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Erik Johnson

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Reactive plasma sputtering deposition of polycrystalline GaN thin films on silicon substrates at room temperature

Lakshman Srinivasan , Cyril Jadaud , François Silva , Jean-Charles Vanel , Jean-Luc Maurice
Journal of Vacuum Science & Technology A, 2023, 41 (5), ⟨10.1116/6.0002718⟩
Journal articles hal-04278185v1

Evolution of Cu-In Catalyst Nanoparticles under Hydrogen Plasma Treatment and Silicon Nanowire Growth Conditions

Weixi Wang , Éric Ngo , Pavel Bulkin , Zhengyu Zhang , Martin Foldyna
Nanomaterials, 2023, 13 (14), pp.2061. ⟨10.3390/nano13142061⟩
Journal articles hal-04278157v1
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Maskless patterned plasma fabrication of interdigitated back contact silicon heterojunction solar cells: Characterization and optimization

Junkang Wang , Monalisa Ghosh , Karim Ouaras , Dmitri Daineka , Pavel Bulkin
Solar Energy Materials and Solar Cells, 2023, 258, pp.112417. ⟨10.1016/j.solmat.2023.112417⟩
Journal articles hal-04269861v1

Maskless interdigitated a-Si:H PECVD process on full M0 c-Si wafer: Homogeneity and passivation assessment

Karim Ouaras , Sergej Filonovich , Bastien Bruneau , Junkang Wang , Monalisa Ghosh
Solar Energy Materials and Solar Cells, 2022, 246, pp.111927. ⟨10.1016/j.solmat.2022.111927⟩
Journal articles hal-03866046v1

Maskless interdigitated a-Si:H PECVD process on full M0 c-Si wafer: Homogeneity and passivation assessment

Karim Ouaras , Sergej Filonovich , Bastien Bruneau , Junkang Wang , Monalisa Ghosh
Solar Energy Materials and Solar Cells, 2022, 246 (8), pp.2200248. ⟨10.1016/j.solmat.2022.111927⟩
Journal articles hal-03861471v1
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Triple Radial Junction Hydrogenated Amorphous Silicon Solar Cells with >2 V Open‐Circuit Voltage

Chaoqi Wang , Martin Foldyna , Erik V Johnson , Pere Roca i Cabarrocas
Solar RRL, 2022, 6 (8), pp.2200248. ⟨10.1002/solr.202200248⟩
Journal articles hal-03861463v1
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Ultrathin Ge epilayers on Si produced by low-temperature PECVD acting as virtual substrates for III-V / c-Si tandem solar cells

Monalisa Ghosh , Pavel Bulkin , François Silva , Erik Johnson , Ileana Florea
Solar Energy Materials and Solar Cells, 2022, 236, pp.111535. ⟨10.1016/j.solmat.2021.111535⟩
Journal articles hal-03861478v1
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Formation of inverse cones in crystalline silicon by selective etching of amorphous regions resulting from epitaxial breakdown

H Mohsin , W Chen , D Daineka , P Roca I Cabarrocas , E Johnson
Journal of Physics D: Applied Physics, 2021, 54 (49), pp.495103. ⟨10.1088/1361-6463/ac22d8⟩
Journal articles hal-03383213v1
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Origin of area selective plasma enhanced chemical vapor deposition of microcrystalline silicon

Ghewa Akiki , Mathieu Frégnaux , Ileana Florea , Pavel Bulkin , Dmitri Daineka
Journal of Vacuum Science & Technology A, 2021, 39 (1), pp.013201. ⟨10.1116/6.0000653⟩
Journal articles hal-03060642v1
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Observation of photovoltaic effect within locally doped silicon nanojunctions using conductive probe AFM

R. Khoury , J Alvarez , T. Ohashi , I. Martín , P. Ortega
Nano Energy, 2020, 76, pp.105072. ⟨10.1016/j.nanoen.2020.105072⟩
Journal articles hal-02905754v1
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Area selective deposition of silicon by plasma enhanced chemical vapor deposition using a fluorinated precursor

Ghewa Akiki , Daniel Suchet , Dmitri Daineka , Sergej Filonovich , Pavel Bulkin
Applied Surface Science, 2020, 531, pp.147305. ⟨10.1016/j.apsusc.2020.147305⟩
Journal articles hal-03001811v1
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Maskless and contactless patterned silicon deposition using a localized PECVD process

Ronan Leal , Bastien Bruneau , Pavel Bulkin , Tatiana Novikova , François Silva
Plasma Sources Science and Technology, 2020, 29 (2), pp.025023. ⟨10.1088/1361-6595/ab5e2c⟩
Journal articles hal-02545248v1
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Direct etching at the nanoscale through nanoparticle-directed capillary condensation

M. Garín , R. Khoury , I. Martín , Erik Johnson
Nanoscale, 2020, 12 (16), pp.9240-9245. ⟨10.1039/C9NR10217E⟩
Journal articles hal-03001169v1
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Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge

Jean-Maxime Orlac'H , Tatiana Novikova , Vincent Giovangigli , Erik Johnson , Pere Roca
Plasma Sources Science and Technology, 2019, 28 (5), pp.055003. ⟨10.1088/1361-6595/ab067d⟩
Journal articles hal-01856184v3
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Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas

Junkang Wang , Sébastien Diné , Jean-Paul Booth , Erik Johnson
Journal of Vacuum Science & Technology A, 2019, 37 (2), pp.021303. ⟨10.1116/1.5056205⟩
Journal articles hal-02081466v1

Erratum: Multi frequency matching for voltage waveform tailoring (2018 Plasma Sources Sci. Technol. 27 095012)

Frederik Schmidt , Julian Schulze , Erik Johnson , Jean-Paul Booth , Douglas Keil
Plasma Sources Science and Technology, 2019, 28, pp.019601. ⟨10.1088/1361-6595/aaeb4b⟩
Journal articles hal-03730658v1
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Microcrystalline silicon thin film deposition from silicon tetrafluoride: Isolating role of ion energy using tailored voltage waveform plasmas

Junkang Wang , Dmitri Daineka , Mustapha Elyaakoubi , Erik Johnson
Solar Energy Materials and Solar Cells, 2019, 190, pp.65-74. ⟨10.1016/j.solmat.2018.10.014⟩
Journal articles hal-02391003v1

Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge

Jean-Maxime Orlac’h , Tatiana Novikova , Vincent Giovangigli , Erik Johnson , Pere Roca I Cabarrocas
Plasma Sources Science and Technology, 2019, 28 (5), pp.055003. ⟨10.1088/1361-6595/ab067d⟩
Journal articles hal-04286867v1

Large Area Radial Junction Silicon Nanowire Solar Mini-Modules

Mutaz Al-Ghzaiwat , Martin Foldyna , Takashi Fuyuki , Wanghua Chen , Erik Johnson
Scientific Reports, 2018, 8 (1), ⟨10.1038/s41598-018-20126-5⟩
Journal articles hal-01908687v1

Multi frequency matching for voltage waveform tailoring

Frederik Schmidt , J. Schulze , Erik Johnson , Jean-Paul Booth , D. Keil
Plasma Sources Science and Technology, 2018, 27 (9), pp.095012. ⟨10.1088/1361-6595/aad2cd⟩
Journal articles hal-02271985v1
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Optical Study and Experimental Realization of Nanostructured Back Reflectors with Reduced Parasitic Losses for Silicon Thin Film Solar Cells

Zeyu Li , Rusli E , Chenjin Chen , Ari Prakoso , Martin Foldyna
Nanomaterials, 2018, 8 (626), ⟨10.3390/nano8080626⟩
Journal articles hal-01908707v1

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Z. Donkó , A. Derzsi , Ihor Korolov , P. Hartmann , S. Brandt
Plasma Physics and Controlled Fusion, 2018, 60 (1), pp.014010. ⟨10.1088/1361-6587/aa8378⟩
Journal articles hal-01895567v1

Structural study of NiOx thin films fabricated by radio frequency sputtering at low temperature

Zhang Song , Tiphaine Bourgeteau , Itaru Raifuku , Yvan Bonnassieux , Erik Johnson
Thin Solid Films, 2018, 646, pp.209 - 215. ⟨10.1016/j.tsf.2017.12.003⟩
Journal articles hal-01908690v1

Excitation of Ar, O 2 , and SF 6 /O 2 plasma discharges using tailored voltage waveforms: control of surface ion bombardment energy and determination of the dominant electron excitation mode

G Fischer , K. Ouaras , E Drahi , B. Bruneau , E Johnson
Plasma Sources Science and Technology, 2018, 27 (7), pp.074003. ⟨10.1088/1361-6595/aaca05⟩
Journal articles hal-02391062v1
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Natural occurrence of the diamond hexagonal structure in silicon nanowires grown by a plasma-assisted vapour-liquid-solid method

J. Tang , Maurice J.L. , F. Fossard , I. Florea , Chen W.
Nanoscale, 2017, 9 (24), pp.8113-8118. ⟨10.1039/c7nr01299c⟩
Journal articles hal-01632386v1

Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges

A. Derzsi , Bastien Bruneau , Andrew Gibson , Erik Johnson , D. O'Connell
Plasma Sources Science and Technology, 2017, 26 (3), pp.034002. ⟨10.1088/1361-6595/aa56d6⟩
Journal articles hal-01895575v1

Texturing optimization for bifacial n-PERT: are pyramids and/or black silicon the way to go for thinner devices?

Rafaël Peyronnet , Guillaume Fischer , Thomas Blévin , Erik Johnson , Etienne Drahi
Energy Procedia, 2017, 124, pp.250-259
Journal articles hal-02018312v1

Plasma nanotexturing of silicon surfaces for photovoltaics applications: influence of initial surface finish on the evolution of topographical and optical properties

Guillaume Fischer , Étienne Drahi , Martin Foldyna , Thomas A. Germer , Erik V. Johnson
Optics Express, 2017, 25 (24), ⟨10.1364/OE.25.0A1057⟩
Journal articles hal-01640105v1

Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: vibrational kinetics and negative ions control

P. Diomede , Bastien Bruneau , S. Longo , E.V. Johnson , Jean-Paul Booth
Plasma Sources Science and Technology, 2017, 26 (7), pp.075007. ⟨10.1088/1361-6595/aa752c⟩
Journal articles hal-01895582v1

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bastien Bruneau , Ihor Korolov , Trevor Lafleur , T. Gans , D. O'Connell
Journal of Applied Physics, 2016, 119 (16), pp.163301. ⟨10.1063/1.4947453⟩
Journal articles hal-01549329v1

Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

E. Schüngel , Ihor Korolov , Bastien Bruneau , A. Derzsi , E.V. Johnson
Journal of Physics D: Applied Physics, 2016, 49 (26), pp.265203. ⟨10.1088/0022-3727/49/26/265203⟩
Journal articles hal-01549338v1

Plasma-Assisted Growth of Silicon Nanowires by Sn Catalyst: Step-by-Step Observation

Jian Tang , Jean-Luc Maurice , Wanghua Chen , Soumyadeep Misra , Martin Foldyna
Nanoscale Research Letters, 2016, 11 (1), ⟨10.1186/s11671-016-1681-5⟩
Journal articles hal-01401083v1

Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms

Bastien Bruneau , Trevor Lafleur , Jean-Paul Booth , Erik Johnson
Plasma Sources Science and Technology, 2016, 25 (2), pp.025006. ⟨10.1088/0963-0252/25/2/025006⟩
Journal articles hal-01549334v1

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

Bastien Bruneau , Trevor Lafleur , T. Gans , D. O'Connell , Arthur Greb
Plasma Sources Science and Technology, 2016, 25 (1), pp.01LT02. ⟨10.1088/0963-0252/25/1/01LT02⟩
Journal articles hal-01549332v1

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

S. Brandt , B. Berger , E. Schüngel , Ihor Korolov , A. Derzsi
Plasma Sources Science and Technology, 2016, 25 (4), pp.045015. ⟨10.1088/0963-0252/25/4/045015⟩
Journal articles hal-01549325v1

Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson
Plasma Sources Science and Technology, 2015, 24 (1), pp.015021. ⟨10.1088/0963-0252/24/1/015021⟩
Journal articles hal-01549355v1

Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , E.V. Johnson
Physical Review Letters, 2015, 114, pp.125002. ⟨10.1103/PhysRevLett.114.125002⟩
Journal articles hal-01549359v1

Substrate and p-layer effects on polymorphous silicon solar cells

S.N. Abolmasov , H. Woo , R. Planques , J. Holovský , E.V. Johnson
EPJ Photovoltaics, 2014, 5, ⟨10.1051/epjpv/2014007⟩
Journal articles hal-01230707v1

Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures

Jean-Christophe Dornstetter , Bastien Bruneau , Pavel Bulkin , Erik V. Johnson , Pere Roca I Cabarrocas
The Journal of Chemical Physics, 2014, 140 (23), ⟨10.1063/1.4883503⟩
Journal articles hal-01230708v1

anglais

Jean-Christophe Dornstetter , Junkang Wang , Bastien Bruneau , Erik V. Johnson , Pere Roca I Cabarrocas
Canadian Journal of Physics, 2014, 92 (7/8), ⟨10.1139/cjp-2013-0606⟩
Journal articles hal-01230710v1

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson
Plasma Sources Science and Technology, 2014, 23 (6), pp.065010. ⟨10.1088/0963-0252/23/6/065010⟩
Journal articles hal-01549377v1

Structural properties of hydrogenated microcrystalline silicon–carbon alloys deposited by Radio Frequency Plasma Enhanced Chemical Vapor Deposition: Effect of microcrystalline silicon seed layer and methane flow rate

S. Gaiaschi , R. Ruggeri , E.V. Johnson , P. Bulkin , P. Chapon
Thin Solid Films, 2014, 550, pp.312-318. ⟨10.1016/j.tsf.2013.11.081⟩
Journal articles hal-01099597v1

Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

C. Charpentier , R. Boukhicha , P. Prod׳homme , T. Emeraud , J.-F. Lerat
Solar Energy Materials and Solar Cells, 2014, 125, ⟨10.1016/j.solmat.2014.02.027⟩
Journal articles hal-01230703v1

Use of radio frequency power, silicon tetrafluoride and methane as parameters to tune structural properties of hydrogenated microcrystalline silicon carbon alloys

S Gaiaschi , R Ruggeri , M-E Gueunier-Farret , E V Johnson
Journal of Physics D: Applied Physics, 2014, 47 (45), pp.455102. ⟨10.1088/0022-3727/47/45/455102⟩
Journal articles hal-01104321v1

Low temperature hydrogenated microcrystalline silicon-carbon alloys deposited by RF-PECVD

Sofia Gaiaschi , Marie-Estelle Gueunier-Farret , Erik V. Johnson
physica status solidi (c), 2014, 11 (11-12), pp.1665-1668. ⟨10.1002/pssc.201400034⟩
Journal articles hal-01104328v1

Understanding Light Harvesting in Radial Junction Amorphous Silicon Thin Film Solar Cells

Linwei Yu , Soumyadeep Misra , Junzhuan Wang , Shengyi Qian , Martin Foldyna
Scientific Reports, 2014, 4, pp.4357. ⟨10.1038/srep04357⟩
Journal articles hal-01083479v1

Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Pierre-Alexandre Delattre , Trevor Lafleur , Erik Johnson , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2013, 46, pp.235201. ⟨10.1088/0022-3727/46/23/235201⟩
Journal articles hal-01549413v1

Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , Sébastien Diné
Review of Scientific Instruments, 2013, 84, pp.015001. ⟨10.1063/1.4773540⟩
Journal articles hal-01549400v1

Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
Plasma Physics and Controlled Fusion, 2013, 55 (12), pp.124002. ⟨10.1088/0741-3335/55/12/124002⟩
Journal articles hal-01549416v1

Tailored voltage waveform deposition of Microcrystalline Silicon thin films from hydrogen-diluted silane and silicon tetrafluoride: optoelectronic properties of films

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
Japanese Journal of Applied Physics, 2012, 51, pp.08HF01. ⟨10.1143/JJAP.51.08HF01⟩
Journal articles hal-01549433v1

Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
Applied Physics Letters, 2012, 100, pp.133504. ⟨10.1063/1.3699222⟩
Journal articles hal-01549437v1

Separate control of the ion flux and ion energy in capacitively coupled rf discharges using voltage waveform tailoring

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
Applied Physics Letters, 2012, 101, pp.124104. ⟨10.1063/1.4754692⟩
Journal articles hal-01549435v1

Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
Journal of Non-Crystalline Solids, 2012, 358 (17), pp.1974-1977. ⟨10.1016/j.jnoncrysol.2012.01.014⟩
Journal articles hal-01549432v1
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Low Temperature Plasma Synthesis of Nanocrystals and their Application to the Growth of Crystalline Silicon and Germanium Thin Films

Pere Roca I Cabarrocas , Ka-Hyun Kim , Romain Cariou , Martin Labrune , Erik Johnson
MRS Online Proceedings Library, 2012, 1426, pp.319. ⟨10.1557/opl.2012.1094⟩
Journal articles hal-00797647v1

Control of Nanocrystalline Silicon Growth Phase and Deposition Rate through Voltage Waveform Tailoring during PECVD

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
MRS Online Proceedings Library, 2011, 1339, pp.mrss11-1339-s04-5. ⟨10.1557/opl.2011.993⟩
Journal articles hal-01549456v1
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Geometrical optimization and electrical performance comparison of thin-film tandem structures based on pm-Si:H and µc-Si:H using computer simulation

Foudil Dadouche , Olivier Bethoux , Marie-Estelle Gueunier-Farret , Erik Johnson , Pere Roca I Cabarrocas
EPJ Photovoltaics, 2011, 2, pp.20301. ⟨10.1051/pvd/2011001⟩
Journal articles hal-00642129v1

Open-circuit voltage increase dynamics in high and low deposition rate polymorphous silicon solar cells

E.V. Johnson , Foudil Dadouche , Marie-Estelle Farret-Gueunier , Jean-Paul Kleider , Pere Roca I Cabarrocas
physica status solidi (a), 2010, 207 (3), pp.691-694
Journal articles hal-00555228v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

E.V. Johnson , T. Verbeke , J-C Vanel , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2010, 43, pp.412001. ⟨10.1088/0022-3727/43/41/412001⟩
Journal articles hal-01549485v1

Device grade hydrogenated polymorphous silicon deposited at high rates

Yrebegnan Moussa Soro , A. Abramov , Marie-Estelle Gueunier-Farret , E.V. Johnson , Christophe Longeaud
Journal of Non-Crystalline Solids, 2008, 354, pp.2092
Journal articles hal-00350767v1

Polymorphous silicon thin films deposited at high rate: transport properties and density of states

Yrebegnan Moussa Soro , A. Abramov , Marie-Estelle Gueunier-Farret , E.V. Johnson , Christophe Longeaud
Thin Solid Films, 2008, 516, pp.6888
Journal articles hal-00350886v1

Role of Fluorinated Precursor in Area Selective PECVD of Silicon on SiOxNy

Ghewa Akiki , Mathieu Frégnaux , Ileana Florea , Pavel Bulkin , Dmitri Daineka
5th Area Selective Deposition Workshop (ASD 2021), Apr 2021, Virtual conference, United States
Conference papers hal-04425827v1
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A Contactless Patterned Plasma Processing for Interdigitated Back Contact Silicon Heterojunction Solar Cells Fabrication

Junkang Wang , Monalisa Ghosh , Fatima Ouadjane , Borja Carbonell , Pavel Bulkin
2021 IEEE 48th Photovoltaic Specialists Conference (PVSC), Jun 2021, Fort Lauderdale, France. pp.0596-0601, ⟨10.1109/PVSC43889.2021.9518831⟩
Conference papers hal-03836937v1

Experimental Demonstration of Multifrequency Matching for Tailored Voltage Waveform Plasma Excitation

Sebastien Dine , Jean-Paul Booth , E.V. Johnson , Junkang Wang
International Conference on Phenomena in Ionised Gases, Jul 2019, Hokkaido, Japan
Conference papers hal-02341689v1

Study of Electronic Properties of Hydrogenated Amorphous Silicon Thin Film from SiH4/H2 using Tailored Voltage Waveforms

Junkang Wang , Federico Ventosinos , Christophe Longeaud , Bastien Bruneau , D. Daineka
E-MRS 2016 Spring Meeting, May 2016, Lille, France
Conference papers hal-01363727v1

ELECTRON POWER ABSORPTION DYNAMICS AND ION ENERGY DISTRIBUTIONS IN CAPACITIVE DISCHARGES DRIVEN BY CUSTOMIZED VOLTAGE WAVEFORMS IN ARGON AND CF4

B. Berger , S. Brandt , J. Franek , E. Shuengel , M. Koepke
IEEE-ICOPS, Jun 2016, Banff, Canada
Conference papers hal-02593683v1

Charged Particle Dynamics in Technological Radio Frequency Plasmas Operated in CF4

J. Schulze , B. Berger , S. Brandt , Bastien Bruneau , Y. Liu
AVS Symposium, Nov 2016, Nashville, United States
Conference papers hal-02573358v1

Modelling and experimental validation of capacitively coupled plasmas in hydrogen

D. Diomede , Bastien Bruneau , Trevor Lafleur , D. J. Economou , S. Longo
EPS Plasma, Jul 2016, Leuven, Belgium
Conference papers hal-02573350v1

Multifrequency impedance matching solutions for plasma excitation by Tailored Voltage Waveforms

Erik Johnson , Sebastien Dine , Jean-Paul Booth
AVS Symposium, Nov 2016, Nashville, United States
Conference papers hal-02593689v1

Heating dynamics and control of energy distribution functions in capacitive discharges driven by tailored voltage waveforms

J. Schulze , B. Berger , S. Brandt , M. Koepke , T. Mussenbrock
International Conference on Plasma Physics ICPP, Jun 2016, Kaohsiung, Taiwan
Conference papers hal-02573352v1

Low Pressure Plasma Cleaning and Doping of CVD Graphene

D. Marinov , G. Cunge , D. Ferrah , E.V. Johnson , J.P. Booth
AVS 62nd International Symposium & Exhibition, 2015, San José, United States
Conference papers hal-01878405v1

Capacitively coupled CF4 discharges excited by tailored waveforms: experiments and kinetic simulations

Bastien Bruneau , Erik Johnson , Jean-Paul Booth , Trevor Lafleur , T. Gans
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland
Conference papers hal-02573343v1

Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H2, and CF4 plasmas

Bastien Bruneau , Erik Johnson , T. Gans , Arthur Greb , Ihor Korolov
Gaseaous Electronics Conference, Oct 2015, Honolulu, United States
Conference papers hal-02593667v1

Ion flux asymmetry obtained by sawtooth-like waveforms: A new degree of freedom in capacitively coupled plasmas

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , Trevor Lafleur
Plasma Etch and Strip in Microelectronics (PESM), Apr 2015, Louvain, Belgium
Conference papers hal-02593661v1

Cleaning and doping of CVD graphene using tailored voltage waveform capacitively coupled plasma

Daniil Marinov , Bastien Bruneau , Erik Johnson , Jean-Paul Booth
Plasma Etch and Strip in Microelectronics _PESM, Apr 2015, Louvain, Belgium
Conference papers hal-02593662v1

Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , Erik Johnson
AVS Annual Symposium, Nov 2014, Baltimore, Maryland, United States
Conference papers hal-02593674v1

Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD

Sofia Gaiaschi , Marie-Estelle Gueunier-Farret , Christophe Longeaud , E.V. Johnson , P. Chapon
E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France
Conference papers hal-01099579v1

Low temperature hydrogenated microcrystalline silicon-carbon alloys deposited by RF-PECVD for photovoltaic application

Sofia Gaiaschi , E.V. Johnson , Marie-Estelle Gueunier-Farret , Christophe Longeaud , P. Chapon
E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France
Conference papers hal-01099573v1

µc-Si1-xCx:H deposited by RF-PECVD: a novel material for PV applications

Sofia Gaiaschi , E.V. Johnson , Marie-Estelle Gueunier-Farret , Christophe Longeaud , Pavel Bulkin
E-MRS Fall Meeting 2013, Sep 2013, Warsaw, Poland
Conference papers hal-00931311v1

Tailored Voltage deposition of µc-Si1-xCx:H from H2 diluted SiH4 and CH4 gas mixtures

Sofia Gaiaschi , R. Ruggeri , E.V. Johnson , Marie-Estelle Gueunier-Farret , Christophe Longeaud
ICANS 25, Aug 2013, Toronto, Canada
Conference papers hal-00931312v1

IN-SITU OBSERVATION OF MICROCRYSTALLINE SILICON THIN FILM GROWTH USING TAILORED VOLTAGE WAVEFORMS

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
International Vacuum Conference, Sep 2013, Paris, France
Conference papers hal-02594804v1

Tailoring plasma properties using pulse-shaping technology,

Jean-Paul Booth , E.V. Johnson , Trevor Lafleur , Pierre-Alexandre Delattre , R.W. Boswell
21st ISPC, Aug 2013, Cairns, Australia
Conference papers hal-02573330v1

Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD

Sofia Gaiaschi , R. Ruggeri , E.V. Johnson , Pavel Bulkin , Marie-Estelle Gueunier-Farret
E-MRS Spring Meeting 2013, May 2013, Strasbourg, France
Conference papers hal-00931313v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas for IEDF and electron density control: Application to Microcrystalline Si Deposition

Jean-Paul Booth , Erik Johnson , Trevor Lafleur , Pierre-Alexandre Delattre
Semicon Korea, Jan 2013, Seoul, Korea, Unknown Region
Conference papers hal-02573289v1

Thin Film Deposition with Tailored Voltage Waveforms: Material Questions and Practical Answers

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
RF Plasma workshop, May 2013, Presqu île de Giens, France
Conference papers hal-02573291v1

Practical Aspects of using Tailored Voltage Waveforms for Thin Film Processing of Photovoltaic Devices

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
AVS Symposium, Oct 2013, Long Beach, California, United States
Conference papers hal-02573331v1

RF power influence on structural and electrical properties of µc-Si1-xCx:H

Sofia Gaiaschi , Marie-Estelle Gueunier-Farret , Christophe Longeaud , E.V. Johnson , Pavel Bulkin
EUPVSEC 2013, Sep 2013, Paris, France
Conference papers hal-00931310v1

Capacitively coupled plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
EPS Plasma, Jul 2013, Espoo, Finland
Conference papers hal-02573294v1

Caracterisations structurales et electriques de μc-Si1−xCx :H deposes par RF-PECVD

Sofia Gaiaschi , R. Ruggeri , E.V. Johnson , Pavel Bulkin , Marie-Estelle Gueunier-Farret
JNPV 2012, Dec 2012, Chantilly, France
Conference papers hal-00781749v1

Plasma deposition of nanocrystalline silicon for solar cells : RF waveform tailoring to optimize deposition rate and film morphology

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre
Gaseous Electronics Meeting, Feb 2012, Murramarang, Australia
Conference papers hal-02573287v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas

Jean-Paul Booth , Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson
GEC, Oct 2012, Austin, Texas, United States
Conference papers hal-02594732v1

Plasma deposition processes excited using Tailored Voltage Waveforms: from microcrystalline silicon thin films to devices

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
AVS Symposium, Oct 2012, Tampa, Floride, United States
Conference papers hal-02573299v1

Plasma Excitation using Tailored Voltage Waveforms for the Deposition of Thin Film Silicon for Photovoltaics: From Plasma Physics to Devices

E.V. Johnson , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
5th International Symposium on Atomically Controlled, Oct 2012, Osaka, Japan
Conference papers hal-02573298v1

Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR

Sofia Gaiaschi , E.V. Johnson , Pavel Bulkin , P. Chapon , Marie-Estelle Gueunier-Farret
E-MRS Spring Meeting 2012, May 2012, Strasbourg, France
Conference papers hal-00779004v1

DEPOSITION OF THIN FILM OF SILICON MICROCRISTALLINE BY RADIO FREQUENCY VOLTAGE WAVEFORM TAILORING

S. Pouliquen , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
AVS, Oct 2011, Nashville, Tennessee, United States
Conference papers hal-02594748v1

VOLTAGE WAVEFORM TAILORING: A PROMISING NEW METHOD FOR SILICON DEPOSITION

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Nishant Sirse , Jean-Paul Booth
CIP (Congres International sur les Plasmas), Jun 2011, Nantes, France
Conference papers hal-02594747v1

Tailored Voltage Waveforms for the Deposition of Microcrystalline Silicon

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
ICANS, Aug 2011, Nara, Japan
Conference papers hal-02594746v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre , T. Verbeke , J-C Vanel
International Conference on Plasmas and Nanotechnology (ICPLANTS), Feb 2011, Takayama, Japan
Conference papers hal-02594739v1

Control of Nanocrystalline Growth Phase and Deposition Rate through Voltage Waveform Tailoring

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
MRS spring meeting, Apr 2011, San Francisco, California, United States
Conference papers hal-02594741v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel
AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States
Conference papers hal-02595160v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel
UK-Technological Plasmas Workshop, Dec 2010, Bristol, United Kingdom
Conference papers hal-02595161v1

Control of Microcrystalline Silicon Deposition by RF Waveform Tailoring

E.V. Johnson , Jean-Paul Booth , J-C Vanel , T. Verbeke
Gaseous Electronics Conference, Oct 2010, Paris, France
Conference papers hal-02595158v1

Open-circuit voltage increase dynamics in high and low deposition rate polymorphous silicon solar cells

E.V. Johnson , Foudil Dadouche , Marie-Estelle Farret-Gueunier , Jean-Paul Kleider , Pere Roca I Cabarrocas
23rd International Conference on Amorphous and Nanocrystalline Semiconductors - ICANS23, 2009, Utrecht, Netherlands
Conference papers hal-00446010v1

A system study on silicon thin-film pm-Si:H/µc-Si:H tandem cell structure

Foudil Dadouche , Olivier Bethoux , Eric Labouré , E.V. Johnson , Pere Roca I Cabarrocas
24th European Photovoltaic Solar Energy Conference, Sep 2009, Hambourg, Germany. pp. 3699-3705
Conference papers hal-00446011v1

Comparative study of thin-film silicon cell tandem structures pm-Si:H/µc-Si:H in system association prospect

Foudil Dadouche , Olivier Bethoux , Marie-Estelle Farret-Gueunier , E.V. Johnson , Pere Roca I Cabarrocas
European Materials Research Society – EMRS Spring Meeting, 2009, Strasbourg, France. pp.CD-Rom Proceedings
Conference papers hal-00446008v1

Hydrogenated polymorphous silicon at high deposition rate : serious alternative for cost-effective modules

E.V. Johnson , A. Abramov , K.H. Kim , Yrebegnan Soro , Marie-Estelle Farret-Gueunier
18th International Photovoltaic Science and Engineering Conference and Exhibition, 2009, Kolkata, India
Conference papers hal-00446006v1

Device grade hydrogenated polymorphous silicon deposited at high rates

Yrebegnan Moussa Soro , A. Abramov , Marie-Estelle Gueunier-Farret , E.V. Johnson , Christophe Longeaud
22nd International Conference on Amorphous and Nanocrystalline Semiconductors, ICANS 22, 2007, United States
Conference papers hal-00322281v1

Polymorphous silicon thin films deposited at high rate: transport properties and density of states

Yrebegnan Moussa Soro , A. Abramov , Marie-Estelle Gueunier-Farret , E.V. Johnson , Christophe Longeaud
E-MRS 2007 Spring Meeting, 2007, France
Conference papers hal-00322303v1

Experimental Benchmarks and sensitivity analysis of PIC/MC simulations of oxygen CCP's

Z. Donko , Aranka Derszi , Bastien Bruneau , Andrew Gibson , E.V. Johnson
International Workshop on Radio-Frequency Plasmas, May 2017, Presqu'île de Giens, France. 2017
Conference poster hal-02611351v1

Frequency dependence of the Electrical Asymmetry Effect in electronegative capacitive RF discharges driven by Tailored Voltage Waveforms

J. Schulze , E. Schuengel , Bastien Bruneau , E.V. Johnson , Jean-Paul Booth
GEC, Oct 2016, Bochum, Germany. 2016
Conference poster hal-02611341v1

Density of states measurements of RF-power, SiF4 and CH4 –tuned-hydrogenated microcrystalline silicon carbon alloy thin films using Fourier transform photocurrent spectroscopy (FTPS)

N. Puspitosari , S. Gaiaschi , C. Longeaud , M. E. Gueunier , E. V. Johnson
European Photovoltaïc Solar Energy Conference, Sep 2015, Hambourg, Germany. Proceedings of the European Photovoltaïc Solar Energy Conference
Conference poster hal-01242764v1

Density of states measurements of RF-power, SiF4 and CH4 –tuned-hydrogenated microcrystalline silicon carbon alloy thin films using Fourier transform photocurrent spectroscopy (FTPS)

N. Puspitosari , S. Gaiaschi , C. Longeaud , M.E. Gueunier , E. V. Johnson
Journées Nationales du Photovoltaïque 2015, Dec 2015, Dourdan, France
Conference poster hal-01245742v1

Investigation of Voltage Waveform Tailoring Effect in CapacitivelyCoupled H2 Discharge: Fluid Simulations and Experimental Validation

T. Novikova , E.V. Johnson , M. Mao , P. Bulkin , Jean-Paul Booth
EPS Plasma Physics, Jul 2012, Stockholm, Sweden. 2012
Conference poster hal-02611270v1

Hybrid Model of Parallel Plate RF Discharges in H2: Effect of DC and Tailored Voltage Waveforms

P. Diomede , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , S. Longo
ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012
Conference poster hal-02611272v1

Voltage Waveform Tailoring in a RF-CCP reactor: Exploration of self-bias, electron density and current waveform

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Jean-Paul Booth
ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011
Conference poster hal-02611277v1

L'énergie solaire photovoltaïque

Daniel Suchet , E.V. Johnson
EDP science, 2022, Introduction à.., Michèle Leduc; Michel Le Bellac, 9782759829231
Books hal-04465191v1