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Area selective deposition of silicon by plasma enhanced chemical vapor deposition using a fluorinated precursor
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Direct etching at the nanoscale through nanoparticle-directed capillary condensation
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Impact of charged species transport coefficients on self-bias voltage in an electrically asymmetric RF discharge
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Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases
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Large Area Radial Junction Silicon Nanowire Solar Mini-Modules
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Optical Study and Experimental Realization of Nanostructured Back Reflectors with Reduced Parasitic Losses for Silicon Thin Film Solar Cells
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Multi frequency matching for voltage waveform tailoring
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Structural study of NiOx thin films fabricated by radio frequency sputtering at low temperature
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Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges
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Natural occurrence of the diamond hexagonal structure in silicon nanowires grown by a plasma-assisted vapour-liquid-solid method
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Texturing optimization for bifacial n-PERT: are pyramids and/or black silicon the way to go for thinner devices?
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Energy Procedia, 2017, 124, pp.250-259
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Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: vibrational kinetics and negative ions control
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Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects
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Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas
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Plasma-Assisted Growth of Silicon Nanowires by Sn Catalyst: Step-by-Step Observation
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Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4
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Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms
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Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4
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Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas
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Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms
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anglais
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Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures
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Substrate and p-layer effects on polymorphous silicon solar cells
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Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms
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Structural properties of hydrogenated microcrystalline silicon–carbon alloys deposited by Radio Frequency Plasma Enhanced Chemical Vapor Deposition: Effect of microcrystalline silicon seed layer and methane flow rate
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Evolution in morphological, optical, and electronic properties of ZnO:Al thin films undergoing a laser annealing and etching process
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Use of radio frequency power, silicon tetrafluoride and methane as parameters to tune structural properties of hydrogenated microcrystalline silicon carbon alloys
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Low temperature hydrogenated microcrystalline silicon-carbon alloys deposited by RF-PECVD
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Understanding Light Harvesting in Radial Junction Amorphous Silicon Thin Film Solar Cells
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Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations
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Radio frequency current-voltage probe for impedance and power measurements in multi-frequency unmatched loads
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Capacitively coupled radio-frequency plasmas excited by tailored voltage waveforms
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Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms
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Tailored voltage waveform deposition of Microcrystalline Silicon thin films from hydrogen-diluted silane and silicon tetrafluoride: optoelectronic properties of films
E.V. Johnson
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S. Pouliquen
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Separate control of the ion flux and ion energy in capacitively coupled rf discharges using voltage waveform tailoring
Trevor Lafleur
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E.V. Johnson
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Jean-Paul Booth
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Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring
E.V. Johnson
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S. Pouliquen
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Low Temperature Plasma Synthesis of Nanocrystals and their Application to the Growth of Crystalline Silicon and Germanium Thin Films
Pere Roca I Cabarrocas
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Ka-Hyun Kim
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Romain Cariou
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Martin Labrune
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Erik Johnson
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Control of Nanocrystalline Silicon Growth Phase and Deposition Rate through Voltage Waveform Tailoring during PECVD
E.V. Johnson
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S. Pouliquen
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Pierre-Alexandre Delattre
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Jean-Paul Booth
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Geometrical optimization and electrical performance comparison of thin-film tandem structures based on pm-Si:H and µc-Si:H using computer simulation
Foudil Dadouche
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Olivier Bethoux
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Marie-Estelle Gueunier-Farret
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Erik Johnson
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Pere Roca I Cabarrocas
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Nanocrystalline silicon film growth morphology control through RF waveform tailoring
E.V. Johnson
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T. Verbeke
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J-C Vanel
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Jean-Paul Booth
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hal-01549485v1
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Open-circuit voltage increase dynamics in high and low deposition rate polymorphous silicon solar cells
E.V. Johnson
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Foudil Dadouche
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Marie-Estelle Farret-Gueunier
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Jean-Paul Kleider
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Pere Roca I Cabarrocas
physica status solidi (a), 2010, 207 (3), pp.691-694
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Polymorphous silicon thin films deposited at high rate: transport properties and density of states
Yrebegnan Moussa Soro
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A. Abramov
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Marie-Estelle Gueunier-Farret
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E.V. Johnson
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Christophe Longeaud
Thin Solid Films, 2008, 516, pp.6888
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Device grade hydrogenated polymorphous silicon deposited at high rates
Yrebegnan Moussa Soro
,
A. Abramov
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Marie-Estelle Gueunier-Farret
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E.V. Johnson
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Christophe Longeaud
Journal of Non-Crystalline Solids, 2008, 354, pp.2092
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