Jean-Paul Booth

290
Documents

Présentation

Research interests

Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Development of sensors for in-situ control of industrial plasma processes.
Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.
Gas breakdown in RF fields.

Brief vitae

2000-Present : Directeur de Recherche, CNRS at LPP, except :
2006-2008 : Technical Director, Lam Research Corp, Fremont, CA, USA
1990-2000 : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
1988-1990 : Post-doctoral researcher, CNRS/CNET, Meylan, France
1985-1988 : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
1980-1984 : BA & MA, Chemistry, Oxford University, UK

Distinctions :
2010 : Fellow of AVS
1984 : Physical Chemistry Part II Thesis Prize, Oxford University
1980-1983 : Stapeldon Scholarship to Exeter College, Oxford

Editorial responsabilities and Conference organisation
Associate Editor of IoP journal Plasma Sources, Science and Technology
Chair, International Workshop on Oxygen Plasma Kinetics 2016
Chair, Laser-Aided Plasma Diagnostics 2013& 2015
Program Commitee, ICPP 2014
Secretary, AVS Plasma Science and Technology Division, 2012-13
Chair, International Conference on Phenomena in Ionised Gases, 2009

Publications

1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
90
57
51
50
43
41
31
31
26
26
25
25
25
24
24
19
18
17
16
14
14
13
12
12
12
10
10
10
9
9
9
9
8
7
7
7
7
7
7
7
7
7
6
6
6
6
6
6
5
5
5
5
5
5
5
5
5
5
5
5
4
4
4
4
4
4
4
4
4
4
4
4
4
4
4
4
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
7
5
4
3
5
7
20
20
24
35
29
21
33
26
20
16
8
1
6

Publications

Deposit thumbnail

Determination of the accuracy of actinometry and line ratio techniques in an O 2 glow discharge: part I, comparison of absolute oxygen atom densities with CRDS measurements

Edmond Baratte , Lex Kuijpers , Tiago Silva , Vasco Guerra , M C M van de Sanden et al.

Plasma Sources Science and Technology, 2025, ⟨10.1088/1361-⟩

Article dans une revue hal-05387630v1
Deposit thumbnail

On the use of pulsed DC bias for etching high aspect ratio features

Xingyi Shi , Samaneh Sadighi , Shahid Rauf , Han Luo , Jun-Chieh Wang et al.

Journal of Vacuum Science & Technology A, 2025, 43 (1), ⟨10.1116/6.0003943⟩

Article dans une revue hal-04818519v1
Deposit thumbnail

Determination of the accuracy of actinometry and line ratio techniques in an O <sub>2</sub> glow discharge: part II, Electric field measurements with Ar and Xe admixtures

Lex Kuijpers , Edmond Baratte , Olivier Guaitella , Jean-Paul Booth , Vasco Guerra et al.

Plasma Sources Science and Technology, 2025, ⟨10.1088/1361-6595/ae24aa⟩

Article dans une revue hal-05387634v1
Deposit thumbnail

Potential stratospheric ozone depletion due to iodine injection from small satellites

Wuhu Feng , John M C Plane , Martyn P. Chipperfield , Alfonso Saiz-Lopez , Jean‐paul Booth

Geophysical Research Letters, 2023, 50 (7), pp.e2022GL102300. ⟨10.1029/2022GL102300⟩

Article dans une revue hal-03976025v1
Deposit thumbnail

Oxygen atom and ozone kinetics in the afterglow of a pulse-modulated DC discharge in pure O2 : an experimental and modelling study of surface mechanisms and ozone vibrational kinetics

Jean-Paul Booth , Olivier Guaitella , Shu Zhang , Dmitry Lopaev , S Zyryanov et al.

Plasma Sources Science and Technology, 2023, 32 (9), pp.095016. ⟨10.1088/1361-6595/acf956⟩

Article dans une revue hal-04217064v1
Deposit thumbnail

Quenching of O2(b1Σg+) by O(3P) atoms. Effect of gas temperature

Jean-Paul Booth , A Chatterjee , O Guaitella , D Lopaev , S Zyryanov et al.

Plasma Sources Science and Technology, 2022, 31 (6), pp.065012. ⟨10.1088/1361-6595/ac7749⟩

Article dans une revue hal-03721576v1
Deposit thumbnail

Foundations of plasma surface functionalization of polymers for industrial and biological applications

Jean-Paul Booth , Miran Mozetič , Anton Nikiforov , Christian Oehr

Plasma Sources Science and Technology, 2022, 31 (10), pp.103001. ⟨10.1088/1361-6595/ac70f9⟩

Article dans une revue hal-03822222v1
Deposit thumbnail

Chemical kinetics and density measurements of OH in an atmospheric pressure He + O2 + H2O radiofrequency plasma

Alexandra Brisset , Andrew Gibson , Sandra Schröter , Kari Niemi , Jean-Paul Booth et al.

Journal of Physics D: Applied Physics, 2021, 54 (28), pp.285201. ⟨10.1088/1361-6463/abefec⟩

Article dans une revue hal-03200547v1
Deposit thumbnail

Fast quenching of metastable O2 (a 1Δg ) and O2 (b 1Σg+ ) molecules by O( 3P) atoms at high temperature

Andrey Vladimirovich Volynets , Dmitry Lopaev , T Rakhimova , O Proshina , Alexander Chukalovsky et al.

Plasma Sources Science and Technology, 2020, ⟨10.1088/1361-6595/abbf92⟩

Article dans une revue hal-02966916v1
Deposit thumbnail

Determination of absolute O(3P) and O2(a1Δg) densities and kinetics in fully modulated O2 dc glow discharges from the O2(X3Σg-) afterglow recovery dynamics

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , João Santos Sousa , Dmitry Lopaev et al.

Plasma Sources Science and Technology, 2020, 29, pp.115009. ⟨10.1088/1361-6595/abb5e7⟩

Article dans une revue hal-02933186v1
Deposit thumbnail

Rydberg spectra of singlet metastable states of O2

C. Western , Jean-Paul Booth , A. Chatterjee , N. de Oliveira

Molecular Physics, 2020, pp.e1741714. ⟨10.1080/00268976.2020.1741714⟩

Article dans une revue hal-02544881v1
Deposit thumbnail

Oxygen atom kinetics in CO<sub>2</sub> plasmas ignited in a DC glow discharge

A. S Morillo-Candas , Cyril Drag , Jean-Paul Booth , T. C Dias , V. Guerra et al.

Plasma Sources Science and Technology, 2019, 28 (7), pp.075010. ⟨10.1088/1361-6595/ab2b84⟩

Article dans une revue hal-02272107v1
Deposit thumbnail

Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas

Junkang Wang , Sébastien Diné , Jean-Paul Booth , Erik Johnson

Journal of Vacuum Science & Technology A, 2019, 37 (2), pp.021303. ⟨10.1116/1.5056205⟩

Article dans une revue hal-02081466v1
Deposit thumbnail

Oxygen (<SUP>3</SUP>P) atom recombination on a Pyrex surface in an O<SUB>2</SUB> plasma

Jean-Paul Booth , Olivier Guaitella , Abhyuday Chatterjee , Cyril Drag , V. Guerra et al.

Plasma Sources Science and Technology, 2019, 28 (5), pp.055005. ⟨10.1088/1361-6595/ab13e8⟩

Article dans une revue hal-02272108v1
Deposit thumbnail

Chemical kinetics in an atmospheric pressure helium plasma containing humidity

Sandra Schröter , Apiwat Wijaikhum , Andrew Gibson , Andrew West , Helen Davies et al.

Physical Chemistry Chemical Physics, 2018, 20 (37), pp.24263-24286. ⟨10.1039/c8cp02473a⟩

Article dans une revue hal-02266591v1

Effect of frequency on the uniformity of symmetrical RF CCP discharges

Yue Liu , Jean-Paul Booth , Pascal Chabert

Plasma Sources Science and Technology, 2018, 27 (5), pp.055012. ⟨10.1088/1361-6595/aabfb4⟩

Article dans une revue hal-01895562v1

Kinetics of highly vibrationally excited O<SUB>2</SUB> (X) molecules in inductively-coupled oxygen plasmas

Adriana Annusova , Daniil Marinov , Jean-Paul Booth , Nishant Sirse , Mrio Lino Da Silva et al.

Plasma Sources Science and Technology, 2018, 27 (4), pp.045006. ⟨10.1088/1361-6595/aab47d⟩

Article dans une revue hal-01895558v1

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Z. Donkó , A. Derzsi , Ihor Korolov , P. Hartmann , S. Brandt et al.

Plasma Physics and Controlled Fusion, 2018, 60 (1), pp.014010. ⟨10.1088/1361-6587/aa8378⟩

Article dans une revue hal-01895567v1
Deposit thumbnail

Calculated electron impact dissociation cross sections for molecular chlorine (Cl 2 )

James R. Hamilton , Jonathan Tennyson , Jean-Paul Booth , Timo Gans , Andrew Gibson

Plasma Sources Science and Technology, 2018, 27 (9), pp.095008. ⟨10.1088/1361-6595/aada32⟩

Article dans une revue hal-01890202v1

Multi frequency matching for voltage waveform tailoring

Frederik Schmidt , J. Schulze , Erik Johnson , Jean-Paul Booth , D. Keil et al.

Plasma Sources Science and Technology, 2018, 27 (9), pp.095012. ⟨10.1088/1361-6595/aad2cd⟩

Article dans une revue hal-02271985v1

Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation

Yue Liu , Jean-Paul Booth , Pascal Chabert

Plasma Sources Science and Technology, 2018, 27 (2), pp.025006. ⟨10.1088/1361-6595/aaa86e⟩

Article dans une revue hal-01895556v1

The role of thermal energy accommodation and atomic recombination probabilities in low pressure oxygen plasmas

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.

Plasma Physics and Controlled Fusion, 2017, 59 (2), pp.024004. ⟨10.1088/1361-6587/59/2/024004⟩

Article dans une revue hal-01895577v1

QDB: a new database of plasma chemistries and reactions

Jonathan Tennyson , Sara Rahimi , Christian Hill , Lisa Tse , Anuradha Vibhakar et al.

Plasma Sources Science and Technology, 2017, 26 (5), pp.055014. ⟨10.1088/1361-6595/aa6669⟩

Article dans une revue hal-01895568v1

Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: vibrational kinetics and negative ions control

P. Diomede , Bastien Bruneau , S. Longo , E.V. Johnson , Jean-Paul Booth

Plasma Sources Science and Technology, 2017, 26 (7), pp.075007. ⟨10.1088/1361-6595/aa752c⟩

Article dans une revue hal-01895582v1

Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges

A. Derzsi , Bastien Bruneau , Andrew Gibson , Erik Johnson , D. O'Connell et al.

Plasma Sources Science and Technology, 2017, 26 (3), pp.034002. ⟨10.1088/1361-6595/aa56d6⟩

Article dans une revue hal-01895575v1

Measurement of the isotope shift of the 2p<SUP>4</SUP> -> 2p<SUP>3</SUP>3p <SUP>3</SUP>P<SUB>2</SUB> two-photon transition of O I and a revision of the triplet energy levels of atomic oxygen

Daniil Marinov , Jean-Paul Booth , Cyril Drag , Christophe Blondel

Journal of Physics B: Atomic, Molecular and Optical Physics, 2017, 50 (6), pp.065003. ⟨10.1088/1361-6455/aa5a88⟩

Article dans une revue hal-01895572v1

Controlled production of atomic oxygen and nitrogen in a pulsed radio-frequency atmospheric-pressure plasma

J. Dedrick , Sandra Schröter , K. Niemi , A. Wijaikhum , E. Wagenaars et al.

Journal of Physics D: Applied Physics, 2017, 50 (45), pp.455204. ⟨10.1088/1361-6463/aa8da2⟩

Article dans une revue hal-01895585v1

Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

E. Schüngel , Ihor Korolov , Bastien Bruneau , A. Derzsi , E.V. Johnson et al.

Journal of Physics D: Applied Physics, 2016, 49 (26), pp.265203. ⟨10.1088/0022-3727/49/26/265203⟩

Article dans une revue hal-01549338v1
Deposit thumbnail

High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma

Daniil Marinov , Mickaël Foucher , Ewen Campbell , Mark Brouard , Pascal Chabert et al.

Plasma Sources Science and Technology, 2016, 25 (3), pp.035019 ⟨10.1088/0963-0252/25/3/035019⟩

Article dans une revue hal-01346016v1

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF<SUB>4</SUB>

S. Brandt , B. Berger , E. Schüngel , Ihor Korolov , A. Derzsi et al.

Plasma Sources Science and Technology, 2016, 25 (4), pp.045015. ⟨10.1088/0963-0252/25/4/045015⟩

Article dans une revue hal-01549325v1

Experimental and simulation study of a capacitively coupled oxygen discharge driven by tailored voltage waveforms

A. Derzsi , Trevor Lafleur , Jean-Paul Booth , Ihor Korolov , Zoltan Donko

Plasma Sources Science and Technology, 2016, 25 (1), pp.015004. ⟨10.1088/0963-0252/25/1/015004⟩

Article dans une revue hal-01549577v1

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bastien Bruneau , Ihor Korolov , Trevor Lafleur , T. Gans , D. O'Connell et al.

Journal of Applied Physics, 2016, 119 (16), pp.163301. ⟨10.1063/1.4947453⟩

Article dans une revue hal-01549329v1

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H<SUB>2</SUB> and CF<SUB>4</SUB>

Bastien Bruneau , Trevor Lafleur , T. Gans , D. O'Connell , Arthur Greb et al.

Plasma Sources Science and Technology, 2016, 25 (1), pp.01LT02. ⟨10.1088/0963-0252/25/1/01LT02⟩

Article dans une revue hal-01549332v1

Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms

Bastien Bruneau , Trevor Lafleur , Jean-Paul Booth , Erik Johnson

Plasma Sources Science and Technology, 2016, 25 (2), pp.025006. ⟨10.1088/0963-0252/25/2/025006⟩

Article dans une revue hal-01549334v1

Pressure broadening of atomic oxygen two-photon absorption laser induced fluorescence

Daniil Marinov , Cyril Drag , Christophe Blondel , Olivier Guaitella , Judith Golda et al.

Plasma Sources Science and Technology, 2016, 25 (6), pp.06LT03. ⟨10.1088/0963-0252/25/6/06LT03⟩

Article dans une revue hal-01549339v1

A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma

Efe Kemaneci , Jean-Paul Booth , Pascal Chabert , Jan van Dijk , Thomas Mussenbrock et al.

Plasma Sources Science and Technology, 2016, 25 (2), pp.025025. ⟨10.1088/0963-0252/25/2/025025⟩

Article dans une revue hal-01549335v1

Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , E.V. Johnson et al.

Physical Review Letters, 2015, 114, pp.125002. ⟨10.1103/PhysRevLett.114.125002⟩

Article dans une revue hal-01549359v1

Gas temperature measurements in oxygen plasmas by high-resolution Two-Photon Absorption Laser-induced Fluorescence

Jean-Paul Booth , Daniil Marinov , Mickaël Foucher , Olivier Guaitella , D. Bresteau et al.

Journal of Instrumentation, 2015, 10 (11), pp.C11003. ⟨10.1088/1748-0221/10/11/C11003⟩

Article dans une revue hal-01549365v1

Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson

Plasma Sources Science and Technology, 2015, 24 (1), pp.015021. ⟨10.1088/0963-0252/24/1/015021⟩

Article dans une revue hal-01549355v1

TALIF measurements of oxygen atom density in the afterglow of a capillary nanosecond discharge

A.V. Klochko , J. Lemainque , Jean-Paul Booth , Svetlana Starikovskaia

Plasma Sources Science and Technology, 2015, 24 (2), pp.025010. ⟨10.1088/0963-0252/24/2/025010⟩

Article dans une revue hal-01549360v1

Highly vibrationally excited O<SUB>2</SUB> molecules in low-pressure inductively-coupled plasmas detected by high sensitivity ultra-broad-band optical absorption spectroscopy

Mickaël Foucher , Daniil Marinov , Emile Carbone , Pascal Chabert , Jean-Paul Booth

Plasma Sources Science and Technology, 2015, 24 (4), pp.042001. ⟨10.1088/0963-0252/24/4/042001⟩

Article dans une revue hal-01549357v1

Radio-frequency capacitively coupled plasmas in hydrogen excited by tailored voltage waveforms: comparison of simulations with experiments

P. Diomede , D. J. Economou , Trevor Lafleur , Jean-Paul Booth , S. Longo

Plasma Sources Science and Technology, 2014, 23 (6), pp.065049. ⟨10.1088/0963-0252/23/6/065049⟩

Article dans une revue hal-01549381v1

Electron transport parameters in NF<SUB>3</SUB>

V. A. Lisovskiy , V. D. Yegorenkov , P. Ogloblina , Jean-Paul Booth , S. Martins et al.

Journal of Physics D: Applied Physics, 2014, 47 (11), pp.115203. ⟨10.1088/0022-3727/47/11/115203⟩

Article dans une revue hal-01549378v1

Electron heating in capacitively coupled plasmas revisited

Trevor Lafleur , Pascal Chabert , Jean-Paul Booth

Plasma Sources Science and Technology, 2014, 23 (3), pp.035010. ⟨10.1088/0963-0252/23/3/035010⟩

Article dans une revue hal-01549379v1

Equivalence of the hard-wall and kinetic-fluid models of collisionless electron heating in capacitively coupled discharges

Trevor Lafleur , Pascal Chabert , Miles Turner , Jean-Paul Booth

Plasma Sources Science and Technology, 2014, 23 (1), pp.015016. ⟨10.1088/0963-0252/23/1/015016⟩

Article dans une revue hal-01549398v1

Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Nishant Sirse , Mickaël Foucher , Pascal Chabert , Jean-Paul Booth

Plasma Sources Science and Technology, 2014, 23 (6), pp.062003. ⟨10.1088/0963-0252/23/6/062003⟩

Article dans une revue hal-01549574v1

Global (volume-averaged) model of inductively coupled chlorine plasma: Influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas

Efe Kemaneci , Emile Carbone , Jean-Paul Booth , Wouter Graef , Jan van Dijk et al.

Plasma Sources Science and Technology, 2014, 23 (4), pp.045002. ⟨10.1088/0963-0252/23/4/045002⟩

Article dans une revue hal-01549388v1

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson

Plasma Sources Science and Technology, 2014, 23 (6), pp.065010. ⟨10.1088/0963-0252/23/6/065010⟩

Article dans une revue hal-01549377v1

Chlorine atom densities in the (3p<SUP>5</SUP>)<SUP>2</SUP> P<SUP>0</SUP><SUB>1/2</SUB> excited spin-orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma

Nishant Sirse , Jean-Paul Booth , Pascal Chabert , A. Surzhykov , P. Indelicato

Journal of Physics D: Applied Physics, 2013, 46 (29), pp.295203. ⟨10.1088/0022-3727/46/29/295203⟩

Article dans une revue hal-01549418v1

Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Pierre-Alexandre Delattre , Trevor Lafleur , Erik Johnson , Jean-Paul Booth

Journal of Physics D: Applied Physics, 2013, 46, pp.235201. ⟨10.1088/0022-3727/46/23/235201⟩

Article dans une revue hal-01549413v1

Direct observation of ozone formation on SiO<SUB>2</SUB> surfaces in O<SUB>2</SUB> discharges

Daniil Marinov , Olivier Guaitella , Jean-Paul Booth , Antoine Rousseau

Journal of Physics D: Applied Physics, 2013, 46, pp.032001. ⟨10.1088/0022-3727/46/3/032001⟩

Article dans une revue hal-01549402v1

Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth

Plasma Physics and Controlled Fusion, 2013, 55 (12), pp.124002. ⟨10.1088/0741-3335/55/12/124002⟩

Article dans une revue hal-01549416v1

Anomalous collisionality in low-pressure plasmas

Trevor Lafleur , Pascal Chabert , M.M. Turner , Jean-Paul Booth

Physics of Plasmas, 2013, 20 (12), pp.124503. ⟨10.1063/1.4859155⟩

Article dans une revue hal-01549421v1

Theory for the self-bias formation in capacitively coupled plasmas excited by arbitrary waveforms

Trevor Lafleur , Pascal Chabert , M.M. Turner , Jean-Paul Booth

Plasma Sources Science and Technology, 2013, 22 (6), pp.065013. ⟨10.1088/0963-0252/22/6/065013⟩

Article dans une revue hal-01549415v1

Fine-structure-resolved electron collisions from chlorine atoms in the (3p<SUP>5</SUP>)<SUP>2</SUP>P<SUB>3/2</SUB><SUP>o</SUP> and (3p<SUP>5</SUP>)<SUP>2</SUP>P<SUB>1/2</SUB><SUP>o</SUP> states

Yang Wang , Oleg Zatsarinny , Klaus Bartschat , Jean-Paul Booth

Physical Review A : Atomic, molecular, and optical physics [1990-2015], 2013, 87, pp.022703. ⟨10.1103/PhysRevA.87.022703⟩

Article dans une revue hal-01549405v1

Absolute atomic oxygen and nitrogen densities in radio-frequency driven atmospheric pressure cold plasmas: Synchrotron vacuum ultra-violet high-resolution Fourier-transform absorption measurements

K. Niemi , D. O'Connell , N. de Oliveira , D. Joyeux , L. Nahon et al.

Applied Physics Letters, 2013, 103 (3), pp.034102. ⟨10.1063/1.4813817⟩

Article dans une revue hal-01549425v1

Normal regime of the weak-current mode of an rf capacitive discharge

V. A. Lisovskiy , V. D. Yegorenkov , E. Artushenko , Jean-Paul Booth , S. Martins et al.

Plasma Sources Science and Technology, 2013, 22 (1), pp.015018. ⟨10.1088/0963-0252/22/1/015018⟩

Article dans une revue hal-01549408v1

Ozone kinetics in low-pressure discharges: vibrationally excited ozone and molecule formation on surfaces

Daniil Marinov , V. Guerra , Olivier Guaitella , Jean-Paul Booth , Antoine Rousseau

Plasma Sources Science and Technology, 2013, 22, pp.055018. ⟨10.1088/0963-0252/22/5/055018⟩

Article dans une revue hal-01549572v1

Secondary electron induced asymmetry in capacitively coupled plasmas

Trevor Lafleur , Pascal Chabert , Jean-Paul Booth

Journal of Physics D: Applied Physics, 2013, 46, pp.135201. ⟨10.1088/0022-3727/46/13/135201⟩

Article dans une revue hal-01549417v1

Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , Sébastien Diné

Review of Scientific Instruments, 2013, 84, pp.015001. ⟨10.1063/1.4773540⟩

Article dans une revue hal-01549400v1

Frequency dependence of the electrical asymmetry effect in dual-frequency capacitively coupled discharges

Jean-Paul Booth , Trevor Lafleur

Applied Physics Letters, 2013, 102, pp.154104. ⟨10.1063/1.4802241⟩

Article dans une revue hal-01549406v1

Tailored voltage waveform deposition of Microcrystalline Silicon thin films from hydrogen-diluted silane and silicon tetrafluoride: optoelectronic properties of films

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth

Japanese Journal of Applied Physics, 2012, 51, pp.08HF01. ⟨10.1143/JJAP.51.08HF01⟩

Article dans une revue hal-01549433v1

Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth

Journal of Non-Crystalline Solids, 2012, 358 (17), pp.1974-1977. ⟨10.1016/j.jnoncrysol.2012.01.014⟩

Article dans une revue istex hal-01549432v1

Control of the ion flux and ion energy in CCP discharges using non-sinusoidal voltage waveforms

Trevor Lafleur , Jean-Paul Booth

Journal of Physics D: Applied Physics, 2012, 45, pp.395203. ⟨10.1088/0022-3727/45/39/395203⟩

Article dans une revue istex hal-01549449v1

Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth

Applied Physics Letters, 2012, 100, pp.133504. ⟨10.1063/1.3699222⟩

Article dans une revue hal-01549437v1

Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

Trevor Lafleur , R.W. Boswell , Jean-Paul Booth

Applied Physics Letters, 2012, 100, pp.194101. ⟨10.1063/1.4712128⟩

Article dans une revue hal-01549438v1

A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring

V. Samara , Jean-Paul Booth , J.-F. de Marneffe , A.P. Milenin , M. Brouri et al.

Plasma Sources Science and Technology, 2012, 21, pp.065004. ⟨10.1088/0963-0252/21/6/065004⟩

Article dans une revue istex hal-01549444v1

Separate control of the ion flux and ion energy in capacitively coupled rf discharges using voltage waveform tailoring

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth

Applied Physics Letters, 2012, 101, pp.124104. ⟨10.1063/1.4754692⟩

Article dans une revue hal-01549435v1

Absolute atomic chlorine densities in a Cl<SUB>2</SUB> ICP determined by Two-Photon Laser Induced Fluorescence with a new calibration method

Jean-Paul Booth , Yasmina Azamoum , Nishant Sirse , Pascal Chabert

Journal of Physics D: Applied Physics, 2012, 45, pp.195201. ⟨10.1088/0022-3727/45/19/195201⟩

Article dans une revue istex hal-01549434v1

Control of Nanocrystalline Silicon Growth Phase and Deposition Rate through Voltage Waveform Tailoring during PECVD

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth

MRS Online Proceedings Library, 2011, 1339, pp.mrss11-1339-s04-5. ⟨10.1557/opl.2011.993⟩

Article dans une revue hal-01549456v1

Surface loss rates of H and Cl atoms in an inductively coupled plasma etcher using time-resolved electron density and optical emission measurements

G. A. Curley , L. Gatilova , S. Guilet , S. Bouchoule , G. S. Gogna et al.

Journal of Vacuum Science & Technology A, 2010, 28 (2), pp.360-372. ⟨10.1116/1.3330766⟩

Article dans une revue hal-01549465v1

Plasmas froids

Jean-Paul Booth , Pascal Chabert

Flash X - La revue scientifique de l'Ecole polytechnique, 2010, 12, pp.3-5

Article dans une revue hal-02570443v1

Electron drift velocity in SF<SUB>6</SUB> in strong electric fields determined from rf breakdown curves

V. Lisovskiy , V. Yegorenkov , Jean-Paul Booth , K. Landry , D. Douai et al.

Journal of Physics D: Applied Physics, 2010, 43, pp.385203. ⟨10.1088/0022-3727/43/38/385203⟩

Article dans une revue istex hal-01549464v1

Dual-frequency capacitive radiofrequency discharges: effect of low-frequency power on electron density and ion flux

Jean-Paul Booth , G. Curley , D. Marić , Pascal Chabert

Plasma Sources Science and Technology, 2010, 19, pp.015005. ⟨10.1088/0963-0252/19/1/015005⟩

Article dans une revue istex hal-01549466v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

E.V. Johnson , T. Verbeke , J-C Vanel , Jean-Paul Booth

Journal of Physics D: Applied Physics, 2010, 43, pp.412001. ⟨10.1088/0022-3727/43/41/412001⟩

Article dans une revue istex hal-01549485v1

Electron transport coefficients in mixtures of CF<SUB>4</SUB> and CF<SUB>2</SUB> radicals

Zd Nikitovic , Vd Stojanovic , Jean-Paul Booth , Zl Petrovic

Plasma Sources Science and Technology, 2009, 18, pp.035008. ⟨10.1088/0963-0252/18/3/035008⟩

Article dans une revue istex hal-01549497v1

Chlorine dissociation fraction in an inductively coupled plasma measured by ultraviolet absorption spectroscopy

F. Neuilly , J.P Booth , L. Vallier

Journal of Vacuum Science and Technology, 2002, pp.A20(1), 225, (2002)

Article dans une revue hal-00475898v1
Deposit thumbnail

Absolute fluorine atoms concentration in fluorocarbon plasma determined from CF2 loss kinetics

Gilles Cunge , Pascal Chabert , Jean-Paul Booth

Journal of Applied Physics, 2001, 89 (12), pp.7750. ⟨10.1063/1.1371940⟩

Article dans une revue hal-00475790v1

Reactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2 etch products

Pascal Chabert , G. Cunge , Jean-Paul Booth

Applied Physics Letters, 2001, pp.79, 916

Article dans une revue hal-00475792v1

In-situ measurement of surface reaction probabilities in low-pressure plasmas

Jean-Paul Booth , Shu Zhang , Garrett Curley

XXXVI ICPIG, Jul 2025, Aix -en-Provence, France

Communication dans un congrès hal-05357588v1
Deposit thumbnail

Comparative Study on Microwave Diagnostics: Cutoff Probe, Hairpin Probe, and Microwave Interferometer

S. Kim , Jean-Paul Booth , Garrett Curley

XXXVI ICPIG, Jul 2025, Aix -en-Provence, France

Communication dans un congrès hal-05357670v1

Oxygen atom kinetics in pulsed Radiofrequency Capacitively-coupled plasmas in pure O2 at intermediate pressures

Jean-Paul Booth , Shu Zhang , Garrett Curley

77th Annual Gaseous Electronics Conference, APS, Sep 2024, San Diego (CA), United States

Communication dans un congrès hal-05354550v1

Hybrid Plasma Modeling of Capacitively-Coupled O2 Plasma at Intermediate Pressures and Comparison with Experiments

Nakul Nuwal , Rupali Sahu , Kallol Bera , Abhishek Verma , Shahid Rauf et al.

77th Annual Gaseous Electronics Conference, APS, Sep 2024, San Diego (CA), United States

Communication dans un congrès hal-05354532v1

Atom recombination on surfaces in plasmas - an experimental study

Jean-Paul Booth

KISM 2024 The 3rd Korean International Semiconductor Conference & Exhibition on Manufacturing Technology, The Korean Society of Semiconductor & Display Technology (KSDT), Nov 2024, Busan, South Korea

Communication dans un congrès hal-05357606v1

Experimental study of intermediate-Pressure RF-CCP in Ar-O2 mixtures

Shu Zhang , Garrett Curley , Jean-Paul Booth

77th Annual Gaseous Electronics Conference, APS, Sep 2024, San Diego (CA), United States

Communication dans un congrès hal-05354483v1

Simulation and Characterization of Capacitively-Coupled Argon Plasma at Intermediate Pressure

Rupali Sahu , Nakul Nuwal , Kallol Bera , Shahid Rauf , Jean-Paul Booth et al.

77th Annual Gaseous Electronics Conference, APS, Sep 2024, San Diego (CA), United States

Communication dans un congrès hal-05354540v1

Improving our understanding of plasma-surface interactions through in-situ measurements

Jean-Paul Booth

Dry Process Symposium, Nov 2023, Nagoya, Japan

Communication dans un congrès hal-04397985v1

Probing surface reactivity in plasmas- is it valid to use a constant reaction probability model?

Jean-Paul Booth

GEC Gaseous Electronics Conference, American Physical Society, Oct 2023, Ann Arbor, MI, USA, United States

Communication dans un congrès hal-04398014v1

What We Still Don't Know About Plasmas in Simple Diatomic Gases- or Using a DC Plasma in Pure O2 as an Ideal Test-Bed for Experimental Validation of Simulations

Jean-Paul Booth

AVS Symposium, Nov 2022, Pittsburgh, PA, United States

Communication dans un congrès hal-04398035v1

Filling the Gaps in Our Understanding of Plasmas in Simple Diatomic Gases- Combining a DC Plasma in Pure O2 with Multiple Advanced Diagnostics for Experimental Validation of Simulations

Jean-Paul Booth

IS Plasma, University of Nagoya, Mar 2021, Nagoya (on line), Japan

Communication dans un congrès hal-04398109v1

Laser Cavity Ringdown Spectroscopy of Oxygen Plasmas: Direct Measurement of the Densities of Oxygen Atoms, Ozone and Negative Ions and Gas Temperature

Jean-Paul Booth

Online Low Temperature Plasma Seminar, May 2021, On line, United States

Communication dans un congrès hal-03317442v1
Deposit thumbnail

Filling the Gaps in Our Understanding of Plasmas in Simple Diatomic Gases-Combining a DC Plasma in Pure O2 with Multiple Advanced Diagnostics for Experimental Validation of Simulations

Jean-Paul Booth , A Chatterjee , O Guaitella , D Lopaev , S Zyryanov et al.

IS Plasma 2021, Mar 2021, Nagoya, Japan

Communication dans un congrès hal-03317344v1

A new look at oxygen plasmas : Quantitative VUV and IR absorption spectroscopy of reactive intermediates

Jean-Paul Booth

JSM -Journees de Spectroscopie Moleculaire, Universite de Rennes/ Societe Francaise de Physique, Jun 2021, Rennes, France

Communication dans un congrès hal-04398064v1

Experimental and numerical investigation of an iodine plasma

Florian Marmuse , Benjamin Esteves , Cyril Drag , Jean-Paul Booth , Anne Bourdon et al.

73rd Annual Gaseous Electronics Virtual Conference, Oct 2020, Virtual, United States

Communication dans un congrès hal-03322751v1

A NEW LOOK AT OXYGEN PLASMAS -QUANTITATIVE SPECTROSCOPY FOR RIGOROUS TESTING OF MODELS

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Dmitry Lopaev , Sergey Zyryanov et al.

International Symposium on the Physics of Ionized Gases, Aug 2020, Sabac, Serbia

Communication dans un congrès hal-03017283v1

Tailoring OH and O production in an atmospheric-pressure plasma in Helium with O2 and H2O admixtures

Erik Wagenaars , Alexandra Brisset , Sandra Schröter , Kari Niemi , Deborah O'Connell et al.

GEC2020 Meeting of The American Physical Society, Oct 2020, San Diego, United States

Communication dans un congrès hal-03017258v1

A new look at Oxygen Plasmas – Quantitative Spectroscopy for rigorous testing of models

Jean-Paul Booth

SPIG - Symposium on Physics of Ionised Gases, Aug 2020, Sabac, Serbia. pp.1

Communication dans un congrès hal-04398151v1

A comprehensive diagnostic study of a DC positive column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Cyril Drag , N. de Oliveira et al.

Frontiers in low Temperature plasma simulation, May 2019, Bad Honnef, Germany

Communication dans un congrès hal-02341779v1

Experimental Demonstration of Multifrequency Matching for Tailored Voltage Waveform Plasma Excitation

Sebastien Dine , Jean-Paul Booth , E.V. Johnson , Junkang Wang

International Conference on Phenomena in Ionised Gases, Jul 2019, Hokkaido, Japan

Communication dans un congrès hal-02341689v1

A Comprehensive Diagnostic Study of a DC Positive Column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth

CESPC-Central European Symposium on Plasma Chemistry, May 2019, Gozd Martuljek, Slovenia

Communication dans un congrès hal-04398185v1

Novel diagnostics to unravel fundamental processes in oxygen plasmas

Jean-Paul Booth

ICAPT-7 : 7th International Conference on Advanced Plasma Technologies, Plasmadis, Feb 2019, Hue, Vietnam

Communication dans un congrès hal-04398232v1

XXXIV ICPIG & ICRP-10

Olivier Guaitella , Ana-Sofia Morillo-Candas , Tiago Dias , Edmond Baratte , P. Ogloblina et al.

Influence of surfaces in the kinetic of CO2 plasma, Jul 2019, Sapporo, Hokkaido, Japan

Communication dans un congrès hal-02371063v1

A comprehensive diagnostic study of a DC positive column in O<SUB>2</SUB>: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.

7th International Conference on Advanced Plasma Technologies, May 2019, Gozd Martuljek, Slovenia

Communication dans un congrès hal-02341781v1

Novel diagnostics to unravel fundamental processes in oxygen plasmas

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Cyril Drag , Dmitry Lopaev et al.

7th International Conference on Advanced Plasma Technologies, Feb 2019, Hue, Vietnam

Communication dans un congrès hal-02341778v1
Deposit thumbnail

Optical and electrical diagnostics in an iodine plasma

Florian Marmuse , Romain Lucken , Cyril Drag , Jean-Paul Booth , Anne Bourdon et al.

36th International Electric Propulsion Conference (IEPC 2019), Sep 2019, Vienne, Austria

Communication dans un congrès hal-02341690v1

A Comprehensive Diagnostic Study of a DC Positive Column in O2: a test-bed for models of plasmas in a diatomic gas

Jean-Paul Booth

Frontiers in low Temperature plasma simulation, May 2019, Bad Honnef (Germany), Germany

Communication dans un congrès hal-04398198v1

Vacuum ultraviolet absorption spectroscopy of oxygen discharges

Jean-Paul Booth

3rd European Conference on Plasma Diagnostics, May 2019, Lisbon, Portugal

Communication dans un congrès hal-02341780v1

63rd Course of the International School of Quantum Electronics

Olivier Guaitella , Ana-Sofia Morillo-Candas , Cyril Drag , Jean-Paul Booth , Bart Klarenaar et al.

Diagnostics to study vibrational excitation kinetics of CO2, Sep 2019, Erice, Italy

Communication dans un congrès hal-02371062v1

High&#8722;resolution VUV absorption diagnostics of discharges in oxygen

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.

20th Gaseous Electronics Meeting, Jun 2018, Magnetic Island, Townsville, Queensland, Australia

Communication dans un congrès hal-02341777v1

Oxygen metastable molecule densities in inductively-coupled plasmas in pure O<SUB>2</SUB> measured by VUV absorption

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.

71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States

Communication dans un congrès hal-02342229v1

Diagnostics of plasma neutral species in a very high frequency oxygen plasma with high sensitivity broadband absorption spectroscopy

J. Zhao , Peter L G Ventzek , Barton Lane , Toshihiko Iwao , Kiyotaka Ishibashi et al.

AVS Symposium, Oct 2018, Long Beach, California, United States

Communication dans un congrès hal-02342227v1

Comparison of gas temperature measurements with Raman, FTIR and HR-TALIF

Ana-Sofia Morillo-Candas , Bart Klarenaar , Marija Grofulovic , Cyril Drag , Jean-Paul Booth et al.

ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom

Communication dans un congrès hal-02342225v1

Effect of high surface-area on CO<SUB>2</SUB> plasma kinetics

Ana-Sofia Morillo-Candas , C. Goncalves , Bart Klarenaar , Jean-Paul Booth , Cyril Drag et al.

ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom

Communication dans un congrès hal-02342226v1

Vacuum ultraviolet absorption spectroscopy of oxygen discharges

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.

The 8th International Workshop on Plasma Spectroscopy, Sep 2018, Oxford, United Kingdom

Communication dans un congrès hal-02342224v1

Multi-species experimental validation of plasma chemistry models at atmospheric pressure

Sandra Schröter , A. Wijiakaum , Andrew Gibson , Jérôme Bredin , K. Niemi et al.

Frontiers in Low temperature Plasma Simulation, May 2018, Dublin, Ireland

Communication dans un congrès hal-02342228v1

High-resolution VUV absorption diagnostics of discharges in oxygen

Jean-Paul Booth

GEM XX : 10th Gaseous Electronic Meeting, Jun 2018, Magnetic Island, Townsville, Queensland, Australia

Communication dans un congrès hal-04398249v1

The role of translational and vibrational energy in processing plasmas: novel optical diagnostics of low-pressure Cl<SUB>2</SUB> and O<SUB>2</SUB> inductively-coupled plasmas

Jean-Paul Booth

1st Asia-Pacific Conference on Plasma Physics, Sep 2017, Chengdu, China

Communication dans un congrès hal-02573371v1

High resolution Two-photon Absorption Laser-Induced Fluorescence (TALIF) with a single-mode nanosecond Ti:Sapphire laser

Ana-Sofia Morillo-Candas , Pierre Lottigier , Cyril Drag , Christophe Blondel , Jean-Paul Booth et al.

18th, Laser Aided Plasma Diagnostics, Sep 2017, Prague, Czech Republic, Unknown Region

Communication dans un congrès hal-02593711v1

Kinetics of metastable states and atoms in DC discharges in pure O<SUB>2</SUB>: An experimental study

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.

23rd International Symposium on Plasma Chemistry, Jul 2017, Montréal, Canada

Communication dans un congrès hal-02593710v1

New methods to determine density, temperature and thermal accommodation coefficient of oxygen atoms

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Andrew Gibson , Cyril Drag et al.

International Workshop on Radio-frequency Plasmas, May 2017, Presqu ile de Giens, France

Communication dans un congrès hal-02593706v1

Probing mechanisms in low-temperature reactive gas plasmas: towards improved models of industrial plasma etch processes

Jean-Paul Booth

2nd European Conference on Plasma Diagnostics, Apr 2017, Bordeaux, France

Communication dans un congrès hal-02573369v1

Kinetics of atoms and metastable molecules in oxygen plasmas revisited: an experimental study

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Ana-Sofia Morillo-Candas , Cyril Drag et al.

10th EU-Japan Joint Symposium on Plasma Processing, Dec 2017, Okinawa, Japan

Communication dans un congrès hal-02573372v1

Single-mode nanosecond Ti: Sapphire laser for high resolution Two-photon Absorption Laser Induced-Fluorescence (TALIF)

Daniil Marinov , Christophe Blondel , Jean-Paul Booth , Olivier Guaitella , Pierre Lottigier et al.

2017 European Conference on Lasers and Electro-Optics and European Quantum Electronics Conference, Jun 2017, Munich, Germany. Paper# CH_3_3

Communication dans un congrès hal-02588053v1

O atom kinetics in CO<SUB>2</SUB> pulsed glow discharges

Ana-Sofia Morillo-Candas , Bart Klarenaar , Richard Engeln , Abhyuday Chatterjee , Jean-Paul Booth et al.

XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal

Communication dans un congrès hal-02593709v1

Vibrational excitation and temperature evolution in a pulsed CO<SUB>2</SUB> discharge

Olivier Guaitella , Ana-Sofia Morillo-Candas , David Yap , Cyril Drag , Jean-Paul Booth et al.

70th Annuel Gaseous Electronics Conference (GEC 2017), 2017, Pittsburgh, Pennsylvania, United States

Communication dans un congrès hal-02592107v1

2 Dimensional PIC/MCC simulations of RF CCPs with dielectric side wall: non-uniformity in electron heating

Yue Liu , Jean-Paul Booth , Pascal Chabert

International Workshop on Radio-Frequency Plasmas, May 2017, Presqu’ile de Giens, France

Communication dans un congrès hal-02593707v1

The role of surface interaction probabilities in reactive plasma modelling

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.

ESCAMPIG, Jul 2016, Bratislava, Slovakia

Communication dans un congrès hal-02593684v1

Vibrational excitation in O<SUB>2</SUB> and Cl<SUB>2 </SUB> inductively-coupled plasmas and DC discharges

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Andrew Gibson , Pascal Chabert et al.

ESCAMPIG Workshop on electron processes active in low temperature plasmas, Jul 2016, Bratislava, Slovakia

Communication dans un congrès hal-02573355v1

Quantitative Diagnostics of Inductively-coupled Radiofrequency Plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures

Jean-Paul Booth , Mickaël Foucher , Andrew Gibson , Daniil Marinov

International Symposium on Gas Kinetics and Related Phenomena, Jul 2016, York, United Kingdom

Communication dans un congrès hal-02593687v1

Charged and neutral particle dynamics in low pressure chlorine and oxygen plasmas: the role of collisional processes

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.

EPS Plasma, Jul 2016, Leuven, Belgium

Communication dans un congrès hal-02573351v1

Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary

Yue Liu , Jean-Paul Booth , Pascal Chabert

GEC, Oct 2016, Bochum, Germany

Communication dans un congrès hal-02593691v1

Multifrequency impedance matching solutions for plasma excitation by Tailored Voltage Waveforms

Erik Johnson , Sebastien Dine , Jean-Paul Booth

AVS Symposium, Nov 2016, Nashville, United States

Communication dans un congrès hal-02593689v1

Gas temperature measuements by high-resolution TALIF

Jean-Paul Booth

Workshop on Oxygen Plasma Kinetics, Sep 2016, Reykjavik, Iceland

Communication dans un congrès hal-02593694v1

Plasma-surface interaction: Heterogeneous processes of atmospheric gases

Daniil Marinov , Olivier Guaitella , V. Guerra , Jean-Paul Booth , Antoine Rousseau

ESCAMPIG, Jul 2016, Bratislava, Slovakia

Communication dans un congrès hal-02573354v1

Reactive species in humidity containing atmospheric pressure plasma jets − Numerical and experimental investigations

Sandra Schröter , Jérôme Bredin , A. West , J. Dedrick , K. Niemi et al.

GEC, Oct 2016, Bochum, Germany

Communication dans un congrès hal-02593693v1

Translational and Vibrational Energy in Cl<SUB>2</SUB> and O<SUB>2</SUB> Plasmas Probed by Innovative Optical Diagnostics

Jean-Paul Booth , Daniil Marinov , Mickaël Foucher , Olivier Guaitella , Cyril Drag et al.

AVS Symposium, Nov 2016, Nashville, United States

Communication dans un congrès hal-02573357v1

Modelling of tailored ion energy distributions for plasma processing applications

P. Diomede , Trevor Lafleur , Jean-Paul Booth , S. Longo , D. J. Economou

ESCAMPIG, Jul 2016, Bratislava, Slovakia

Communication dans un congrès hal-02573353v1

Modelling and experimental validation of capacitively coupled plasmas in hydrogen

D. Diomede , Bastien Bruneau , Trevor Lafleur , D. J. Economou , S. Longo et al.

EPS Plasma, Jul 2016, Leuven, Belgium

Communication dans un congrès hal-02573350v1

Dynamics of inductive plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> and Cl<SUB>2</SUB>/O<SUB>2</SUB> mixtures: quantitative diagnostics and numerical modelling

Daniil Marinov , Mickaël Foucher , Andrew Gibson , Pascal Chabert , Jean-Paul Booth

IVC (International Vacuum Conference), Aug 2016, Busan, Korea, Unknown Region

Communication dans un congrès hal-02573356v1

The importance of surface interaction probabilities in low pressure plasma simulations for process design

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.

PESM (Plasma Etch and Strip for Microelectronics), May 2016, Grenoble, France

Communication dans un congrès hal-02593686v1

ELECTRON POWER ABSORPTION DYNAMICS AND ION ENERGY DISTRIBUTIONS IN CAPACITIVE DISCHARGES DRIVEN BY CUSTOMIZED VOLTAGE WAVEFORMS IN ARGON AND CF<SUB>4</SUB>

B. Berger , S. Brandt , J. Franek , E. Shuengel , M. Koepke et al.

IEEE-ICOPS, Jun 2016, Banff, Canada

Communication dans un congrès hal-02593683v1

Charged Particle Dynamics in Technological Radio Frequency Plasmas Operated in CF<SUB>4</SUB>

J. Schulze , B. Berger , S. Brandt , Bastien Bruneau , Y. Liu et al.

AVS Symposium, Nov 2016, Nashville, United States

Communication dans un congrès hal-02573358v1

Heating dynamics and control of energy distribution functions in capacitive discharges driven by tailored voltage waveforms

J. Schulze , B. Berger , S. Brandt , M. Koepke , T. Mussenbrock et al.

International Conference on Plasma Physics ICPP, Jun 2016, Kaohsiung, Taiwan

Communication dans un congrès hal-02573352v1

Vibrational excitation in O<SUB>2</SUB> and Cl<SUB>2</SUB> inductively-coupled plasmas and DC discharges

V. Guerra , Jean-Paul Booth , Daniil Marinov , Mickaël Foucher , Adriana Annusova

GEC, Oct 2016, Bochum, Germany

Communication dans un congrès hal-02593690v1

Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures

Jean-Paul Booth

Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland

Communication dans un congrès hal-02573339v1

101 uses of Cold Plasmas: from smartphones to space travel

Jean-Paul Booth

Plas@par International Summer School : Discover Plasmas, Aug 2015, Roscoff, France

Communication dans un congrès hal-02573342v1

Density and temperature measurements in ICP's of Cl<SUB>2</SUB>/O<SUB>2</SUB> using high sensitivity ultra broad-band absorption spectroscopy

Mickaël Foucher , Daniil Marinov , Emile Carbone , Pascal Chabert , Jean-Paul Booth

International Symposium on Plasma Chemistry, Jul 2015, Anvers, Belgium

Communication dans un congrès hal-02593678v1

Detection of Biomedically Relevant Reactive Oxygen Species in Atmospheric Pressure Plasmas

Sandra Schröter , Jérôme Bredin , K. Niemi , J. Dedrick , Mickaël Foucher et al.

AVS Symposium, Oct 2015, San Jose, California, United States

Communication dans un congrès hal-02593680v1

Reactive species generated in atmospheric-pressure plasmas with water admixtures for biomedical applications: Absolute measurements and numerical simulations

Sandra Schröter , Jérôme Bredin , A. West , K. Niemi , J. Dedrick et al.

Gaseaous Electronics Conference, Oct 2015, Honolulu, United States

Communication dans un congrès hal-02593672v1

Vibrational kinetics in Cl<SUB>2</SUB> and O<SUB>2</SUB> low-pressure inductively-coupled plasmas

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Adriana Annusova et al.

Gaseous Electronics Conference, Oct 2015, Honolulu, United States

Communication dans un congrès hal-02593669v1

Modelling the influence of neutral gas heating mechanisms on particle densities in inductively coupled chlorine discharges

Andrew Gibson , T. Gans , Mickaël Foucher , Daniil Marinov , Pascal Chabert et al.

Gaseous Electronics Conference, Oct 2015, Honolulu, United States

Communication dans un congrès hal-02593670v1

Validation of Inductively Coupled Plasmas Sustained in Halogen Chemistries

Ankur Agarwal , Mickaël Foucher , S. Rauf , Jean-Paul Booth , Pascal Chabert et al.

AVS Annual Symposium, Oct 2015, San Jose, California, United States

Communication dans un congrès hal-02593676v1

Cleaning and doping of CVD graphene using tailored voltage waveform capacitively coupled plasma

Daniil Marinov , Bastien Bruneau , Erik Johnson , Jean-Paul Booth

Plasma Etch and Strip in Microelectronics _PESM, Apr 2015, Louvain, Belgium

Communication dans un congrès hal-02593662v1

Inductively-coupled plasmas in Cl<SUB>2</SUB> and O<SUB>2</SUB>: Comparing HPEM with advanced diagnostic measurements

Jean-Paul Booth , Mickaël Foucher , Andrew Gibson , Daniil Marinov , Nishant Sirse et al.

Quantumol Workshop -Linking Simulation with Experiment, Sep 2015, London, United Kingdom

Communication dans un congrès hal-02573341v1

Low Pressure Plasma Cleaning and Doping of CVD Graphene

D. Marinov , G. Cunge , D. Ferrah , E.V. Johnson , J.P. Booth

AVS 62nd International Symposium & Exhibition, 2015, San José, United States

Communication dans un congrès hal-01878405v1

Ultra broad-band high sensitivity absorption spectroscopy of inductively-coupled plasmas in Cl<SUB>2</SUB>/O<SUB>2</SUB> mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert

Frontiers in Low-temperature Plasma Diagnostics FLTPD, May 2015, Porquerolles, France

Communication dans un congrès hal-02593663v1

Quantitative Diagnostics of Inductive Plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> AND Cl<SUB>2</SUB>/O<SUB>2</SUB> Mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert

Symposium on Application of Plasma Processes, Jan 2015, Vysoké Tatry, Slovakia

Communication dans un congrès hal-02573337v1

A Comprehensive Quantitative Study of Low Pressure Inductively-Coupled Plasmas in Cl<SUB>2</SUB>, O<SUB>2</SUB> and Mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Ankur Agarwal et al.

AVS Symposium, Oct 2015, San Jose, California, United States

Communication dans un congrès hal-02593682v1

Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert

MRS-Japan, Dec 2015, Yokohama, Japan

Communication dans un congrès hal-02573344v1

Gas Temperature Measurements in Plasmas by High-Resolution TALIF

Jean-Paul Booth , Olivier Guaitella , Daniil Marinov , Mickaël Foucher , Cyril Drag et al.

Laser AIded Plasma Diagnostics LAPD, Sep 2015, Sapporo, Japan

Communication dans un congrès hal-02593665v1

Capacitively coupled CF<SUB>4</SUB> discharges excited by tailored waveforms: experiments and kinetic simulations

Bastien Bruneau , Erik Johnson , Jean-Paul Booth , Trevor Lafleur , T. Gans et al.

Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland

Communication dans un congrès hal-02573343v1

Reactive adsorption of molecules and radicals on surfaces

Daniil Marinov , Olivier Guaitella , Jean-Paul Booth , Antoine Rousseau

22nd International Symposium on Plasma Chemistry, Jul 2015, Antwerp, Belgium

Communication dans un congrès hal-02573340v1

Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H<SUB>2</SUB>, and CF<SUB>4</SUB> plasmas

Bastien Bruneau , Erik Johnson , T. Gans , Arthur Greb , Ihor Korolov et al.

Gaseaous Electronics Conference, Oct 2015, Honolulu, United States

Communication dans un congrès hal-02593667v1

Ion flux asymmetry obtained by sawtooth-like waveforms: A new degree of freedom in capacitively coupled plasmas

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , Trevor Lafleur et al.

Plasma Etch and Strip in Microelectronics (PESM), Apr 2015, Louvain, Belgium

Communication dans un congrès hal-02593661v1

Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , Erik Johnson

AVS Annual Symposium, Nov 2014, Baltimore, Maryland, United States

Communication dans un congrès hal-02593674v1

Inductively-coupled plasmas of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurement of atoms, Cl<SUB>x</SUB>O<SUB>y</SUB> and electron densities

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert

PESM, May 2014, Grenoble, France

Communication dans un congrès hal-02593657v1

Inductively-coupled plasmas of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurement of atoms, Cl<SUB>x</SUB>O<SUB>y</SUB> and electron densities

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert

GEC, Nov 2014, Raleigh, North Carolina, United States

Communication dans un congrès hal-02593658v1

Diagnostics of Cl<SUB>2</SUB>/O<SUB>2</SUB> Inductively-Coupled Plasmas by Ultra-High sensitivity Broad-Band Absorption Spectroscopy

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert

AVS, Nov 2014, Baltimore, Maryland, United States

Communication dans un congrès hal-02593659v1

A model for capacitive discharges with arbitrary RF waveform excitation including the electrical asymmetry effect and the associated self-bias

Pascal Chabert , Trevor Lafleur , Jean-Paul Booth , Miles Turner

8th International Conference on reactive Plasma, Feb 2014, Fukuoka, Japan

Communication dans un congrès hal-02573360v1

Dynamique des Plasmas à Couplage Inductive dans les gaz HBr, Cl<SUB>2</SUB> et O<SUB>2</SUB> et mixtures: Diagnostiques Laser et Absorption Ultraviolet Large-Bande

Jean-Paul Booth , Mickaël Foucher , Pascal Chabert

Colloque de Plasma-Québec, Jun 2014, Montreal, Canada

Communication dans un congrès hal-02573338v1

Experimental and numerical study of fast gas heating and O atom production in a capillary nanosecond discharge

A.V. Klochko , A. Salmon , J. Lemainque , N.A. Popov , Jean-Paul Booth et al.

52st AIAA Aerospace Sciences Meeting, Jan 2014, National Harbor, Maine, United States. pp.2014-1030

Communication dans un congrès hal-02588024v1

Determining atom and radical surface recombination coefficients in low-pressure plasmas

Jean-Paul Booth

Gaseous Electronics Conference : workshop on plasma-surface interactions, Sep 2013, Princeton, New Jersey, United, Unknown Region

Communication dans un congrès hal-02573332v1

Diagnostics of inductively-coupled plasmas in HBr : Bromine atom and electron densities

Jean-Paul Booth , Nishant Sirse , Robert Soriano , Mickaël Foucher , Pascal Chabert

Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States

Communication dans un congrès hal-02594803v1

Diagnostics of Inductively-Coupled Plasmas in Hydrogen Bromide : Bromine Atom and Electron Densities

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Mickaël Foucher

AVS Symposium, Oct 2013, Long Beach, California, United States

Communication dans un congrès hal-02594800v1

Capacitively coupled plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth

EPS Plasma, Jul 2013, Espoo, Finland

Communication dans un congrès hal-02573294v1

Tailoring plasma properties using pulse-shaping technology,

Jean-Paul Booth , E.V. Johnson , Trevor Lafleur , Pierre-Alexandre Delattre , R.W. Boswell

21st ISPC, Aug 2013, Cairns, Australia

Communication dans un congrès hal-02573330v1

IN-SITU OBSERVATION OF MICROCRYSTALLINE SILICON THIN FILM GROWTH USING TAILORED VOLTAGE WAVEFORMS

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth

International Vacuum Conference, Sep 2013, Paris, France

Communication dans un congrès hal-02594804v1

Electron heating in capacitively coupled plasmas revisited: single and multi-frequency discharges

Trevor Lafleur , Pascal Chabert , Miles Turner , Jean-Paul Booth

Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States

Communication dans un congrès hal-02573333v1

OZONE KINETICS IN LOW-PRESSURE DISCHARGES

V. Guerra , Daniil Marinov , Jean-Paul Booth , Olivier Guaitella , Antoine Rousseau

SAPP, Jan 2013, Malá Fatra, Slovakia

Communication dans un congrès hal-02573288v1

Study of fast gas heating in a capillary nanosecond discharge in air. TALIF O atoms measurements and kinetic modeling (AIAA 2013-0574)

A.V. Klochko , J. Lemainque , N.A. Popov , Jean-Paul Booth , Svetlana Starikovskaia

51st AIAA Aerospace Sciences Meeting, Jan 2013, Grapevine, Texas, United States

Communication dans un congrès hal-02589147v1

Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Mickaël Foucher , Nishant Sirse , Jean-Paul Booth , Pascal Chabert

Journées d’Echange du Réseau des Technologies des Plasmas Froids, Oct 2013, La Rochelle, France

Communication dans un congrès hal-02594807v1

Optical diagnostics of low-pressure plasmas in halogen gases

Jean-Paul Booth , Pascal Chabert , Nishant Sirse , P. Indelicato , A. Surzykov et al.

ICPIG, Jul 2013, Granada, Spain

Communication dans un congrès hal-02573296v1

Inductively-coupled plasmas in pure chlorine: comparison of atom density, electron density and gas temperature measurements with the HPEM hybrid model.

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , B. Pruvost , M.J. Kushner

RF Plasma workshop, May 2013, Presqu ile de Giens, France

Communication dans un congrès hal-02573293v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas for IEDF and electron density control: Application to Microcrystalline Si Deposition

Jean-Paul Booth , Erik Johnson , Trevor Lafleur , Pierre-Alexandre Delattre

Semicon Korea, Jan 2013, Seoul, Korea, Unknown Region

Communication dans un congrès hal-02573289v1

Dynamics of Cl<SUB>2</SUB> inductively-coupled plasmas: Role of electronic and vibrational excitation

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , P. Indelicato , A. Surzhykov et al.

FLTPD, Apr 2013, Rolduc, Netherlands

Communication dans un congrès hal-02573290v1

Vibrational kinetics in a Cl2 inductively-coupled plasma

B. Pruvost , Jean-Paul Booth , Mickaël Foucher , Pascal Chabert , V. Guerra et al.

Gaseous Electronics Conference, Oct 2013, Princeton, New Jersey, United States

Communication dans un congrès hal-02594801v1

Diagnostics of inductively-coupled plasmas in hydrogen bromide : Bromine atom and electron densities

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Mickaël Foucher

UK Technological Plasmas Workshop, Dec 2013, York, United Kingdom

Communication dans un congrès hal-02594799v1

Practical Aspects of using Tailored Voltage Waveforms for Thin Film Processing of Photovoltaic Devices

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth

AVS Symposium, Oct 2013, Long Beach, California, United States

Communication dans un congrès hal-02573331v1

Thin Film Deposition with Tailored Voltage Waveforms: Material Questions and Practical Answers

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth

RF Plasma workshop, May 2013, Presqu île de Giens, France

Communication dans un congrès hal-02573291v1

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl<SUB>2</SUB>

Jean-Paul Booth , Pascal Chabert , Yasmina Azamoum , Nishant Sirse

Plasma Etch and Strip in Microelectronics (PESM), Mar 2012, Grenoble, France

Communication dans un congrès hal-02594730v1

Cl atom spin-orbit excited densities in a Cl2 ICP determined by TALIF

Jean-Paul Booth , Nishant Sirse , P. Indelicato , Y. Wang , Oleg Zatsarinny et al.

UK Technological Plasmas Workshop, Dec 2012, Milton Keynes, United Kingdom

Communication dans un congrès hal-02594805v1

Absolute Cl and Cl<SUB>2</SUB> densities in a Cl<SUB>2</SUB> ICP determined by TALIF with a new calibration method

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert

Technological Plasmas Workshop, Jan 2012, Manchester, United Kingdom

Communication dans un congrès hal-02594794v1

Plasma deposition processes excited using Tailored Voltage Waveforms: from microcrystalline silicon thin films to devices

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth

AVS Symposium, Oct 2012, Tampa, Floride, United States

Communication dans un congrès hal-02573299v1

Plasma characteristics in non-sinusoidally excited CCP discharges

Trevor Lafleur , Jean-Paul Booth

GEC, Oct 2012, Austin, Texas, United States

Communication dans un congrès hal-02594733v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas

Jean-Paul Booth , Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson

GEC, Oct 2012, Austin, Texas, United States

Communication dans un congrès hal-02594732v1

Cl atom spin-orbit excited densities in a Cl<SUB>2</SUB> ICP determined by TALIF

Jean-Paul Booth , Nishant Sirse , P. Indelicato , A. Surzhykov , Y. Wang et al.

UK TPW, Dec 2012, Milton Keynes, United Kingdom

Communication dans un congrès hal-02594737v1

Plasma deposition of nanocrystalline silicon for solar cells : RF waveform tailoring to optimize deposition rate and film morphology

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre

Gaseous Electronics Meeting, Feb 2012, Murramarang, Australia

Communication dans un congrès hal-02573287v1

Mesure de densité électronique dans les plasmas froids par techniques micro-ondes

Jean-Paul Booth

Les Journées du Plasma Froid, Oct 2012, Ecully, France

Communication dans un congrès hal-02573281v1

Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control

Jean-Paul Booth

Fusion Frontiers and Interfaces Workshop, Mar 2012, York, United Kingdom

Communication dans un congrès hal-02573297v1

Chlorine atom and molecule dynamics in an inductively coupled plasma in pure Cl<SUB>2</SUB>

Jean-Paul Booth , Pascal Chabert , Yasmina Azamoum , Nishant Sirse

International Workshop on Plasma Spectroscopy (IPS), May 2012, Presqu ile de Giens, France

Communication dans un congrès hal-02594731v1

Plasma Excitation using Tailored Voltage Waveforms for the Deposition of Thin Film Silicon for Photovoltaics: From Plasma Physics to Devices

E.V. Johnson , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth

5th International Symposium on Atomically Controlled, Oct 2012, Osaka, Japan

Communication dans un congrès hal-02573298v1

Gas temperature measurement in Ar and Ar-Cl<SUB>2</SUB> based ICP discharge: Comparison between experiments and simulations

Nishant Sirse , Quentin Délivré , Jean-Paul Booth , Pascal Chabert

IEEE International Conference on Plasma Science (ICOPS), Jul 2012, Edinburgh, United Kingdom

Communication dans un congrès hal-02594795v1

Inductively-coupled plasmas in pure chlorine: comparison experiments/HPEM

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert

GEC, Oct 2012, Austin, Texas, United States

Communication dans un congrès hal-02594735v1

DEPOSITION OF THIN FILM OF SILICON MICROCRISTALLINE BY RADIO FREQUENCY VOLTAGE WAVEFORM TAILORING

S. Pouliquen , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth

AVS, Oct 2011, Nashville, Tennessee, United States

Communication dans un congrès hal-02594748v1

Atomic Chlorine absolute densities and surface recombination coefficients in inductively coupled plasmas in Cl<SUB>2</SUB>

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert

AVS, Oct 2011, Nashville, Tennessee, United States

Communication dans un congrès hal-02594749v1

MESURE DE TEMPERATURE DU GAZ DANS UN RÉACTEUR DE GRAVURE DOUBLE FRÉQUENCES CAPACITIF

Jean-Paul Booth , Wladimir Bjelogrlic , Jérôme Bredin

Journees du Reseau Plasmas Froids, May 2011, Toulouse, France

Communication dans un congrès hal-02573301v1

Tailored Voltage Waveforms for the Deposition of Microcrystalline Silicon

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth

ICANS, Aug 2011, Nara, Japan

Communication dans un congrès hal-02594746v1

Recombination coefficients of Cl atoms on Al<SUB>2</SUB>O<SUB>3</SUB> walls determined by TALIF

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Mujahid Zaka-Ul-Islam , Pascal Chabert

Plasma Etch and Strip for Microelectronics (PESM), May 2011, Mechelen, Belgium

Communication dans un congrès hal-02594744v1

Absolute Cl and Cl<SUB>2</SUB> densities in a Cl<SUB>2</SUB> ICP determined by TALIF with a new calibration method

Nishant Sirse , Yasmina Azamoum , Pascal Chabert , Jean-Paul Booth

UK TPW, Dec 2011, Manchester, United Kingdom

Communication dans un congrès hal-02594750v1

Absolute atomic chlorine densities in a Cl<SUB>2</SUB> ICP determined by TALIF with a new calibration method

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert

30th ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom

Communication dans un congrès hal-02594798v1

INCLINE - Inductively coupled plasma for CMOS-compatible etching of III-V integrated laser sources

S. Bouchoule , L. Gatilova , G. Patriarche , S. Guilet , L. Le Gratiet et al.

Journées Nationales en Nanosciences et Nanotechnologies, 2011, Ecole Polytechnique, Palaiseau, France

Communication dans un congrès hal-02594797v1

Detection of atomic chlorine in an inductively-coupled plasma by TALIF:Absolute densities and surface recombination coefficients

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert

LAPD, Oct 2011, Jeju, Korea, Unknown Region

Communication dans un congrès hal-02573303v1

VOLTAGE WAVEFORM TAILORING: A PROMISING NEW METHOD FOR SILICON DEPOSITION

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Nishant Sirse , Jean-Paul Booth

CIP (Congres International sur les Plasmas), Jun 2011, Nantes, France

Communication dans un congrès hal-02594747v1

Planar Langmuir probe in pulsing regime

V. Samara , Jean-Paul Booth , J.-F. de Marneffe , W. Boullart

PESM (Plasma Etch and Strip for Microelectronics), May 2011, Mechelen, Belgium

Communication dans un congrès hal-02594742v1

Control of Nanocrystalline Growth Phase and Deposition Rate through Voltage Waveform Tailoring

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth

MRS spring meeting, Apr 2011, San Francisco, California, United States

Communication dans un congrès hal-02594741v1

All you ever wanted to know about Fluorocarbon Plasmas but never dared to ask

Jean-Paul Booth

POSMOL (International Symposium on Electron Molecule Collisions and Swarms), Jul 2011, Maynooth, Ireland

Communication dans un congrès hal-02573302v1

Seeing Inside Plasma Etch Reactors: from diagnostics to sensors for control

Jean-Paul Booth , Pascal Chabert , Rodolphe Sarot , Mujahid Zaka-Ul-Islam

IS-Plasma (International Symposium-Plasma), Feb 2011, Nagoya, Japan

Communication dans un congrès hal-02573300v1

Cl atom recombination coefficients in a Cl<SUB>2</SUB> ICP determined by TALIF

Jean-Paul Booth , Pascal Chabert , F. Boutaiba , Mujahid Zaka-Ul-Islam

Frontiers in Low Temperature Plasma Diagnostics (FLTPD), May 2011, Zinnowitz, Germany

Communication dans un congrès hal-02594745v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre , T. Verbeke , J-C Vanel

International Conference on Plasmas and Nanotechnology (ICPLANTS), Feb 2011, Takayama, Japan

Communication dans un congrès hal-02594739v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel

AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States

Communication dans un congrès hal-02595160v1

Time-resolved electron density and OES measurements for studying the surface loss rates of H and Cl atoms in a Cl2-H2 ICP plasma

G. Curley , L. Gatilova , S. Guilet , S. Bouchoule , G. Gogna et al.

63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas, 2010, Paris, France. TF4-005, 763-764, Hori M. and Graha W.G. (Eds), Japan Society of Applied Physics

Communication dans un congrès hal-00800895v1

GAS BREAKDOWN IN RF AND LONGITUDINAL COMBINED ELECTRIC FIELDS

V. A. Lisovskiy , Jean-Paul Booth , V. D. Yegorenkov , N. D. Kharchenko

RF Breakdown Workshop, Oct 2010, Paris, France

Communication dans un congrès hal-02573304v1

Control of Microcrystalline Silicon Deposition by RF Waveform Tailoring

E.V. Johnson , Jean-Paul Booth , J-C Vanel , T. Verbeke

Gaseous Electronics Conference, Oct 2010, Paris, France

Communication dans un congrès hal-02595158v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel

UK-Technological Plasmas Workshop, Dec 2010, Bristol, United Kingdom

Communication dans un congrès hal-02595161v1

Effect of low-frequency power on electron density and ion flux in dual-frequency capacitive radiofrequency discharges

Jean-Paul Booth , G. Curley , Pascal Chabert

PESM, Mar 2010, Grenoble, France

Communication dans un congrès hal-02595157v1

Physique et physicochimie des Plasmas excites par radio-frequence

Jean-Paul Booth

Journees Plasma-Photovoltaique, Nov 2010, St Cyprien, France

Communication dans un congrès hal-02611098v1

Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes

Jérôme Bredin , Jean-Paul Booth

Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States

Communication dans un congrès hal-02595162v1

Etch process control with a deposition-tolerant planar electrostatic probe

Jean-Paul Booth , D. Keil , C. Thorgrimsson , M. Nagai , L. Albarede

Radiofrequency Plasma Workshop, May 2009, Presqu ile de Giens, France

Communication dans un congrès hal-02573306v1

Absorption spectroscopy diagnostics of a dual-frequency capacitive dielectric etch tool using Ultraviolet Light-Emitting Diodes

Jean-Paul Booth , Jérôme Bredin

AVS International Symposium, Nov 2009, San Jose, California, United States

Communication dans un congrès hal-02595165v1

Dual-frequency capacitive radiofrequency discharges : Effect of low-frequency power on electron density and flux

Jean-Paul Booth , G. Curley , Pascal Chabert , D. Maric

Gaseous Electronics Conference, Oct 2009, Saratoga Springs, New York, United States

Communication dans un congrès hal-02595163v1

Etch process control with a deposition-tolerant planar electrostatic probe

Jean-Paul Booth , D. Keil , C. Thorgrimsson , M. Nagai , L. Albarede

Irish Plasma and Beam Processing Group Meeting, May 2009, Belfast, Northern Ireland, United Kingdom

Communication dans un congrès hal-02573307v1

Etch process control with a deposition-tolerant planar electrostatic probe

Jean-Paul Booth , D. Keil , C. Thorgrimsson , M. Nagai , L. Albarede

PESM, Feb 2009, Louvain, Belgium

Communication dans un congrès hal-02573305v1

CFX kinetics, gas temperature and instabilities in a CF4 inductively coupled discharge

J.P Booth , H. Abada , P. Chabert , G. Cunge

48th National AVS symposium & Topical conferences, 2001, San Francisco, United States

Communication dans un congrès hal-00494528v1

CFx kinetics, gas temperatures and instabilities in a CF4 inductively-coupled discharge

J.P Booth , H. Abada , P. Chabert , G. Cunge

48th AVS Annual Symposium, 2001, San Francisco, United States

Communication dans un congrès hal-00486179v1

Chlorine Inductively- coupled Plasma diagnostics using UV absorption spectroscopy and an ion flux probE

J.P Booth , F. Neuilly , J.M Francou , L. Vallier

International Colloquium on Plasma Processes, CIP, 2001, Antibes, France

Communication dans un congrès hal-00486185v1

High rate silicon carbide etching

P. Chabert , J. Perrin , J.P Booth , G. Cunge

ISPC, 15th International Symposium on Plasma Chemistry, 2001, Orleans, France

Communication dans un congrès hal-00481964v1

Towards calibration of picosecond O-TALIF

Z Shu , Sopie Latorre , J.B. Billeau , Jean-Paul Booth , D.V. Seletskiy et al.

XXXVI ICPIG, Jul 2025, Aix -en-Provence, France

Poster de conférence hal-05357661v1

Modeling of N2-H2 DC discharges for ammonia production

Luis Lemos Alves , P Pereira , S.S. Baghel , A. Goncalves , Maik Budde et al.

XXXVI ICPIG, Jul 2025, Aix -en-Provence, France

Poster de conférence hal-05357697v1

Vacuum ultraviolet absorption spectroscopy of oxygen discharges

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.

Journées de la Spectroscopie Moléculaire, May 2019, Creteil, France. 2019

Poster de conférence hal-02861164v1

Experimental determination of cross-sections/reaction rates: Methods and difficulties

Jean-Paul Booth

Rencontres scientifiques plasmas froids et lasers, Nov 2019, Toulouse, France. 2019

Poster de conférence hal-02861165v1

Oxygen 3P atom density and temperature determined by Cavity Ringdown spectroscopy of the forbidden 1D2 <-3P2 transition

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , Cyril Drag , Katherine Manfred et al.

Frontiers in Low Temperature Plasma Diagnostics, May 2019, Bad Honnef, Germany. 2019

Poster de conférence hal-02861161v1

Iodine as propellant for electric propulsion: updated global model and comparisons to experiments

Florian Marmuse , Romain Lucken , Cyril Drag , Jean-Paul Booth , Anne Bourdon et al.

International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019

Poster de conférence hal-02341688v1

Kinetics of active species in a DC discharge by synchrotron VUV absorption

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , João Santos Sousa , N. de Oliveira et al.

International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019

Poster de conférence hal-02865808v1

Oxygen 3P atom and O- ion density and atomic temperature in O<SUB>2</SUB> DC discharge obtained by Cavity Ringdown spectroscopy

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , Cyril Drag , Katherine Manfred et al.

International Symposium on Plasma Chemistry, Jun 2019, Naples, Italy. 2019

Poster de conférence hal-02861162v1

Spectroscopic study of an iodine plasma in a low pressure RF-ICP ion source

Florian Marmuse , Theo Courtois , Jean-Paul Booth , Cyril Drag , Ane Aanesland et al.

71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. 2018

Poster de conférence hal-02864740v1

Density of metastable O<SUB>2</SUB>(b 1 Sigma g+) molecules in an O<SUB>2</SUB> DC discharge measured by vacuum ultraviolet absorption and optical emission spectroscopy

Jean-Paul Booth , Olivier Guaitella , Abhyuday Chatterjee , Dmitry Lopaev , Sergey Zyryanov et al.

71st Annual Gaseous Electronics Conference, Nov 2018, Portland, Oregon, United States. 2018

Poster de conférence hal-02864739v1

Oxygen metastable molecule densities in inductively-coupled plasmas in pure O<SUB>2</SUB> measured by VUV absorption

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , L. Nahon et al.

ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018

Poster de conférence hal-02864750v1

O2 X, a and b densities and kinetics in pure O2 DC discharges: VUV absorption, IR emission and Cavity Ring Down Spectroscopy measurements

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , N. de Oliveira , L. Nahon et al.

ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018

Poster de conférence hal-02864738v1

Temperature and density measurements in an iodine RF-CCP plasma with emission and absorption spectroscopy

Florian Marmuse , Cyril Drag , Jean-Paul Booth , Ane Aanesland

ESCAMPIG XXIV, Jul 2018, Glasgow, Scotland, United Kingdom. 2018

Poster de conférence hal-02341678v1

Metastable Molecules in O<SUB>2</SUB> Plasmas probed by High Resolution Fourier Transform Absorption Spectroscopy

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , L. Nahon , Nelson d'Oliveira et al.

XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017

Poster de conférence hal-02611353v1

O<SUB>2</SUB> dissociation in plasmas and problems of the O<SUB>2</SUB> cross section set

Jean-Paul Booth , Olivier Guaitella , Abhyuday Chatterjee , Sergey Zyryanov , Dmitry Lopaev et al.

XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017

Poster de conférence hal-02611355v1

Experimental Benchmarks and sensitivity analysis of PIC/MC simulations of oxygen CCP's

Z. Donko , Aranka Derszi , Bastien Bruneau , Andrew Gibson , E.V. Johnson et al.

International Workshop on Radio-Frequency Plasmas, May 2017, Presqu'île de Giens, France. 2017

Poster de conférence hal-02611351v1

Control of charged species dynamics in atmospheric pressure plasmas using tailored voltage waveforms

Andrew Gibson , L. Alelyani , S. Doyle , Jérôme Bredin , Jean-Paul Booth et al.

XXXIII ICPIG- International Conference on Phenomena in Ionised Gases, Jul 2017, Estoril/Lisbon, Portugal. 2017

Poster de conférence hal-02611352v1

Kinetics of metastable states and atoms in DC discharges in pure O<SUB>2</SUB>: an experimental study

Jean-Paul Booth , Abhyuday Chatterjee , Olivier Guaitella , N. de Oliveira , Laurent Nahon et al.

REACPLAS Workshop (reactivity, Plasmas, Astrophysics), Nov 2017, Orsay, France. 2017

Poster de conférence hal-02611361v1

Kinetics of Metastable Molecules and O atoms in O<SUB>2</SUB> Plasmas

Abhyuday Chatterjee , Jean-Paul Booth , Olivier Guaitella , Ana-Sofia Morillo-Candas , Cyril Drag et al.

Masterclass "New approaches for plasma/surface interaction studies", Oct 2017, Bad Honnef, Germany. 2017

Poster de conférence hal-02611360v1

Species-dependent thermal energy accommodation in low-pressure plasmas

Andrew Gibson , T. Gans , M.J. Kushner , Jean-Paul Booth

23rd International Symposium on Plasma Chemistry, Jul 2017, Montréal, Canada. 2017

Poster de conférence hal-02611357v1

Iodine atom detection in a plasma thruster by infrared diode laser absorption

Jean-Paul Booth , Theo Courtois

18th, Laser Aided Plasma Diagnostics, Sep 2017, Prague, Czech Republic, Unknown Region. 2017

Poster de conférence hal-02611358v1

Frequency dependence of the Electrical Asymmetry Effect in electronegative capacitive RF discharges driven by Tailored Voltage Waveforms

J. Schulze , E. Schuengel , Bastien Bruneau , E.V. Johnson , Jean-Paul Booth et al.

GEC, Oct 2016, Bochum, Germany. 2016

Poster de conférence hal-02611341v1

Highly vibrationally excited O<SUB>2</SUB> molecules in low pressure oxygen plasmas: 1. Broad-band absorption spectroscopy

Daniil Marinov , Mickaël Foucher , Olivier Guaitella , Richard Engeln , Pascal Chabert et al.

ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016

Poster de conférence hal-02611336v1

High-resolution TALIF measurements of atomic oxygen: determination of gas temperature and collisional broadening coefficients

Jean-Paul Booth , Daniil Marinov , Olivier Guaitella , Cyril Drag , Richard Engeln et al.

GEC (Gaseous Electronics Synposium), Oct 2016, Bochum, Germany. 2016

Poster de conférence hal-02611340v1

Experimental and simulation study of capacitively coupled oxygen discharges driven by tailored voltage waveforms

A. Derzsi , Bastien Bruneau , Trevor Lafleur , Jean-Paul Booth , Ihor Korolov et al.

ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016

Poster de conférence hal-02611337v1

The role of gas kinetics and surface interaction probabilities in simulations of industrial plasma sources at low pressure

Andrew Gibson , Mickaël Foucher , Daniil Marinov , Pascal Chabert , T. Gans et al.

International Symposium on Gas Kinetics, Jul 2016, York, United Kingdom. 2016

Poster de conférence hal-02611343v1

Measuring atomic oxygen densities and electron properties in an Inductively Coupled Plasma for thin film deposition

D. Meehan , Andrew Gibson , Jean-Paul Booth , E. Wagenaars

GEC, Oct 2016, Bochum, Germany. 2016

Poster de conférence hal-02611342v1

Highly vibrationally excited O<SUB>2</SUB> molecules in low pressure oxygen plasmas: 2. Self-consistent model

Adriana Annusova , V. Guerra , M. Lino Da Silva , B. Lopez , Mickaël Foucher et al.

ESCAMPIG, Jul 2016, Bratislava, Slovakia. 2016

Poster de conférence hal-02611338v1

Atmospheric pressure plasmas as sources of reactive oxygen and hydrogen species for biomedical applications

Sandra Schröter , Andrew Gibson , Jérôme Bredin , A. West , A. Wijiaikum et al.

International Symposium on Gas Kinetics, Jul 2016, York, United Kingdom. 2016

Poster de conférence hal-02611339v1

EXPERIMENTAL AND MODELING STUDIES OF LOW-PRESSURE CAPACITIVE OXYGEN PLASMAS EXCITED BY TAILORED VOLTAGE WAVEFORMS

Aranka Derszi , Trevor Lafleur , Ihor Korolov , Jean-Paul Booth , Zoltan Donko

Symposium on Application of Plasma Processes, Jan 2015, Tatranská Lomnica, Slovakia. 2015

Poster de conférence hal-02611332v1

Capacitively Coupled Radio-Frequency Plasmas Excited by Tailored Voltage Waveforms: Particle-In-Cell/Monte Carlo Simulations in 1 and 2 Dimensions

Yue Liu , Jean-Paul Booth , Pascal Chabert

Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland. 2015

Poster de conférence hal-02611334v1

Vibrational kinetics in Cl<SUB>2</SUB> and O<SUB>2</SUB> low-pressure inductively-coupled plasmas

Jean-Paul Booth , Mickaël Foucher , Daniil Marinov , Pascal Chabert , Adriana Annusova et al.

POSMOL, Jul 2015, Lisbon, Portugal. 2015

Poster de conférence hal-02611335v1

A model for inductively coupled plasmas in O2 including vibrational kinetics

Adriana Annusova , V. Guerra , Jean-Paul Booth , Mickaël Foucher , Daniil Marinov et al.

EPS Plasma, Jun 2015, Lisbon, Portugal. 2015

Poster de conférence hal-02611333v1

Ground-state bromine atoms measurements by Two-Photon Absorption Laser-Induced Fluorescence

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert

PESM, May 2014, Grenoble, France. 2014

Poster de conférence hal-02611326v1

High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert

GEC, Nov 2014, Raleigh, North Carolina, United States. 2014

Poster de conférence hal-02611330v1

Inductively-coupled plasmas (ICP) of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurements of atoms, ClxOy and electron densities

Mickaël Foucher , Daniil Marinov , Emile Carbone , Jean-Paul Booth , Pascal Chabert

GEC, Nov 2014, Raleigh, North Carolina, United States. 2014

Poster de conférence hal-02611329v1

Inductively-coupled plasmas (ICP) of Cl<SUB>2</SUB>,O<SUB>2</SUB> and mixtures : measurements of atoms, ClxOy and electron densities

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert

PESM, May 2014, Grenoble, France. 2014

Poster de conférence hal-02611325v1

Inductively-coupled plasmas in pure Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures: measurements of atom, Cl<SUB>x</SUB>O<SUB>y</SUB> and electron densities

Mickaël Foucher , Pascal Chabert , Jean-Paul Booth

Plasma Kinetics Master Class, Oct 2014, Bad Honnef, Germany. 2014

Poster de conférence hal-02611331v1

High sensitivity ultra-broad-band absorption spectroscopy applied to etching plasmas

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert

ESCAMPIG, Jul 2014, Greifswald, Germany. 2014

Poster de conférence hal-02611328v1

Inductively-coupled plasmas (ICP) of Cl<SUB>2</SUB>, O<SUB>2</SUB> and mixtures : measurements of atoms, ClxOy and electron densit

Mickaël Foucher , Emile Carbone , Jean-Paul Booth , Pascal Chabert

ESCAMPIG, Jul 2014, Greifswald, Germany. 2014

Poster de conférence hal-02611327v1

Dynamique des plasmas radio-fréquences pulsés à couplage inductif en gaz halogénés simples

Mickaël Foucher , Jean-Paul Booth , B. Pruvost , Pascal Chabert

Journée de l'industrie Plas@par, Nov 2013, Paris, France. 2013

Poster de conférence hal-02611324v1

Atomic bromine density measurements in HBr inductively coupled plasma by two-photon absorption laser-induced fluorescence

Jean-Paul Booth , Nishant Sirse , Mickaël Foucher

Laser Aided Plasma Diagnostics, Sep 2013, Madison, Wisconsin, United States. 2013

Poster de conférence hal-02611316v1

Hybrid Model of Parallel Plate RF Discharges in H<SUB>2</SUB>: Effect of DC and Tailored Voltage Waveforms

P. Diomede , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , S. Longo et al.

ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012

Poster de conférence hal-02611272v1

Gas temperature and electron density measurements in Ar and Ar<SUB>-</SUB>Cl<SUB>2</SUB> ICP discharges

Jean-Paul Booth , Nishant Sirse , Quentin Délivré , Pascal Chabert

ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012

Poster de conférence hal-02611271v1

Investigation of Voltage Waveform Tailoring Effect in CapacitivelyCoupled H<SUB>2</SUB> Discharge: Fluid Simulations and Experimental Validation

T. Novikova , E.V. Johnson , M. Mao , P. Bulkin , Jean-Paul Booth et al.

EPS Plasma Physics, Jul 2012, Stockholm, Sweden. 2012

Poster de conférence hal-02611270v1

Ozone production in O<SUB>2</SUB> plasma at low pressure: evaluation of surface and gas phase mechanisms

Daniil Marinov , Olivier Guaitella , V. Guerra , Nishant Sirse , Jean-Paul Booth et al.

IPS, May 2012, Presqu'île de Giens, France. 2012

Poster de conférence hal-02611269v1

Electron density comparison between experiments and simulations in Chlorine based ICP discharge

Jean-Paul Booth , Nishant Sirse , Yasmina Azamoum , Pascal Chabert

ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011

Poster de conférence hal-02611275v1

Voltage Waveform Tailoring in a RF-CCP reactor: Exploration of self-bias, electron density and current waveform

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Jean-Paul Booth

ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011

Poster de conférence hal-02611277v1

Recombination coefficient of Cl atoms on Al<SUB>2</SUB>O<SUB>3</SUB> walls determined byTwo-Photon Laser-Induced Fluorescence

Jean-Paul Booth , Nishant Sirse , Pascal Chabert , Yasmina Azamoum , Mujahid Zaka-Ul-Islam

ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011

Poster de conférence hal-02611274v1

Electron densities and temperatures in a Cl<SUB>2</SUB>/Ar ICP

Jean-Paul Booth , Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , L. Gatilova et al.

Gaseous Electronics Conference, Oct 2010, Paris, France. 2010

Poster de conférence hal-02611281v1

Inductive plasmas in Cl<SUB>2</SUB>/Ar :Comparison of hybrid model results with experimental measurements

Jean-Paul Booth , Emilie Despiau-Pujo , Pascal Chabert , Rodolphe Sarot

AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States. 2010

Poster de conférence hal-02611282v1

Inductive plasmas in Cl<SUB>2</SUB>/Ar : Comparison of hybrid model results with experimental measurements

Jean-Paul Booth , Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , L. Gatilova et al.

ESCAMPIG, Jul 2010, Novi Sad, Serbia. 2010

Poster de conférence hal-02611280v1

Plasma inductif en Cl<SUB>2</SUB>/Ar : comparaison entre simulations hybrides et expériences

Rodolphe Sarot , Emilie Despiau-Pujo , Pascal Chabert , Jean-Paul Booth , L. Gatilova et al.

Congres de la Division Plasma du SFP, May 2010, Bordeaux, France. 2010

Poster de conférence hal-02611278v1

Broadband absorption with UV Light-Emitting Diodes in a dual-frequency capacitively coupled reactor

Jérôme Bredin , Jean-Paul Booth

Radiofrequency Plasma Workshop, May 2009, Presqu ile de Giens, France. 2009

Poster de conférence hal-02611283v1