Remi Dussart
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Titanium oxide thin film growth by magnetron sputtering: Total energy flux and its relationship with the phase constitutionSurface and Coatings Technology, 2014, Vol 254 (2014), Volume 254, 15 September 2014, Pages 291-297. ⟨10.1016/j.surfcoat.2014.06.037⟩
Article dans une revue
hal-01057278v1
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IR emission from the target during plasma magnetron sputter depositionThin Solid Films, 2013, pp.547(2013) 44-49. ⟨10.1016/j.tsf.2013.07.025⟩
Article dans une revue
hal-00943789v1
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IR emission from the target during plasma magnetron sputter depositionThin Solid Films, 2013, 545, pp.44-49. ⟨10.1016/j.tsf.2013.07.025⟩
Article dans une revue
in2p3-00874718v1
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On the measurement of energy fluxes in plasmas using a calorimetric probe and a thermopile sensorJournal of Physics D: Applied Physics, 2010, 43 (46), pp.465201. ⟨10.1088/0022-3727/43/46/465201⟩
Article dans une revue
hal-00569747v1
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Energy flux measurements at the substrate deposition during reactive and non-reactive magnetron sputter deposition processes19th International Vacuum Conference, Sep 2013, Paris, France
Communication dans un congrès
hal-01166024v1
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Direct energy influx measurements in high power impulse sputtering2nd International Conference on HiPIMS, HiPIMS2011 , Jun 2011, Braunschweig, Germany
Communication dans un congrès
hal-01288780v1
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