Erik Johnson

115
Documents

Publications

Publications

Evolution of Cu-In Catalyst Nanoparticles under Hydrogen Plasma Treatment and Silicon Nanowire Growth Conditions

Weixi Wang , Éric Ngo , Pavel Bulkin , Zhengyu Zhang , Martin Foldyna et al.
Nanomaterials, 2023, 13 (14), pp.2061. ⟨10.3390/nano13142061⟩
Article dans une revue hal-04278157 v1
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Reactive plasma sputtering deposition of polycrystalline GaN thin films on silicon substrates at room temperature

Lakshman Srinivasan , Cyril Jadaud , François Silva , Jean-Charles Vanel , Jean-Luc Maurice et al.
Journal of Vacuum Science & Technology A, 2023, 41 (5), ⟨10.1116/6.0002718⟩
Article dans une revue hal-04278185 v1
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Maskless patterned plasma fabrication of interdigitated back contact silicon heterojunction solar cells: Characterization and optimization

Junkang Wang , Monalisa Ghosh , Karim Ouaras , Dmitri Daineka , Pavel Bulkin et al.
Solar Energy Materials and Solar Cells, 2023, 258, pp.112417. ⟨10.1016/j.solmat.2023.112417⟩
Article dans une revue hal-04269861 v1

Maskless interdigitated a-Si:H PECVD process on full M0 c-Si wafer: Homogeneity and passivation assessment

Karim Ouaras , Sergej Filonovich , Bastien Bruneau , Junkang Wang , Monalisa Ghosh et al.
Solar Energy Materials and Solar Cells, 2022, 246, pp.111927. ⟨10.1016/j.solmat.2022.111927⟩
Article dans une revue hal-03866046 v1

Maskless interdigitated a-Si:H PECVD process on full M0 c-Si wafer: Homogeneity and passivation assessment

Karim Ouaras , Sergej Filonovich , Bastien Bruneau , Junkang Wang , Monalisa Ghosh et al.
Solar Energy Materials and Solar Cells, 2022, 246 (8), pp.2200248. ⟨10.1016/j.solmat.2022.111927⟩
Article dans une revue hal-03861471 v1
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Ultrathin Ge epilayers on Si produced by low-temperature PECVD acting as virtual substrates for III-V / c-Si tandem solar cells

Monalisa Ghosh , Pavel Bulkin , François Silva , Erik Johnson , Ileana Florea et al.
Solar Energy Materials and Solar Cells, 2022, 236, pp.111535. ⟨10.1016/j.solmat.2021.111535⟩
Article dans une revue hal-03861478 v1
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Triple Radial Junction Hydrogenated Amorphous Silicon Solar Cells with >2 V Open‐Circuit Voltage

Chaoqi Wang , Martin Foldyna , Erik V Johnson , Pere Roca i Cabarrocas
Solar RRL, 2022, 6 (8), pp.2200248. ⟨10.1002/solr.202200248⟩
Article dans une revue hal-03861463 v1
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Origin of area selective plasma enhanced chemical vapor deposition of microcrystalline silicon

Ghewa Akiki , Mathieu Frégnaux , Ileana Florea , Pavel Bulkin , Dmitri Daineka et al.
Journal of Vacuum Science & Technology A, 2021, 39 (1), pp.013201. ⟨10.1116/6.0000653⟩
Article dans une revue hal-03060642 v1
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Formation of inverse cones in crystalline silicon by selective etching of amorphous regions resulting from epitaxial breakdown

H Mohsin , W Chen , D Daineka , P Roca I Cabarrocas , E Johnson
Journal of Physics D: Applied Physics, 2021, 54 (49), pp.495103. ⟨10.1088/1361-6463/ac22d8⟩
Article dans une revue hal-03383213 v1
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Observation of photovoltaic effect within locally doped silicon nanojunctions using conductive probe AFM

R. Khoury , J Alvarez , T. Ohashi , I. Martín , P. Ortega et al.
Nano Energy, 2020, 76, pp.105072. ⟨10.1016/j.nanoen.2020.105072⟩
Article dans une revue hal-02905754 v1
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Area selective deposition of silicon by plasma enhanced chemical vapor deposition using a fluorinated precursor

Ghewa Akiki , Daniel Suchet , Dmitri Daineka , Sergej Filonovich , Pavel Bulkin et al.
Applied Surface Science, 2020, 531, pp.147305. ⟨10.1016/j.apsusc.2020.147305⟩
Article dans une revue hal-03001811 v1
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Maskless and contactless patterned silicon deposition using a localized PECVD process

Ronan Leal , Bastien Bruneau , Pavel Bulkin , Tatiana Novikova , François Silva et al.
Plasma Sources Science and Technology, 2020, 29 (2), pp.025023. ⟨10.1088/1361-6595/ab5e2c⟩
Article dans une revue hal-02545248 v1
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Direct etching at the nanoscale through nanoparticle-directed capillary condensation

M. Garín , R. Khoury , I. Martín , Erik Johnson
Nanoscale, 2020, 12 (16), pp.9240-9245. ⟨10.1039/C9NR10217E⟩
Article dans une revue hal-03001169 v1
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Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge

Jean-Maxime Orlac'H , Tatiana Novikova , Vincent Giovangigli , Erik Johnson , Pere Roca
Plasma Sources Science and Technology, 2019, 28 (5), pp.055003. ⟨10.1088/1361-6595/ab067d⟩
Article dans une revue hal-01856184 v3
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Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas

Junkang Wang , Sébastien Diné , Jean-Paul Booth , Erik Johnson
Journal of Vacuum Science & Technology A, 2019, 37 (2), pp.021303. ⟨10.1116/1.5056205⟩
Article dans une revue hal-02081466 v1

Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge

Jean-Maxime Orlac’h , Tatiana Novikova , Vincent Giovangigli , Erik Johnson , Pere Roca I Cabarrocas
Plasma Sources Science and Technology, 2019, 28 (5), pp.055003. ⟨10.1088/1361-6595/ab067d⟩
Article dans une revue hal-04286867 v1
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Microcrystalline silicon thin film deposition from silicon tetrafluoride: Isolating role of ion energy using tailored voltage waveform plasmas

Junkang Wang , Dmitri Daineka , Mustapha Elyaakoubi , Erik Johnson
Solar Energy Materials and Solar Cells, 2019, 190, pp.65-74. ⟨10.1016/j.solmat.2018.10.014⟩
Article dans une revue hal-02391003 v1

Erratum: Multi frequency matching for voltage waveform tailoring <A href="/abs/">(2018 Plasma Sources Sci. Technol. 27 095012</A>)

Frederik Schmidt , Julian Schulze , Erik Johnson , Jean-Paul Booth , Douglas Keil et al.
Plasma Sources Science and Technology, 2019, 28, pp.019601. ⟨10.1088/1361-6595/aaeb4b⟩
Article dans une revue hal-03730658 v1

Excitation of Ar, O 2 , and SF 6 /O 2 plasma discharges using tailored voltage waveforms: control of surface ion bombardment energy and determination of the dominant electron excitation mode

G Fischer , K. Ouaras , E Drahi , B. Bruneau , E Johnson
Plasma Sources Science and Technology, 2018, 27 (7), pp.074003. ⟨10.1088/1361-6595/aaca05⟩
Article dans une revue hal-02391062 v1

Large Area Radial Junction Silicon Nanowire Solar Mini-Modules

Mutaz Al-Ghzaiwat , Martin Foldyna , Takashi Fuyuki , Wanghua Chen , Erik Johnson et al.
Scientific Reports, 2018, 8 (1), ⟨10.1038/s41598-018-20126-5⟩
Article dans une revue hal-01908687 v1

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Z. Donkó , A. Derzsi , Ihor Korolov , P. Hartmann , S. Brandt et al.
Plasma Physics and Controlled Fusion, 2018, 60 (1), pp.014010. ⟨10.1088/1361-6587/aa8378⟩
Article dans une revue hal-01895567 v1
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Optical Study and Experimental Realization of Nanostructured Back Reflectors with Reduced Parasitic Losses for Silicon Thin Film Solar Cells

Zeyu Li , Rusli E , Chenjin Chen , Ari Prakoso , Martin Foldyna et al.
Nanomaterials, 2018, 8 (626), ⟨10.3390/nano8080626⟩
Article dans une revue hal-01908707 v1

Multi frequency matching for voltage waveform tailoring

Frederik Schmidt , J. Schulze , Erik Johnson , Jean-Paul Booth , D. Keil et al.
Plasma Sources Science and Technology, 2018, 27 (9), pp.095012. ⟨10.1088/1361-6595/aad2cd⟩
Article dans une revue hal-02271985 v1

Structural study of NiOx thin films fabricated by radio frequency sputtering at low temperature

Zhang Song , Tiphaine Bourgeteau , Itaru Raifuku , Yvan Bonnassieux , Erik Johnson et al.
Thin Solid Films, 2018, 646, pp.209 - 215. ⟨10.1016/j.tsf.2017.12.003⟩
Article dans une revue hal-01908690 v1

Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: vibrational kinetics and negative ions control

P. Diomede , Bastien Bruneau , S. Longo , E.V. Johnson , Jean-Paul Booth
Plasma Sources Science and Technology, 2017, 26 (7), pp.075007. ⟨10.1088/1361-6595/aa752c⟩
Article dans une revue hal-01895582 v1
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Natural occurrence of the diamond hexagonal structure in silicon nanowires grown by a plasma-assisted vapour-liquid-solid method

J. Tang , Maurice J.L. , F. Fossard , I. Florea , Chen W. et al.
Nanoscale, 2017, 9 (24), pp.8113-8118. ⟨10.1039/c7nr01299c⟩
Article dans une revue hal-01632386 v1

Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges

A. Derzsi , Bastien Bruneau , Andrew Gibson , Erik Johnson , D. O'Connell et al.
Plasma Sources Science and Technology, 2017, 26 (3), pp.034002. ⟨10.1088/1361-6595/aa56d6⟩
Article dans une revue hal-01895575 v1

Texturing optimization for bifacial n-PERT: are pyramids and/or black silicon the way to go for thinner devices?

Rafaël Peyronnet , Guillaume Fischer , Thomas Blévin , Erik Johnson , Etienne Drahi et al.
Energy Procedia, 2017, 124, pp.250-259
Article dans une revue hal-02018312 v1

Plasma nanotexturing of silicon surfaces for photovoltaics applications: influence of initial surface finish on the evolution of topographical and optical properties

Guillaume Fischer , Étienne Drahi , Martin Foldyna , Thomas A. Germer , Erik V. Johnson
Optics Express, 2017, 25 (24), ⟨10.1364/OE.25.0A1057⟩
Article dans une revue hal-01640105 v1

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF<SUB>4</SUB>

S. Brandt , B. Berger , E. Schüngel , Ihor Korolov , A. Derzsi et al.
Plasma Sources Science and Technology, 2016, 25 (4), pp.045015. ⟨10.1088/0963-0252/25/4/045015⟩
Article dans une revue hal-01549325 v1

Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

E. Schüngel , Ihor Korolov , Bastien Bruneau , A. Derzsi , E.V. Johnson et al.
Journal of Physics D: Applied Physics, 2016, 49 (26), pp.265203. ⟨10.1088/0022-3727/49/26/265203⟩
Article dans une revue hal-01549338 v1

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Bastien Bruneau , Ihor Korolov , Trevor Lafleur , T. Gans , D. O'Connell et al.
Journal of Applied Physics, 2016, 119 (16), pp.163301. ⟨10.1063/1.4947453⟩
Article dans une revue hal-01549329 v1

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H<SUB>2</SUB> and CF<SUB>4</SUB>

Bastien Bruneau , Trevor Lafleur , T. Gans , D. O'Connell , Arthur Greb et al.
Plasma Sources Science and Technology, 2016, 25 (1), pp.01LT02. ⟨10.1088/0963-0252/25/1/01LT02⟩
Article dans une revue hal-01549332 v1

Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms

Bastien Bruneau , Trevor Lafleur , Jean-Paul Booth , Erik Johnson
Plasma Sources Science and Technology, 2016, 25 (2), pp.025006. ⟨10.1088/0963-0252/25/2/025006⟩
Article dans une revue hal-01549334 v1

Plasma-Assisted Growth of Silicon Nanowires by Sn Catalyst: Step-by-Step Observation

Jian Tang , Jean-Luc Maurice , Wanghua Chen , Soumyadeep Misra , Martin Foldyna et al.
Nanoscale Research Letters, 2016, 11 (1), ⟨10.1186/s11671-016-1681-5⟩
Article dans une revue hal-01401083 v1

Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , E.V. Johnson et al.
Physical Review Letters, 2015, 114, pp.125002. ⟨10.1103/PhysRevLett.114.125002⟩
Article dans une revue hal-01549359 v1

Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson
Plasma Sources Science and Technology, 2015, 24 (1), pp.015021. ⟨10.1088/0963-0252/24/1/015021⟩
Article dans une revue hal-01549355 v1

Low temperature hydrogenated microcrystalline silicon-carbon alloys deposited by RF-PECVD

Sofia Gaiaschi , Marie-Estelle Gueunier-Farret , Erik V. Johnson
Physica Status Solidi C: Current Topics in Solid State Physics, 2014, 11 (11-12), pp.1665-1668. ⟨10.1002/pssc.201400034⟩
Article dans une revue istex hal-01104328 v1

Use of radio frequency power, silicon tetrafluoride and methane as parameters to tune structural properties of hydrogenated microcrystalline silicon carbon alloys

S Gaiaschi , R Ruggeri , M-E Gueunier-Farret , E V Johnson
Journal of Physics D: Applied Physics, 2014, 47 (45), pp.455102. ⟨10.1088/0022-3727/47/45/455102⟩
Article dans une revue hal-01104321 v1

Understanding Light Harvesting in Radial Junction Amorphous Silicon Thin Film Solar Cells

Linwei Yu , Soumyadeep Misra , Junzhuan Wang , Shengyi Qian , Martin Foldyna et al.
Scientific Reports, 2014, 4, pp.4357. ⟨10.1038/srep04357⟩
Article dans une revue hal-01083479 v1

anglais

Jean-Christophe Dornstetter , Junkang Wang , Bastien Bruneau , Erik V. Johnson , Pere Roca I Cabarrocas
Canadian Journal of Physics, 2014, 92 (7/8), ⟨10.1139/cjp-2013-0606⟩
Article dans une revue hal-01230710 v1

Substrate and p-layer effects on polymorphous silicon solar cells

S.N. Abolmasov , H. Woo , R. Planques , J. Holovský , E.V. Johnson et al.
EPJ Photovoltaics, 2014, 5, ⟨10.1051/epjpv/2014007⟩
Article dans une revue hal-01230707 v1

Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures

Jean-Christophe Dornstetter , Bastien Bruneau , Pavel Bulkin , Erik V. Johnson , Pere Roca I Cabarrocas
The Journal of Chemical Physics, 2014, 140 (23), ⟨10.1063/1.4883503⟩
Article dans une revue hal-01230708 v1

Structural properties of hydrogenated microcrystalline silicon–carbon alloys deposited by Radio Frequency Plasma Enhanced Chemical Vapor Deposition: Effect of microcrystalline silicon seed layer and methane flow rate

S. Gaiaschi , R. Ruggeri , E.V. Johnson , P. Bulkin , P. Chapon et al.
Thin Solid Films, 2014, 550, pp.312-318. ⟨10.1016/j.tsf.2013.11.081⟩
Article dans une revue hal-01099597 v1

Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process

C. Charpentier , R. Boukhicha , P. Prod׳homme , T. Emeraud , J.-F. Lerat et al.
Solar Energy Materials and Solar Cells, 2014, 125, ⟨10.1016/j.solmat.2014.02.027⟩
Article dans une revue hal-01230703 v1

Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , E.V. Johnson
Plasma Sources Science and Technology, 2014, 23 (6), pp.065010. ⟨10.1088/0963-0252/23/6/065010⟩
Article dans une revue hal-01549377 v1

Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
Plasma Physics and Controlled Fusion, 2013, 55 (12), pp.124002. ⟨10.1088/0741-3335/55/12/124002⟩
Article dans une revue hal-01549416 v1

Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Pierre-Alexandre Delattre , Trevor Lafleur , Erik Johnson , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2013, 46, pp.235201. ⟨10.1088/0022-3727/46/23/235201⟩
Article dans une revue hal-01549413 v1

Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , Sébastien Diné
Review of Scientific Instruments, 2013, 84, pp.015001. ⟨10.1063/1.4773540⟩
Article dans une revue hal-01549400 v1

Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
Journal of Non-Crystalline Solids, 2012, 358 (17), pp.1974-1977. ⟨10.1016/j.jnoncrysol.2012.01.014⟩
Article dans une revue istex hal-01549432 v1
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Low Temperature Plasma Synthesis of Nanocrystals and their Application to the Growth of Crystalline Silicon and Germanium Thin Films

Pere Roca I Cabarrocas , Ka-Hyun Kim , Romain Cariou , Martin Labrune , Erik Johnson et al.
MRS Online Proceedings Library, 2012, 1426, pp.319. ⟨10.1557/opl.2012.1094⟩
Article dans une revue hal-00797647 v1

Tailored voltage waveform deposition of Microcrystalline Silicon thin films from hydrogen-diluted silane and silicon tetrafluoride: optoelectronic properties of films

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
Japanese Journal of Applied Physics, 2012, 51, pp.08HF01. ⟨10.1143/JJAP.51.08HF01⟩
Article dans une revue hal-01549433 v1

Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
Applied Physics Letters, 2012, 100, pp.133504. ⟨10.1063/1.3699222⟩
Article dans une revue hal-01549437 v1

Separate control of the ion flux and ion energy in capacitively coupled rf discharges using voltage waveform tailoring

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
Applied Physics Letters, 2012, 101, pp.124104. ⟨10.1063/1.4754692⟩
Article dans une revue hal-01549435 v1

Control of Nanocrystalline Silicon Growth Phase and Deposition Rate through Voltage Waveform Tailoring during PECVD

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
MRS Online Proceedings Library, 2011, 1339, pp.mrss11-1339-s04-5. ⟨10.1557/opl.2011.993⟩
Article dans une revue hal-01549456 v1
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Geometrical optimization and electrical performance comparison of thin-film tandem structures based on pm-Si:H and µc-Si:H using computer simulation

Foudil Dadouche , Olivier Bethoux , Marie-Estelle Gueunier-Farret , Erik Johnson , Pere Roca I Cabarrocas et al.
EPJ Photovoltaics, 2011, 2, pp.20301. ⟨10.1051/pvd/2011001⟩
Article dans une revue hal-00642129 v1

Open-circuit voltage increase dynamics in high and low deposition rate polymorphous silicon solar cells

E.V. Johnson , Foudil Dadouche , Marie-Estelle Farret-Gueunier , Jean-Paul Kleider , Pere Roca I Cabarrocas
Physica Status Solidi A (applications and materials science), 2010, 207 (3), pp.691-694
Article dans une revue hal-00555228 v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

E.V. Johnson , T. Verbeke , J-C Vanel , Jean-Paul Booth
Journal of Physics D: Applied Physics, 2010, 43, pp.412001. ⟨10.1088/0022-3727/43/41/412001⟩
Article dans une revue istex hal-01549485 v1

Polymorphous silicon thin films deposited at high rate: transport properties and density of states

Yrebegnan Moussa Soro , A. Abramov , Marie-Estelle Gueunier-Farret , E.V. Johnson , Christophe Longeaud et al.
Thin Solid Films, 2008, 516, pp.6888
Article dans une revue hal-00350886 v1

Device grade hydrogenated polymorphous silicon deposited at high rates

Yrebegnan Moussa Soro , A. Abramov , Marie-Estelle Gueunier-Farret , E.V. Johnson , Christophe Longeaud et al.
Journal of Non-Crystalline Solids, 2008, 354, pp.2092
Article dans une revue hal-00350767 v1
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A Contactless Patterned Plasma Processing for Interdigitated Back Contact Silicon Heterojunction Solar Cells Fabrication

Junkang Wang , Monalisa Ghosh , Fatima Ouadjane , Borja Carbonell , Pavel Bulkin et al.
2021 IEEE 48th Photovoltaic Specialists Conference (PVSC), Jun 2021, Fort Lauderdale, France. pp.0596-0601, ⟨10.1109/PVSC43889.2021.9518831⟩
Communication dans un congrès hal-03836937 v1

Role of Fluorinated Precursor in Area Selective PECVD of Silicon on SiOxNy

Ghewa Akiki , Mathieu Frégnaux , Ileana Florea , Pavel Bulkin , Dmitri Daineka et al.
5th Area Selective Deposition Workshop (ASD 2021), Apr 2021, Virtual conference, United States
Communication dans un congrès hal-04425827 v1

Experimental Demonstration of Multifrequency Matching for Tailored Voltage Waveform Plasma Excitation

Sebastien Dine , Jean-Paul Booth , E.V. Johnson , Junkang Wang
International Conference on Phenomena in Ionised Gases, Jul 2019, Hokkaido, Japan
Communication dans un congrès hal-02341689 v1

Multifrequency impedance matching solutions for plasma excitation by Tailored Voltage Waveforms

Erik Johnson , Sebastien Dine , Jean-Paul Booth
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès hal-02593689 v1

Study of Electronic Properties of Hydrogenated Amorphous Silicon Thin Film from SiH4/H2 using Tailored Voltage Waveforms

Junkang Wang , Federico Ventosinos , Christophe Longeaud , Bastien Bruneau , D. Daineka et al.
E-MRS 2016 Spring Meeting, May 2016, Lille, France
Communication dans un congrès hal-01363727 v1

Modelling and experimental validation of capacitively coupled plasmas in hydrogen

D. Diomede , Bastien Bruneau , Trevor Lafleur , D. J. Economou , S. Longo et al.
EPS Plasma, Jul 2016, Leuven, Belgium
Communication dans un congrès hal-02573350 v1

Charged Particle Dynamics in Technological Radio Frequency Plasmas Operated in CF<SUB>4</SUB>

J. Schulze , B. Berger , S. Brandt , Bastien Bruneau , Y. Liu et al.
AVS Symposium, Nov 2016, Nashville, United States
Communication dans un congrès hal-02573358 v1

ELECTRON POWER ABSORPTION DYNAMICS AND ION ENERGY DISTRIBUTIONS IN CAPACITIVE DISCHARGES DRIVEN BY CUSTOMIZED VOLTAGE WAVEFORMS IN ARGON AND CF<SUB>4</SUB>

B. Berger , S. Brandt , J. Franek , E. Shuengel , M. Koepke et al.
IEEE-ICOPS, Jun 2016, Banff, Canada
Communication dans un congrès hal-02593683 v1

Heating dynamics and control of energy distribution functions in capacitive discharges driven by tailored voltage waveforms

J. Schulze , B. Berger , S. Brandt , M. Koepke , T. Mussenbrock et al.
International Conference on Plasma Physics ICPP, Jun 2016, Kaohsiung, Taiwan
Communication dans un congrès hal-02573352 v1

Cleaning and doping of CVD graphene using tailored voltage waveform capacitively coupled plasma

Daniil Marinov , Bastien Bruneau , Erik Johnson , Jean-Paul Booth
Plasma Etch and Strip in Microelectronics _PESM, Apr 2015, Louvain, Belgium
Communication dans un congrès hal-02593662 v1

Low Pressure Plasma Cleaning and Doping of CVD Graphene

D. Marinov , G. Cunge , D. Ferrah , E.V. Johnson , J.P. Booth
AVS 62nd International Symposium & Exhibition, 2015, San José, United States
Communication dans un congrès hal-01878405 v1

Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H<SUB>2</SUB>, and CF<SUB>4</SUB> plasmas

Bastien Bruneau , Erik Johnson , T. Gans , Arthur Greb , Ihor Korolov et al.
Gaseaous Electronics Conference, Oct 2015, Honolulu, United States
Communication dans un congrès hal-02593667 v1

Ion flux asymmetry obtained by sawtooth-like waveforms: A new degree of freedom in capacitively coupled plasmas

Bastien Bruneau , T. Gans , D. O'Connell , Arthur Greb , Trevor Lafleur et al.
Plasma Etch and Strip in Microelectronics (PESM), Apr 2015, Louvain, Belgium
Communication dans un congrès hal-02593661 v1

Capacitively coupled CF<SUB>4</SUB> discharges excited by tailored waveforms: experiments and kinetic simulations

Bastien Bruneau , Erik Johnson , Jean-Paul Booth , Trevor Lafleur , T. Gans et al.
Radiofrequency Plasma Workshop, Jun 2015, Dublin, Ireland
Communication dans un congrès hal-02573343 v1

Low temperature hydrogenated microcrystalline silicon-carbon alloys deposited by RF-PECVD for photovoltaic application

Sofia Gaiaschi , E.V. Johnson , Marie-Estelle Gueunier-Farret , Christophe Longeaud , P. Chapon et al.
E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France
Communication dans un congrès hal-01099573 v1

Control over the ion flux obtained by sawtooth-like waveforms in radiofrequency capacitively coupled plasmas

Bastien Bruneau , T. Novikova , Trevor Lafleur , Jean-Paul Booth , Erik Johnson
AVS Annual Symposium, Nov 2014, Baltimore, Maryland, United States
Communication dans un congrès hal-02593674 v1

Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD

Sofia Gaiaschi , Marie-Estelle Gueunier-Farret , Christophe Longeaud , E.V. Johnson , P. Chapon et al.
E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France
Communication dans un congrès hal-01099579 v1

RF power influence on structural and electrical properties of µc-Si1-xCx:H

Sofia Gaiaschi , Marie-Estelle Gueunier-Farret , Christophe Longeaud , E.V. Johnson , Pavel Bulkin et al.
EUPVSEC 2013, Sep 2013, Paris, France
Communication dans un congrès hal-00931310 v1

Capacitively coupled plasmas excited by tailored voltage waveforms

Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
EPS Plasma, Jul 2013, Espoo, Finland
Communication dans un congrès hal-02573294 v1

Tailoring plasma properties using pulse-shaping technology,

Jean-Paul Booth , E.V. Johnson , Trevor Lafleur , Pierre-Alexandre Delattre , R.W. Boswell
21st ISPC, Aug 2013, Cairns, Australia
Communication dans un congrès hal-02573330 v1

IN-SITU OBSERVATION OF MICROCRYSTALLINE SILICON THIN FILM GROWTH USING TAILORED VOLTAGE WAVEFORMS

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
International Vacuum Conference, Sep 2013, Paris, France
Communication dans un congrès hal-02594804 v1

Tailored Voltage deposition of µc-Si1-xCx:H from H2 diluted SiH4 and CH4 gas mixtures

Sofia Gaiaschi , R. Ruggeri , E.V. Johnson , Marie-Estelle Gueunier-Farret , Christophe Longeaud et al.
ICANS 25, Aug 2013, Toronto, Canada
Communication dans un congrès hal-00931312 v1

µc-Si1-xCx:H deposited by RF-PECVD: a novel material for PV applications

Sofia Gaiaschi , E.V. Johnson , Marie-Estelle Gueunier-Farret , Christophe Longeaud , Pavel Bulkin et al.
E-MRS Fall Meeting 2013, Sep 2013, Warsaw, Poland
Communication dans un congrès hal-00931311 v1

Structural and electrical characterization of microcrystalline silicon-carbon alloys deposited by RF-PECVD

Sofia Gaiaschi , R. Ruggeri , E.V. Johnson , Pavel Bulkin , Marie-Estelle Gueunier-Farret et al.
E-MRS Spring Meeting 2013, May 2013, Strasbourg, France
Communication dans un congrès hal-00931313 v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas for IEDF and electron density control: Application to Microcrystalline Si Deposition

Jean-Paul Booth , Erik Johnson , Trevor Lafleur , Pierre-Alexandre Delattre
Semicon Korea, Jan 2013, Seoul, Korea, Unknown Region
Communication dans un congrès hal-02573289 v1

Thin Film Deposition with Tailored Voltage Waveforms: Material Questions and Practical Answers

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
RF Plasma workshop, May 2013, Presqu île de Giens, France
Communication dans un congrès hal-02573291 v1

Practical Aspects of using Tailored Voltage Waveforms for Thin Film Processing of Photovoltaic Devices

E.V. Johnson , Bastien Bruneau , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
AVS Symposium, Oct 2013, Long Beach, California, United States
Communication dans un congrès hal-02573331 v1

Deposition of microcrystalline silicon-carbon alloys by RF-PECVD and MDECR

Sofia Gaiaschi , E.V. Johnson , Pavel Bulkin , P. Chapon , Marie-Estelle Gueunier-Farret et al.
E-MRS Spring Meeting 2012, May 2012, Strasbourg, France
Communication dans un congrès hal-00779004 v1

Plasma deposition processes excited using Tailored Voltage Waveforms: from microcrystalline silicon thin films to devices

E.V. Johnson , S. Pouliquen , Pierre-Alexandre Delattre , Jean-Paul Booth
AVS Symposium, Oct 2012, Tampa, Floride, United States
Communication dans un congrès hal-02573299 v1

Tailored Voltage Waveform Capacitively-Coupled Plasmas

Jean-Paul Booth , Trevor Lafleur , Pierre-Alexandre Delattre , E.V. Johnson
GEC, Oct 2012, Austin, Texas, United States
Communication dans un congrès hal-02594732 v1

Caracterisations structurales et electriques de μc-Si1−xCx :H deposes par RF-PECVD

Sofia Gaiaschi , R. Ruggeri , E.V. Johnson , Pavel Bulkin , Marie-Estelle Gueunier-Farret et al.
JNPV 2012, Dec 2012, Chantilly, France
Communication dans un congrès hal-00781749 v1

Plasma deposition of nanocrystalline silicon for solar cells : RF waveform tailoring to optimize deposition rate and film morphology

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre
Gaseous Electronics Meeting, Feb 2012, Murramarang, Australia
Communication dans un congrès hal-02573287 v1

Plasma Excitation using Tailored Voltage Waveforms for the Deposition of Thin Film Silicon for Photovoltaics: From Plasma Physics to Devices

E.V. Johnson , Pierre-Alexandre Delattre , Trevor Lafleur , Jean-Paul Booth
5th International Symposium on Atomically Controlled, Oct 2012, Osaka, Japan
Communication dans un congrès hal-02573298 v1

Tailored Voltage Waveforms for the Deposition of Microcrystalline Silicon

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
ICANS, Aug 2011, Nara, Japan
Communication dans un congrès hal-02594746 v1

DEPOSITION OF THIN FILM OF SILICON MICROCRISTALLINE BY RADIO FREQUENCY VOLTAGE WAVEFORM TAILORING

S. Pouliquen , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth
AVS, Oct 2011, Nashville, Tennessee, United States
Communication dans un congrès hal-02594748 v1

VOLTAGE WAVEFORM TAILORING: A PROMISING NEW METHOD FOR SILICON DEPOSITION

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Nishant Sirse , Jean-Paul Booth
CIP (Congres International sur les Plasmas), Jun 2011, Nantes, France
Communication dans un congrès hal-02594747 v1

Control of Nanocrystalline Growth Phase and Deposition Rate through Voltage Waveform Tailoring

E.V. Johnson , Pierre-Alexandre Delattre , Jean-Paul Booth
MRS spring meeting, Apr 2011, San Francisco, California, United States
Communication dans un congrès hal-02594741 v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , Pierre-Alexandre Delattre , T. Verbeke , J-C Vanel
International Conference on Plasmas and Nanotechnology (ICPLANTS), Feb 2011, Takayama, Japan
Communication dans un congrès hal-02594739 v1

Control of Microcrystalline Silicon Deposition by RF Waveform Tailoring

E.V. Johnson , Jean-Paul Booth , J-C Vanel , T. Verbeke
Gaseous Electronics Conference, Oct 2010, Paris, France
Communication dans un congrès hal-02595158 v1

RF waveform tailoring to control film morphology during nanocrystalline silicon PECVD

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel
UK-Technological Plasmas Workshop, Dec 2010, Bristol, United Kingdom
Communication dans un congrès hal-02595161 v1

Nanocrystalline silicon film growth morphology control through RF waveform tailoring

Jean-Paul Booth , E.V. Johnson , T. Verbeke , J-C Vanel
AVS Symposium, Oct 2010, Albuquerque, New Mexico, United States
Communication dans un congrès hal-02595160 v1

Comparative study of thin-film silicon cell tandem structures pm-Si:H/µc-Si:H in system association prospect

Foudil Dadouche , Olivier Bethoux , Marie-Estelle Farret-Gueunier , E.V. Johnson , Pere Roca I Cabarrocas et al.
European Materials Research Society – EMRS Spring Meeting, 2009, Strasbourg, France. pp.CD-Rom Proceedings
Communication dans un congrès hal-00446008 v1

Open-circuit voltage increase dynamics in high and low deposition rate polymorphous silicon solar cells

E.V. Johnson , Foudil Dadouche , Marie-Estelle Farret-Gueunier , Jean-Paul Kleider , Pere Roca I Cabarrocas
23rd International Conference on Amorphous and Nanocrystalline Semiconductors - ICANS23, 2009, Utrecht, Netherlands
Communication dans un congrès hal-00446010 v1

A system study on silicon thin-film pm-Si:H/µc-Si:H tandem cell structure

Foudil Dadouche , Olivier Bethoux , Eric Labouré , E.V. Johnson , Pere Roca I Cabarrocas et al.
24th European Photovoltaic Solar Energy Conference, Sep 2009, Hambourg, Germany. pp. 3699-3705
Communication dans un congrès hal-00446011 v1

Hydrogenated polymorphous silicon at high deposition rate : serious alternative for cost-effective modules

E.V. Johnson , A. Abramov , K.H. Kim , Yrebegnan Soro , Marie-Estelle Farret-Gueunier et al.
18th International Photovoltaic Science and Engineering Conference and Exhibition, 2009, Kolkata, India
Communication dans un congrès hal-00446006 v1

Polymorphous silicon thin films deposited at high rate: transport properties and density of states

Yrebegnan Moussa Soro , A. Abramov , Marie-Estelle Gueunier-Farret , E.V. Johnson , Christophe Longeaud et al.
E-MRS 2007 Spring Meeting, 2007, France
Communication dans un congrès hal-00322303 v1

Device grade hydrogenated polymorphous silicon deposited at high rates

Yrebegnan Moussa Soro , A. Abramov , Marie-Estelle Gueunier-Farret , E.V. Johnson , Christophe Longeaud et al.
22nd International Conference on Amorphous and Nanocrystalline Semiconductors, ICANS 22, 2007, United States
Communication dans un congrès hal-00322281 v1

Experimental Benchmarks and sensitivity analysis of PIC/MC simulations of oxygen CCP's

Z. Donko , Aranka Derszi , Bastien Bruneau , Andrew Gibson , E.V. Johnson et al.
International Workshop on Radio-Frequency Plasmas, May 2017, Presqu'île de Giens, France. 2017
Poster de conférence hal-02611351 v1

Frequency dependence of the Electrical Asymmetry Effect in electronegative capacitive RF discharges driven by Tailored Voltage Waveforms

J. Schulze , E. Schuengel , Bastien Bruneau , E.V. Johnson , Jean-Paul Booth et al.
GEC, Oct 2016, Bochum, Germany. 2016
Poster de conférence hal-02611341 v1

Density of states measurements of RF-power, SiF4 and CH4 –tuned-hydrogenated microcrystalline silicon carbon alloy thin films using Fourier transform photocurrent spectroscopy (FTPS)

N. Puspitosari , S. Gaiaschi , C. Longeaud , M.E. Gueunier , E. V. Johnson
Journées Nationales du Photovoltaïque 2015, Dec 2015, Dourdan, France
Poster de conférence hal-01245742 v1

Density of states measurements of RF-power, SiF4 and CH4 –tuned-hydrogenated microcrystalline silicon carbon alloy thin films using Fourier transform photocurrent spectroscopy (FTPS)

N. Puspitosari , S. Gaiaschi , C. Longeaud , M. E. Gueunier , E. V. Johnson
European Photovoltaïc Solar Energy Conference, Sep 2015, Hambourg, Germany. Proceedings of the European Photovoltaïc Solar Energy Conference
Poster de conférence hal-01242764 v1

Hybrid Model of Parallel Plate RF Discharges in H<SUB>2</SUB>: Effect of DC and Tailored Voltage Waveforms

P. Diomede , Pierre-Alexandre Delattre , E.V. Johnson , Jean-Paul Booth , S. Longo et al.
ESCAMPIG, Jul 2012, Viana do Costello, Portugal. 2012
Poster de conférence hal-02611272 v1

Investigation of Voltage Waveform Tailoring Effect in CapacitivelyCoupled H<SUB>2</SUB> Discharge: Fluid Simulations and Experimental Validation

T. Novikova , E.V. Johnson , M. Mao , P. Bulkin , Jean-Paul Booth et al.
EPS Plasma Physics, Jul 2012, Stockholm, Sweden. 2012
Poster de conférence hal-02611270 v1

Voltage Waveform Tailoring in a RF-CCP reactor: Exploration of self-bias, electron density and current waveform

Pierre-Alexandre Delattre , S. Pouliquen , E.V. Johnson , Jean-Paul Booth
ICPIG, Aug 2011, Belfast, Northern Ireland, United Kingdom. 2011
Poster de conférence hal-02611277 v1

L'énergie solaire photovoltaïque

Daniel Suchet , E.V. Johnson
EDP science, 2022, Introduction à.., Michèle Leduc; Michel Le Bellac, 9782759829231
Ouvrages hal-04465191 v1