Didier Tonneau

CV
83
Documents
Affiliation actuelle
  • Centre Interdisciplinaire de Nanoscience de Marseille (CINaM)
Contact

Présentation


Compétences

Dosimetry fior ionising radiaition, X-ray spectroscopy, Scanning Probe Microscopy, Nanoscience, Micro and Nanoelectronics

Publications

Publications

Characterization of a high lateral resolution and high sensitivity dosimeter for proton beams using inorganic scintillator detector

Gaël Simonin , Sree Bash Chandra Debnath , Kévin Lalanne , Didier Tonneau , Sébastien Lavandier et al.

IEEE Sensors Journal, 2025, 25 (3), pp.4563-4569. ⟨10.1109/JSEN.2024.3502906⟩

Article dans une revue irsn-04888798v1
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Geometrical Characterization of an Inorganic Scintillator Detector for Proton Therapy using a Micrometer Scale Ion Beam

Kevin Lalanne , Sree Bash Chandra Debnath , Gaël Simonin , D. Tonneau , François Vianna-Legros et al.

IEEE Sensors Journal, 2024, 24 (13), pp.20587-20594. ⟨10.1109/JSEN.2024.3401630⟩

Article dans une revue irsn-04592453v1

Cerenkov free micro-dosimetry in small-field radiation therapy technique

Sree Bash Chandra Debnath , Didier Tonneau , Carole Fauquet , Agnes Tallet , Julien Darréon

Physics in Medicine and Biology, 2024, 69 (12), pp.125018. ⟨10.1088/1361-6560/ad51c6⟩

Article dans une revue hal-04915518v1
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Characterization of Some Physical and Photocatalytic Properties of CuO Nanofilms Synthesized by a Gentle Chemical Technique

Soumia Aroussi , Mohamed Amine Dahamni , Mostefa Ghamnia , Didier Tonneau , Carole Fauquet

Condensed Matter, 2022, 7 (2), pp.37. ⟨10.3390/condmat7020037⟩

Article dans une revue hal-04236306v1

Synthesis and Investigation of Pure and Cu-Doped NiO Nanofilms for Future Applications in Wastewater Treatment Rejected by Textile Industry

D. Tonneau

Catalysts, 2022

Article dans une revue hal-04915527v1
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Spray Pyrolysis Synthesis of Pure and Mg-Doped Manganese Oxide Thin Films

Mohamed Amine Dahamni , Mostefa Ghamnia , Salah Eddine Naceri , Carole Fauquet , Didier Tonneau et al.

Coatings, 2021, 11 (5), pp.598. ⟨10.3390/coatings11050598⟩

Article dans une revue hal-04236305v1

An Interactive micromanipulation station combined to a confocal XRF instrument : proof of concept and volume resolution

D. Tonneau , D. Renahy , S. Douillet , H. Maradj , C. Fauquet et al.

IEEEXplore Digital Library, 2021, ⟨10.1109/MARSS49294.2020.9307924⟩

Article dans une revue hal-03523732v1
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Dosimetric characterization of a small-scale (Zn,Cd)S:Ag inorganic scintillating detector to be used in radiotherapy

Sree Bash Chandra Debnath , Didier Tonneau , Carole Fauquet , Agnes Tallet , Anthony Goncalves et al.

Physica Medica European Journal of Medical Physics, 2021, 84, pp.15-23. ⟨10.1016/j.ejmp.2021.03.022⟩

Article dans une revue hal-03189139v1
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High resolution small‐scale inorganic scintillator detector: HDR brachytherapy application

Sree Bash Chandra Debnath , Marjorie Ferre , Didier Tonneau , Carole Fauquet , Agnes Tallet et al.

Medical Physics : The international journal of medical physics research and practice, 2021, ⟨10.1002/mp.14727⟩

Article dans une revue hal-03169741v1

Signal amplification of fiber integrated X-ray detectors by metallization

D. Tonneau

IEEE Sensors Journal, 2021, 21 (17), pp.18793. ⟨10.1109/JSEN.2021.3091660⟩

Article dans une revue hal-03521426v1

Photocatalytical properties of NiO nanofilms doped with Ba

S. Boulila , M. Ghamnia , A. Boukhachem , A. Ouhaibi , M. Chakhoum et al.

Philosophical Magazine Letters, 2020, 100 (6), pp.283-293. ⟨10.1080/09500839.2020.1760389⟩

Article dans une revue hal-02940558v1
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High spatial resolution inorganic scintillator detector for high energy X-ray beam at small field irradiation

S.B.C Debnath , Agnes Tallet , S. Lavandier , Sree Bash , Chandra Debnath et al.

Medical Physics : The international journal of medical physics research and practice, 2019, ⟨10.1002/MP.14002⟩

Article dans une revue hal-02424913v2

The effect of strontium doping on structural and morphological properties of ZnO nanofilms synthesized by ultrasonic spray pyrolysis method

A. Ouhaibi , M. Ghamnia , A. Dahamni , V. Heresanu , C. Fauquet et al.

Journal of Science: Advanced Materials and Devices, 2018, 3 (1), pp.29-36. ⟨10.1016/j.jsamd.2018.01.004⟩

Article dans une revue hal-01957997v1

The effect of strontium doping on structural and morphological properties of ZnO nanofilms synthesized by ultrasonic spray pyrolysis method

A. Ouhaibi , M. Ghamnia , M.A. Dahamni , V. Heresanu , C. Fauquet et al.

Journal of Science: Advanced Materials and Devices, 2018, 3 (1), pp.29-36. ⟨10.1016/j.jsamd.2018.01.004⟩

Article dans une revue hal-04236299v1

Ultracompact x-ray dosimeter based on scintillators coupled to a nano-optical antenna

Zhihua Xie , Hichem Maradj , Miguel-Angel Suarez , Lydie Viau , Virginie Moutarlier et al.

Optics Letters, 2017, 42 (7), pp.1361. ⟨10.1364/OL.42.001361⟩

Article dans une revue hal-04236298v1

Toward sub-micro-XRF working at nanometer range using capillary optics

M. Dehlinger , C. Fauquet , F. Jandard , A. Bjeoumikhova , R. Gubzhokov et al.

X-Ray Spectrometry, 2013, 42 (6), pp.456-461

Article dans une revue hal-00919570v1

Spatial resolution of confocal XRF technique using capillary optics

M. Dehlinger , C. Fauquet , S. Lavandier , O. Aumporn , F. Jandard et al.

Nanoscale Research Letters, 2013, 8, pp.UNSP 271. ⟨10.1186/1556-276X-8-271⟩

Article dans une revue hal-00914734v1

Toward sub-micro-XRF working at nanometer range using capillary optics

M. Dehlinger , C. Fauquet , F. Jandard , A. Bjeoumikhov , S. Bjeoumikhova et al.

X-Ray Spectrometry, 2013, 42 (6), pp.456-461. ⟨10.1002/xrs.2503⟩

Article dans une revue istex hal-04236296v1

Mapping of X-ray induced luminescence using a SNOM probe

F. Jandard , C. Fauquet , M. Dehlinger , A. Ranguis , A. Bjeoumikhov et al.

Applied Surface Science, 2013, 267, pp.81-85. ⟨10.1016/j.apsusc.2012.07.162⟩

Article dans une revue istex hal-04236295v1

Mapping of X-ray induced luminescence using a SNOM probe

F. Jandard , C. Fauquet , M. Dehlinger , A. Ranguis , A. Bjeoumikhov et al.

Applied Surface Science, 2013, 267, pp.81-85

Article dans une revue hal-00843731v1

Feasibility of simultaneous surface topography and XRF mapping using Shear Force Microscopy

M. Dehlinger , C. Dorczynski , C. Fauquet , F. Jandard , D. Tonneau et al.

International Journal of Nanotechnology, 2012, 9 (3/4/5/6/7), pp.460. ⟨10.1504/IJNT.2012.045348⟩

Article dans une revue hal-04236292v1

Feasibility of simultaneous surface topography and XRF mapping using Shear Force Microscopy

M. Dehlinger , C. Dorczynski , C. Fauquet , F. Jandard , D. Tonneau et al.

International Journal of Nanotechnology, 2012, 9 (3-7), pp.460-470. ⟨10.1504/IJNT.2012.045348⟩

Article dans une revue hal-00697528v1

Combining scanning probe microscopy and X-ray spectroscopy

C. Fauquet , M. Dehlinger , F. Jandard , S. Ferrero , D. Pailharey et al.

Nanoscale Research Letters, 2011, 6, pp.308. ⟨10.1186/1556-276X-6-308⟩

Article dans une revue hal-00975161v1

Electric field induced motion of metallic droplets: Application to submicron contactor

H. Dallaporta , M. Prestigiacomo , F. Bedu , D. Tonneau , D. Chatain et al.

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 2010, 28 (4), pp.L35-L38. ⟨10.1116/1.3462963⟩

Article dans une revue hal-04236291v1
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Electric field induced motion of metallic droplets: application to submicron contactor

H. Dallaporta , M. Prestigiacomo , F. Bedu , D. Tonneau , D. Chatain et al.

Journal of Vacuum Science and Technology, 2010, 28 (4), pp.L35-L38. ⟨10.1116/1.3462963⟩

Article dans une revue hal-00523864v1

Silicon nanowires synthesis on a submicronic terminal: Structural and electrical characterization

Hichem Abed , Houda Sahaf , Alan Reguer , Nabil Rochdi , Didier Tonneau et al.

Journal of Applied Physics, 2010, 107 (2), ⟨10.1063/1.3284940⟩

Article dans une revue hal-04236288v1

Silicon nanowires synthesis on a submicronic terminal: Structural and electrical characterization

H. Abed , H. Sahaf , A. Reguer , N. Rochdi , D. Tonneau et al.

Journal of Applied Physics, 2010, 107, pp.23410

Article dans une revue hal-00475814v1

Fabrication and electrical properties of ultra-thin silicon nanowires

N. Rochdi , D. Tonneau , F. Jandard , H. Dallaporta , V. Safarov

Physica Status Solidi A (applications and materials science), 2008, 205 (5), pp.1157-1161

Article dans une revue hal-00386844v1

Electrical conductivity of ultra-thin silicon nanowires

N. Rochdi , D. Tonneau , F. Jandard , H. Dallaporta , V. Safarov et al.

Journal of Vacuum Science and Technology, 2008, 26 (1), pp.159-163

Article dans une revue hal-00303801v1

Electrical conductivity of ultra-thin silicon nanowires

Nabil Rochdi , Didier Tonneau , Franck Jandard , Hervé Dallaporta , Viatcheslav Safarov et al.

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2008, 26 (1), pp.159-163. ⟨10.1116/1.2823056⟩

Article dans une revue hal-04236281v1

Structural and electrical studies of conductive nanowires prepared by focused ion beam induced deposition

A. Reguer , F. Bedu , D. Tonneau , H. Dallaporta , M. Prestigiacomo et al.

Journal of Vacuum Science and Technology, 2008, 26 (1), pp.175-180

Article dans une revue hal-00303797v1

Fabrication and electrical properties of ultra-thin silicon nanowires

N. Rochdi , D. Tonneau , F. Jandard , H. Dallaporta , V. Safarov

Physica Status Solidi A (applications and materials science), 2008, 205 (5), pp.1157-1161. ⟨10.1002/pssa.200723484⟩

Article dans une revue istex hal-04236283v1

Structural and electrical studies of conductive nanowires prepared by focused ion beam induced deposition

A. Reguer , F. Bedu , D. Tonneau , H. Dallaporta , M. Prestigiacomo et al.

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2008, 26 (1), pp.175-180. ⟨10.1116/1.2830630⟩

Article dans une revue hal-04236286v1
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Directed growth of horizontal silicon nanowires by laser induced decomposition of silane

H. Abed , A. Charrier , H. Dallaporta , V. Safarov , H. Jamgotchian et al.

Journal of Vacuum Science and Technology, 2006, 24, pp.1248. ⟨10.1116/1.2194948⟩

Article dans une revue hal-00070974v1
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Deposition of gold nanofeatures on silicon samples by field-induced deposition using a scanning tunneling microscope

H. Abed , H. Jamgotchian , H. Dallaporta , B. Gely , P. Bindzi et al.

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2005, 23 (4), ⟨10.1116/1.1943440⟩

Article dans une revue hal-01722654v1

Purification and crystallization of tungsten wires fabricated by focused-ion-beam-induced deposition

M. Prestigiacomo , F. Bedu , F. Jandard , D. Tonneau , H. Dallaporta et al.

Applied Physics Letters, 2005, 86 (19), ⟨10.1063/1.1927714⟩

Article dans une revue hal-04236279v1

Purification and crystallization of tungsten wires fabricated by focused-ion-beam-induced deposition

M. Prestigiacomo , F. Bedu , F. Jandard , D. Tonneau , H. Dallaporta et al.

Applied Physics Letters, 2005, ⟨10.1063/1.1927714⟩

Article dans une revue hal-01578387v1

Studies of structures elaborated by focused ion beam induced deposition

M. Prestigiacomo , L. Roussel , A. Houel , P. Sudraud , F. Bedu et al.

Microelectronic Engineering, 2004, ⟨10.1016/j.mee.2004.07.047⟩

Article dans une revue istex hal-01578374v1

Light induced reversible conductivity changes in Silicon-On-Insulator nanowires

D. Tonneau , Francinelli A. , Tonneau D. , Clément N. , Abed H. et al.

Applied Physics Letters, 2004, 85 (22), pp.5272

Article dans une revue hal-03513105v1

Studies of structures elaborated by focused ion beam induced deposition

M. Prestigiacomo , L. Roussel , A. Houël , P. Sudraud , F. Bedu et al.

Microelectronic Engineering, 2004, 76 (1-4), pp.175-181. ⟨10.1016/j.mee.2004.07.047⟩

Article dans une revue istex hal-04236277v1

Variable Structure Control of a Piezoelectric Actuator for a Scanning Tunnelling Microscope

D. Tonneau , Bonnail N. , Tonneau D. , Capolino G.-A. , Dallaporta H.

IEEE Transactions on Industrial Informatics, 2004, 51 (2), pp.354

Article dans une revue hal-03513247v1

High aspect ratio nano-oxidation of Silicon with noncontact atomic force microscopy

D. Tonneau

Journal of Vacuum Science and Technology, 2003, 21 (6), pp.2348

Article dans une revue hal-03513081v1

<title>Scanning probe microscopy of nanocrystalline iridium oxide thin films</title>

Daniel Pailharey , D. Tonneau , A. Houel , A. Kuzmin , R. Kalendarev et al.

SPIE, 2003, pp.259-265. ⟨10.1117/12.517031⟩

Article dans une revue hal-04236313v1

Current-Induced Structural Modification of Silicon-on-Insulator Nanostructures

D. Tonneau , N. Clement , A. Francinelli , H. Dallaporta , F. Jandard et al.

Applied Physics Letters, 2003, 82 (11), pp.1727

Article dans une revue hal-03521584v1

Resistless Patterning of Quantum Nanostructures by Local Anodization with an Atomic Force Microscope

D. Tonneau , Bouchiat V. , Faucehr M. , Fournier T. , Pannetier B. et al.

Microelectronic Engineering, 2002, 61-62, pp.517

Article dans une revue hal-03521608v1

Reaction Mechanisms in Laser-assisted Chemical Vapor Deposition of Microstructures

D. Tonneau , Y. Pauleau

NATO ASI Ser., Ser. 2, 2002, 55, pp.223-254

Article dans une revue hal-03523769v1

Proximal Probes Induced Chemical Processing for Nanodevice Elaboration

D. Tonneau , N. Clément , A. Houel , N. Bonnail , H. Dallaporta et al.

NATO ASI Ser., Ser. 2, 2002, Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies, 55, pp.255-281

Article dans une revue hal-03523774v1

Direct Patterning of Nanostructures by Field-Induced Deposition from a STM Tip

D. Tonneau , A. Houel , N. Bonnail , H. Dallaporta , V. Safarov

Journal of Vacuum Science and Technology, 2002, 20 (6), pp.2337

Article dans une revue hal-03521601v1

Kinetics and Reaction Mechanisms of Laser-Assisted Chemical Vapor Deposition of Polycrystalline Silicon Dots from Silane

D. Tonneau , Y. Pauleau

Journal of Applied Physics, In press, 91 (3), pp.1553-1559

Article dans une revue hal-03523710v1

Implantation d'une commande à structure variable pour un actionneur piézoélectrique associé à un microscope à effet tunnel

D. Tonneau

La Revue de l'électricité et de l'électronique, 2002, - (02), pp.35. ⟨10.3845/REE.2002.017⟩

Article dans une revue hal-04236271v1

Growth of Silicon Oxide on Hydrogenated Silicon During Lithography with an Atomic Force Microscope

D. Tonneau , F. Marchi , V. Bouchiat , H. Dallaporta , V. Safarov

Journal of Vacuum Science and Technology, 2000, 16 (6), pp.2952-2956

Article dans une revue hal-03523720v1

Direct Patterning of Noble Metal Nanostructures with a STM

D. Tonneau , F. Marchi , H. Dallaporta , V. Safarov , V. Bouchiat

Journal of Vacuum Science and Technology, 2000, 18 (3), pp.1171-1176

Article dans une revue hal-03523719v1

STM Studies : Spatial Resolution Limits to Fit Observations in Nanotechnology

D. Tonneau , P. D. Szkutnik , A. Piednoir , A. Ronda , F. Marchi et al.

Applied Surface Science, 2000, 164, pp.169-174

Article dans une revue hal-03523715v1

Growth Kinetics and Mechanisms of Aluminum Dots Promoted by Laser-Induced Decomposition of TMAA

D. Tonneau , F. Thuron , A. Correia , J.E. Bouree , Y. Pauleau

Jpn. J. Appl. Phys, 1998, 37, pp.4954-4961

Article dans une revue hal-03523722v1

Kinetics of Laser Induced Thermal Decomposition of Trimethylamine-alane

D. Tonneau , J.E. Bourée , Y. Pauleau

Applied Surface Science, 1995, 86, pp.488-493

Article dans une revue hal-03523725v1
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Growth Kinetics of Copper Films from Photoassisted CVD of Copperacetylacetonate

D. Tonneau , R. Pierrisnard , H. Dallaporta , W. Marine

Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-629-C5-635. ⟨10.1051/jphyscol:1995575⟩

Article dans une revue istex jpa-00253937v1

Laser Direct Writing of Gold Tracks from Decomposition of Organometallic Screen Ink

D. Tonneau , J.E. Bouree , A. Correia , G. Roche , G. Pelous et al.

J. of Appl. Phys, 1995, 78, pp.5139-5142

Article dans une revue hal-03523723v1

Kinetics of laser thermal decomposition of trimethylamine alane

D. Tonneau , J.E. Bourée , Y. Pauleau

Applied Surface Science, 1995, 86 (1-4), pp.488-493. ⟨10.1016/0169-4332(94)00436-6⟩

Article dans une revue istex hal-04236262v1

Electrical Characterization of Laser-Induced Deposits of Aluminum on Gallium Arsenide

D. Tonneau , M. Cuniot , J.M. Laroche , H. Orain , J.F. Rommeluere et al.

Thin Solid Films, 1994, 241, pp.47-51

Article dans une revue hal-03523726v1

Laser-induced deposition of aluminium on gallium arsenide and silicon nitride from trimethylamine alane

T. Frugier , A. Boulahia , A. Sayah , D. Tonneau , J.E. Bourée et al.

Applied Surface Science, 1993, 69 (1-4), pp.305-309. ⟨10.1016/0169-4332(93)90523-E⟩

Article dans une revue istex hal-04236258v1

Kinetics of Laser-Assisted Chemical Vapor Deposition of Tungsten Microstructures

Geoffroy Auvert , Yves Pauleau , Didier Tonneau

Japanese Journal of Applied Physics, 1992, 31 (1R), pp.100. ⟨10.1143/JJAP.31.100⟩

Article dans une revue hal-04236253v1

Growth kinetics of tungsten microstructures produced via the hydrogen reduction of tungsten hexafluoride on laser-heated substrates

G. Auvert , Y. Pauleau , D. Tonneau

Journal of Applied Physics, 1992, 71 (9), pp.4533-4543. ⟨10.1063/1.350771⟩

Article dans une revue hal-04236255v1
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PYROLYTIC DECOMPOSITION OF SILANE ON LASER-IRRADIATED SILICA SUBSTRATES

D. Tonneau , Y. Pauleau , G. Auvert

Journal de Physique Colloques, 1989, 50 (C5), pp.C5-637-C5-645. ⟨10.1051/jphyscol:1989574⟩

Article dans une revue jpa-00229607v1
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LASER-INDUCED DECOMPOSITION OF METAL CARBONYLS FOR CHEMICAL VAPOR DEPOSITION OF MICROSTRUCTURES

D. Tonneau , G. Auvert , Y. Pauleau

Journal de Physique Colloques, 1989, 50 (C5), pp.C5-647-C5-656. ⟨10.1051/jphyscol:1989575⟩

Article dans une revue istex jpa-00229608v1

Deposition of nickel microstructures by CO2 laser-assisted decomposition of nickel tetracarbonyl

D. Tonneau , G. Auvert , Y. Pauleau

Journal of Applied Physics, 1989, 66 (1), pp.165-168. ⟨10.1063/1.343898⟩

Article dans une revue hal-04236250v1

Chemical processes promoted by CO2 laser-assisted decomposition of silane on silica substrates

D. Tonneau , Y. Pauleau , G. Auvert

Journal of Applied Physics, 1989, 65 (11), pp.4410-4413. ⟨10.1063/1.343280⟩

Article dans une revue hal-04236249v1

Growth kinetics of nickel microstructures produced by laser-induced decomposition of nickel tetracarbonyl

D. Tonneau , G. Auvert , Y. Pauleau

Journal of Applied Physics, 1988, 64 (10), pp.5189-5196. ⟨10.1063/1.342430⟩

Article dans une revue hal-04236247v1

Evidence of a photon effect during the visible laser-assisted deposition of polycrystalline silicon from silane

G. Auvert , D. Tonneau , Y. Pauleau

Applied Physics Letters, 1988, 52 (13), pp.1062-1064. ⟨10.1063/1.99211⟩

Article dans une revue hal-04236244v1

CO2-laser-induced chemical vapour deposition of polycrystalline silicon from silane

D. Tonneau , G. Auvert , Y. Pauleau

Thin Solid Films, 1987, 155 (1), pp.75-86. ⟨10.1016/0040-6090(87)90454-8⟩

Article dans une revue istex hal-04236243v1

Absorption and decomposition of silane under infrared laser irradiation

D. Tonneau , G. Auvert , Y. Pauleau

Chemical Physics, 1986, 103 (2-3), pp.353-358. ⟨10.1016/0301-0104(86)80036-2⟩

Article dans une revue istex hal-04236241v1

Deposition of Silicon Films by Photodissociation of Silane Under IR Laser Irradiation

Y. Pauleau , D. Tonneau , G. Auvert

Chemical Physics, 1984, Springer Series in Chemical Physics, 39, pp.215-220. ⟨10.1007/978-3-642-82381-7_28⟩

Article dans une revue istex hal-04236238v1

Laser Direct Writing for Device Applications

G. Auvert , Y. Pauleau , D. Tonneau

Emerging Technologies for In Situ Processing, Springer Netherlands, pp.201-211, 1988, ⟨10.1007/978-94-009-1409-4_21⟩

Chapitre d'ouvrage istex hal-04236317v1

METHOD FOR MANUFACTURING A FLUX DETECTOR OF A FIRST AND A SECOND IONISING RADIATION

D. Tonneau , J. Darreon , C. Fauquet , S.B.C. Debnath , A. Tallet

France, Patent n° : WO/2022/161889. 2022, https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2022161889&_cid=P10-LNLE1M-65721-1

Brevet hal-04236591v1

Dosimeter

D. Tonneau , S.B.C. Debnath , J. Darreon , C. Fauquet , A. Tallet

France, Patent n° : WO2021043773A1. 2020, https://patents.google.com/patent/WO2021043773A1/en

Brevet hal-04236583v1

DEVICE FOR TOPOGRAPHICAL CHARACTERISATION AND CHEMICAL MAPPING OF SURFACES

D. Tonneau , J. Purans , F. Jandard , A. Erko , C. Fauquet et al.

France, Patent n° : WO/2011/154877. 2011, https://patentscope.wipo.int/search/en/detail.jsf?docId=WO2011154877

Brevet hal-04236574v1

Method for making a wire nanostructure in a semiconductor film

D. Tonneau , Fraboulet D. , Gautier J. , Clement N. , Bouchiat V.

France, Patent n° : US7217946B2. 2003, https://patents.google.com/patent/US7217946B2/en

Brevet hal-04236567v1

Laser micro-film machine for processing objects having thin films such as integrated circuits

D. Tonneau , Girard J.J. , Pelous G.

France, Patent n° : WO1991011288A1. 1990, https://patents.google.com/patent/WO1991011288A1/en

Brevet hal-04236562v1

PROCESS FOR LOCALIZED ENGRAVING OF A SILICON OXIDE LAYER

D. Tonneau , Geoffroy Auvert , Yves Pauleau

France, Patent n° : EP0261040A1. 1986

Brevet hal-04236552v1