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Role of Fluorinated Precursor in Area Selective PECVD of Silicon on SiOxNy
Ghewa Akiki
,
Mathieu Frégnaux
,
Ileana Florea
,
Pavel Bulkin
,
Dmitri Daineka
5th Area Selective Deposition Workshop (ASD 2021), Apr 2021, Virtual conference, United States
Communication dans un congrès
hal-04425827v1
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A Contactless Patterned Plasma Processing for Interdigitated Back Contact Silicon Heterojunction Solar Cells Fabrication
Junkang Wang
,
Monalisa Ghosh
,
Fatima Ouadjane
,
Borja Carbonell
,
Pavel Bulkin
Communication dans un congrès
hal-03836937v1
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Experimental Demonstration of Multifrequency Matching for Tailored Voltage Waveform Plasma Excitation
Sebastien Dine
,
Jean-Paul Booth
,
E.V. Johnson
,
Junkang Wang
International Conference on Phenomena in Ionised Gases, Jul 2019, Hokkaido, Japan
Communication dans un congrès
hal-02341689v1
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Heating dynamics and control of energy distribution functions in capacitive discharges driven by tailored voltage waveforms
J. Schulze
,
B. Berger
,
S. Brandt
,
M. Koepke
,
T. Mussenbrock
International Conference on Plasma Physics ICPP, Jun 2016, Kaohsiung, Taiwan
Communication dans un congrès
hal-02573352v1
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Multifrequency impedance matching solutions for plasma excitation by Tailored Voltage Waveforms
Erik Johnson
,
Sebastien Dine
,
Jean-Paul Booth
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès
hal-02593689v1
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Study of Electronic Properties of Hydrogenated Amorphous Silicon Thin Film from SiH4/H2 using Tailored Voltage Waveforms
Junkang Wang
,
Federico Ventosinos
,
Christophe Longeaud
,
Bastien Bruneau
,
D. Daineka
E-MRS 2016 Spring Meeting, May 2016, Lille, France
Communication dans un congrès
hal-01363727v1
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Modelling and experimental validation of capacitively coupled plasmas in hydrogen
D. Diomede
,
Bastien Bruneau
,
Trevor Lafleur
,
D. J. Economou
,
S. Longo
EPS Plasma, Jul 2016, Leuven, Belgium
Communication dans un congrès
hal-02573350v1
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Charged Particle Dynamics in Technological Radio Frequency Plasmas Operated in CF4
J. Schulze
,
B. Berger
,
S. Brandt
,
Bastien Bruneau
,
Y. Liu
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès
hal-02573358v1
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ELECTRON POWER ABSORPTION DYNAMICS AND ION ENERGY DISTRIBUTIONS IN CAPACITIVE DISCHARGES DRIVEN BY CUSTOMIZED VOLTAGE WAVEFORMS IN ARGON AND CF4
B. Berger
,
S. Brandt
,
J. Franek
,
E. Shuengel
,
M. Koepke
IEEE-ICOPS, Jun 2016, Banff, Canada
Communication dans un congrès
hal-02593683v1
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Capacitively coupled CF4 discharges excited by tailored waveforms: experiments and kinetic simulations
Bastien Bruneau
,
Erik Johnson
,
Jean-Paul Booth
,
Trevor Lafleur
,
T. Gans
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland
Communication dans un congrès
hal-02573343v1
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Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H2, and CF4 plasmas
Bastien Bruneau
,
Erik Johnson
,
T. Gans
,
Arthur Greb
,
Ihor Korolov
Gaseaous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès
hal-02593667v1
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Ion flux asymmetry obtained by sawtooth-like waveforms: A new degree of freedom in capacitively coupled plasmas
Bastien Bruneau
,
T. Gans
,
D. O'Connell
,
Arthur Greb
,
Trevor Lafleur
Plasma Etch and Strip in Microelectronics (PESM), Apr 2015, Louvain, Belgium
Communication dans un congrès
hal-02593661v1
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Cleaning and doping of CVD graphene using tailored voltage waveform capacitively coupled plasma
Daniil Marinov
,
Bastien Bruneau
,
Erik Johnson
,
Jean-Paul Booth
Plasma Etch and Strip in Microelectronics _PESM, Apr 2015, Louvain, Belgium
Communication dans un congrès
hal-02593662v1
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Low Pressure Plasma Cleaning and Doping of CVD Graphene
D. Marinov
,
G. Cunge
,
D. Ferrah
,
E.V. Johnson
,
J.P. Booth
AVS 62nd International Symposium & Exhibition, 2015, San José, United States
Communication dans un congrès
hal-01878405v1
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Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas
Bastien Bruneau
,
T. Novikova
,
Trevor Lafleur
,
Jean-Paul Booth
,
Erik Johnson
AVS Annual Symposium, Nov 2014, Baltimore, Maryland, United States
Communication dans un congrès
hal-02593674v1
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Low temperature hydrogenated microcrystalline silicon-carbon alloys deposited by RF-PECVD for photovoltaic application
Sofia Gaiaschi
,
E.V. Johnson
,
Marie-Estelle Gueunier-Farret
,
Christophe Longeaud
,
P. Chapon
E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France
Communication dans un congrès
hal-01099573v1
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Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD
Sofia Gaiaschi
,
Marie-Estelle Gueunier-Farret
,
Christophe Longeaud
,
E.V. Johnson
,
P. Chapon
E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France
Communication dans un congrès
hal-01099579v1
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Practical Aspects of using Tailored Voltage Waveforms for Thin Film Processing of Photovoltaic Devices
E.V. Johnson
,
Bastien Bruneau
,
Pierre-Alexandre Delattre
,
Trevor Lafleur
,
Jean-Paul Booth
AVS Symposium, Oct 2013, Long Beach, California, United States
Communication dans un congrès
hal-02573331v1
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Tailored Voltage Waveform Capacitively-Coupled Plasmas for IEDF and electron density control: Application to Microcrystalline Si Deposition
Jean-Paul Booth
,
Erik Johnson
,
Trevor Lafleur
,
Pierre-Alexandre Delattre
Semicon Korea, Jan 2013, Seoul, Korea, Unknown Region
Communication dans un congrès
hal-02573289v1
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Thin Film Deposition with Tailored Voltage Waveforms: Material Questions and Practical Answers
E.V. Johnson
,
Bastien Bruneau
,
Pierre-Alexandre Delattre
,
Trevor Lafleur
,
Jean-Paul Booth
RF Plasma workshop, May 2013, Presqu île de Giens, France
Communication dans un congrès
hal-02573291v1
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Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD
Sofia Gaiaschi
,
R. Ruggeri
,
E.V. Johnson
,
Pavel Bulkin
,
Marie-Estelle Gueunier-Farret
E-MRS Spring Meeting 2013, May 2013, Strasbourg, France
Communication dans un congrès
hal-00931313v1
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RF power influence on structural and electrical properties of µc-Si1-xCx:H
Sofia Gaiaschi
,
Marie-Estelle Gueunier-Farret
,
Christophe Longeaud
,
E.V. Johnson
,
Pavel Bulkin
EUPVSEC 2013, Sep 2013, Paris, France
Communication dans un congrès
hal-00931310v1
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Capacitively coupled plasmas excited by tailored voltage waveforms
Trevor Lafleur
,
Pierre-Alexandre Delattre
,
E.V. Johnson
,
Jean-Paul Booth
EPS Plasma, Jul 2013, Espoo, Finland
Communication dans un congrès
hal-02573294v1
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µc-Si1-xCx:H deposited by RF-PECVD: a novel material for PV applications
Sofia Gaiaschi
,
E.V. Johnson
,
Marie-Estelle Gueunier-Farret
,
Christophe Longeaud
,
Pavel Bulkin
E-MRS Fall Meeting 2013, Sep 2013, Warsaw, Poland
Communication dans un congrès
hal-00931311v1
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Tailored Voltage deposition of µc-Si1-xCx:H from H2 diluted SiH4 and CH4 gas mixtures
Sofia Gaiaschi
,
R. Ruggeri
,
E.V. Johnson
,
Marie-Estelle Gueunier-Farret
,
Christophe Longeaud
ICANS 25, Aug 2013, Toronto, Canada
Communication dans un congrès
hal-00931312v1
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Tailoring plasma properties using pulse-shaping technology,
Jean-Paul Booth
,
E.V. Johnson
,
Trevor Lafleur
,
Pierre-Alexandre Delattre
,
R.W. Boswell
21st ISPC, Aug 2013, Cairns, Australia
Communication dans un congrès
hal-02573330v1
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IN-SITU OBSERVATION OF MICROCRYSTALLINE SILICON THIN FILM GROWTH USING TAILORED VOLTAGE WAVEFORMS
E.V. Johnson
,
Bastien Bruneau
,
Pierre-Alexandre Delattre
,
Trevor Lafleur
,
Jean-Paul Booth
International Vacuum Conference, Sep 2013, Paris, France
Communication dans un congrès
hal-02594804v1
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Plasma Excitation using Tailored Voltage Waveforms for the Deposition of Thin Film Silicon for Photovoltaics: From Plasma Physics to Devices
E.V. Johnson
,
Pierre-Alexandre Delattre
,
Trevor Lafleur
,
Jean-Paul Booth
5th International Symposium on Atomically Controlled, Oct 2012, Osaka, Japan
Communication dans un congrès
hal-02573298v1
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Caracterisations structurales et electriques de μc-Si1−xCx :H deposes par RF-PECVD
Sofia Gaiaschi
,
R. Ruggeri
,
E.V. Johnson
,
Pavel Bulkin
,
Marie-Estelle Gueunier-Farret
JNPV 2012, Dec 2012, Chantilly, France
Communication dans un congrès
hal-00781749v1
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Tailored Voltage Waveform Capacitively-Coupled Plasmas
Jean-Paul Booth
,
Trevor Lafleur
,
Pierre-Alexandre Delattre
,
E.V. Johnson
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès
hal-02594732v1
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Plasma deposition processes excited using Tailored Voltage Waveforms: from microcrystalline silicon thin films to devices
E.V. Johnson
,
S. Pouliquen
,
Pierre-Alexandre Delattre
,
Jean-Paul Booth
AVS Symposium, Oct 2012, Tampa, Floride, United States
Communication dans un congrès
hal-02573299v1
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Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR
Sofia Gaiaschi
,
E.V. Johnson
,
Pavel Bulkin
,
P. Chapon
,
Marie-Estelle Gueunier-Farret
E-MRS Spring Meeting 2012, May 2012, Strasbourg, France
Communication dans un congrès
hal-00779004v1
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Plasma deposition of nanocrystalline silicon for solar cells : RF waveform tailoring to optimize deposition rate and film morphology
Jean-Paul Booth
,
E.V. Johnson
,
Pierre-Alexandre Delattre
Gaseous Electronics Meeting, Feb 2012, Murramarang, Australia
Communication dans un congrès
hal-02573287v1
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RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD
Jean-Paul Booth
,
E.V. Johnson
,
Pierre-Alexandre Delattre
,
T. Verbeke
,
J-C Vanel
International Conference on Plasmas and Nanotechnology (ICPLANTS), Feb 2011, Takayama, Japan
Communication dans un congrès
hal-02594739v1
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DEPOSITION OF THIN FILM OF SILICON MICROCRISTALLINE BY RADIO FREQUENCY VOLTAGE WAVEFORM TAILORING
S. Pouliquen
,
Pierre-Alexandre Delattre
,
E.V. Johnson
,
Jean-Paul Booth
AVS, Oct 2011, Nashville, Tennessee, United States
Communication dans un congrès
hal-02594748v1
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Tailored Voltage Waveforms for the Deposition of Microcrystalline Silicon
E.V. Johnson
,
Pierre-Alexandre Delattre
,
Jean-Paul Booth
ICANS, Aug 2011, Nara, Japan
Communication dans un congrès
hal-02594746v1
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Control of Nanocrystalline Growth Phase and Deposition Rate through Voltage Waveform Tailoring
E.V. Johnson
,
Pierre-Alexandre Delattre
,
Jean-Paul Booth
MRS spring meeting, Apr 2011, San Francisco, California, United States
Communication dans un congrès
hal-02594741v1
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VOLTAGE WAVEFORM TAILORING: A PROMISING NEW METHOD FOR SILICON DEPOSITION
Pierre-Alexandre Delattre
,
S. Pouliquen
,
E.V. Johnson
,
Nishant Sirse
,
Jean-Paul Booth
CIP (Congres International sur les Plasmas), Jun 2011, Nantes, France
Communication dans un congrès
hal-02594747v1
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Nanocrystalline silicon film growth morphology control through RF waveform tailoring
Jean-Paul Booth
,
E.V. Johnson
,
T. Verbeke
,
J-C Vanel
AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States
Communication dans un congrès
hal-02595160v1
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Control of Microcrystalline Silicon Deposition by RF Waveform Tailoring
E.V. Johnson
,
Jean-Paul Booth
,
J-C Vanel
,
T. Verbeke
Gaseous Electronics Conference, Oct 2010, Paris, France
Communication dans un congrès
hal-02595158v1
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RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD
Jean-Paul Booth
,
E.V. Johnson
,
T. Verbeke
,
J-C Vanel
UK-Technological Plasmas Workshop, Dec 2010, Bristol, United Kingdom
Communication dans un congrès
hal-02595161v1
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Open-circuit voltage increase dynamics in high and low deposition rate polymorphous silicon solar cells
E.V. Johnson
,
Foudil Dadouche
,
Marie-Estelle Farret-Gueunier
,
Jean-Paul Kleider
,
Pere Roca I Cabarrocas
23rd International Conference on Amorphous and Nanocrystalline Semiconductors - ICANS23, 2009, Utrecht, Netherlands
Communication dans un congrès
hal-00446010v1
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Comparative study of thin-film silicon cell tandem structures pm-Si:H/µc-Si:H in system association prospect
Foudil Dadouche
,
Olivier Bethoux
,
Marie-Estelle Farret-Gueunier
,
E.V. Johnson
,
Pere Roca I Cabarrocas
European Materials Research Society – EMRS Spring Meeting, 2009, Strasbourg, France. pp.CD-Rom Proceedings
Communication dans un congrès
hal-00446008v1
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Hydrogenated polymorphous silicon at high deposition rate : serious alternative for cost-effective modules
E.V. Johnson
,
A. Abramov
,
K.H. Kim
,
Yrebegnan Soro
,
Marie-Estelle Farret-Gueunier
18th International Photovoltaic Science and Engineering Conference and Exhibition, 2009, Kolkata, India
Communication dans un congrès
hal-00446006v1
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A system study on silicon thin-film pm-Si:H/µc-Si:H tandem cell structure
Foudil Dadouche
,
Olivier Bethoux
,
Eric Labouré
,
E.V. Johnson
,
Pere Roca I Cabarrocas
24th European Photovoltaic Solar Energy Conference, Sep 2009, Hambourg, Germany. pp. 3699-3705
Communication dans un congrès
hal-00446011v1
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Device grade hydrogenated polymorphous silicon deposited at high rates
Yrebegnan Moussa Soro
,
A. Abramov
,
Marie-Estelle Gueunier-Farret
,
E.V. Johnson
,
Christophe Longeaud
22nd International Conference on Amorphous and Nanocrystalline Semiconductors, ICANS 22, 2007, United States
Communication dans un congrès
hal-00322281v1
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Polymorphous silicon thin films deposited at high rate: transport properties and density of states
Yrebegnan Moussa Soro
,
A. Abramov
,
Marie-Estelle Gueunier-Farret
,
E.V. Johnson
,
Christophe Longeaud
E-MRS 2007 Spring Meeting, 2007, France
Communication dans un congrès
hal-00322303v1
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