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Emmanuel Dubois

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***Emmanuel Dubois*** graduated as an engineer from the Institut Supérieur d’Electronique et du Numérique (ISEN), Lille, France, in 1985 and received the Ph.D. degree from the University of Lille in 1990. He was awarded the IBM Prize for High-Performance Computing in 1990 for his work on parallelizing the IMPACT3 in-house simulation code for transport in semiconductors. In 1992, he was a visiting scientist at the IBM T.J. Watson Research Centre, Yorktown Heights, working on characterization and simulation of submicron SOI-MOSFETs. In 1993, he joined the Institut d’Electronique de Microélectronique et de Nanotechnologie (IEMN UMR 8520) where he is currently Director of Research at the Centre National de la Recherche Scientifique, CNRS. He was coordinator of three European Projects focused on near-field-based lithography and Schottky source-drain MOS technologies (FP4-IST-QUEST, FP5-IST-SODAMOS, FP6-IST-METAMOS) and was involved as workpackage/task leader in a series of European projects devoted to ultimate MOS architectures (FP5 SASEM, FP6 SiNANO NoE, FP7 NANOSIL NoE, FP6 NANOCMOS IP, FP6 PULLNANO IP). From 2005 to 2016, he was on the Technical Program Committee of ESSDERC and was TPC member of the VSLI Symposium on Technology (2018-2019-2020). Until 2017, he participated to the nanoelectronics committee of the French Observatory on Micro and Nano Technologies (OMNT). He is currently heading the STMicroelectronics-IEMN Joint Laboratory and coordinates the PIA-EQUIPEX project LEAF on advanced laser-based microfabrication for System Moore integration. His research interests cover advanced source/drain CMOS technology, RF and mmW CMOS/BiCMOS, non-conventional thermal energy harvesting, laser micromachining and functional packaging of compact RF/mmW/photonics subsystems. **Thèmes de recherche** **1991-2001: Simulation et modélisation de dispositifs semiconducteurs** - Développement de code de simulation du transport dans les semiconducteurs (dérive-diffusion, Monte Carlo) - Optimisation de technologie MOS, bipolaire BiCMOS **1997-2001: Nanotechnologies basées sur la microscopie champ proche** - Modélisation de l’oxydation anodique locale assistée par STM/AFM - Application à la nanolithographie en champ proche **2000-2016: Architecture, technologie et fabrication de nano-transistors** - Architectures Source/Drain Schottky en technologie MOS avancée : siliciures à faibles barrières, modélisation, intégration de composants DC et RF - Cellule mémoire à quelques électrons : auto-alignement du point flottant de stockage de charge - Architecture MOS-FinFET : procédé technologique spacers-first contournant les limitations de gravure 3D - Transistors MOS sur film mince cristallin obtenus par croissance catalytique VLS - Transistors à nanofils pour des applications de capteurs chimiques ultra-sensibles **2010 → : Principes et technologie de conversion thermoélectrique non conventionnels** - Structuration phononique pour la réduction de conductivité thermique du silicium - Micro-convertisseur thermoélectrique en membrane planaire de silicium **2010 → : Packaging fonctionnel des systèmes intégrés** - Microstructuration laser en régime femtoseconde (projet EQUIPEX LEAF) - Electronique CMOS RF/mmW mécaniquement flexible hautes performances - Performances RF augmentées par micro-usinage localisée du substrat - Interposeur électro-optique pour communication haut-débit 400Gb/s - Packaging de fonctions mmW : guide d’onde et source de bruit amplifiée en bande G - Packaging de sondes actives intégrées en bande millimétrique - Microcavités pour composants RF-CMOS sur SOI ultra-rapides pour applications 5G et au-delà

Publications

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Design and fabrication of nanometer measurement platform for better understanding of silicon mechanical properties

Maciej Haras , Jean-François Robillard , Thomas Skotnicki , Emmanuel Dubois
Journal of Applied Physics, 2023, 134 (2), pp.024305. ⟨10.1063/5.0152192⟩
Journal articles hal-04165436v1
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A G-band Packaged Amplified Noise Source using SiGe BiCMOS 55 nm Technology

Victor Fiorese , Joao Carlos Azevedo Goncalves , Simon Bouvot , Sylvie Lepilliet , Daniel Gloria
IEEE Transactions on Microwave Theory and Techniques, In press, ⟨10.1109/TMTT.2023.3311476⟩
Journal articles hal-04192337v1
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Analysis of Airgaps for Off State Capacitance Reduction in SOI CMOS RF Switches

Daniel Gheysens , Alain Fleury , Stephane Monfray , Frederic Gianesello , Philippe Cathelin
IEEE Transactions on Electron Devices, inPress, ⟨10.1109/TED.2023.3311415⟩
Journal articles hal-04192324v1
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Substrate-Induced Dissipative and Non-Linear Effects in RF Switches: Probing Ultimate Performance Based on Laser-Machined Membrane Suspension

Arun Bhaskar , Justine Philippe , Etienne Okada , Flavie Braud , J.F. Robillard
Electronics, 2022, 11 (15), pp.2333. ⟨10.3390/electronics11152333⟩
Journal articles hal-03739747v1
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A CMOS Compatible Thermoelectric Device made of Crystalline Silicon Membranes with Nanopores

Thierno-Moussa Bah , Stanislav Didenko , Di Zhou , Tianqi Zhu , Hafsa Ikzibane
Nanotechnology, 2022, 33 (50), pp.505403. ⟨10.1088/1361-6528/ac8d12⟩
Journal articles hal-03766399v1
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Heat dissipation in partially perforated phononic nano-membranes with periodicities below 100 nm

Antonin Massoud , Valeria Lacatena , Maciej Haras , Emmanuel Dubois , Stéphane Monfray
APL Materials, 2022, 10 (5), pp.051113. ⟨10.1063/5.0091539⟩
Journal articles hal-03682509v1
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The good, the bad and the ugly polishing: Effect of abrasive size on standardless EDS analysis of Portland cement clinker’s calcium silicates

Vincent Thiéry , Emmanuel Dubois , Séverine Bellayer
Micron, 2022, 158, pp.103266. ⟨10.1016/j.micron.2022.103266⟩
Journal articles hal-03662917v1
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Large-area femtosecond laser milling of silicon employing trench analysis

Arun Bhaskar , Justine Philippe , Flavie Braud , Etienne Okada , Vanessa Avramovic
Optics and Laser Technology, 2021, 138, pp.106866. ⟨10.1016/j.optlastec.2020.106866⟩
Journal articles hal-03091197v1

Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform

Stephane Monfray , Sébastien Cremer , Nathalie Vulliet , Emmanuel Dubois , Florian Domengie
Proceedings of SPIE, the International Society for Optical Engineering, 2020, pp.2. ⟨10.1117/12.2554725⟩
Journal articles hal-04249322v1
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Substrate engineering of inductors on SOI for improvement of Q-factor and application in LNA

Arun Bhaskar , Justine Philippe , Vanessa Avramovic , Flavie Braud , J.F. Robillard
IEEE Journal of the Electron Devices Society, 2020, 8, pp.959-969. ⟨10.1109/JEDS.2020.3019884⟩
Journal articles hal-03091190v1

Femtosecond laser micromachining of crystalline silicon for ablation of deep macro-sized cavities for silicon-on-insulator applications

Arun Bhaskar , Justine Philippe , Flavie Braud , Etienne Okada , Jean-François Robillard
Proceedings of SPIE, the International Society for Optical Engineering, 2019, pp.20. ⟨10.1117/12.2507652⟩
Journal articles hal-04249332v1
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Thermal analysis of ultimately-thinned-and-transfer-bonded CMOS on mechanically flexible foils

Justine Philippe , Arun Bhaskar , Etienne Okada , Flavie Braud , J.F. Robillard
IEEE Journal of the Electron Devices Society, 2019, 7, pp.973-978. ⟨10.1109/JEDS.2019.2939884⟩
Journal articles hal-02317229v1
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Broadband terahertz light-matter interaction enhancement for precise spectroscopy of thin films and micro-samples

Romain Peretti , Flavie Braud , Emilien Peytavit , Emmanuel Dubois , Jean-Francois Lampin
Photonics, 2018, 5 (2), pp.11. ⟨10.3390/photonics5020011⟩
Journal articles hal-02317238v1
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Cost effective laser structuration of optical waveguides on thin glass interposer

Jean-Marc Boucaud , Folly-Eli Ayi-Yovo , Quentin Hivin , Matthieu Berthomé , Cédric Durand
Journal of Lightwave Technology, 2017, 35 (20), pp.4445-4450. ⟨10.1109/JLT.2017.2732461⟩
Journal articles hal-01961118v1

Ultra-thin dielectric insertions for contact resistivity lowering in advanced CMOS: Promises and challenges

Julien Borrel , Louis Hutin , Donato Kava , Rémy Gassilloud , Nicolas Bernier
Japanese Journal of Applied Physics, 2017, 56 (4), 04CB02, 7 p. ⟨10.7567/JJAP.56.04CB02⟩
Journal articles hal-03325004v1
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Oxidation-assisted graphene heteroepitaxy on copper foil

Nicolas Reckinger , Xiaohui Tang , Frederic Joucken , Luc Lajaunie , Raul Arenal
Nanoscale, 2016, 8 (44), pp.18751-18759. ⟨10.1039/c6nr02936a⟩
Journal articles hal-03325005v1
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Modeling of Fermi-level pinning alleviation with MIS contacts: n and pMOSFETs cointegration considerations-Part I

Julien Borrel , Louis Hutin , Olivier Rozeau , Marie-Anne Jaud , Sebastien Martinie
IEEE Transactions on Electron Devices, 2016, 63 (9), pp.3413-3418. ⟨10.1109/TED.2016.2590836⟩
Journal articles hal-03325007v1
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Fabrication of thin-film silicon membranes with phononic crystals for thermal conductivity measurements

Maciej Haras , Valeria Lacatena , Thierno-Moussa Bah , Stanislav Didenko , J.F. Robillard
IEEE Electron Device Letters, 2016, 37 (10), pp.1358-1361. ⟨10.1109/LED.2016.2600590⟩
Journal articles hal-03276234v1
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Physical study by surface characterizations of sarin sensor on the basis of chemically functionalized silicon nanoribbon field effect transistor

K. Smaali , David Guérin , V. Passi , L. Ordronneau , A. Carella
Journal of Physical Chemistry C, 2016, 120 (20), pp.11180-11191. ⟨10.1021/acs.jpcc.6b00336⟩
Journal articles hal-03325001v1
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Synthesis and characterization of low work function alkali oxide thin films for unconventional thermionic energy converters

Valentina Giorgis , François Morini , Tianqi Zhu , J.F. Robillard , X. Wallart
Journal of Applied Physics, 2016, 120 (20), pp.205108. ⟨10.1063/1.4968532⟩
Journal articles hal-03276235v1

Modeling of Fermi-level pinning alleviation with MIS contacts: n and pMOSFETs cointegration considerations-Part II

Julien Borrel , Louis Hutin , Olivier Rozeau , Marie-Anne Jaud , Sebastien Martinie
IEEE Transactions on Electron Devices, 2016, 63 (9), pp.3419-3423. ⟨10.1109/TED.2016.2590826⟩
Journal articles hal-03325006v1
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Thermoelectric energy conversion: How good can silicon be?

Maciej Haras , Valeria Lacatena , François Morini , J.F. Robillard , Stephane Monfray
Materials Letters, 2015, 157, pp.193-196. ⟨10.1016/j.matlet.2015.05.012⟩
Journal articles hal-03325003v1
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Toward quantitative modeling of silicon phononic thermocrystals

V. Lacatena , M. Haras , J.F. Robillard , S. Monfray , T. Skotnicki
Applied Physics Letters, 2015, 106 (11), 114104, 4 p. ⟨10.1063/1.4915619⟩
Journal articles hal-03324999v1

Extra-low parasitic gate-to-contacts capacitance architecture for sub-14 nm transistor nodes

Heimanu Niebojewski , C. Le Royer , Y. Morand , O. Rozeau , M.A. Jaud
Solid-State Electronics, 2014, 97, pp.45-51. ⟨10.1016/j.sse.2014.04.028⟩
Journal articles hal-01000014v1

Phononic engineering of silicon using "dots on the fly" e-beam lithography and plasma etching

Valeria Lacatena , Maciej Haras , J.F. Robillard , Stéphane Monfray , Thomas Skotnicki
Microelectronic Engineering, 2014, 121, pp.131-134. ⟨10.1016/j.mee.2014.04.034⟩
Journal articles hal-00994777v1
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Unconventional thin-film thermoelectric converters : structure, simulation, and comparative study

Maciej Haras , Valeria Lacatena , Stéphane Monfray , J.F. Robillard , Thomas Skotnicki
Journal of Electronic Materials, 2014, 43, pp.2109-2114. ⟨10.1007/s11664-014-2982-z⟩
Journal articles hal-00994781v1
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Low work function thin film growth for high efficiency thermionic energy converter : coupled Kelvin probe and photoemission study of potassium oxide

François Morini , Emmanuel Dubois , J.F. Robillard , Stéphane Monfray , Thomas Skotnicki
physica status solidi (a), 2014, 211 (6), pp.1334-1337. ⟨10.1002/pssa.201300136⟩
Journal articles hal-01005619v1

Design guidelines for releasing silicon nanowire arrays by liquid and vapor phase hydrofluoric acid

V. Passi , Emmanuel Dubois , Aurélie Lecestre , A. Sanchez-Linde , B. Du Bois
Microelectronic Engineering, 2013, 103, pp.57-65. ⟨10.1016/j.mee.2012.09.002⟩
Journal articles hal-00795975v1
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Radio-frequency and low noise characteristics of SOI technology on plastic for flexible electronics

A. Lecavelier Des Etangs-Levallois , Marie Lesecq , Francois Danneville , Y. Tagro , Sylvie Lepilliet
Solid-State Electronics, 2013, 90, pp.73-78. ⟨10.1016/j.sse.2013.02.049⟩
Journal articles hal-00914203v1
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A converging route towards very high frequency, mechanically flexible, and performance stable integrated electronics

A. Lecavelier Des Etangs-Levallois , Z. K. Chen , Marie Lesecq , Sylvie Lepilliet , Y. Tagro
Journal of Applied Physics, 2013, 113 (15), pp.153701. ⟨10.1063/1.4801803⟩
Journal articles hal-00819466v1

Schottky barrier height reduction using strained silicon-on-insulator and dopant segregation

F. Ravaux , Emmanuel Dubois , Z.K. Chen
Microelectronic Engineering, 2012, 98, pp.391-394. ⟨10.1016/j.mee.2012.05.045⟩
Journal articles hal-00790413v1

Comparative study of erbium disilicide thin films grown in situ under ultrahigh vacuum or ex situ with a capping layer

N. Reckinger , C.A. Dutu , Xing Tang , Emmanuel Dubois , Dmitri Yarekha
Thin Solid Films, 2012, 520, pp.4501-4505. ⟨10.1016/j.tsf.2012.02.076⟩
Journal articles hal-00787381v1
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Anisotropic Vapor HF etching of silicon dioxide for Si microstructure release

Vikram Passi , Ulf Sodervall , Bengt Nilsson , Goran Petersson , Mats Hagberg
Microelectronic Engineering, 2012, 95, pp.83-89. ⟨10.1016/j.mee.2012.01.005⟩
Journal articles hal-00643499v1

Ta/TiN midgap full-metal single gate fabrication using combined chlorine-based plasma and highly selective chemical metal etching for decananometer CMOS technology

Z.K. Chen , Emmanuel Dubois , F. Ravaux , Francois Danneville
Microelectronic Engineering, 2012, 97, pp.280-284. ⟨10.1016/j.mee.2012.04.035⟩
Journal articles hal-00790412v1

Carrier injection at silicide/silicon interfaces in nanowire based-nanocontacts

X.-L. Han , Guilhem Larrieu , Emmanuel Dubois , Fuccio Cristiano
Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2012, 606 (9-10), pp.836 - 839. ⟨10.1016/j.susc.2012.01.021⟩
Journal articles hal-01921880v1

Low-frequency noise in Schottky-barrier-based nanoscale field-effect transistors

N. Clement , G. Larrieu , Emmanuel Dubois
IEEE Transactions on Electron Devices, 2012, 59, pp.180-187. ⟨10.1109/TED.2011.2169676⟩
Journal articles hal-00787365v1
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High Gain and Fast Detection of Warfare Agents Using Back-Gated Silicon-Nanowired MOSFETs

Vikram Passi , Florent Ravaux , Emmanuel Dubois , Simon Clavaguera , Alexandre Carella
IEEE Electron Device Letters, 2011, 32, pp.1-3. ⟨10.1109/LED.2011.2146750⟩
Journal articles cea-01344105v1
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Erbium silicide growth in the presence of residual oxygen

N. Reckinger , Xing Tang , S. Godey , Emmanuel Dubois , A. Laszcz
Journal of The Electrochemical Society, 2011, 158, pp.H715-H723. ⟨10.1149/1.3585777⟩
Journal articles hal-00597075v1

New chemically functionalized nanomaterials for electrical nerve agents sensors

J.P. Simonato , S. Clavaguera , A. Carella , M. Delalande , N. Raoul
Journal of Physics: Conference Series, 2011, 307, pp.012008-1-5. ⟨10.1088/1742-6596/307/1/012008⟩
Journal articles hal-00795903v1
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Very low effective Schottky barrier height for erbium disilicide contacts on n-Si through arsenic segregation

N. Reckinger , C. Poleunis , Emmanuel Dubois , C.A. Dutu , X.H. Tang
Applied Physics Letters, 2011, 99 (1), pp.012110. ⟨10.1063/1.3608159⟩
Journal articles hal-00639859v1
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Low temperature tunneling current enhancement in silicide/Si Schottky contacts with nanoscale barrier width

N. Reckinger , Xing Tang , Emmanuel Dubois , G. Larrieu , D. Flandre
Applied Physics Letters, 2011, 98 (11), pp.1121021. ⟨10.1063/1.3567546⟩
Journal articles hal-00579075v1

TEM studies of PtSi low Schottky-barrier contacts for source/drain in MOS transistors

A. Laszcz , J. Ratajczak , A. Czerwinski , J. Katcki , N. Breil
Central European Journal of Physics, 2011, 9, pp.423-427. ⟨10.2478/s11534-010-0135-4⟩
Journal articles hal-00574499v1
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Energy-band engineering for improved charge retention in fully self-aligned double floating-gate single-electron memories

Xiaohui Tang , Christophe Krzeminski , Aurelien Lecavelier Des Etangs-Levallois , Zhenkun Chen , Emmanuel Dubois
Nano Letters, 2011, 11, pp.4520-4526. ⟨10.1021/nl202434k⟩
Journal articles hal-00640212v1

150-GHz RF SOI-CMOS technology in ultrathin regime on organic substrate

A. Lecavelier Des Etangs-Levallois , Emmanuel Dubois , Marie Lesecq , Francois Danneville , L. Poulain
IEEE Electron Device Letters, 2011, 32, pp.1510-1512. ⟨10.1109/LED.2011.2166241⟩
Journal articles hal-00639864v1

Functionalization of silicon nanowires for specific sensing

V. Passi , Emmanuel Dubois , C. Celle , S. Clavaguera , J.P. Simonato
ECS Transactions, 2011, 35, pp.313-318. ⟨10.1149/1.3570811⟩
Journal articles hal-00591351v1

Realization of ultra dense arrays of vertical silicon NWs with defect free surface and perfect anisotropy using a top-down approach

X.L. Han , G. Larrieu , Pier-Francesco Fazzini , Emmanuel Dubois
Microelectronic Engineering, 2011, 88, pp.2622-2624. ⟨10.1016/j.mee.2010.12.102⟩
Journal articles hal-00795901v1

CMOS integration using low thermal budget dopant-segregated metallic S/D junctions on thin-body SOI

G. Larrieu , Emmanuel Dubois , D. Ducatteau
ECS Transactions, 2011, 41, pp.275-282. ⟨10.1149/1.3633307⟩
Journal articles hal-00795902v1

CMOS inverter based on Schottky source-drain MOS technology with low-temperature dopant segregation

G. Larrieu , Emmanuel Dubois
IEEE Electron Device Letters, 2011, 32, pp.728-730. ⟨10.1109/LED.2011.2131111⟩
Journal articles hal-00603004v1

Confined VLS growth and structural characterization of silicon nanoribbons

Aurélie Lecestre , Emmanuel Dubois , A. Villaret , T. Skotnicki , P. Coronel
Microelectronic Engineering, 2010, 87, pp.1522-1526. ⟨10.1016/j.mee.2009.11.053⟩
Journal articles hal-00549560v1

Realization of vertical silicon nanowire networks with an ultra high density using a top-down approach

X.L. Han , G. Larrieu , Emmanuel Dubois
Journal of Nanoscience and Nanotechnology, 2010, 10, pp.7423-7427. ⟨10.1166/jnn.2010.2841⟩
Journal articles hal-00549625v1

Transmission electron microscopy study of erbium silicide formation from Ti/Er stack for Schottky contact applications

J. Ratajczak , A. Laszcz , A. Czerwinski , J. Katcki , F. Phillipp
Journal of Microscopy, 2010, 237, pp.379-383. ⟨10.1111/j.1365-2818.2009.03264.x⟩
Journal articles hal-00549623v1

Characterization of ytterbium silicide formed in ultra high vacuum

A. Laszcz , J. Ratajczak , A. Czerwinski , J. Katcki , V. Srot
Journal of Physics: Conference Series, 2010, 209, pp.012056-1-4. ⟨10.1088/1742-6596/209/1/012056⟩
Journal articles hal-00549559v1
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Schottky barrier lowering with the formation of crystalline Er silicide on n-Si upon thermal annealing

N. Reckinger , X.H. Tang , V. Bayot , Dmitri Yarekha , S. Godey
Applied Physics Letters, 2009, 94 (19), pp.191913. ⟨10.1063/1.3136849⟩
Journal articles hal-00471985v1

A simple method for measuring Si-Fin sidewall roughness by AFM

X.H. Tang , V. Bayot , N. Reckinger , D. Flandre , J.P. Raskin
IEEE Transactions on Nanotechnology, 2009, 8, pp.611-616. ⟨10.1109/TNANO.2009.2021064⟩
Journal articles hal-00471972v1

Confined and guided catalytic growth of crystalline silicon films on a dielectric substrate

Aurélie Lecestre , Emmanuel Dubois , A. Villaret , P. Coronel , T. Skotnicki
IOP Conference Series: Materials Science and Engineering, 2009, 6, pp.012022-1-6. ⟨10.1088/1757-899X/6/1/012022⟩
Journal articles hal-00471991v1

Optimization of RF performance of metallic source/drain SOI MOSFETs using dopant segregation at the Schottky interface

R. Valentin , Emmanuel Dubois , G. Larrieu , J.P. Raskin , Gilles Dambrine
IEEE Electron Device Letters, 2009, 30, pp.1197-1199. ⟨10.1109/LED.2009.2031254⟩
Journal articles hal-00471810v1

UHV fabrication of the ytterbium silicide as potential low schottky barrier S/D contact material for N-type MOSFET

Dmitri Yarekha , G. Larrieu , N. Breil , Emmanuel Dubois , S. Godey
ECS Transactions, 2009, 19, pp.339-344. ⟨10.1149/1.3118961⟩
Journal articles hal-00471999v1
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Process Optimization and Downscaling of a Single Electron Single Dot Memory

Christophe Krzeminski , Xiaohui Tang , Nicolas Reckinger , Vincent Bayot , Emmanuel Dubois
IEEE Transactions on Nanotechnology, 2009, 8 (9), pp.737-748. ⟨10.1109/TNANO.2009.2021653⟩
Journal articles hal-00601623v1

Arsenic-segregated rare earth silicide junctions : reduction of Schottky barrier and integration in metallic n-MOSFETs on SOI

G. Larrieu , Dmitri Yarekha , Emmanuel Dubois , N. Breil , O. Fainot
IEEE Electron Device Letters, 2009, 30, pp.1266-1268. ⟨10.1109/LED.2009.2033085⟩
Journal articles hal-00471974v1

Enhanced carrier injection in Schottky contacts using dopant segregation : a Monte Carlo research

E. Pascual , M.J. Martin , R. Rengel , G. Larrieu , Emmanuel Dubois
Semiconductor Science and Technology, 2009, 24, pp.025022-1-6. ⟨10.1088/0268-1242/24/2/025022⟩
Journal articles hal-00471970v1

TEM characterization of polysilicon and silicide fin fabrication processes of FinFETs

J. Ratajczak , A. Laszcz , A. Czerwinski , J. Katcki , Xing Tang
Acta Physica Polonica A, 2009, 116, pp.89-91
Journal articles hal-00472000v1

An electrical evaluation method for the silicidation of silicon nanowires

Xing Tang , N. Reckinger , V. Bayot , D. Flandre , Emmanuel Dubois
Applied Physics Letters, 2009, 95, pp.023106-1-3. ⟨10.1063/1.3171929⟩
Journal articles hal-00471971v1

Issues associated to rare earth silicide integration in ultra thin FD SOI Schottky barrier nMOSFETs

G. Larrieu , Dmitri Yarekha , Emmanuel Dubois , D. Deresmes , N. Breil
ECS Transactions, 2009, 19, pp.201-207. ⟨10.1149/1.3117410⟩
Journal articles hal-00471998v1
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A single layer hydrogen silsesquioxane (HSQ) based lift-off process for germanium and platinum

Vikram Passi , Aurélie Lecestre , Christophe Krzeminski , Guilhem Larrieu , Emmanuel Dubois
Microelectronic Engineering, 2009, 87 (10), pp.1872-1878. ⟨10.1016/j.mee.2009.11.022⟩
Journal articles hal-00625915v1
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Low Schottky barrier height for ErSi2−x/n-Si contacts formed with a Ti cap

N. Reckinger , Xing Tang , V. Bayot , Dmitri Yarekha , Emmanuel Dubois
Journal of Applied Physics, 2008, 104 (10), pp.103523. ⟨10.1063/1.3010305⟩
Journal articles hal-00356975v1

RF small signal analysis of Schottky-barrier p-MOSFETs

R. Valentin , Emmanuel Dubois , J.P. Raskin , G. Larrieu , Gilles Dambrine
IEEE Transactions on Electron Devices, 2008, 55, pp.1192-1202. ⟨10.1109/TED.2008.919382⟩
Journal articles hal-00356664v1

A Monte Carlo investigation of carrier transport in fabricated back-to-back Schottky diodes : influence of direct quantum tunnelling and temperature

E. Pascual , R. Rengel , N. Reckinger , Xing Tang , V. Bayot
physica status solidi (c), 2008, 5, pp.119-122. ⟨10.1002/pssc.200776519⟩
Journal articles hal-00356974v1

Characterization of ultrathin SOI film and application to short channel MOSFETs

Xing Tang , N. Reckinger , G. Larrieu , Emmanuel Dubois , D. Flandre
Nanotechnology, 2008, 19, pp.165703-1-7. ⟨10.1088/0957-4484/19/16/165703⟩
Journal articles hal-00356972v1

Impact of channel doping on Schottky barrier height and investigation on p-SB MOSFETs performance

G. Larrieu , Emmanuel Dubois , Dmitri Yarekha , N. Breil , N. Reckinger
Materials Science and Engineering: B, 2008, 154-155, pp.159-162. ⟨10.1016/j.mseb.2008.10.014⟩
Journal articles hal-00356976v1

Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/SiO2/Si structure

A. Laszcz , J. Ratajczak , A. Czerwinski , J. Katcki , V. Srot
Materials Science and Engineering: B, 2008, 154-155, pp.175-178. ⟨10.1016/j.mseb.2008.10.002⟩
Journal articles hal-00356977v1

Integration of PtSi in p-type MOSFETs using a sacrificial low-temperature germanidation process

N. Breil , Emmanuel Dubois , A. Halimaoui , A. Pouydebasque , G. Larrieu
IEEE Electron Device Letters, 2008, 29, pp.152-154. ⟨10.1109/LED.2007.914090⟩
Journal articles hal-00356971v1
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Kinetics, stoichiometry, morphology and current drive capabilities of Ir-based silicides

G. Larrieu , Emmanuel Dubois , X. Wallart , J. Katcki
Journal of Applied Physics, 2007, 102, pp.094504-1-7. ⟨10.1063/1.2802564⟩
Journal articles hal-00255850v1

Spacer-first damascene-gate FinFET architecture featuring stringer-free integration

F. Cornu-Fruleux , J. Penaud , Emmanuel Dubois , P. Coronel , G. Larrieu
IEEE Electron Device Letters, 2007, 28, pp.523-526. ⟨10.1109/LED.2007.897443⟩
Journal articles hal-00255851v1

Selective etching of Pt with respect to PtSi using a sacrificial low temperature germanidation process

N. Breil , A. Halimaoui , T. Skotnicki , Emmanuel Dubois , G. Larrieu
Applied Physics Letters, 2007, 91, pp.232112-1-3. ⟨10.1063/1.2821143⟩
Journal articles hal-00255853v1
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Silicon dry oxidation kinetics at low temperature in the nanometric range: Modeling and experiment

Christophe Krzeminski , Guilhem Larrieu , Julien Penaud , Evelyne Lampin , Emmanuel Dubois
Journal of Applied Physics, 2007, 101 (064908), pp.064908-1-8. ⟨10.1063/1.2711764⟩
Journal articles hal-00600436v1

TEM characterisation of the erbium silicide formation process using a Pt/Er stack on the silicon-on-insulator substrate

A. Łaszcz , J. Katcki , J. Ratajczak , Xing Tang , Emmanuel Dubois
Journal of Microscopy, 2006, 224, pp.38-41
Journal articles hal-00138660v1

TEM study of PtSi contacts layers for low Schottky barrier MOSFETs

A. Laszcz , J. Katcki , J. Ratajczak , A. Czerwinski , N. Breil
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2006, 253, pp.274-277
Journal articles hal-00138656v1

Transformation of hydrogen silsesquioxane properties with RIE plasma treatment for advanced multiple-gate MOSFETs

J. Penaud , F. Fruleux , Emmanuel Dubois
Applied Surface Science, 2006, 253, pp.395-399
Journal articles hal-00138654v1

Optimisation of HSQ e-beam lithography for the patterning of FinFET transistors

F. Fruleux , J. Penaud , Emmanuel Dubois , M. Francois , M. Muller
Microelectronic Engineering, 2006, 83, pp.776-779
Journal articles hal-00138652v1

TEM study of iridium silicide contact layers for low Schottky barrier MOSFETs

A. Laszcz , A. Czerwinski , J. Ratajczak , J. Katcki , N. Breil
Archives of Metallurgy and Materials, 2006, 51, pp.551-554
Journal articles hal-00152968v1
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Fabrication and room-temperature single-charging behavior of self-aligned single-dot memory devices

Tang Xiaohui , Nicolas Reckinger , Vincent Bayot , Christophe Krzeminski , Emmanuel Dubois
IEEE Transactions on Nanotechnology, 2006, 5 (6), p. 649. ⟨10.1109/TNANO.2006.883481⟩
Journal articles hal-00623277v1

An optimal high contrast e-beam lithography process for the patterning of dense fin networks

F. Fruleux , J. Penaud , Emmanuel Dubois , M. Francois , M. Muller
Materials Science and Engineering: C, 2006, 26, pp.893-897
Journal articles hal-00138653v1

Fabrication and room-temperature single-charging behavior of self-aligned single-dot memory devices

Xing Tang , N. Reckinger , V. Bayot , Christophe Krzeminski , Emmanuel Dubois
IEEE Transactions on Nanotechnology, 2006, 5, pp.649-656
Journal articles hal-00138655v1

Impact of large angle tilt implantation on the threshold voltages of LDMOS transistors on SOI

H. Xu , E. Lampin , Emmanuel Dubois , S. Bardy , F. Murray
Materials Science and Engineering: B, 2005, 124-125, pp.323-326
Journal articles hal-00138396v1

Reactive ion etching of a 20 nanometers tungsten gate using a SF6/N2 chemistry and hydrogen silsesquioxane hard mask resist

G. Larrieu , Emmanuel Dubois
Journal of Vacuum Science and Technology, 2005, 23, pp.2046-2050
Journal articles hal-00125635v1

Integration of PtSi-based Schottky-barrier p-MOSFETs with a midgap tungsten gate

G. Larrieu , Emmanuel Dubois
IEEE Transactions on Electron Devices, 2005, 52, pp.2720-2726
Journal articles hal-00138397v1

Transmission electron microscopy of iridium silicide contacts for advanced MOSFET structures with Schottky source and drain

A. Laszcz , J. Katcki , J. Ratajczak , G. Larrieu , Emmanuel Dubois
Journal of Alloys and Compounds, 2004, 382, pp.24-28
Journal articles hal-00140977v1

Ideal subthreshold characteristics of thin-film SOI p-MOSFETs with Schottky source/drain and a midgap tungsten gate

G. Larrieu , Emmanuel Dubois
IEE Proceedings Microwaves Antennas and Propagation, 2004, 25, pp.801-803
Journal articles hal-00140978v1
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Measurement of low Schottky barrier heights applied to metallic source/drain metal–oxide–semiconductor field effect transistors (MOSFETs)

Emmanuel Dubois , G. Larrieu
Journal of Applied Physics, 2004, 96, pp.729-737
Journal articles hal-00140973v1

Schottky-barrier source/drain MOSFETs on ultra-thin silicon-on-insulator body with a tungsten metallic midgap gate

G. Larrieu , Emmanuel Dubois
IEEE Electron Device Letters, 2004, 25, pp.801-803
Journal articles hal-00140981v1
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Formation of Pt-based silicide contacts : kinetics, stochiometry and current drive capabilities

Guilhem Larrieu , Emmanuel Dubois , X. Wallart , Xavier Baie , J. Katcki
Journal of Applied Physics, 2003, 94 (12), pp.7801-7810. ⟨10.1063/1.1605817⟩
Journal articles hal-00146394v1

Accurate modelling of large angle tilt (LATID) and pure vertical implantations : application to the simulation of n- and p-LDMOS backgates

E. Lampin , Emmanuel Dubois , H. Xu , S. Bardy , F. Murray
IEEE Transactions on Electron Devices, 2003, 50, pp.1401-1404
Journal articles hal-00146392v1

Very low Schottky barrier to n-type silicon with PtEr-stack silicide

Xing Tang , J. Katcki , Emmanuel Dubois , N. Reckinger , J. Ratajczak
Solid-State Electronics, 2003, 47, pp.2105-2111
Journal articles hal-00146401v1

Non-quasi-static transient model of fully-depleted SOI MOSFET and its application to the analysis of charge sharing in an analog switch

Emmanuel Dubois , E. Robilliart
IEEE Electron Device Letters, 2002, 23, pp.43-45
Journal articles hal-00148743v1

Low Schottky barrier source/drain for advanced MOS architecture : device design and material consideration

Emmanuel Dubois , G. Larrieu
Solid-State Electronics, 2002, 46, pp.997-1004
Journal articles hal-00148735v1

From nanoelectronics to nanotechnology

Emmanuel Dubois
Belgian Journal of Electronics & Communications HF, 2002, 3, pp.9-16
Journal articles hal-00250387v1

Kinetics of oxydation by scanning probe microscopy : a space-charge-limited model

Emmanuel Dubois , J.L. Bubendorff
Journal of Applied Physics, 2000, 87, pp.8148-8154
Journal articles hal-00158510v1

Nanooxidation of sil¬icon surfaces with a scanning probe microscope : application to the conception of new devices

Didier Stiévenard , Paul-Aymeric Fontaine , Emmanuel Dubois , B. Grandidier , Jean Philippe Nys
Condensed Matter News, 1999
Journal articles hal-04249377v1

Nanometer scale lithography on silicon, titanium and PMMA resist using scanning probe microscopy

Emmanuel Dubois , Jean-Luc Bubbendorff
Solid-State Electronics, 1999, 43 (6), pp.1085-1089. ⟨10.1016/S0038-1101(99)00029-5⟩
Journal articles hal-04246744v1

Characterization of scanning tunneling microscopy and atomic force microscopy-based techniques for nanolithography on hydrogen-passivated silicon

P. Fontaine , Emmanuel Dubois , D. Stiévenard
Journal of Applied Physics, 1998, 84 (4), pp.1776-1781. ⟨10.1063/1.368334⟩
Journal articles hal-04246740v1

Nanooxidation using a scanning probe microscope: An analytical model based on field induced oxidation

D. Stiévenard , P. Fontaine , Emmanuel Dubois
Applied Physics Letters, 1997, 70 (24), pp.3272-3274. ⟨10.1063/1.118425⟩
Journal articles hal-04246734v1

Extraction method of the base series resistances in bipolar transistor in presence of current crowding

Emmanuel Dubois , P.H. Bricout , E. Robilliart
IEEE Journal of Solid-State Circuits, 1996, 31 (1), pp.132-135. ⟨10.1109/4.485876⟩
Journal articles hal-04246698v1

Short-channel effect immunity and current capability of sub-0.1-micron MOSFET's using a recessed channel

P.-H. Bricout , Emmanuel Dubois
IEEE Transactions on Electron Devices, 1996, 43 (8), pp.1251-1255. ⟨10.1109/16.506776⟩
Journal articles hal-04246714v1

Anomalous voltage overshoot during turn-off of thin-film n-channel SOI MOSFETs

Emmanuel Dubois , G.G. Shahidi , M.R. Scheuermann
IEEE Electron Device Letters, 1993, 14 (4), pp.164-166. ⟨10.1109/55.215163⟩
Journal articles hal-04246691v1

Piezoresistivity effects in N-MOSFET devices

Z.Z. Wanga , J. Suski , D. Collard , Emmanuel Dubois
Sensors and Actuators A: Physical , 1992, 34 (1), pp.59-65. ⟨10.1016/0924-4247(92)80140-X⟩
Journal articles hal-04246666v1

Adaptive mesh refinement for multilayer process simulation using the finite element method

B. Baccus , D. Collard , Emmanuel Dubois
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1992, 11 (3), pp.396-403. ⟨10.1109/43.124426⟩
Journal articles hal-04246676v1

A study of the electrical performances of isolation structures

Emmanuel Dubois , J.-L. Coppee , B. Baccus , D. Collard
IEEE Transactions on Electron Devices, 1990, 37 (6), pp.1477-1486. ⟨10.1109/16.106243⟩
Journal articles hal-04246652v1

Efficient two-dimensional multilayer process simulation of advanced bipolar devices

Bruno Baccus , Emmanuel Dubois , Dominique Collard , Denis Morel
Solid-State Electronics, 1989, 32 (11), pp.1013-1023. ⟨10.1016/0038-1101(89)90165-2⟩
Journal articles hal-04246681v1
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ELECTRICAL PERFORMANCES COMPARISON OF SEMI AND FULLY RECESSED ISOLATION STRUCTURES

Emmanuel Dubois , J.-L. Coppee , B. Baccus , D. Collard
Journal de Physique Colloques, 1988, 49 (C4), pp.C4-813-C4-816. ⟨10.1051/jphyscol:19884171⟩
Journal articles jpa-00227913v1

Integrated metrology devices dedicated to transient Harman measurement of silicon nano-meshes

Hafsa Ikzibane , Jon Canosa , Emmanuel Dubois , J.F. Robillard
Workshop for Multi-Functional Materials, Université Polytechnique des Hauts-de-France; Université de Mons, Jun 2023, Valenciennes (Nord), France
Conference papers hal-04188230v1

Raman thermometry characterization of GeSbTe based phase change materials

Akash Patil , Yannick Le-Friec , Jury Sandrini , Roberto Simola , Simon Jeannot
XVII Conference on Phonon Scattering in Condensed Matter, Phonons 2023, Jul 2023, Paris, France
Conference papers hal-04188350v1

GeTe thermal characterization with 3-omega and Raman thermometry methods

C. Mercier , A. Patil , J. Canosa , C. Jerez-Garcia , M. Brouillard
Workshop for Multi-Functional Materials 2023, Jun 2023, Valenciennes, France. 1 page
Conference papers hal-04188217v1

Silicon Based Suspended Thermometry Device Fabrication for Phonon Ballistic and Coherent Regimes Study

J. Canosa Diaz , H. Ikzibane , B. Brisuda , C. Polanco Garcia , L. Saminadayar
PHONONICS 2023: 6th International Conference on Phononic Crystals/Metamaterials/Metasurfaces, Phonon Transport, and Topological Phononics, Jun 2023, Manchester (UK), United Kingdom
Conference papers hal-04188314v1
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Improving off-state capacitance of SOI-CMOS RF switches: how good are air microcavities?

Daniel Gheysens , Alain Fleury , Stéphane Monfray , Frédéric Gianesello , Philippe Cathelin
IEEE 53rd European Solid-State Device Research Conference, ESSDERC, Sep 2023, Lisbon, Portugal. pp.109-112, ⟨10.1109/ESSDERC59256.2023.10268524⟩
Conference papers hal-04226645v1
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RF Performance of Large Germanium Telluride Switches for Power Application

Ismaël Charlet , Bruno Reig , Corentin Mercier , Julien Delprato , Vincent Puyal
18th European Microwave Integrated Circuits Conference (EuMIC), Sep 2023, Berlin, Germany
Conference papers hal-04227456v1
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Suspended crystalline silicon thermometry devices: towards quantum nanophononics

Jon Canosa , Hafsa Ikzibane , Boris Brisuda , Natalio Mingo , Olivier Bourgeois
Nanoscale and Microscale Heat Transfer VII - Eurotherm, May 2022, Palermo, Italy
Conference papers hal-03870287v1
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A 140 GHz to 170 GHz active tunable noise source development in SiGe BiCMOS 55 nm technology

Victor Fiorese , Joao Carlos , Azevedo Goncalves , Simon Bouvot , Emmanuel Dubois
16th European Microwave Integrated Circuits Conference, EuMIC 2021, Apr 2022, London, United Kingdom. pp.125-128, ⟨10.23919/EuMIC50153.2022.9783645⟩
Conference papers hal-03637553v1
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Raman Thermometry Characterization of GeSbTe based Phase Change Materials

Akash Patil , Yannick Le-Friec , Jury Sandrini , Roberto Simola , Philippe Boivin
2022 28th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC), Sep 2022, Dublin, Ireland. pp.1-5, ⟨10.1109/THERMINIC57263.2022.9950662⟩
Conference papers hal-03875742v2
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Integrated metrology devices dedicated to transient Harman measurement of silicon nano-meshes

Hafsa Ikzibane , Jon Canosa , Emmanuel Dubois , Jean-François Robillard
Nanoscale and Microscale Heat Transfer VII - Eurotherm, May 2022, Palermo, Italy
Conference papers hal-03870513v1
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Exploring the response of Ryugu-inspired phyllosilicates to a pulsed laser

Daniel Hallatt , Hugues Leroux , Emmanuel Dubois , Flavie Braud
53rd Lunar and Planetary Science Conference, Mar 2022, Texas, United States
Conference papers hal-03664443v1

Heat transfer in silicon nano-membranes: application to thermoelectricity

J.F. Robillard , Hafsa Ikzibane , Antonin Massoud , Valeria Lacatena , Maciej Haras
The 20th international symposium on the Physics of Semiconductors and Applications (ISPSA20), Jul 2022, Jaeju, South Korea
Conference papers hal-04088371v1
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220 GHz E-Plane Transition from Waveguide to Suspended Stripline Integrated on Industrial Organic Laminate Substrate Technology

Victor Fiorese , F. Laporte , J.F. Caillet , G. Catalano , F. Gianesello
European Microwave Conference, EuMC 2021, Session EuMC06 - 3D to 2D Transitions and New Materials for mmWave system Integration, EuMIC/EuMC/EuMW, Apr 2021, London, United Kingdom. pp.99-102, ⟨10.23919/EuMC50147.2022.9784166⟩
Conference papers hal-03637651v1

Functional packaging of RF, mmW and photonic functions based on femtosecond laser micromachining

Emmanuel Dubois , Arun Bhaskar , Jean-Marc Boucaud , A. Alves , Cybelle Belem-Gonçalves
19th International Nanotech Symposium NANO KOREA 2021, TS10-Nanofabrication & Measurements, Jul 2021, Seoul, South Korea
Conference papers hal-03582878v1

[Invité] Packaging fonctionnel de fonctions RF, mmW et photonique basé sur le micro-usinage laser

Emmanuel Dubois
9eme Conférence plénière du GdR Ondes, GDR ONDES 2451, Nov 2021, Villeneuve d'Ascq, France
Conference papers hal-03741454v1
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Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform

Stephane Monfray , Sébastien Cremer , Nathalie Vulliet , Emmanuel Dubois , Florian Domengie
SPIE Photonics Europe, Conference 11364 - Applications of Photonic Technology - Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, Apr 2020, Strasbourg, France. 1136403, 8 p., ⟨10.1117/12.2554725⟩
Conference papers hal-03092725v1
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Evaluation of micro laser sintering metal 3D-printing technology for the development of waveguide passive devices up to 325 GHz

Victor Fiorese , Cybelle Belem-Gonçalves , Carlos del Rio , Diane Titz , Frédéric Gianesello
IEEE/MTT-S International Microwave Symposium, IMS 2020, Aug 2020, Los Angeles, United States. pp.1168-1171, ⟨10.1109/IMS30576.2020.9224102⟩
Conference papers hal-03091222v1
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Shining the light to terahertz spectroscopy of nL-volume biological samples

Sergey I. Mitryukovskiy , Melanie Lavancier , Flavie Braud , Goedele Roos , Theo Hannotte
CLEO (The Conference on Lasers and Electro-Optics Conference) 2019, May 2019, San Jose, United States. paper ATu3K.6, 2 p., ⟨10.1364/CLEO_AT.2019.ATu3K.6⟩
Conference papers hal-02158865v1
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Device for broadband THz spectroscopy of 1-nL-volume samples

Sergey Mitryukovskiy , Melanie Lavancier , Flavie Braud , Theo Hannotte , Emmanuel Dubois
2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Sep 2019, Paris, France. paper Tu-PM2-3-6, 2 p., ⟨10.1109/IRMMW-THz.2019.8874026⟩
Conference papers hal-02886495v1
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Femtosecond laser micromachining of crystalline silicon for ablation of deep macro-sized cavities for silicon-on-insulator applications

Arun Bhaskar , Justine Philippe , Flavie Braud , Etienne Okada , J.F. Robillard
SPIE Photonics West, Conference 10906 - Laser-based Micro- and Nanoprocessing XIII, Feb 2019, San Francisco, United States. 109060K, 13 p., ⟨10.1117/12.2507652⟩
Conference papers hal-02317233v1
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Towards broadband THz spectroscopy and analysis of sub-wavelength-size biological samples

Sergey Mitryukovskiy , Melanie Lavancier , Flavie Braud , Yue Bai , Emmanuel Dubois
2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Sep 2019, Paris, France. ⟨10.1109/IRMMW-THz.2019.8874409⟩
Conference papers hal-02886507v1

Device for light-matter interaction enhancement in the full THz range for precise spectroscopy of small volume samples

Romain Peretti , Sergey I. Mitryukovskiy , Flavie Braud , Emilien Peytavit , Emmanuel Dubois
2018 43rd International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz 2018), Sep 2018, Nagoya, Japan. paper Tu-POS-05, 1-2, ⟨10.1109/IRMMW-THz.2018.8510508⟩
Conference papers hal-02317320v1

Femtosecond pulsed laser for advanced photonic packaging

Quentin Hivin , Jean-Marc Boucaud , Flavie Braud , Cédric Durand , Frédéric Gianesello
7th Electronic System-Integration Technology Conference, ESTC 2018, Sep 2018, Dresden, Germany. ⟨10.1109/ESTC.2018.8546374⟩
Conference papers hal-01961743v1

Artificially-induced anisotropic heat flow in 2D patterned membranes

Stanislav Didenko , Tierno M'Bah , Antonin Massoud , Valeria Lacatena , Maciej Haras
Eurotherm 111: Nanoscale and Microscale Heat Transfer VI, Dec 2018, Levi, Finland
Conference papers hal-02025449v1

Performance evaluation of silicon based thermoelectric generators interest of coupling low thermal conductivity thin films and a planar architecture

Thierno-Moussa Bah , Stanjen Didenko , Stephane Monfray , Thomas Skotnicki , Emmanuel Dubois
48th European Solid-State Device Research Conference (ESSDERC 2018), Sep 2018, Dresden, Germany. pp.226-229, ⟨10.1109/ESSDERC.2018.8486919⟩
Conference papers hal-02317293v1

Phonon heat conduction in phononic crystal membranes

Antonin Massoud , Jean-Marie Bluet , Regis Orobtchouk , Valeria Lacatena , Maciej Haras
18th IEEE International Conference on Nanotechnology, IEEE Nano 2018, Session on “nanophononics”, Jul 2018, Cork, Ireland
Conference papers hal-01932516v1

Single mode polymer optical waveguides and out-of-plane coupling structure on a glass substrate

J.M. Boucaud , Q. Hivin , C. Durand , F. Gianesello , Davide Bucci
7th Electronic System-Integration Technology Conference, ESTC 2018, Sep 2018, Dresden, Germany. ⟨10.1109/ESTC.2018.8546461⟩
Conference papers hal-01961666v1

Demonstration of low-thermal conductivity silicon nano-patterned membranes as a thermoelectric material

J.F. Robillard , Tierno M'Bah , Stanislav Didenko , Tianqi Zhu , Di Zhou
Eurotherm 111: Nanoscale and Microscale Heat Transfer VI, Dec 2018, Levi, Finland
Conference papers hal-02025459v1

Phonon heat conduction in phononic crystal membranes

Antonin Massoud , Jean-Marie Bluet , Regis Orobtchouk , Valeria Lacatena , Maciej Haras
E-MRS Spring Meeting, Symposium "Nanostructures for phononic applications", Jun 2018, Strasbourg, France
Conference papers hal-01932523v1

Large-area femtosecond laser ablation of Silicon to create membrane with high performance CMOS-SOI RF functions

Arun Bhaskar , Justine Philippe , Matthieu Berthomé , Etienne Okada , J.F. Robillard
2018 7th Electronic System-Integration Technology Conference (ESTC), Sep 2018, Dresden, Germany. pp.801-806, ⟨10.1109/ESTC.2018.8546407⟩
Conference papers hal-02317259v1

Thermal conductivity in Si 2D phononic membranes studied by Raman Thermometry,

Stanislav Didenko , Antonin Massoud , Tierno M'Bah , J.F. Robillard , Pierre-Olivier Chapuis
GDRe Workshop on Thermal Nanosciences and NanoEngineering, Nov 2017, Lille, France
Conference papers hal-02030916v1

Considerations on Fermi-depinning, dipoles and oxide tunneling for oxygen-based dielectric insertions in advanced CMOS contacts

Julien Borrel , L. Hutin , H. Grampeix , E. Nolot , E. Ghegin
IEEE Silicon Nanoelectronics Workshop (SNW), Jun 2016, Honolulu, United States. pp.140-141, ⟨10.1109/SNW.2016.7578022⟩
Conference papers hal-03325002v1

Heat conduction in 2D phononic structures

P.-O. Chapuis , M. Massoud , T. Nghiem , J.M. Bluet , V. Lacatena
WE-Heraeus-Seminar “Heat Transfer and Heat Conduction on the Nanoscale”, Apr 2016, Bad Honnef, Germany
Conference papers hal-01475329v1

Thermal conductivity of Si 2D phononic membranes studied by MD simulations and Raman thermometry

S. Didenko , V. Lacatena , M. Haras , J.F. Robillard , P.O. Chapuis
Eurotherm 108: Nanoscale and Microscale Heat Transfer V, Sep 2016, Santorini, Greece
Conference papers hal-01475281v1

Comparative thermal characterization of nanophononic membrane strips by Raman thermometry, scanning thermal microscopy, and an electro-thermal method

M. Massoud , V. Lacatena , M. Haras , S. Didenko , P.O. Chapuis
Eurotherm 108: Nanoscale and Microscale Heat Transfer V, Sep 2016, Santorini, Greece
Conference papers hal-01475299v1

Improved performance of flexible CMOS technology using ultimate thinning and transfer bonding

Emmanuel Dubois , Justine Philippe , Matthieu Berthomé , J.F. Robillard , Christophe Gaquière
6th Electronic System-Integration Technology Conference (ESTC), Sep 2016, Grenoble, France. ⟨10.1109/ESTC.2016.7764513⟩
Conference papers hal-03272693v1

Metal/insulator/semiconductor contacts for ultimately scaled CMOS nodes: projected benefits and remaining challenges

Julien Borrel , Louis Hutin , Helen Grampeix , Emmanuel Nolot , Magali Tessaire
IWJT 2016 - 16th International Workshop on Junction Technology, May 2016, Shanghai, China. pp.14-19
Conference papers hal-03325000v1

Thermal Conductivity Reduction in Fully Suspended and Periodically Patterned Membranes Measured by Electro-Thermal Method

V. Lacatena , M. Haras , J.F. Robillard , T. Skotnicki , Emmanuel Dubois
MRS Fall meeting, Symposium II on “Phonons”, Nov 2015, Boston, United States
Conference papers hal-01464806v1

Characterization of flexible CMOS technology tranferred onto a metallic foil

Justine Philippe , Aurelien Lecavelier Des Etangs-Levallois , Philip Latzel , Francois Danneville , J.F. Robillard
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, Jan 2015, Bologna, Italy. ⟨10.1109/ULIS.2015.7063747⟩
Conference papers hal-03272691v1

Ultra-foldable/stretchable wideband RF interconnects using laser ablation of metal film on a flexible substrate

Sofiene Bouaziz , Matthieu Berthomé , J.F. Robillard , Emmanuel Dubois
45th European Microwave Conference (EuMC), Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345902⟩
Conference papers hal-03325008v1

Application-oriented performance of RF CMOS technologies on flexible substrates

Justine Philippe , Aurélien Lecavelier , Matthieu Berthomé , J.F. Robillard , Christophe Gaquière
IEEE International Electron Devices Meeting (IEDM), Dec 2015, Washington, United States. ⟨10.1109/IEDM.2015.7409707⟩
Conference papers hal-03272696v1

Synthesis and electrical characterisations of a low work function cesium oxide coating for high efficiency thermionic energy converter

François Morini , J.F. Robillard , Stéphane Monfray , I.D. Baikie , Thomas Skotnicki
European Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium BB - Materials by design for energy applications through theory and experiment, 2014, Lille, France
Conference papers hal-00966136v1

Fabrication of integrated micrometer platform for thermoelectric measurements

Maciej Haras , V. Lacatena , François Morini , J.F. Robillard , S. Monfray
60th Annual IEEE International Electron Devices Meeting (IEDM), Dec 2014, San Francisco, United States. paper 8.5, 8.5.1-8.5.4, ⟨10.1109/IEDM.2014.7047012⟩
Conference papers hal-03325009v1

Efficient reduction of thermal conductivity in silicon using phononic-engineered membranes

Valeria Lacatena , Maciej Haras , J.F. Robillard , Stéphane Monfray , Thomas Skotnicki
European Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium D - Phonons and fluctuations in low dimensional structures, 2014, Lille, France
Conference papers hal-00964542v1

Silicon thermoelectrics : a non-conventional approach based on thin-film phononic engineering

J.F. Robillard , Valeria Lacatena , Maciej Haras , Stéphane Monfray , Thomas Skotnicki
CMOS Emerging Technologies Research Symposium, 2014, Grenoble, France
Conference papers hal-00976631v1

Phononic crystals patterning by e-beam lithography "dots on the fly" methodology for integration into thermoelectric energy converters

Valeria Lacatena , Maciej Haras , J.F. Robillard , Stéphane Monfray , Thomas Skotnicki
17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 3 p
Conference papers hal-01020281v1

Integrated measurement platform for thermal conductivity measurements in thin-film crystalline silicon and silicon-germanium

Maciej Haras , Valeria Lacatena , Stéphane Monfray , J.F. Robillard , Thomas Skotnicki
European Materials Research Society Spring Meeting, E-MRS Spring 2014, Symposium BB - Materials by design for energy applications through theory and experiment, 2014, Lille, France
Conference papers hal-00964577v1

Intégration hétérogène de systèmes communicants CMOS-SOI en gamme millimétrique

Justine Philippe , Emmanuel Dubois , Francois Danneville , Daniel Gloria
Doctoriales Lille Nord de France 2014, 2014, Marcq-en-Baroeul, France
Conference papers hal-01005696v1

Nouvelle technologie de contact pour CMOS FD-SOI 10nm et en deçà le contact dipolaire

Julien Borrel , Louis Hutin , Magali Grégoire , Fabrice Nemouchi , Olivier Rozeau
17es Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 4 p
Conference papers hal-01020275v1

Intégration hétérogène de systèmes communicants CMOS-SOI en gamme millimétrique

Justine Philippe , Aurélien Lecavelier , Francois Danneville , Daniel Gloria , Emmanuel Dubois
17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, JNRDM 2014, 2014, Villeneuve d'Ascq, France. 4 p
Conference papers hal-01020278v1

High performance CMOS with enhanced property of mechanical flexibility

Emmanuel Dubois , Aurélien Lecavelier Des Etangs-Levallois , Justine Philippe , Sylvie Lepilliet , Francois Danneville
CMOS Emerging Technologies Research Symposium, 2014, Grenoble, France
Conference papers hal-00976625v1

[Invited] SOI technologies for high-performance flexible electronics

Emmanuel Dubois
Joint 7th International Workshop ''Functional Nanomaterials and Devices'' and 2nd Ukrainian-French Seminar ''Semiconductor-on-insulator materials, devices and circuits : physics, technology & diagnostic'', 2013, Kyiv, Ukraine
Conference papers hal-00819468v1

Low work function thin film growth for high efficiency thermionic energy converter : coupled Kelvin probe and photoemission study of potassium oxide

François Morini , Emmanuel Dubois , J.F. Robillard , S. Monfray , T. Skotnicki
European Materials Research Society Spring Meeting, E-MRS Spring 2013, Symposium C - Advanced thermoelectrics : from materials to devices, 2013, Strasbourg, France
Conference papers hal-00819702v1

Detection of neurotoxic gases by functionalized silicon nanowire field-effect transistors

J.P. Simonato , L. Ordronneau , A. Carella , V. Passi , Emmanuel Dubois
ImagieNano Conference, Security & Defense, NanoSD 2013, 2013, Bilbao, Spain
Conference papers hal-00811786v1

Phononic engineering of silicon using dots on the fly 'electron beam lithography and plasma etching'

V. Lacatena , M. Haras , J.F. Robillard , S. Monfray , T. Skotnicki
39th International Conference on Micro and Nano Engineering, MNE 2013, 2013, London, United Kingdom
Conference papers hal-00878809v1

Self-aligned contacts for 10nm FDSOI node : from device to circuit evaluation

H. Niebojewski , C. Le Royer , Y. Morand , O. Rozeau , M.A. Jaud
39th IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference, IEEE S3S 2013, 2013, Monterey, CA, United States. paper 6a.4, 2 p., ⟨10.1109/S3S.2013.6716549⟩
Conference papers hal-00955675v1

Extra-low parasitic gate-to-contacts capacitance architecture for sub-14nm transistor nodes

H. Niebojewski , C. Le Royer , Y. Morand , M.A. Jaud , O. Rozeau
9th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2013, 2013, Paris, France
Conference papers hal-00878810v1
Image document

Carreau: CARrier REsource Access for mUle, DTN applied to hybrid WSN / satellite system

Patrice Raveneau , Emmanuel Chaput , Riadh Dhaou , Emmanuel Dubois , Patrick Gelard
IEEE Vehicular Technology Conference - VTC 2013, Sep 2013, Las Vegas, United States. pp. 1-5
Conference papers hal-01148365v1

Low-frequency noise in Schottky barriers based nanoscale field-effect transistors

N. Clement , G. Larrieu , Emmanuel Dubois
Materials Research Society Spring Meeting, MRS Spring 2012, Symposium D : Nanocontacts - Emerging Materials and Processing for Ohmicity and Rectification, 2012, San Francisco, CA, United States
Conference papers hal-00797702v1

Characterization of PtSi nanowires transferred onto organic film

A. Lecavelier Des Etangs-Levallois , V. Passi , Z.K. Chen , François Morini , Emmanuel Dubois
38th International Micro & Nano Engineering Conference, MNE 2012, 2012, Toulouse, France
Conference papers hal-00797774v1

Radio frequency and low noise characteristics of SOI technology on plastic for flexible electronics

A. Lecavelier Des Etangs-Levallois , Emmanuel Dubois , Marie Lesecq , Francois Danneville , Y. Tagro
8th European Workshop on Silicon on Insulator Technology, Devices and Circuits, EuroSOI 2012, 2012, Montpellier, France. pp.73-78, ⟨10.1016/j.sse.2013.02.049⟩
Conference papers hal-00797713v1

Room temperature process for direct writing of nanostructures on plastic

V. Passi , A. Lecavelier Des Etangs-Levallois , Z.K. Chen , François Morini , Emmanuel Dubois
38th International Micro & Nano Engineering Conference, MNE 2012, 2012, Toulouse, France
Conference papers hal-00797783v1

Electrical nerve agents sensors based on chemically functionalized nanomaterials

A. Carella , S. Clavaguera , C. Celle , S. Lenfant , D. Vuillaume
NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012, 2012, Santa Clara, CA, United States. pp.130-132
Conference papers hal-00801097v1

High frequency noise potentialities of reported CMOS 65 nm SOI technology on flexible substrate

Y. Tagro , A. Lecavelier Des Etangs-Levallois , L. Poulain , Sylvie Lepilliet , D. Gloria
12th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in Rf Systems, SiRF 2012, 2012, Santa Clara, CA, United States. pp.89-92, ⟨10.1109/SiRF.2012.6160147⟩
Conference papers hal-00801054v1

TCAD study of the detection mechanisms in silicon nanoribbon-based gas sensors

L. Silvestri , S. Reggiani , V. Passi , F. Ravaux , Emmanuel Dubois
41st European Solid-State Device Research Conference, ESSDERC 2011, 2011, Helsinki, Finland. paper ID 5173, 131-134
Conference papers hal-00800024v1

Innovative electrical sensors for highly toxic gases based on carbon nanotubes and silicon nanowires

J.P. Simonato , A. Carella , S. Clavaguera , M. Delalande , S. Lenfant
Materials Research Society Fall Meeting, MRS Fall 2011, Symposium BB : Semiconductor nanowires for photovoltaics, 2011, Boston, MA, United States
Conference papers hal-00807191v1

Principe alternatif de conversion thermoélectrique : nouveaux matériaux à faible travail d'extraction

François Morini , Emmanuel Dubois , T. Skotnicki , S. Monfray
14èmes Journées Nationales du Réseau Doctoral de Micro et Nanoélectronique, JNRDM 2011, 2011, Cachan, France. pp.1-4
Conference papers hal-00806677v1

Fabrication and electrical characterization of dense vertical Si nanowires arrays

X.L. Han , G. Larrieu , Emmanuel Dubois
European Materials Research Society Spring Meeting, E-MRS Spring 2010, Symposium P : Science and technology of nanotubes, nanowires and graphene, 2010, Strasbourg, France
Conference papers hal-00574100v1

Synthesis and characterization of crystalline silicon ribbons on insulator using catalytic Vapor-Liquid-Solid growth inside a cavity

Aurélie Lecestre , Emmanuel Dubois , A. Villaret , P. Coronel , T. Skotnicki
6th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, EUROSOI 2010, 2010, France. pp.99-100
Conference papers hal-00549974v1

Report hétérogène de dispositifs et circuits CMOS RF sur substrat souple

A. Lecavelier Des Etangs-Levallois , Emmanuel Dubois , Francois Danneville , D. Gloria , C. Raynaud
13èmes Journées Nationales du Réseau Doctoral en Microélectronique, JNRDM 2010, 2010, France. pp.CD-ROM, Session Systèmes hautes fréquences, 1-4
Conference papers hal-00573208v1

Backgate bias and stress level impact on giant piezoresistance effect in thin silicon films and nanowires

V. Passi , J.P. Raskin , F. Ravaux , Emmanuel Dubois
23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, 2010, China. pp.464-467, ⟨10.1109/MEMSYS.2010.5442464⟩
Conference papers hal-00549973v1

Self-aligned single-electron memory fabrication based on Si/SiGe/Si heterostructures

Xing Tang , F. Ravaux , Emmanuel Dubois , E. Kasper , K. Alim
35th International Conference on Micro & Nano Engineering, MNE 2009, 2009, Ghent, Belgium
Conference papers hal-00575272v1

Metallic source/drain for advanced MOS architectures : from material engineering to device integration

Emmanuel Dubois , G. Larrieu , N. Breil , R. Valentin , Francois Danneville
SINANO-NANOSIL Workshop, Silicon-based CMOS and Beyond-CMOS Nanodevices, 2009, Athens, Greece
Conference papers hal-00575267v1

Metallic source/drain architecture for advanced MOS technology : an overview of METAMOS results

Emmanuel Dubois , G. Larrieu , N. Breil , R. Valentin , Francois Danneville
8th Symposium Diagnostics & Yield : Advanced Silicon Devices and Technologies for ULSI Era, 2009, Warsaw, Poland
Conference papers hal-00575696v1

A conceptual agent-based model to explore biases in a role playing game outcomes, "Learn to game, game to learn"

Emmanuel Dubois , Véronique Souchère , Olivier Barreteau
40. Annual Conference of the International Simulation And Gaming Association, ISAGA 2009, International Simulation And Gaming Association (ISAGA). Delft, NLD., Jun 2009, Singapour, Singapore. 10 p
Conference papers hal-02824111v1

Impact of channel doping on Schottky barrier height and investigation on p-SB MOSFETs performance

G. Larrieu , Emmanuel Dubois , Dmitri Yarekha , N. Breil , N. Reckinger
European Materials Research Society Spring Meeting, E-MRS Spring 2008, Symposium I : Front-end junction and contact formation in future Silicon/Germanium based devices, 2008, _, France
Conference papers hal-00361543v1

Electron microscopy of silicides formation in Schottky barrier contacts to electronic devices

J. Katcki , J. Ratajczak , A. Laszcz , F. Phillipp , N. Reckinger
XIII International Conference on Electron Microscopy, EM'2008, 2008, Cracow-Zakopane, Poland
Conference papers hal-00361545v1

Confined and guided catalytic growth of crystalline silicon films on a dielectric substrate

Aurélie Lecestre , Emmanuel Dubois , A. Villaret , P. Coronel , T. Skotnicki
ESS-Fringe Poster Session of 2008 European Solid-State Device Research Conference, ESSDERC 2008, 2008, Edinburgh, Scotland, United Kingdom
Conference papers hal-00361551v1

NANOSIL Network of Excellence : silicon-based nanostructures and nanodevices for long-term nanoelectronics applications

F. Balestra , E. Parker , D. Leadley , S. Mantl , Emmanuel Dubois
European Materials Research Society Spring Meeting, E-MRS Spring 2008, Symposium I : Front-end junction and contact formation in future Silicon/Germanium based devices, 2008, Strasbourg, France
Conference papers hal-00361546v1

Selective etching of implanted silicon dioxide in hydrofluoric acid

V. Passi , Aurélie Lecestre , Emmanuel Dubois , J.P. Raskin
34th International Conference on Micro and Nano Engineering, MNE 2008, 2008, Athens, Greece
Conference papers hal-00361548v1

Investigation on the platinum silicide Schottky barrier height modulation using a dopant segregation approach

N. Breil , A. Halimaoui , Emmanuel Dubois , E. Lampin , L. Godet
Materials Research Society Spring Meeting, MRS Spring 2008, Symposium E : Doping Engineering for Front-End Processing, 2008, United States. pp.85-90
Conference papers hal-00360805v1

Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/SiO2/Si structure

A. Laszcz , J. Ratajczak , A. Czerwinski , J. Katcki , V. Srot
European Materials Research Society Spring Meeting, E-MRS Spring 2008, Symposium I : Front-end junction and contact formation in future Silicon/Germanium based devices, 2008, Strasbourg, France
Conference papers hal-00361547v1

Localized and oriented catalytic growth of crystalline silicon nanoribbons

Aurélie Lecestre , Emmanuel Dubois , A. Villaret , P. Coronel , T. Skotnicki
Journées Nationales sur les Technologies Emergentes en Micro-nanofabrication, JNTE 08, 2008, Toulouse, France
Conference papers hal-00361549v1

Investigation of the ytterbium silicide as low Schottky barrier source/drain contact material for n-type MOSFET

Dmitri Yarekha , G. Larrieu , Emmanuel Dubois , S. Godey , X. Wallart
Journées Nationales sur les Technologies Emergentes en Micro-nanofabrication, JNTE 08, 2008, Toulouse, France
Conference papers hal-00361550v1

Transmission electron microscopy study of erbium silicide formation from Ti/Er stack for Schottky contact applications

J. Ratajczak , A. Laszcz , A. Czerwinski , J. Katcki , F. Phillipp
XIII International Conference on Electron Microscopy, EM'2008, 2008, Cracow-Zakopane, Poland
Conference papers hal-00361544v1

NANOSIL Network of Excellence: Silicon-based nanostructures and nanodevices for long-term nanoelectronics applications

F. Balestra , E. Parker , D. Leadley , S. Mantl , Emmanuel Dubois
European Materials Research Society (E-MRS 2008), Symposium, May 2008, Strasbourg, France
Conference papers hal-00391849v1

Recent advances in metallic source/drain MOSFETs

Emmanuel Dubois , G. Larrieu , N. Breil , R. Valentin , Francois Danneville
8th International Workshop on Junction Technology, IWJT'08, 2008, Shanghai, China. pp.139-144, ⟨10.1109/IWJT.2008.4540035⟩
Conference papers hal-00800974v1

Dual silicide integration of low Schottky-barrier source-drain in a spacer-first damascene-metal-gate FinFET architecture

F. Cornu-Fruleux , J. Penaud , Emmanuel Dubois , P. Coronel , G. Larrieu
Proceedings of the 12th Silicon Nanoelectronics Workshop, SNW 2007, 2007, Kyoto, Japan
Conference papers hal-00367364v1

An original selective etch of Pt vs PtSi using a low temperature germanidation process

N. Breil , A. Halimaoui , Emmanuel Dubois , G. Larrieu , J. Ratajczak
Proceedings of the 211th Electrochemical Society Meeting, 2007, Chicago, IL, United States
Conference papers hal-00367361v1

Investigations of high frequency performance of Schottky-barrier MOSFETs

R. Valentin , Emmanuel Dubois , J.P. Raskin , Gilles Dambrine , G. Larrieu
7th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2007, 2007, United States. pp.32-35, ⟨10.1109/SMIC.2007.322762⟩
Conference papers hal-00284381v1

High frequency figures of merit of conventional and Schottky barrier MOSFETs

Francois Danneville , R. Valentin , Emmanuel Dubois , Gilles Dambrine
4th International Symposium on System Construction of Global-Network-Oriented Information Electronics, 2007, Sendai, Japan. pp.412-417
Conference papers hal-00286235v1

Metallic source/drain architecture : status and prospects

Emmanuel Dubois , G. Larrieu , N. Breil , M. Ostling , P.E. Hellström
SINANO-ESSDERC Workshop, 2007, Munich, Germany
Conference papers hal-00367349v1

Erbium silicide formation under ultra high vacuum

N. Breil , Emmanuel Dubois , Y. Morand , V. Carron , A. Halimaoui
Proceedings of the 16th European Workshop on Materials for Advanced Metallization, MAM 2007, 2007, Bruges, Belgium
Conference papers hal-00367362v1

TEM study of the silicidation process in Pt/Si and Ir/Si structures

A. Laszcz , J. Ratajczak , A. Czerwinski , J. Katcki , N. Breil
Proceedings of the 15th International Conference on Microscopy of Semiconducting Materials, MSMXV, 2007, Cambridge, United Kingdom
Conference papers hal-00367363v1

Impact of n-type channel implantation on performance of p-type Schottky barrier MOSFETs

N. Breil , Emmanuel Dubois , A. Pouydebasque , T. Skotnicki
Proceedings of the 12th Silicon Nanoelectronics Workshop, SNW 2007, 2007, Kyoto, Japan
Conference papers hal-00367365v1

Low temperature implementation of dopant-segregated band-edge metallic S/D junctions in thin-body SOI p-MOSFETs

G. Larrieu , Emmanuel Dubois , R. Valentin , N. Breil , Francois Danneville
IEEE International Electron Devices Meeting, IEDM 2007, 2007, United States. pp.147-150, ⟨10.1109/IEDM.2007.4418886⟩
Conference papers hal-00284387v1

Fabrication and analysis of CMOS fully-compatible high conductance impact-ionization MOS (I-MOS) transistors

C. Charbuillet , Emmanuel Dubois , S. Monfray , P. Bouillon , T. Skotnicki
2006, pp.299-302
Conference papers hal-00138680v1

Influence of gate offset spacer width on SOI MOSFETs HF properties

R. Valentin , A. Siligaris , G. Pailloncy , Emmanuel Dubois , Gilles Dambrine
2006, pp.77-80
Conference papers hal-00126800v1

Iridium silicide : a promising electrode for metallic source/drain in decananometer MOSFETs

G. Larrieu , Emmanuel Dubois , X. Wallart , J. Katcki
2006, pp.123
Conference papers hal-00138682v1

Room temperature single-electron operation and fabrication of downscaled self-aligned single-dot memory devices

Xing Tang , N. Reckinger , V. Bayot , Christophe Krzeminski , Emmanuel Dubois
Materials Research Society Spring Meeting, MRS Spring 2006, 2006, San Francisco, CA, United States
Conference papers hal-00244026v1

Integration and performance of Schottky