Remi Dussart
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IR emission from the target during plasma magnetron sputter depositionThin Solid Films, 2013, pp.547(2013) 44-49. ⟨10.1016/j.tsf.2013.07.025⟩
Article dans une revue
hal-00943789v1
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Energy transferred to the substrate surface during reactive magnetron sputtering of aluminum in Ar/O2 atmosphereThin Solid Films, 2013, 539, pp.88. ⟨10.1016/j.tsf.2013.05.075⟩
Article dans une revue
hal-00839010v1
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IR emission from the target during plasma magnetron sputter depositionThin Solid Films, 2013, 545, pp.44-49. ⟨10.1016/j.tsf.2013.07.025⟩
Article dans une revue
in2p3-00874718v1
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Advantages of energy influx measurements in low pressure plasma processesInternational Conference on Plasma Surface Engineering, Sep 2012, Garmisch-Partenkirchen, Germany
Communication dans un congrès
hal-00831371v1
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