nanoen.2017.09.001⟩
Journal articles hal-01848668v1
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Room-temperature soft mode and ferroelectric like polarization in SrTiO3 ultrathin films: Infrared and ab initio study

Wei-Wei Peng , Robert Tétot , Gang Niu , Emilie Amzallag , Bertrand Vilquin et al.
Scientific Reports, 2017, 7, pp.2160. ⟨10.1038/s41598-017-02113-4⟩
Journal articles hal-01724280v1

Room temperature optical response of zinc oxide nanowires synthesized by chemical bath deposition to toluene vapors

A. Apostoluk , R. Parize , B. Vilquin , T. H. Nguyen , Vincent Consonni et al.
physica status solidi (a), 2016, 213 (5), pp.1115-1119. ⟨10.1002/pssa.201532748⟩
Journal articles hal-01456370v1

Novel Concept of Gas Sensitivity Characterization of Materials Suited for Implementation in FET-Based Gas Sensors

Yosri Ayadi , Lama Rahhal , Bertrand Vilquin , Céline Chevalier , Fabian Ambriz Vargas et al.
Nanoscale Research Letters, 2016, 11 (1), ⟨10.1186/s11671-016-1687-z⟩
Journal articles hal-01921508v1
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Dramatic effect of thermal expansion mismatch on the structural, dielectric, ferroelectric and pyroelectric properties of low-cost epitaxial PZT films on SrTiO 3 and Si (001) subtrates.

Rahma Moalla , B. Vilquin , G. Saint-Girons , Gaël Sebald , N. Baboux et al.
CrystEngComm, 2016, 18 (11), pp.1887 - 1891. ⟨10.1039/C5CE02311D⟩
Journal articles hal-01848710v1

Realization of a graphene gate field effect transistor for electrochemical detection and biosensors

Julien Pézard , Mihai Lazar , Naoufel Haddour , Claude Botella , Pascale Roy et al.
Thin Solid Films, 2016, ⟨10.1016/j.tsf.2016.04.031⟩
Journal articles hal-01389621v1

Chemical reactivity between sol–gel deposited Pb(Zr,Ti)O3 layers and their GaAs substrates

Benjamin Meunier , L. Largeau , Philippe Regreny , Jose Penuelas , Romain Bachelet et al.
CrystEngComm, 2016, 18, pp.7494
Journal articles hal-01489114v1

Electrode interface controlled electrical properties in epitaxial Pb(Zr0.52Ti0.48)O-3 films grown on Si substrates with SrTiO3 buffer layer

A. Boni , C. Chirila , I. Pasuk , R. Negrea , L. Trupina et al.
Thin Solid Films, 2015, 593
Journal articles hal-01489392v1

X-ray photoelectron spectroscopy and diffraction investigation of a metal–oxide-semiconductor heterostructure: Pt/Gd2O3/Si(111)

D. Ferrah , M. El Kazzi , G. Niu , Claude Botella , J. Penuelas et al.
Journal of Crystal Growth, 2015, 416, pp.118 - 125. ⟨10.1016/j.jcrysgro.2015.02.001⟩
Journal articles hal-01848746v1

Epitaxial manganite freestanding bridges for low power pressure sensors

D. Le Bourdais , G. Agnus , T. Maroutian , V. Pillard , P. Aubert et al.
Journal of Applied Physics, 2015, 118 (12), ⟨10.1063/1.4931885⟩
Journal articles hal-01848720v1

Nanoscale study of perovskite BiFeO3/spinel (Fe, Zn)3O4 co-deposited thin film by electrical scanning probe methods

Alexis Borowiak , K. Okada , T. Kanki , Brice Gautier , Bertrand Vilquin et al.
Applied Surface Science, 2015, 351, pp.531
Journal articles hal-01489414v1
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Surface atomic and chemical structure of relaxor Sr0.63Ba0.37Nb2O6(001)

J. L. Wang , B. Vilquin , B. Gautier , G. Dezanneau , N. Barrett et al.
Applied Physics Letters, 2015, 106, pp.242901. ⟨10.1063/1.4922773⟩
Journal articles hal-01489339v2

Comparison between the ferroelectric/electric properties of the PbZr0.52Ti0.48O3 films grown on Si (100) and on STO (100) substrates

C. Chirila , A. Boni , I. Pasuk , R. Negrea , L. Trupina et al.
Journal of Materials Sciences Letters, 2015, 50, Issue: 11, pp.3883-3894
Journal articles hal-01489405v1

Realization and Characterization of Graphene on 4H-SiC for Tera-Hertz Transistors

Julien Pezard , Jérémy Lhuillier , Zakarya El-Friach , Véronique Soulière , Bertrand Vilquin et al.
Materials Science Forum, 2015, 821-823, pp.941 - 944. ⟨10.4028/www.scientific.net/MSF.821-823.941⟩
Journal articles hal-01391855v1
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Phase transition in ferroelectric Pb(Zr0.52Ti0.48)O3 epitaxial thin films

Qiang Liu , O. Marconot , M. Piquemal , C. Eypert , Alexis Borowiak et al.
Thin Solid Films, 2014, 553, pp.85-88. ⟨10.1016/j.tsf.2013.12.042⟩
Journal articles hal-01489882v1

Electromechanical response of amorphous LaAlO 3 thin film probed by scanning probe microscopies

Alexis Borowiak , Nicolas Baboux , David Albertini , Bertrand Vilquin , Guillaume Saint Girons et al.
Applied Physics Letters, 2014, 105 (1), ⟨10.1063/1.4889853⟩
Journal articles hal-01848759v1

Functional spinel oxide heterostructures on silicon

Romain Bachelet , Patricia de Coux , Bénédicte Warot-Fonrose , Vassil Skumryev , Gang Niu et al.
CrystEngComm, 2014, 16 (47), pp.10741 - 10745. ⟨10.1039/C4CE01817F⟩
Journal articles hal-01848780v1
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Chemistry and structure of BaTiO3 ultra-thin films grown by different O2 plasma power

J.L. Wang , J. Leroy , G. Niu , G. Saint-Girons , B. Gautier et al.
Chemical Physics Letters, 2014, 592, pp.206 - 210. ⟨10.1016/j.cplett.2013.12.030⟩
Journal articles cea-01376789v1

Phase transitions in [001]-oriented morphotropic PbZr0.52Ti0.48O3 thin film deposited onto SrTiO3-buffered Si substrate

Y. Shi , M. Cueff , G. Niu , G. Le Rhun , B. Vilquin et al.
Journal of Applied Physics, 2014, 115, pp.214108. ⟨10.1063/1.4881818⟩
Journal articles hal-01053264v1

Application of a sensitive catalytic reactor to the study of CO oxidation over SrTiO3(100) and BaTiO3/SrTiO3(100) ferroelectric surfaces

S. Nassreddine , F. Morfin , G. Niu , B. Vilquin , F. Gaillard et al.
Surface and Interface Analysis, 2014, 46 (10-11), pp.721-725. ⟨10.1002/sia.5391⟩
Journal articles hal-01149237v1
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Time-resolved photoemission spectroscopy on a metal/ferroelectric heterostructure

J.E. Rault , G. Agnus , T. Maroutian , V. Pillard , Ph. Lecoeur et al.
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2013, 88, pp.155107. ⟨10.1103/PhysRevB.88.155107⟩
Journal articles cea-01477621v1

Full field electron spectromicroscopy applied to ferroelectric materials

N. Barrett , J. E. Rault , L. Wang , C. Mathieu , A. Locatelli et al.
Journal of Applied Physics, 2013, 113 (18), ⟨10.1063/1.4801968⟩
Journal articles cea-01477631v1
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Interface electronic structure in a metal/ferroelectric heterostructure under applied bias

J.E. Rault , T. Maroutian , G. Agnus , Ph. Lecoeur , G. Niu et al.
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2013, 87, pp.155146. ⟨10.1103/PhysRevB.87.155146⟩
Journal articles cea-01477666v1

Morphological and structural properties of InP/Gd2O3 nanowires grown by molecular beam epitaxy on silicon substrate

J. Penuelas , X. Lu , N.P. Blanchard , Guillaume Saint-Girons , B. Vilquin et al.
Journal of Crystal Growth, 2012, 347 (1), pp.49-52. ⟨10.1016/j.jcrysgro.2012.03.003⟩
Journal articles hal-01939995v1

Chemistry and Atomic Distortion at the Surface of an Epitaxial BaTiO3 Thin Film after Dissociative Adsorption of Water

J. L. Wang , F. Gaillard , A. Pancotti , B. Gautier , G. Niu et al.
Journal of Physical Chemistry C, 2012, 116, pp.21802-21809. ⟨10.1021/jp305826e⟩
Journal articles hal-00777517v1

Molecular beam epitaxy growth of BaTiO3 thin films and crucial impact of oxygen content conditions on the electrical characteristics

G. Niu , B. Gautier , S. Yin , Guillaume Saint-Girons , P. Lecoeur et al.
Thin Solid Films, 2012, 520 (14), pp.4595-4599
Journal articles hal-01939992v1
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Evidence for the formation of two phases during the growth of SrTiO3 on silicon

G. Niu , J. Penuelas , L. Largeau , B. Vilquin , J.-L. Maurice et al.
Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2011, 83, pp.054105. ⟨10.1103/PhysRevB.83.054105⟩
Journal articles hal-00601296v1

Epitaxy of BaTiO3 thin film on Si(001) using a SrTiO3 buffer layer for non-volatile memory application

G. Niu , S. Yin , Guillaume Saint-Girons , B. Gautier , P. Lecoeur et al.
Microelectronic Engineering, 2011, 88 (7), pp.1232-1235
Journal articles hal-01939990v1

Heteroepitaxy of SrTiO3 thin films on Si (001) using different growth strategies: Toward substratelike quality

G. Niu , B. Vilquin , J. Penuelas , C. Botella , G. Hollinger et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2011, 29 (4), pp.041207. ⟨10.1116/1.3609813⟩
Journal articles hal-01892239v1

Direct epitaxial growth of SrTiO3 on Si (001): Interface, crystallization and IR evidence of phase transition

G. Niu , W. W. Peng , G. Saint-Girons , J. Penuelas , Pascal Roy et al.
Thin Solid Films, 2011, 519 (17), pp.5722-5725. ⟨10.1016/J.TSF.2010.12.208⟩
Journal articles hal-00753321v1

Epitaxial growth of germanium on silicon using a Gd2O3/Si (111) crystalline template

C. Dubourdieu , I. Gelard , O. Salicio , G. Saint Girons , A. Chettaoui et al.
Journal of Vacuum Science & Technology A, 2010, 28 (5), pp.1187-1190
Journal articles hal-01939983v1
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Oxides heterostructures for nanoelectronics

Catherine Dubourdieu , Isabelle Gélard , Olivier Salicio , Guillaume Saint-Girons , Bertrand Vilquin et al.
International Journal of Nanotechnology, 2010, 7 (4-8), pp.320-347. ⟨10.1504/IJNT.2010.031723⟩
Journal articles hal-01067589v1

Growth temperature dependence of epitaxial Gd2O3 films on Si(111)

Guillaume Saint-Girons , G. Niu , B. Vilquin , N. Baboux , C. Plossu et al.
Microelectronic Engineering, 2009, 86 (7-9), pp.1700-1702
Journal articles hal-01940600v1
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Impact of a γ-Al2O3(001) barrier on LaAlO3 metal-oxide-semiconductor capacitor electrical properties

L. Becerra , C. Merckling , M. El-Kazzi , N. Baboux , B. Vilquin et al.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2009, 27 (1), pp.384-388. ⟨10.1116/1.3065437⟩
Journal articles hal-01939927v1

Molecular beam epitaxy of SrTiO3 on Si (001): Early stages of the growth and strain relaxation

Gang Niu , Guillaume Saint-Girons , Bertrand Vilquin , Gabriel Delhaye , Jean-Luc Maurice et al.
Applied Physics Letters, 2009, 95 (6), pp.2902. ⟨10.1063/1.3193548⟩
Journal articles hal-00663481v1

Epitaxial growth of high-κ oxides on silicon

C. Merckling , Guillaume Saint-Girons , G. Delhaye , G. Patriarche , L. Largeau et al.
Thin Solid Films, 2008, 517 (1), pp.197-200
Journal articles hal-01939925v1

Ultralow equivalent oxide thickness obtained for thin amorphous LaAlO3 layers grown on Si(001)

L. Becerra , C. Merckling , N. Baboux , C. Plossu , O. Marty et al.
Applied Physics Letters, 2007, 91 (19), pp.192909
Journal articles hal-01939919v1
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Crystallographic and optical properties of epitaxial Pb(Zr-0.6,Ti-0.4)O-3 thin films grown on LaAlO3 substrates

B. Vilquin , R. Bouregba , G. Poullain , H. Murray , El Hadj Dogheche et al.
Journal of Applied Physics, 2003, 94 (8), pp.5167-5171. ⟨10.1063/1.1610776⟩
Journal articles hal-00162729v1

Integration of VO2 on Silicon for thermotronic applications

Swayam Sahoo , Alexandre Juneau-Fecteau , A. Lamirand , Victor Pierron , Laurence Mechin et al.
JMC 2022 (Journées de la matière condensée), Société française de physique (SFP),, Société française de physique (SFP), Aug 2022, Lyon, France
Conference papers hal-03849064v1

X-ray spectroscopy analysis of the chemical and electronic structure of BaTiO3 ultrathin films

Sara Gonzalez , Pedro Rojo Romeo , Matthieu Bugnet , Patrick Schöffmann , Edwige Otero et al.
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Conference papers hal-03750617v1

Interface engineering for vanadium dioxide (VO2) integration on silicon

Swayam Sahoo , Alexandre Juneau-Fecteau , Anne Lamirand , Victor Pierron , Laurence Méchin et al.
European Materials Research Society(E-MRS) 2022 fall meeting, European Materials Research Society, Sep 2022, Warsaw, Poland
Conference papers hal-03792911v1

Fabrication process for sub-8 nm HfZrO2-based ferroelectric tunnel junctions with enhanced properties

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante et al.
EMRS 2022 Spring Meeting - Symposium E : Adaptive materials and devices for brain-inspired electronics, European Materials Research Society, May 2022, Strasbourg, France
Conference papers hal-03690321v1

How to play on the fabrication process of HfZrO2 ferroelectric thin film to enhance its physical properties

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Ingrid Cañero Infante et al.
EMRS 2022 Spring Meeting - Symposium N: Synthesis, processing and characterization of nanoscale multi functional oxide films VIII and 6th E-MRS & MRS-J bilateral symposium, European Materials Research Society, May 2022, Strasbourg, France
Conference papers hal-03682220v1
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Heteroepitaxial Growth of Lithium Niobate Thin Films on Sapphire Substrates with Different Orientations by Pulsed-Laser Deposition

Ihor Pershukov , Jérôme Richy , Emma Borel , Elisa Soulat , Marie Bousquet et al.
2022 IEEE International Symposium on Applications of Ferroelectrics (ISAF 2022), IEEE, Jun 2022, Tours, France. ⟨10.1109/ISAF51494.2022.9870044⟩
Conference papers hal-03715485v1

Wake-Up Effect and Retention Evolutions of Hf0.5Zr0.5O2 Capacitor by Nanostructuration Engineering

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Infante Ingrid C. et al.
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Conference papers hal-03715010v1
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A multiscale study of the structure, chemistry and ferroelectric properties of epitaxial sol-gel PbZr0.2Ti0.8O3 films for nanomechanical switching

Ingrid C. Infante , Sergio Gonzalez Casal , Xiaofei Bai , Kevin Alhada‐lahbabi , Sara Gonzalez et al.
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Conference papers hal-03719104v1

Influence of the electrode interface on the properties of ferroelectric HfZrO2

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Rabei Barhoumi , Ingrid Cañero Infante et al.
High k Workshop 2022, NamLab, Sep 2022, Dresden, Germany
Conference papers hal-03775873v1

Comparative Study of sub-8 nm HZO-Based Ferroelectric Tunnel Junctions with Enhanced Ferroelectricity

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante et al.
ISAF-PFM-ECAPD 2022, Jun 2022, Tours, France
Conference papers hal-03715029v1

Study of Polarisation and Conduction Mechanisms in Ferroelectric Hf0.5Zr0.5O2 Down to Deep Cryogenic Temperature 4.2 K

Benoit Manchon , Dorian Coffineau , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo et al.
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Conference papers hal-03719069v1

The discovery of ferroelectricity in HfO2

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
6th Conference of Bangladesh Crystallographic Association, Bangladesh Crystallographic Association, Jan 2021, Dhaka, Bangladesh
Conference papers hal-03111364v1

Nanostructuration effect on the properties of ferroelectric HfZrO2

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
6th edition of the International Workshop of Materials Physics, The National Institute of Materials Physics (NIMP), Sep 2021, Bucarest, Romania
Conference papers hal-03351080v1

Développement de capteurs environnementaux ultra-basse consommation à base de SnO2

Antonio Assaf , Bernard Pelissier , Theo Levert , Ingrid Cañero Infante , Bassem Salem et al.
4th international workshop of IEEE Sensors, Nov 2021, Marseille, France
Conference papers hal-03503960v1

Effect of bottom electrodes on HZO thin film properties

Bertrand Vilquin , Greta Segantini , Benoit Manchon , Ingrid Cañero Infante , Pedro Rojo Romeo et al.
International Symposium on Applications of Ferroelectrics (ISAF) 2021, https://isaf-isif-pfm2021.org/, May 2021, Sydney, Australia
Conference papers hal-03274229v1

Towards La2/3Sr1/3MnO3/SrTiO3/Si resonant MEMS with an epitaxial AlN actuation layer

Laryssa Carvalho de Araujo , Bertrand Vilquin , Victor Pierron , Bernadette Domengès , Zhe Wang et al.
Emrs Fall meeting, Symposium L: Integration of advanced materials on silicon: from classical to neuromorphic and quantum applications, Sep 2021, ONLINE - Warsaw, Poland
Conference papers hal-03431697v1

Electrical Characterisation of HfZrO2 Ferroelectric Tunnel Junctions for Neuromorphic Application

Benoit Manchon , Greta Segantini , Pedro Rojo Romeo , Nicolas Baboux , Rabei Barhoumi et al.
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Conference papers hal-03354311v1

Metallic oxide defect luminescent emission for application in solar cells and WLEDs

Aleksandra Apostoluk , Y Zhang , Thibaut Cornier , Paul Neumann , Bertrand Vilquin et al.
4th Online International Conference On Science & Engineering of Materials (ICSEM-2021), Jul 2021, Online conference, India
Conference papers hal-03503407v1

Impact of a dielectric layer at TiN/HfZrO2 interface for ferroelectric tunnel junctions applications

Greta Segantini , Pedro Rojo Romeo , Benoit Manchon , Rabei Barhoumi , Damien Deleruyelle et al.
Journées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France
Conference papers hal-03372588v1
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Use of epitaxial PZT thin films for La2/3Sr1/3MnO3 based MEMs devices on SrTiO3/Si

Laryssa Carvalho de Araujo , J J Manguele , Bertrand Vilquin , Zhe Wang , Carolina Adamo et al.
DTIP’2021 (23rd edition of the Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS), Aug 2021, ONLINE - Lyon, France. pp.01-05, ⟨10.1109/DTIP54218.2021.9568662⟩
Conference papers hal-03431593v1

Huge reduction of wake-up effect in ferroelectric HfZrO2 nanostructures

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Conference papers hal-03351082v1

Développement d’un capteur environnemental ultra-basse consommation à base de SnO2 en technologie CMOS FDSOI

Antonio Assaf , João Resende , Levert Theo , Bernard Pelissier , Infante Ingrid C. et al.
Journées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France
Conference papers hal-03375553v1

Towards epitaxial Pb(Zr0.52Ti0.48)O3/La2/3Sr1/3MnO3/SrTiO3 based resonant MEMS on Si

Laryssa Carvalho de Araujo , J J Manguele , Bertrand Vilquin , Zhe Wang , Carolina Adamo et al.
JMC 17 (17èmes journées de la matière condensée), Minicolloque 17: Oxydes Fonctionnels : des matériaux aux dispositifs, Aug 2021, ONLINE - Rennes, France. pp.1
Conference papers hal-03431691v1

Role of ultra-thin Ti and Al interfacial layers in HfZrO2 ferroelectric tunnel junctions

Greta Segantini , Benoit Manchon , Pedro Rojo Romeo , Rabei Barhoumi , Nicolas Baboux et al.
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Conference papers hal-03368741v1
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Structure, chemical analysis, and ferroelectric properties of chemical solution derived epitaxial PbZr$_{0.2}$Ti$_{0.8}$O$_3$ films for nanomechanical switching

Infante Ingrid C. , Sergio Gonzalez Casal , Xiaofei Bai , Bertrand Vilquin , Pedro Rojo Romeo et al.
JMC-17 - 17ème Journées de la Matière Condensée, SFP, Aug 2021, Rennes, France
Conference papers hal-03759161v1

Tracking polarization loss and imprint during electrical tests in sputtered TiN/HZO/TiN capacitors

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
Novel high-k workshop applications, NamLab, Apr 2021, Dresden, Germany
Conference papers hal-03273116v1
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Towards active photonic dispersion control using graphene-induced non-radiative loss

Jérémy Lhuillier , Pierre Demongodin , Thomas Wood , Malik Kemiche , Bertrand Vilquin et al.
CLEO: Science and Innovations 2020, May 2020, Washington DC, United States. pp.SW4F.4., ⟨10.1364/CLEO_SI.2020.SW4F.4⟩
Conference papers hal-02617933v1

Hybrid chip-based nonlinear optical devices using graphene

Christelle Monat , Pierre Demongodin , Jérémy Lhuillier , Milan Sinobad , Houssein El Dirani et al.
graphene2020, Oct 2020, Grenoble, France
Conference papers hal-03299045v1
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Modulateur electro-optique large-bande à base de graphene sur résonnateur optique planaire

T. Wood , Jérémy Lhuillier , Pierre Demongodin , M. Kemiche , Bertrand Vilquin et al.
39ème Journées Nationales d'Optique Guidée (JNOG), Jul 2019, Paris-Saclay, France
Conference papers hal-02400039v1

Wideband Graphene Electro-optic Modulator on 1D Photonic Crystal Cavity

T. Wood , Jérémy Lhuillier , Pierre Demongodin , M. Kemiche , Bertrand Vilquin et al.
European Quantum Electronics Conference 2019, Jun 2019, Munich, Germany. ⟨10.1109/CLEOE-EQEC.2019.8872717⟩
Conference papers hal-02400046v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
IUMRS-ICA 2019, Sep 2019, Perth, Australia
Conference papers hal-02310137v1

Integration of Amorphous Low Refractive Index Active Materials in Silicon Photonics

R. Orobtchouk , Ali Belarouci , B. Vilquin , Pedro Rojo Romeo
2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840268⟩
Conference papers hal-02400096v1

Vanadium Oxide Based Waveguide Modulator Integrated on Silicon

Jimmy John , Regis Orobtchouk , Pedro Rojo Romeo , B. Vilquin , Zhen Zhang et al.
2019 21st International Conference on Transparent Optical Networks (ICTON), Jul 2019, Angers, France. pp.1-1, ⟨10.1109/ICTON.2019.8840555⟩
Conference papers hal-02408515v1

Huge working pressure effect on the ferroelectric properties of RF sputtered hafnia/zirconia layers

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo , Lucian Pintilie et al.
High-k Workshop 2019, NamLab, Jun 2019, Dresden, Germany
Conference papers hal-02281215v1

Efficient integration of low refractive index active materials on CMOS compatible photonics platform based on half etch slot waveguide

R. Orobtchouk , Ali Belarouci , Bertrand Vilquin , Pedro Rojo Romeo
Photonics North 2019, May 2019, Québec, Canada
Conference papers hal-02400614v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
IEEE 39th International Conference on ELECTRONICS AND NANOTECHNOLOGY ELNANO-2019, IEEE, Apr 2019, Kyiv, Ukraine
Conference papers hal-02281214v1

Fabrication de dispositifs ferroélectriques à partir de HfO2 dopé et les problèmes en suspens

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo
Réunion thématique du GDR OXYFUN « Couches minces d'oxydes fonctionnels et applications en électronique et photonique », GDR OXYFUN, Oct 2019, Caen, France
Conference papers hal-02310135v1

Ferroelectric hafnium/zirconium oxide solid solutions deposited by RF magnetron sputtering with a single target

Jordan Bouaziz , Pédro Rojo Romeo , Bertrand Vilquin , Nicolas Baboux
E-MRS Spring Meeting 2019, May 2019, Nice, France
Conference papers hal-02506544v1

Ferroelectric HfZrO2 thin films for IoT applications

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
Rencontre RENATECH "Croissance Cristalline", Nov 2019, Grenoble, France
Conference papers hal-02392443v1

Sputtered ferroelectric hafnium/zirconium oxide solid solutions from a single target

Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo , Lucian Pintilie , Raluca Negrea et al.
EMRS Spring Meeting 2019, Jul 2019, Nice, France
Conference papers hal-02506563v1

Deposition of hafnium/zirconium oxides solid solution by reactive magnetron sputtering for fast and low power ferroelectric devices

Jordan Bouaziz , Bertrand Vilquin , Pédro Rojo Romeo , Nicolas Baboux , Bruno Masenelli et al.
Journée de la matière condensée 2018, Aug 2018, Grenoble, France
Conference papers hal-02506592v1

Photoferroelectric Ba(Sn,Ti)O3 solid solutions

Halyna Volkova , P Gemeiner , Baba Wague , B. Vilquin , J. Guillot et al.
Journées Nationales du GDR OXIFUN 2018, Mar 2018, Piriac sur Mer, France
Conference papers hal-01808081v1
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Prospects for energy-efficient edge computing with integrated HfO 2-based ferroelectric devices

Ian O'Connor , Mayeul Cantan , Cedric Marchand , Bertrand Vilquin , Bastien Giraud et al.
IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SOC), Oct 2018, Verona, Italy. ⟨10.1109/VLSI-SoC.2018.8644809⟩
Conference papers hal-01916992v1

Half Hetch Slot waveguides for Low-Cost Integration of CMOS compatible low refractive index active materials in Silicon Photonics

R. Orobtchouk , Ali Belarouci , Bertrand Vilquin , Pedro Rojo Romeo , Jordan Bouaziz et al.
Photonics North, Jun 2018, Montréal, Canada
Conference papers hal-02400084v1

Infra-red characterizations of metal oxide thin films

Bertrand Vilquin
CMOS ET, May 2017, Varsovie, Poland
Conference papers hal-02017626v1

Contrôle dynamique de la lumière par des matériaux fonctionnels

Sébastien Cueff , Regis Orobtchouk , Pedro Rojo Romeo , Bertrand Vilquin , Guillaume Saint-Girons et al.
Workshop du GDR Ondes, Oct 2017, sophia-antipolis, France
Conference papers hal-01965364v1

Vers la réalisation de composants optiques nonlinéaires intégrés sur puce exploitant du graphène

Alexandra Pavlova , Malik Kemiche , Jérémy Lhuillier , Thomas Wood , Radoslaw Mazurczyk et al.
colloque SFO-PAMO, 24ème Congrès Général de la SFP, Jan 2017, Orsay, France
Conference papers hal-01701490v1

Growth of hybrid GaAs core / shell nanowires

Xin Guan , Jeanne Becdelievre , Guillaume Saint-Girons , Romain Bachelet , Philippe Regreny et al.
GDR PULSE, 2016, Marseille, France
Conference papers hal-01489098v1

Hybrid silicon-ferroelectric oxide platform for tunable nanophotonics on silicon

S. Cueff , P. Castera , A. Gutierrez , P. Romeo , R. Orobtchouk et al.
2016 18th International Conference on Transparent Optical Networks (ICTON), Jul 2016, Trento, Italy. ⟨10.1109/ICTON.2016.7550429⟩
Conference papers hal-01848690v1

Semiconducting core / piezoelectric shell nanowires

Jose Penuelas , Xin Guan , Jeanne Becdelievre , Guillaume Saint-Girons , Romain Bachelet et al.
PiezoNEMS workshop, 2016, Grenoble, France
Conference papers hal-01489081v1

Oxydes fonctionnels intégrés sur Si pour des applications en énergie et photonique

Romain Bachelet , Mihai Apreutesei , Rahma Moalla , Benjamin Meunier , Sébastien Cueff et al.
JNMO, Jun 2016, Les Issambres, France
Conference papers hal-01965366v1

Interface reactivity and epitaxial growth of SrTiO3 and other functional oxides on Si and GaAs

Benjamin Meunier , Rahma Moalla , Adrien Carretero-Genevrier , L. Largeau , J. Gazquez et al.
IC-MBE 2016 international conference, 2016, Montpellier, France
Conference papers hal-01489068v1

Functional oxides for optical devices

Guillaume Saint-Girons , Sébastien Cueff , Benjamin Meunier , Romain Bachelet , Jose Penuelas et al.
E-MRS 2016 Fall Meeting, Sep 2016, Warsaw, Poland
Conference papers hal-01965369v1

Ferroelectric oxide slot waveguide electro-optic modulator on Silicon

Sébastien Cueff , Régis Orobtchouk , Pedro Rojo-Romeo , A. Gutierrez , P. Castéra et al.
SPIE Photonic West 2016 Conference, 2016, San-Francisco (USA), United States
Conference papers hal-01489100v1

Functional oxides on silicon for on-chip thermal management

Ramah Moalla , M. Apreutesei , Bertrand Vilquin , Philippe Regreny , Claude Botella et al.
XVth Electroceramics conference, Jun 2016, Limoges, France
Conference papers hal-01965438v1

Graphene Field Effect Transistors on SiC for High Speed and Bio-sensing Applications

Julien Pézard , Mihai Lazar , Bertrand Vilquin , Pedro Rojo Romeo , Naoufel Haddour et al.
JNTE (Journées Nationales des Technologies Emergentes), Nov 2015, Ecully, France
Conference papers hal-01946338v1

Epitaxial pyroelectric Pb(Zr,Ti)O3 thin films on silicon for thermal energy harvesting

Rahma Moalla , Qiang Liu , Guillaume Saint-Girons , Bertrand Vilquin , Nicolas Baboux et al.
EMRS 2015 Spring Meeting, 2015, Lille, France
Conference papers hal-01489367v1

Functional oxide pressure sensor

D. Le Bourdais , G. Agnus , T. Maroutian , V. Pillard , Guillaume Saint-Girons et al.
EMRS Spring Meeting, 2015, Lille, France
Conference papers hal-01489374v1

Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application

Benjamin Meunier , Romain Bachelet , Bertrand Vilquin , Pedro Rojo-Romeo , Geneviève Grenet et al.
EuroMBE 2015 conference, 2015, Canazei, Italy
Conference papers hal-01489363v1

Strong electrocaloric anisotropy in epitaxial Pb(Zr,Ti)O3 heterostructures

Rahma Moalla , Bertrand Vilquin , Guillaume Saint-Girons , Nicolas Baboux , G. Sebald et al.
EMRS 2015 Fall Meeting, Sep 2015, Varsovie, Poland
Conference papers hal-01489353v1

Electromechanical response of amorphous LaAlO3 thin film probed by scanning probe microscopies

Alexis Borowiak , H. Tanaka , Nicolas Baboux , David Albertini , Bertrand Vilquin et al.
ISAF 2015 conference, 2015, Singapour, Singapore
Conference papers hal-01489365v1

Towards ferroelectric control of topological insulators and surface states

O. Copie , G. Le Rhun , Bertrand Vilquin , L. Tortech , C. Mathieu et al.
EMRS Spring Meeting, 2015, Lille, France
Conference papers hal-01489616v1

Study of the conduction mechanism through a Pb(Zr,Ti)O3 thin film

Qiang Liu , Simon Martin , Nicolas Baboux , David Albertini , Brice Gautier et al.
EMRS Spring Meeting, 2015, Lille, France
Conference papers hal-01489622v1

Realization of a single layer graphene field effect transistor

J. Pezard , Jérémy Lhuillier , Z. El-Friakh , V. Souliere , Pedro Rojo Romeo et al.
EMRS Spring Meeting, 2015, Lille, France
Conference papers hal-01489358v1

Monolithic integration of pyroelectric oxide films on silicon for thermal energy harvesting and cooling applications

Rahma Moalla , Nicolas Baboux , G. Sebald , Bertrand Vilquin , Guillaume Saint-Girons et al.
EMRS 2015 Fall Meeting, 2015, Varsovie, Poland
Conference papers hal-01489342v1

Hybrid silicon-ferroelectric oxide slot waveguide for on-chip optoelectronics

Sébastien Cueff , Regis Orobtchouk , Pedro Rojo-Romeo , Baba Wague , Xuan Hu et al.
MRS Fall Meeting, 2015, Boston (USA), United States
Conference papers hal-01489369v1

SrTiO3 thin layers on Si: epitaxy and use as templates for thermal energy management and photonic integrated devices

Sébastien Cueff , Mihai Apreutesei , R. Moalla , B. Meunier , X. Hu et al.
Journees Nationales sur les Technologies Emergentes en micro/nanofabrication (JNTE), Nov 2015, Ecully, France
Conference papers hal-01291404v1

Functional spinel oxide heterostructures on silicon

Romain Bachelet , Patricia de Coux , Bénédicte Warot-Fonrose , Vassil Skumryev , G. Niu et al.
MRS 2015 Spring Meeting, Apr 2015, San-Francisco, United States
Conference papers hal-01965452v1

Epitaxial growth of ferroelectric Pb(Zr,Ti)O3 thin layers on SrTiO3-templated GaAs/InGaAs quantum well structure for opto-mechanical application

Benjamin Meunier , Romain Bachelet , Bertrand Vilquin , Pedro Rojo-Romeo , Geneviève Grenet et al.
EMRS 2015 Spring Meeting, 2015, Lille, France
Conference papers hal-01489362v1

Thermal energy harvesting through epitaxial pyroelectric oxide films integrated on silicon

Rahma Moalla , Qiang Liu , J. Vila-Fungueiriño , Adrien Carretero-Genevrier , B. Rivas-Murias et al.
EMRS 2015 Spring Meeting, 2015, Lille, France
Conference papers hal-01489612v1

Perovskite Oxide MEMS: Strain Control and Sensor Applications

P. Lecoeur , D. Le Bourdais , G. Agnus , T. Maroutian , M. Matzen et al.
MRS 2015 Fall Meeting, 2015, Boston (USA), United States
Conference papers hal-01489582v1

Epitaxial growth of SrTiO3 on GaAs : Towards opto-mechanical applications

Benjamin Meunier , Geneviève Grenet , Claude Botella , Philippe Regreny , Romain Bachelet et al.
Europ. Material research Society EMRS, 2015, Lille, France
Conference papers hal-01489364v1

Influence of the substrate on structural and electrical behaviors of BST thin film

Baba Wague , Qiang Liu , Simon Martin , Nicolas Baboux , David Albertini et al.
EMRS Spring Meeting 2015, 2015, Lille, France
Conference papers hal-01489370v1

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Rahma Moalla , Lucie Mazet , Lamis Louahadj , Qiang Liu , Jose Penuelas et al.
Nanotech MEET conference 2014, Apr 2014, Hammamet, Tunisia
Conference papers hal-01489914v1

Electro-optic modulation using hybrid silicon-ferroelectric oxide slot waveguide

Sébastien Cueff , Xuan Hu , Regis Orobtchouk , Pedro Rojo Romeo , Romain Bachelet et al.
Workshop “Les oxydes pour l’optique et la photonique”, 2014, Meudon, France
Conference papers hal-01489872v1

Integration of functional oxides on silicon for nanoelectronics and energy

Romain Bachelet , Lamis Louahadj , Lucie Mazet , Rahma Moalla , Gang Niu et al.
International Conference on Materials and Characterization Techniques (ICMCT), 2014, VIT Univ., Vellore, Chennai, India
Conference papers hal-01490283v1

Slot waveguide electro-optic modulator with ferroelectric oxide BaTiO3 on silicon

X. Hu , R. Orobtchouk , S. Cueff , Pedro Rojo Romeo , P. Regreny et al.
2014 IEEE 11th International Conference on Group IV Photonics, Aug 2014, Paris, France. ⟨10.1109/Group4.2014.6961944⟩
Conference papers hal-01848756v1
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Silicon CMOS compatible transition metal dioxide technology for boosting highly integrated photonic devices with disruptive performance

P. Sanchis , L. Sanchez , P. Castera , A. Rosa , A. Gutierrez et al.
ICTON 2014 -16th International Conference on Transparent Optical Networks, Jul 2014, Graz, Austria. pp.1-4, ⟨10.1109/ICTON.2014.6876505⟩
Conference papers hal-01848763v1

Electro-optic modulation with functional oxides monolithically integrated on silicon

Sébastien Cueff , Xuan Hu , Regis Orobtchouk , Pédro Rojo Romeo , C. Bachelet et al.
Silicon Photonics Summer School organized by PLAT4M project, 2014, Ghent, Belgium
Conference papers hal-01489917v1

Heterostructures combining functional oxides and semiconductors for integrated photonics

Guillaume Saint-Girons , Sébastien Cueff , Benjamin Meunier , Xuan Hu , Lamis Louahadj et al.
Workshop “Les oxydes pour l’optique et la photonique”, Dec 2014, Meudon, France
Conference papers hal-01490286v1

Texturation control of Pb(Zr,Ti)O3 films on SOI substrate

C. Debray , C. Delcamp , Z. El-Friakhj , J. Henri , Jérémy Lhuillier et al.
ICMAST, 2014, Bilbao, Spain
Conference papers hal-01489823v1

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Rahma Moalla , Lucie Mazet , Lamis Louahadj , Qiang Liu , Jose Penuelas et al.
European Materials Research Society (E-MRS), Spring Meeting, 2014, Lille, France
Conference papers hal-01489913v1

Graphene on 4H-SiC for terahertz transistors and ferroelectric non-volatile memories

J. Pezard , Jérémy Lhuillier , Z. El-Friakh , V. Souliere , Pédro Rojo Romeo et al.
CSCRM, 2014, Grenoble, France
Conference papers hal-01489926v1

Growth of semiconducting core / functional oxide shell nanowires

J. Penuelas , F. Boudaa , R. Bachelet , B. Vilquin , Bruno Masenelli et al.
PiezoNEMS'2013, Nov 2013, grenoble, France
Conference papers hal-01060922v1

Young modulus and Poisson ratio of polycrystalline and single crystal PZT thin-film measured by picosecond ultrasonics

F. Casset , Arnaud Devos , J. Abergel , G. Le Rhun , B. Vilquin et al.
IEEE International Ultrasonics Symposium, IUS 2013, 2013, Prague, Czech Republic
Conference papers hal-00944050v1
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Influence of bottom electrodes on HZO thin film features

Pedro Rojo Romeo , Infante Ingrid C. , Greta Segantini , Pedro Rojo Romeo , Benoit Manchon et al.
Material Challenge for Memory Applications 2021, Apr 2021, New York, United States
Conference poster hal-03274227v1
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Bottom electrodes impact on Hf0.5Zr0.5O2 ferroelectric tunnel junctions

Greta Segantini , Pedro Rojo Romeo , Benoit Manchon , Nicolas Baboux , Ingrid C Infante et al.
EMRS Spring Meeting 2021, May 2021, Virtual, France.
Conference poster hal-03275569v1
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Reduction of HfZrO2 capacitor wake-up effect

Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo , Bertrand Vilquin
Materials Challenges for Memory, Apr 2021, New York, United States.
Conference poster hal-03273119v1
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Spatial modulation of graphene's chemical potential

Jérémy Lhuillier , Pierre Demongodin , Thomas Wood , Malik Kemiche , Bertrand Vilquin et al.
Graphene2020, Jun 2020, Grenoble, France.
Conference poster hal-02618057v1

Study of the Electrical and Electronic Properties of Domains and Domain Walls in Ferroelectrics Combining AFM and STEM Techniques

Sergio Gonzalez Casal , David Albertini , Infante Ingrid C. , Nicolas Baboux , Solène Brottet et al.
International Symposium on the Application of Ferroelectrics (ISAF), Jul 2019, Lausanne, Switzerland
Conference poster hal-02461378v1

A Thorough Study of Ferroelectric Sputtered (Hf, Zr)O2 Solid Solutions

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Brice Gautier , Bertrand Vilquin et al.
International Symposium on the Application of Ferroelectrics, Jul 2019, Lausanne, Switzerland.
Conference poster hal-02461347v1
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Deposition of doped and undoped HfO2 for fast and low energy consumption ferroelectric devices

Jordan Bouaziz , Bertrand Vilquin , Pedro Rojo Romeo , Nicolas Baboux , Bruno Masenelli et al.
6th International Conference SENSO Workshop, Jun 2018, Gardanne, France
Conference poster hal-02506625v1
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Comparison between Sputtering and Atomic Layer Deposition of ferroelectric doped and undoped HfO2

Jordan Bouaziz , Bertrand Vilquin , Pedro Rojo Romeo , Nicolas Baboux , Bruno Masenelli et al.
EMRS Spring Meeting 2017, May 2017, Strasbourg, France
Conference poster hal-02506676v1

Nanofils et capteurs de gaz

T.-H. Nguyen , A. Apostoluk , B. Masenelli , Pedro Rojo Romeo , B. Vilquin et al.
Workshop Lyonnais sur les Nanosciences et les Nanotechnologies, Jun 2015, Lyon, France. , 2016
Conference poster hal-01374549v1

Metal oxides nanowires for optical gas sensing

T.-H. H Nguyen , Vincent Consonni , E. Appert , R. Parize , F. Gaillard et al.
Journées Nationales sur les Technologies Emergentes en Micro-Nanofabrication, JNTE 2015, Nov 2015, Lyon, France
Conference poster hal-01374542v1

Epitaxial pyroelectric thin films on silicon for thermal energy harvesting

Rahma Moalla , Lucie Mazet , Lamis Louahadj , Qiang Liu , Jose Penuelas et al.
Nanotech MEET conference 2014, Apr 2014, Hammamet, Tunisia. , 2014
Conference poster hal-01489793v1

Epitaxial Systems Combining Oxides and Semiconductors

Gang Niu , Guillaume Saint-Girons , Bertrand Vilquin
Molecular Beam Epitaxy (Second Edition) From Research to Mass Production, Elsevier, pp.377-402, 2018
Book sections hal-02273400v1

Epitaxial systems combining oxides and semiconductors

Gang Niu , Guillaume Saint-Girons , Bertrand Vilquin
Molecular Beam Epitaxy, Elsevier, pp.451-475, 2013
Book sections hal-02273398v1

Nanowires on film for photoelectrochemical water splitting

Miao Zhong , Mario Kurniawan , Aleksandra Apostoluk , Bertrand Vilquin , Jean-Jacques Delaunay et al.
Nanowires - Recent Advances, InTech, 2012, ⟨10.5772/52593⟩
Book sections hal-01986747v1

Vers l'intégration monolithique d'hétérostructures et de nanostructures III-V et Ge sur silicium pour la microélectronique et l'optoélectronique

G. Saint-Girons , M. Gendry , H. Dumont , P. Regreny , J. Cheng et al.
Leray J.L., Boudenot J.C., Gautier J. La micro-nano électronique, enjeux et mutations, CNRS ÉDITIONS, pp.179-182, 2009
Book sections hal-00575787v1