Jean-Paul Booth
1
Documents
Présentation
**Research interests**
Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Development of sensors for in-situ control of industrial plasma processes.
Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.
Gas breakdown in RF fields.
**Brief vitae**
*2000-Present* : Directeur de Recherche, CNRS at LPP, except :
*2006-2008* : Technical Director, Lam Research Corp, Fremont, CA, USA
*1990-2000* : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
*1988-1990* : Post-doctoral researcher, CNRS/CNET, Meylan, France
*1985-1988* : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
*1980-1984* : BA & MA, Chemistry, Oxford University, UK
**Distinctions :**
*2010* : Fellow of [AVS](https://www.avs.org/Awards-Recognition/Society-Honors/Fellow-of-the-Society)
*1984* : Physical Chemistry Part II Thesis Prize, Oxford University
*1980-1983* : Stapeldon Scholarship to Exeter College, Oxford
**Editorial responsabilities and Conference organisation**
Associate Editor of IoP journal [Plasma Sources, Science and Technology](http://iopscience.iop.org/journal/0963-0252/page/Editorial%20Board)
Chair, [International Workshop on Oxygen Plasma Kinetics 2016](http://langmuir.raunvis.hi.is/~tumi/wox.html)
Chair, Laser-Aided Plasma Diagnostics [2013](<http://plasma.physics.wisc.edu/conferences/LAPD-2013 />)[& 2015](http://lapd17.qe.eng.hokudai.ac.jp/)
Program Commitee, [ICPP 2014](http://www.ipfn.ist.utl.pt/ICPP2014/Welcome_to_ICPP_2014.html)
Secretary, [AVS Plasma Science and Technology Division, 2012-13](http://www.avs.org/Divisions/pstd)
Chair, International Conference on Phenomena in Ionised Gases, 2009
**Research interests**
Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Development of sensors for in-situ control of industrial plasma processes.
Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.
Gas breakdown in RF fields.
**Brief vitae**
*2000-Present* : Directeur de Recherche, CNRS at LPP, except :
*2006-2008* : Technical Director, Lam Research Corp, Fremont, CA, USA
*1990-2000* : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
*1988-1990* : Post-doctoral researcher, CNRS/CNET, Meylan, France
*1985-1988* : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
*1980-1984* : BA & MA, Chemistry, Oxford University, UK
**Distinctions :**
*2010* : Fellow of [AVS](https://www.avs.org/Awards-Recognition/Society-Honors/Fellow-of-the-Society)
*1984* : Physical Chemistry Part II Thesis Prize, Oxford University
*1980-1983* : Stapeldon Scholarship to Exeter College, Oxford
**Editorial responsabilities and Conference organisation**
Associate Editor of IoP journal [Plasma Sources, Science and Technology](http://iopscience.iop.org/journal/0963-0252/page/Editorial%20Board)
Chair, [International Workshop on Oxygen Plasma Kinetics 2016](http://langmuir.raunvis.hi.is/~tumi/wox.html)
Chair, Laser-Aided Plasma Diagnostics [2013](<http://plasma.physics.wisc.edu/conferences/LAPD-2013 />)[& 2015](http://lapd17.qe.eng.hokudai.ac.jp/)
Program Commitee, [ICPP 2014](http://www.ipfn.ist.utl.pt/ICPP2014/Welcome_to_ICPP_2014.html)
Secretary, [AVS Plasma Science and Technology Division, 2012-13](http://www.avs.org/Divisions/pstd)
Chair, International Conference on Phenomena in Ionised Gases, 2009
Publications
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High rate silicon carbide etchingISPC, 15th International Symposium on Plasma Chemistry, 2001, Orleans, France
Communication dans un congrès
hal-00481964v1
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