Emmanuel Dubois
236
Documents
Researcher identifiers
emmanuel-dubois-iemn
-
0000-0002-0347-010X
- IdRef : 134290291
Presentation
***Emmanuel Dubois*** received the Ingénieur degree from the Institut Supérieur d’Electronique et du Numérique (ISEN), Lille, France, in 1985 and the Ph. D. degree from the University of Lille in 1990. He was the recipient of the IBM award for high performance computing in 1990. In 1992, he was a visiting scientist at the IBM T.J. Watson Research Centre, Yorktown Heights, working on characterization and simulation of submicron SOI-MOSFETs. In 1993, he joined the Institut d’Electronique de Microélectronique et de Nanotechnologie (IEMN UMR 8520) where he is currently Director of Research at the Centre National de la Recherche Scientifique, CNRS. He was coordinator or task leader of a series of European projects focused on ultimate non-conventional MOSFETs (FP4-IST-QUEST, FP5-IST-SODAMOS, FP6-IST-METAMOS, FP6 SiNANO NoE, FP7 NANOSIL NoE, FP6 NANOCMOS IP, FP6 PULLNANO IP). He currently heads the STMicroelectronics-IEMN Joint Laboratory. From 2005 to 2016, he was on the Technical Program Committee of ESSDERC and was TPC member of the VSLI Symposium on Technology (2018-2019-2020). Until 2017, he participated to the nanoelectronics committee of the French Observatory on Micro and NanoTechnologies (OMNT). He is currently involved in functional packaging *(System-Moore)* and coordinator of the PIA-EQUIPEX project LEAF on advanced laser-based microfabrication. His research interests cover advanced source/drain CMOS technology, non-conventional thermal energy harvesting, laser micromachining and functional packaging for RF, mmW and photonics.
Publications
- 5
- 3
- 3
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 2
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 1
- 10
- 5
- 3
- 5
- 12
- 3
- 12
- 6
- 14
- 12
- 12
- 16
- 9
- 17
- 20
- 13
- 17
- 13
- 14
- 9
- 3
- 7
- 3
- 1
|
Raman Thermometry Characterization of GeSbTe based Phase Change Materials2022 28th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC), Sep 2022, Dublin, Ireland. pp.1-5, ⟨10.1109/THERMINIC57263.2022.9950662⟩
Conference papers
hal-03875742v1
|
|
Integrated metrology devices dedicated to transient Harman measurement of silicon nano-meshesNanoscale and Microscale Heat Transfer VII - Eurotherm, May 2022, Palermo, Italy
Conference papers
hal-03870513v1
|
|
Exploring the response of Ryugu-inspired phyllosilicates to a pulsed laser53rd Lunar and Planetary Science Conference, Mar 2022, Texas, United States
Conference papers
hal-03664443v1
|
|
Raman Thermometry Characterization of GeSbTe based Phase Change Materials28th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2022), Sep 2022, Dublin, Ireland. pp.1-5, ⟨10.1109/THERMINIC57263.2022.9950662⟩
Conference papers
hal-03870575v1
|
|
A 140 GHz to 170 GHz active tunable noise source development in SiGe BiCMOS 55 nm technology16th European Microwave Integrated Circuits Conference, EuMIC 2021, Apr 2022, London, United Kingdom. pp.125-128, ⟨10.23919/EuMIC50153.2022.9783645⟩
Conference papers
hal-03637553v1
|
|
Suspended crystalline silicon thermometry devices: towards quantum nanophononicsNanoscale and Microscale Heat Transfer VII - Eurotherm, May 2022, Palermo, Italy
Conference papers
hal-03870287v1
|
Functional packaging of RF, mmW and photonic functions based on femtosecond laser micromachining19th International Nanotech Symposium NANO KOREA 2021, TS10-Nanofabrication & Measurements, Jul 2021, Seoul, South Korea
Conference papers
hal-03582878v1
|
|
|
220 GHz E-Plane Transition from Waveguide to Suspended Stripline Integrated on Industrial Organic Laminate Substrate TechnologyEuropean Microwave Conference, EuMC 2021, Session EuMC06 - 3D to 2D Transitions and New Materials for mmWave system Integration, EuMIC/EuMC/EuMW, Apr 2021, London, United Kingdom. pp.99-102, ⟨10.23919/EuMC50147.2022.9784166⟩
Conference papers
hal-03637651v1
|
[Invité] Packaging fonctionnel de fonctions RF, mmW et photonique basé sur le micro-usinage laser9eme Conférence plénière du GdR Ondes, GDR ONDES 2451, Nov 2021, Villeneuve d'Ascq, France
Conference papers
hal-03741454v1
|
|
|
Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platformSPIE Photonics Europe, Conference 11364 - Applications of Photonic Technology - Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, Apr 2020, Strasbourg, France. 1136403, 8 p., ⟨10.1117/12.2554725⟩
Conference papers
hal-03092725v1
|
|
Evaluation of micro laser sintering metal 3D-printing technology for the development of waveguide passive devices up to 325 GHzIEEE/MTT-S International Microwave Symposium, IMS 2020, Aug 2020, Los Angeles, United States. pp.1168-1171, ⟨10.1109/IMS30576.2020.9224102⟩
Conference papers
hal-03091222v1
|
|
Device for broadband THz spectroscopy of 1-nL-volume samples2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Sep 2019, Paris, France. paper Tu-PM2-3-6, 2 p., ⟨10.1109/IRMMW-THz.2019.8874026⟩
Conference papers
hal-02886495v1
|
|
Towards broadband THz spectroscopy and analysis of sub-wavelength-size biological samples2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Sep 2019, Paris, France. ⟨10.1109/IRMMW-THz.2019.8874409⟩
Conference papers
hal-02886507v1
|
|
Femtosecond laser micromachining of crystalline silicon for ablation of deep macro-sized cavities for silicon-on-insulator applicationsSPIE Photonics West, Conference 10906 - Laser-based Micro- and Nanoprocessing XIII, Feb 2019, San Francisco, United States. 109060K, 13 p., ⟨10.1117/12.2507652⟩
Conference papers
hal-02317233v1
|
|
Shining the light to terahertz spectroscopy of nL-volume biological samplesCLEO (The Conference on Lasers and Electro-Optics Conference) 2019, May 2019, San Jose, United States. paper ATu3K.6, 2 p., ⟨10.1364/CLEO_AT.2019.ATu3K.6⟩
Conference papers
hal-02158865v1
|
Femtosecond pulsed laser for advanced photonic packaging7th Electronic System-Integration Technology Conference, ESTC 2018, Sep 2018, Dresden, Germany. ⟨10.1109/ESTC.2018.8546374⟩
Conference papers
hal-01961743v1
|
|
Artificially-induced anisotropic heat flow in 2D patterned membranesEurotherm 111: Nanoscale and Microscale Heat Transfer VI, Dec 2018, Levi, Finland
Conference papers
hal-02025449v1
|
|
Phonon heat conduction in phononic crystal membranesE-MRS Spring Meeting, Symposium "Nanostructures for phononic applications", Jun 2018, Strasbourg, France
Conference papers
hal-01932523v1
|
|
Performance evaluation of silicon based thermoelectric generators interest of coupling low thermal conductivity thin films and a planar architecture48th European Solid-State Device Research Conference (ESSDERC 2018), Sep 2018, Dresden, Germany. pp.226-229, ⟨10.1109/ESSDERC.2018.8486919⟩
Conference papers
hal-02317293v1
|
|
Demonstration of low-thermal conductivity silicon nano-patterned membranes as a thermoelectric materialEurotherm 111: Nanoscale and Microscale Heat Transfer VI, Dec 2018, Levi, Finland
Conference papers
hal-02025459v1
|
|
Phonon heat conduction in phononic crystal membranes18th IEEE International Conference on Nanotechnology, IEEE Nano 2018, Session on “nanophononics”, Jul 2018, Cork, Ireland
Conference papers
hal-01932516v1
|
|
Single mode polymer optical waveguides and out-of-plane coupling structure on a glass substrate7th Electronic System-Integration Technology Conference, ESTC 2018, Sep 2018, Dresden, Germany. ⟨10.1109/ESTC.2018.8546461⟩
Conference papers
hal-01961666v1
|
|
Large-area femtosecond laser ablation of Silicon to create membrane with high performance CMOS-SOI RF functions2018 7th Electronic System-Integration Technology Conference (ESTC), Sep 2018, Dresden, Germany. pp.801-806, ⟨10.1109/ESTC.2018.8546407⟩
Conference papers
hal-02317259v1
|
|
Device for light-matter interaction enhancement in the full THz range for precise spectroscopy of small volume samples2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz 2018), Sep 2018, Nagoya, Japan. paper Tu-POS-05, 1-2, ⟨10.1109/IRMMW-THz.2018.8510508⟩
Conference papers
hal-02317320v1
|
|
Thermal conductivity in Si 2D phononic membranes studied by Raman Thermometry,GDRe Workshop on Thermal Nanosciences and NanoEngineering, Nov 2017, Lille, France
Conference papers
hal-02030916v1
|
|
Heat conduction in 2D phononic structuresWE-Heraeus-Seminar “Heat Transfer and Heat Conduction on the Nanoscale”, Apr 2016, Bad Honnef, Germany
Conference papers
hal-01475329v1
|
|
Thermal conductivity of Si 2D phononic membranes studied by MD simulations and Raman thermometryEurotherm 108: Nanoscale and Microscale Heat Transfer V, Sep 2016, Santorini, Greece
Conference papers
hal-01475281v1
|
|
Comparative thermal characterization of nanophononic membrane strips by Raman thermometry, scanning thermal microscopy, and an electro-thermal methodEurotherm 108: Nanoscale and Microscale Heat Transfer V, Sep 2016, Santorini, Greece
Conference papers
hal-01475299v1
|
|
Improved performance of flexible CMOS technology using ultimate thinning and transfer bonding6th Electronic System-Integration Technology Conference (ESTC), Sep 2016, Grenoble, France. ⟨10.1109/ESTC.2016.7764513⟩
Conference papers
hal-03272693v1
|
|
Considerations on Fermi-depinning, dipoles and oxide tunneling for oxygen-based dielectric insertions in advanced CMOS contactsIEEE Silicon Nanoelectronics Workshop (SNW), Jun 2016, Honolulu, United States. pp.140-141, ⟨10.1109/SNW.2016.7578022⟩
Conference papers
hal-03325002v1
|
|
Metal/insulator/semiconductor contacts for ultimately scaled CMOS nodes: projected benefits and remaining challengesIWJT 2016 - 16th International Workshop on Junction Technology, May 2016, Shanghai, China. pp.14-19
Conference papers
hal-03325000v1
|
|
Ultra-foldable/stretchable wideband RF interconnects using laser ablation of metal film on a flexible substrate45th European Microwave Conference (EuMC), Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345902⟩
Conference papers
hal-03325008v1
|
|
Characterization of flexible CMOS technology tranferred onto a metallic foil2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, Jan 2015, Bologna, Italy. ⟨10.1109/ULIS.2015.7063747⟩
Conference papers
hal-03272691v1
|
|
Application-oriented performance of RF CMOS technologies on flexible substratesIEEE International Electron Devices Meeting (IEDM), Dec 2015, Washington, United States. ⟨10.1109/IEDM.2015.7409707⟩
Conference papers
hal-03272696v1
|
|
Thermal Conductivity Reduction in Fully Suspended and Periodically Patterned Membranes Measured by Electro-Thermal MethodMRS Fall meeting, Symposium II on “Phonons”, Nov 2015, Boston, United States
Conference papers
hal-01464806v1
|
|
Fabrication of integrated micrometer platform for thermoelectric measurements60th Annual IEEE International Electron Devices Meeting (IEDM), Dec 2014, San Francisco, United States. paper 8.5, 8.5.1-8.5.4, ⟨10.1109/IEDM.2014.7047012⟩
Conference papers
hal-03325009v1
|
|
Synthesis and electrical characterisations of a low work function cesium oxide coating for high efficiency thermionic energy converterEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium BB - Materials by design for energy applications through theory and experiment, 2014, Lille, France
Conference papers
hal-00966136v1
|
|
Phononic crystals patterning by e-beam lithography "dots on the fly" methodology for integration into thermoelectric energy converters17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p
Conference papers
hal-01020281v1
|
|
Integrated measurement platform for thermal conductivity measurements in thin-film crystalline silicon and silicon-germaniumEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium BB - Materials by design for energy applications through theory and experiment, 2014, Lille, France
Conference papers
hal-00964577v1
|
|
Silicon thermoelectrics : a non-conventional approach based on thin-film phononic engineeringCMOS Emerging Technologies Research Symposium, 2014, Grenoble, France
Conference papers
hal-00976631v1
|
|
Efficient reduction of thermal conductivity in silicon using phononic-engineered membranesEuropean Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium D - Phonons and fluctuations in low dimensional structures, 2014, Lille, France
Conference papers
hal-00964542v1
|
|
Intégration hétérogène de systèmes communicants CMOS-SOI en gamme millimétriqueDoctoriales Lille Nord de France 2014, 2014, Marcq-en-Baroeul, France
Conference papers
hal-01005696v1
|
|
Nouvelle technologie de contact pour CMOS FD-SOI 10nm et en deçà le contact dipolaire17es Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 4 p
Conference papers
hal-01020275v1
|
|
High performance CMOS with enhanced property of mechanical flexibilityCMOS Emerging Technologies Research Symposium, 2014, Grenoble, France
Conference papers
hal-00976625v1
|
|
Intégration hétérogène de systèmes communicants CMOS-SOI en gamme millimétrique17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 4 p
Conference papers
hal-01020278v1
|
|
Detection of neurotoxic gases by functionalized silicon nanowire field-effect transistorsImagieNano Conference, Security & Defense, NanoSD 2013, 2013, Bilbao, Spain
Conference papers
hal-00811786v1
|
|
Low work function thin film growth for high efficiency thermionic energy converter : coupled Kelvin probe and photoemission study of potassium oxideEuropean Materials Research Society Spring Meeting, E-MRS Spring 2013, Symposium C - Advanced thermoelectrics : from materials to devices, 2013, Strasbourg, France
Conference papers
hal-00819702v1
|
|
[Invited] SOI technologies for high-performance flexible electronicsJoint 7th International Workshop ''Functional Nanomaterials and Devices'' and 2nd Ukrainian-French Seminar ''Semiconductor-on-insulator materials, devices and circuits : physics, technology & diagnostic'', 2013, Kyiv, Ukraine
Conference papers
hal-00819468v1
|
|
Phononic engineering of silicon using dots on the fly 'electron beam lithography and plasma etching'39th International Conference on Micro and Nano Engineering, MNE 2013, 2013, London, United Kingdom
Conference papers
hal-00878809v1
|
|
Extra-low parasitic gate-to-contacts capacitance architecture for sub-14nm transistor nodes9th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2013, 2013, Paris, France
Conference papers
hal-00878810v1
|
|
Self-aligned contacts for 10nm FDSOI node : from device to circuit evaluation39th IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference, IEEE S3S 2013, 2013, Monterey, CA, United States. paper 6a.4, 2 p., ⟨10.1109/S3S.2013.6716549⟩
Conference papers
hal-00955675v1
|
|
|
Carreau: CARrier REsource Access for mUle, DTN applied to hybrid WSN / satellite systemIEEE Vehicular Technology Conference - VTC 2013, Sep 2013, Las Vegas, United States. pp. 1-5
Conference papers
hal-01148365v1
|
Characterization of PtSi nanowires transferred onto organic film38th International Micro & Nano Engineering Conference, MNE 2012, 2012, Toulouse, France
Conference papers
hal-00797774v1
|
|
Radio frequency and low noise characteristics of SOI technology on plastic for flexible electronics8th European Workshop on Silicon on Insulator Technology, Devices and Circuits, EuroSOI 2012, 2012, Montpellier, France. pp.73-78, ⟨10.1016/j.sse.2013.02.049⟩
Conference papers
hal-00797713v1
|
|
High frequency noise potentialities of reported CMOS 65 nm SOI technology on flexible substrate12th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in Rf Systems, SiRF 2012, 2012, Santa Clara, CA, United States. pp.89-92, ⟨10.1109/SiRF.2012.6160147⟩
Conference papers
hal-00801054v1
|
|
Room temperature process for direct writing of nanostructures on plastic38th International Micro & Nano Engineering Conference, MNE 2012, 2012, Toulouse, France
Conference papers
hal-00797783v1
|
|
Electrical nerve agents sensors based on chemically functionalized nanomaterialsNSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012, 2012, Santa Clara, CA, United States. pp.130-132
Conference papers
hal-00801097v1
|
|
Low-frequency noise in Schottky barriers based nanoscale field-effect transistorsMaterials Research Society Spring Meeting, MRS Spring 2012, Symposium D : Nanocontacts - Emerging Materials and Processing for Ohmicity and Rectification, 2012, San Francisco, CA, United States
Conference papers
hal-00797702v1
|
|
TCAD study of the detection mechanisms in silicon nanoribbon-based gas sensors41st European Solid-State Device Research Conference, ESSDERC 2011, 2011, Helsinki, Finland. paper ID 5173, 131-134
Conference papers
hal-00800024v1
|
|
Principe alternatif de conversion thermoélectrique : nouveaux matériaux à faible travail d'extraction14èmes Journées Nationales du Réseau Doctoral de Micro et Nanoélectronique, JNRDM 2011, 2011, Cachan, France. pp.1-4
Conference papers
hal-00806677v1
|
|
Innovative electrical sensors for highly toxic gases based on carbon nanotubes and silicon nanowiresMaterials Research Society Fall Meeting, MRS Fall 2011, Symposium BB : Semiconductor nanowires for photovoltaics, 2011, Boston, MA, United States
Conference papers
hal-00807191v1
|
|
Fabrication and electrical characterization of dense vertical Si nanowires arraysEuropean Materials Research Society Spring Meeting, E-MRS Spring 2010, Symposium P : Science and technology of nanotubes, nanowires and graphene, 2010, Strasbourg, France
Conference papers
hal-00574100v1
|
|
Synthesis and characterization of crystalline silicon ribbons on insulator using catalytic Vapor-Liquid-Solid growth inside a cavity6th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2010, 2010, France. pp.99-100
Conference papers
hal-00549974v1
|
|
Report hétérogène de dispositifs et circuits CMOS RF sur substrat souple13èmes Journées Nationales du Réseau Doctoral en Microélectronique, JNRDM 2010, 2010, France. pp.CD-ROM, Session Systèmes hautes fréquences, 1-4
Conference papers
hal-00573208v1
|
|
Backgate bias and stress level impact on giant piezoresistance effect in thin silicon films and nanowires23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, 2010, China. pp.464-467, ⟨10.1109/MEMSYS.2010.5442464⟩
Conference papers
hal-00549973v1
|
|
Metallic source/drain for advanced MOS architectures : from material engineering to device integrationSINANO-NANOSIL Workshop, Silicon-based CMOS and Beyond-CMOS Nanodevices, 2009, Athens, Greece
Conference papers
hal-00575267v1
|
|
A conceptual agent-based model to explore biases in a role playing game outcomes, "Learn to game, game to learn"40. Annual Conference of the International Simulation And Gaming Association, ISAGA 2009, International Simulation And Gaming Association (ISAGA). Delft, NLD., Jun 2009, Singapour, Singapore. 10 p
Conference papers
hal-02824111v1
|
|
Metallic source/drain architecture for advanced MOS technology : an overview of METAMOS results8th Symposium Diagnostics & Yield : Advanced Silicon Devices and Technologies for ULSI Era, 2009, Warsaw, Poland
Conference papers
hal-00575696v1
|
|
Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures35th International Conference on Micro & Nano Engineering, MNE 2009, 2009, Ghent, Belgium
Conference papers
hal-00575272v1
|
|
NANOSIL Network of Excellence : silicon-based nanostructures and nanodevices for long-term nanoelectronics applicationsEuropean Materials Research Society Spring Meeting, E-MRS Spring 2008, Symposium I : Front-end junction and contact formation in future Silicon/Germanium based devices, 2008, Strasbourg, France
Conference papers
hal-00361546v1
|
|
Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/SiO2/Si structureEuropean Materials Research Society Spring Meeting, E-MRS Spring 2008, Symposium I : Front-end junction and contact formation in future Silicon/Germanium based devices, 2008, Strasbourg, France
Conference papers
hal-00361547v1
|
|
Investigation on the platinum silicide Schottky barrier height modulation using a dopant segregation approachMaterials Research Society Spring Meeting, MRS Spring 2008, Symposium E : Doping Engineering for Front-End Processing, 2008, United States. pp.85-90
Conference papers
hal-00360805v1
|
|
NANOSIL Network of Excellence: Silicon-based nanostructures and nanodevices for long-term nanoelectronics applicationsEuropean Materials Research Society (E-MRS 2008), Symposium, May 2008, Strasbourg, France
Conference papers
hal-00391849v1
|
|
Recent advances in metallic source/drain MOSFETs8th International Workshop on Junction Technology, IWJT'08, 2008, Shanghai, China. pp.139-144, ⟨10.1109/IWJT.2008.4540035⟩
Conference papers
hal-00800974v1
|
|
Transmission electron microscopy study of erbium silicide formation from Ti/Er stack for Schottky contact applicationsXIII International Conference on Electron Microscopy, EM'2008, 2008, Cracow-Zakopane, Poland
Conference papers
hal-00361544v1
|
|
Localized and oriented catalytic growth of crystalline silicon nanoribbonsJournées Nationales sur les Technologies Emergentes en Micro-nanofabrication, JNTE 08, 2008, Toulouse, France
Conference papers
hal-00361549v1
|
|
Investigation of the ytterbium silicide as low Schottky barrier source/drain contact material for n-type MOSFETJournées Nationales sur les Technologies Emergentes en Micro-nanofabrication, JNTE 08, 2008, Toulouse, France
Conference papers
hal-00361550v1
|
|
Selective etching of implanted silicon dioxide in hydrofluoric acid34th International Conference on Micro and Nano Engineering, MNE 2008, 2008, Athens, Greece
Conference papers
hal-00361548v1
|
|
Impact of channel doping on Schottky barrier height and investigation on p-SB MOSFETs performanceEuropean Materials Research Society Spring Meeting, E-MRS Spring 2008, Symposium I : Front-end junction and contact formation in future Silicon/Germanium based devices, 2008, _, France
Conference papers
hal-00361543v1
|
|
Electron microscopy of silicides formation in Schottky barrier contacts to electronic devicesXIII International Conference on Electron Microscopy, EM'2008, 2008, Cracow-Zakopane, Poland
Conference papers
hal-00361545v1
|
|
Confined and guided catalytic growth of crystalline silicon films on a dielectric substrateESS-Fringe Poster Session of 2008 European Solid-State Device Research Conference, ESSDERC 2008, 2008, Edinburgh, Scotland, United Kingdom
Conference papers
hal-00361551v1
|
|
Dual silicide integration of low Schottky-barrier source-drain in a spacer-first damascene-metal-gate FinFET architectureProceedings of the 12th Silicon Nanoelectronics Workshop, SNW 2007, 2007, Kyoto, Japan
Conference papers
hal-00367364v1
|
|
An original selective etch of Pt vs PtSi using a low temperature germanidation processProceedings of the 211th Electrochemical Society Meeting, 2007, Chicago, IL, United States
Conference papers
hal-00367361v1
|
|
Erbium silicide formation under ultra high vacuumProceedings of the 16th European Workshop on Materials for Advanced Metallization, MAM 2007, 2007, Bruges, Belgium
Conference papers
hal-00367362v1
|
|
Investigations of high frequency performance of Schottky-barrier MOSFETs7th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2007, 2007, United States. pp.32-35, ⟨10.1109/SMIC.2007.322762⟩
Conference papers
hal-00284381v1
|
|
High frequency figures of merit of conventional and Schottky barrier MOSFETs4th International Symposium on System Construction of Global-Network-Oriented Information Electronics, 2007, Sendai, Japan. pp.412-417
Conference papers
hal-00286235v1
|
|
Metallic source/drain architecture : status and prospectsSINANO-ESSDERC Workshop, 2007, Munich, Germany
Conference papers
hal-00367349v1
|
|
Low temperature implementation of dopant-segregated band-edge metallic S/D junctions in thin-body SOI p-MOSFETsIEEE International Electron Devices Meeting, IEDM 2007, 2007, United States. pp.147-150, ⟨10.1109/IEDM.2007.4418886⟩
Conference papers
hal-00284387v1
|
|
Impact of n-type channel implantation on performance of p-type Schottky barrier MOSFETsProceedings of the 12th Silicon Nanoelectronics Workshop, SNW 2007, 2007, Kyoto, Japan
Conference papers
hal-00367365v1
|
|
TEM study of the silicidation process in Pt/Si and Ir/Si structuresProceedings of the 15th International Conference on Microscopy of Semiconducting Materials, MSMXV, 2007, Cambridge, United Kingdom
Conference papers
hal-00367363v1
|
|
Iridium silicide : a promising electrode for metallic source/drain in decananometer MOSFETs2006, pp.123
Conference papers
hal-00138682v1
|
|
Room temperature single-electron operation and fabrication of downscaled self-aligned single-dot memory devicesMaterials Research Society Spring Meeting, MRS Spring 2006, 2006, San Francisco, CA, United States
Conference papers
hal-00244026v1
|
|
TEM study of PtSi contact layers for accumulated low Schottky barrier MOSFET2006, pp.U/PI.24
Conference papers
hal-00138674v1
|
|
Integration and performance of Schottky junction SOI devices6th International Workshop on Junction Technology, IWJT-2006, 2006, Shanghai, China
Conference papers
hal-00138707v1
|
|
Large optimisation of source/drain architecture in double gate CMOS using combined static and transient analysisMaterials Research Society Spring Meeting, MRS Spring 2006, Transistor Scaling - Methods, Materials, and Modeling, 2006, Moscone West, San-Franscico, CA, United States
Conference papers
hal-00138694v1
|
|
High current drive in ultra-short impact ionization MOS (I-MOS) devices2006, paper 6.2
Conference papers
hal-00138690v1
|
|
40 nm PtSi-based Schottky-barrier p-MOSFETs with a midgap tungsten gate7th Symposium Diagnostics & Yield Advanced Silicon Devices and Technologies for ULSI Era, 2006, Warsaw, Poland
Conference papers
hal-00138697v1
|
|
Influence of gate offset spacer width on SOI MOSFETs HF properties2006, pp.77-80
Conference papers
hal-00126800v1
|
|
Fabrication and analysis of CMOS fully-compatible high conductance impact-ionization MOS (I-MOS) transistors2006, pp.299-302
Conference papers
hal-00138680v1
|
|
Self-aligned single-electron memories SASEM project (IST-2001-32674)15th NID Workshop - Plenary Meeting, 2005, Madrid, Spain
Conference papers
hal-00138410v1
|
|
Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrateProceedings of the XII International Conference on Electron Microscopy of Solids, EM'2005, 2005, Kazimierz Dolny, Poland
Conference papers
hal-00139246v1
|
|
Impact of large angle tilt implantation on the threshold voltages of LDMOS transistor on SOI2005, pp.D-VI.08
Conference papers
hal-00138400v1
|
|
TEM characterisation of accumulation low Schottky barrier MOSFET with PtSi contactsSchool on Materials Science and Electron Microscopy, Microscopy of Tomorrow's Industrial Materials, 2005, Berlin, Germany
Conference papers
hal-00138408v1
|
|
Schottky-barrier source-drain architecture for ultimate CMOSSINANO Workshop, 2005, Grenoble, France
Conference papers
hal-00138409v1
|
|
An optimal high contrast e-beam lithography process for the patterning of dense fin networks2005, pp.A/PII.01
Conference papers
hal-00138401v1
|
|
Optimisation of HSQ e-beam lithography for the patterning of FinFET transistors2005, pp.9C01
Conference papers
hal-00138404v1
|
|
Transformation of hydrogen silsexquioxane properties with RIE plasma treatment for advanced multiple-gate MOSFETs2005, pp.P-P.15
Conference papers
hal-00138399v1
|
|
Recent advances in metallic source-drain engineeringSINANO Workshop, 2005, Grenoble, France
Conference papers
hal-00138411v1
|
|
|
Optimisation and Simulation of an Alternative nano-flash Memory: the SASEM deviceMaterials Research Society Fall Meeting, Nov 2004, Boston, United States. pp.D1.6.1
Conference papers
hal-00603411v1
|
Optimisation and simulation of an alternative nano-flash memory : the SASEM device2004, pp.45-50
Conference papers
hal-00140991v1
|
|
Transistor MOSFET Schottky en régime nanométriqueJournées Nationales Nanoélectronique, 2004, Aussois, France
Conference papers
hal-00140994v1
|
|
Transmission electron microscopy of silicides used in ALSB-SOI MOSFET structure2004, pp.479-482
Conference papers
hal-00147750v1
|
|
Advanced and nanometric MOSFET architecture, multiple gate devices and Pi gatesMIGAS International Summer School on Advanced Microelectronics, MIGAS'04, 2004, Autrans, France
Conference papers
hal-00140995v1
|
|
Intégration de source/drain Schottky en technologie MOS décananométriqueJournée Club EEA : Electronique des Dispositifs Ultimes et Innovants, 2004, Fuveau, France
Conference papers
hal-00141009v1
|
|
Simulation et optimisation d'une mémoire flash nanométriqueJournées Nationales Nanoélectronique, 2004, Aussois, France
Conference papers
hal-00140993v1
|
|
FinFET achievement : optimum e-beam lithography to etch dense silicon fins networksMIGAS International Summer School on Advanced Microelectronics, MIGAS'04, 2004, Autrans, France
Conference papers
hal-00140996v1
|
|
Integration of Schottky source/drain in advanced MOS technology : the SODAMOS project13th Melari/NID Workshop, 2004, Athens, Greece
Conference papers
hal-00141008v1
|
|
Transmission Electron Microscopy analysis of MOSFET structuresSchool on Materials Science and Electron Microscopy, Emerging Microscopy for Advanced Materials Development-Imaging and Spectroscopy on Atomic Scale, 2004, Berlin, Germany
Conference papers
hal-00140997v1
|
|
Electron microscopy analysis of MOSFET structuresIEEE 6th Symposium Diagnostics and Yield 2003, Jun 2003, Warsaw, Poland. pp.67-70
Conference papers
hal-00146402v1
|
|
New Schottky source/drain architecturesWorkshop Micro et Nanoélectronique, 2003, Crolles, France
Conference papers
hal-00146417v1
|
|
Performance of Pt-based low Schottky barrier silicide contacts on weakly doped silicon2003, pp.D791-D796
Conference papers
hal-00146405v1
|
|
Transmission electron microscopy analysis of silicides used in ALSB-SOI MOSFET structuresConference on Microscopy of Semiconducting Materials, Mar 2003, Cambridge, United Kingdom. pp.479-482, ⟨10.1201/9781351074636-110⟩
Conference papers
hal-00250182v1
|
|
Very low Schottky barrier to n-type silicon with PtEr-stack silicide2003, pp.99-104
Conference papers
hal-00146416v1
|
|
Transmission electron microscopy of iridium silicide contacts for advanced MOSFET structures with Schottky source and drainEuropean Materials Research Society Fall Meeting, 2003, Warsaw, Poland
Conference papers
hal-00146424v1
|
|
Advanced source/drain architecture using very low Schottky barriers : device design and material engineering2001, pp.203-206
Conference papers
hal-00152202v1
|
|
Low Schottky barrier source/drain for advanced MOS architectureFranco-Swedish Workshop on SOI, 2001, Grenoble, France
Conference papers
hal-00152239v1
|
|
Power LDMOS design using an SOI RESURF architecture : on state / breakdown voltage trade-offFranco-Swedish Workshop on SOI, 2001, Grenoble, France
Conference papers
hal-00152238v1
|
|
Low Schottky barrier source/drain for advanced MOS architecture : device, design and material consideration2001, pp.53-56
Conference papers
hal-00152233v1
|
|
Silicon nanoelectronicsMicro and Nano Workshop, 2001, Louvain La Neuve, Belgium
Conference papers
hal-00152236v1
|
|
Mémoires électroniques du futur : évolution de la microélectronique siliciumFête de la Science, 2000, Lille, France
Conference papers
hal-00158535v1
|
|
Intégration silicium à l'IEMN : de l'architecture de composants aux circuits radiofréquencesJournée Thématique de l'ANRT sur l'Intégration, 2000, Paris, France
Conference papers
hal-00158505v1
|
Nanometer-scale active thermal devices for thermal microscopy probe calibration16èmes Journées de La Matière Condensée (JMC2018), Aug 2018, Grenoble, France. pp.513-513
Conference poster
hal-02023911v1
|
Microscopy of Semiconducting Materials 2003A. G. Cullis, P. A. Midgley. CRC Press, 4 p., 2018, 9781351074636. ⟨10.1201/9781351074636⟩
Books
hal-03555261v1
|
Schottky source/drain MOSFETsDeleonibus S. Intelligent integrated systems : technologies, devices and architectures, Pan Stanford Publishing, section 1, chapter 2, 55-96, 2013, 978-9-8144-1142-4
Book sections
hal-00878461v1
|
|
Confined and guided vapor-liquid-solid catalytic growth of silicon nanoribbons : from nanowires to structured silicon-on-insulator layersNazarov A., Colinge J.P., Balestra F., Raskin J.P., Gamiz F., Lysenko V.S. Semiconductor-on-insulator materials for nanoelectronics applications, Springer Berlin Heidelberg, pp.Part 1, 67-89, 2011, Collection : Chemistry and materials science, Series : Engineering materials, ⟨10.1007/978-3-642-15868-1_4⟩
Book sections
hal-00591734v1
|
|
Introduction to Schottky-barrier MOS architectures : concept, challenges, material engineering and device integrationBalestra F. Nanoscale CMOS : innovative materials, modeling and characterization, ISTE-WILEY, Chapitre 5, 157-204, 2010
Book sections
hal-00575852v1
|
|
Les nanotechnologiesEncyclopédie KLEIO, Larousse-Havas, pp.CD-ROM, 2001
Book sections
hal-00132071v1
|
Convertisseur d'énergie à effet tunnelN° de brevet: FR2985851 (A1) 2013-07-19. 2013
Patents
hal-00847262v1
|
|
Procédé de fabrication de transistors MOSFET complémentaires de type P et N, et dispositif électronique comprenant de tels transistors, et processeur comprenant au moins un tel dispositifN° de brevet: FR2930073 (A1). 2009
Patents
hal-00426616v1
|
|
Réalisation d'un transistor à effet de champN° de brevet: FR2905800 (A1). 2008
Patents
hal-00372049v1
|
|
Transistor MOS pour circuits à haute densité d'intégrationN° de brevet: FR2805395 (A1). 2001
Patents
hal-00372674v1
|
Contributions à la modélisation et à la fabrication de dispositifs silicium avancée2005
Other publications
hal-00138412v1
|
|
Mitigation of substrate coupling effects in RF switch by localized substrate removal using laser processing2021
Preprints, Working Papers, ...
hal-03350081v1
|