Edouard Laudrel

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Publications

Bulk micromachined Titanium MEMS

Gwenaël Bécan , Baptiste Rousset , Samson Edmond , Nathalie Isac , Maïté Do Vale et al.
16th NAMIS Workshop (NAMIS 2018), Jun 2018, Oulu, Finland
Communication dans un congrès hal-02306373 v1

Titanium-based MEMS: Application for a novel implantable feedthrough using TTV (Through Titanium Vias) technologies

Bertrand Boutaud , Edouard Laudrel , Marion Woytasik , Elie Lefeuvre , Thomas Tillocher et al.
6th Micro/Nano-Electronics Packaging and Assembly, Design and Manufacturing Forum (MiNaPAD 2018), May 2018, Grenoble, France
Communication dans un congrès hal-02306370 v1

Microstructuration of titanium for implantable components

Edouard Laudrel , Thomas Tillocher , Philippe Lefaucheux , Marion Woytasik , Fabrice Michel et al.
Journées Nationales sur les Technologies Emergentes en micro-nanofabrication, Nov 2017, Orléans, France
Communication dans un congrès hal-02306063 v1

Bulk titanium deep etching by plasma processes

Edouard Laudrel , Thomas Tillocher , Philippe Lefaucheux , Bertrand Boutaud , Remi Dussart
, 20th International Colloquium on Plasma Processes (CIP), Jun 2015, Saint-Etienne, France
Communication dans un congrès hal-01166023 v1

DRY DEEP ETCHING OF BULK TITANIUM BY PLASMA PROCESSES

Edouard Laudrel , Thomas Tillocher , Philippe Lefaucheux , Bertrand Boutaud , Remi Dussart
AVS 62nd International Symposium & Exhibition, Oct 2015, San Jose, United States
Communication dans un congrès hal-01228465 v1

Design of a Ti-based microsensor for in vivo pressure monitoring

Gwenael Becan , Bertrand Boutaud , Edouard Laudrel , Fabien Parrain , Marion Woytasik et al.
2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France
Poster de conférence hal-02306964 v1

Titanium microstructuring for implantable components

Edouard Laudrel , Thomas Tillocher , Yannick Méric , Philippe Lefaucheux , Marion Woytasik et al.
Design, Test, Integration and Packaging of MEMS/MOEMS, May 2017, Bordeaux, France
Poster de conférence hal-01561245 v1

Chlorine-based plasma deep etching of bulk titanium

Edouard Laudrel , Thomas Tillocher , Yannick Méric , Philippe Lefaucheux , Bertrand Boutaud et al.
International Symposium on Dry Process 2016 (DPS2016), Nov 2016, Sapporo, Japan
Poster de conférence hal-01561222 v1