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Engineering of HZO layer for the fabrication of ultimate 3D vertical transistors for Memory-in-Logic applications M. Materials engineering for advanced semiconductor devices
Konstantinos Moustakas
,
Bruno Neckel
,
Aurélie Lecestre
,
Fabrice Mathieu
,
Thomas Mikolajick
European Materials Research Society (EMRS ) spring meeting 2023, May 2023, Strasbourg, France
Conference papers
hal-04168229v1
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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility
Isabelle Dufour
,
Luis Iglesias Hernandez
,
Priyadarshini Shanmugam
,
Jean-François Michaud
,
Laurent Colin
Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France
Conference papers
hal-03778623v1
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Optimizing a brain-on-chip technology with nanowire based-3D electrodes to record and stimulate the neuronal activity with high resolution
Inès Muguet
,
Fabrice Mathieu
,
Ali Maziz
,
Laurent Mazenq
,
Guilhem Larrieu
Les Journées Nationales des Nanofils semiconducteurs, Sep 2022, Nice, France
Conference papers
hal-03845587v1
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MEMS-based platforms for characterization of advanced functional materials
Liviu Nicu
,
Susan Trolier-Mckinstry
,
Gabor Molnar
,
Azzedine Bousseksou
,
Maira Dolores Manrique Juarez
16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS 2021), Apr 2021, Xiamen, China
Conference papers
hal-03210652v1
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MEMS-based platforms for characterization of advanced functional materials: from Substantia to Potentia
Liviu Nicu
,
Susan Trolier-Mckinstry
,
Gabor Molnar
,
Azzedine Bousseksou
,
Maria Dolores Manrique-Juarez
IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Apr 2021, Xiamen, China
Conference papers
hal-03424049v1
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Conductive polymer coated 3D-nanostructured electrodes to enhance the stimulation and recording performances of neuronal activity
Inès Muguet
,
Ali Maziz
,
Laurent Mazenq
,
Fabrice Mathieu
,
Guilhem Larrieu
2021 MRS Fall Meeting & exhibit, Nov 2021, Boston, United States
Conference papers
hal-03845567v1
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Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures
Isabelle Dufour
,
Luis Iglesias Hernandez
,
Priyadarshini Shanmugam
,
Jean-François Michaud
,
Daniel Alquier
2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩
Conference papers
hal-02481928v1
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Magnetophoresis Assisted Capillary Assembly of Cobalt Nanorods: A New Source of Permanent Magnets for MEMS
Pierre Moritz
,
Fabrice Mathieu
,
David Bourrier
,
Daisuke Saya
,
Antoine Gonon
Conference papers
hal-03011866v1
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Development Of Micro-Magnets For The Electromagnetic Transduction Of MEMS
Pierre Moritz
,
Fabrice Mathieu
,
David Bourrier
,
Daisuke Saya
,
Thomas Blon
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Jun 2019, Berlin, Germany. pp.1748-1751, ⟨10.1109/TRANSDUCERS.2019.8808335⟩
Conference papers
hal-02413900v1
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Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructures
Olivier Thomas
,
Arthur Givois
,
Aurélien Grolet
,
Jean-François Deü
,
Cécile Fuinel
EUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal
Conference papers
hal-01962993v1
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Driving and sensing M/NEMS flexural vibration using dielectric transduction
Cécile Fuinel
,
Fabrice Mathieu
,
Bernard Legrand
31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France
Conference papers
hal-01962981v1
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Full system for piezoelectric organic MEMS resonators operating in liquid media
Pierre-Henri Ducrot
,
Isabelle Dufour
,
Liviu Nicu
,
Fabrice Mathieu
,
Cédric Ayela
Transducers 2017, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2017, Kaohsiung, Taiwan. pp.1372-1375, ⟨10.1109/TRANSDUCERS.2017.7994312⟩
Conference papers
hal-01500133v1
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Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films
Daisuke Saya
,
Denis Dezest
,
Thierry Leichle
,
Fabrice Mathieu
,
Liviu Nicu
2017 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM), May 2017, Atlanta, United States. ⟨10.1109/ISAF.2017.8000219⟩
Conference papers
hal-01816372v1
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Spin crossover materials for MEMS actuation: Film integration and characterization
Maria Dolores Manrique-Juarez
,
Sylvain Rat
,
Laurent Mazenq
,
Fabrice Mathieu
,
Isabelle Séguy
Conference papers
hal-01816366v1
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Integration of FinFETs and 3D nanoprobes devices on a common bio-platform for monitoring electrical activity of single neurons
Adrien Casanova
,
Marie-Charline Blatché
,
Fabrice Mathieu
,
Luca Bettamin
,
Hélène Martin
Conference papers
hal-01816371v1
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High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration
Cécile Fuinel
,
Fabrice Mathieu
,
Adrian Laborde
,
Laurent Mazenq
,
Christian Bergaud
Conference papers
hal-01962426v1
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Simple fabrication process for organic piezoelectric resonators : application to viscosity measurement
Pierre-Henri Ducrot
,
Isabelle Dufour
,
Fabrice Mathieu
,
Liviu Nicu
,
Martin Heinisch
13th International Workshop on Nanomechanical Sensing (NMC 2016), Jun 2016, Delft, Netherlands
Conference papers
hal-01301323v1
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Probing electrical activity of single neurons based on 1D nanostructures: from extra to intracellular interfacing.
Adrien Casanova
,
Marie-Charline Blatché
,
Fabrice Mathieu
,
Aurélie Lecestre
,
Cécile Ferré
11th IEEE Nanotechnology Materials and Devices Conference (NMDC), Oct 2016, Toulouse, France. 2p
Conference papers
hal-01462968v1
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Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction
Adhitya Bhaswara
,
Hohyun Keum
,
Fabrice Mathieu
,
Bernard Legrand
,
Seok Kim
42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria
Conference papers
hal-01962410v1
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Electronic scheme for full control of organic piezoelectric MEMS resonatorss
Pierre-Henri Ducrot
,
Isabelle Dufour
,
Cédric Ayela
,
Fabrice Mathieu
,
Liviu Nicu
2016 IEEE International Frequency Control Symposium (IFCS 2016), May 2016, La Nouvelle Orléans, LA, United States. ⟨10.1109/FCS.2016.7546797⟩
Conference papers
hal-01271757v1
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Study of cells mechanical properties thanks to organic piezoelectric MEMS resonators
Pierre-Henri Ducrot
,
Isabelle Dufour
,
Fabrice Mathieu
,
Liviu Nicu
,
Marie-Christine Durrieu
Journées de l’école doctorale SPI Université de Bordeaux, Mar 2016, Bordeaux, France
Conference papers
hal-01415864v1
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Simple casting based fabrication of PEDOT:PSS-PVDF-ionic liquid soft actuators
Christian Bergaud
,
Aiva Simaite
,
Bertrand Tondu
,
Fabrice Mathieu
,
Philippe Souères
SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, Mar 2015, San Diego, United States. ⟨10.1117/12.2083936⟩
Conference papers
hal-01764277v1
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PZT Nanofilm-Based Wafer Scale Nanoresonators
Denis Dezest
,
Fabrice Mathieu
,
Laurent Mazenq
,
Liviu Nicu
,
Caroline Soyer
IEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p
Conference papers
hal-01144194v1
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Sensitivity optimization of silicon microcantilever-based density sensor for hydrogen detection
Mohand-Tayeb Boudjiet
,
Johan Bertrand
,
Laurent Mazenq
,
Thierry Leichle
,
Fabrice Mathieu
11th Nanomechanical Sensing Workshop NMC 2014, Apr 2014, Madrid, Spain. 2 p
Conference papers
hal-00951760v1
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Laser plasma acceleration of electrons with multi-PW laser beams in the frame of CILEX
B. Cros
,
B.S. Paradkar
,
X. Davoine
,
A. Chancé
,
F.G. Desforges
Conference papers
in2p3-00903672v1
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Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators
Denis Dezest
,
Fabrice Mathieu
,
Laurent Mazenq
,
Caroline Soyer
,
Jean Costecalde
2013 Nanomechanical Sensing Workshop, May 2013, Stanford, USA, United States. pp.0
Conference papers
hal-03165172v1
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New characterization methods for monitoring small resonant frequency variation. Application: Uncoated Silicon Microcantilever-based Sensors
Mohand-Tayeb Boudjiet
,
Fabrice Mathieu
,
Liviu Nicu
,
Johan Bertrand
,
Claude Pellet
Journées nationales du GDR Micro Nano-Systèmes, 2013, Toulouse, France
Conference papers
hal-00933254v1
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Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities
Olivier Thomas
,
Fabrice Mathieu
,
W. Mansfield
,
C. Huang
,
S. Trolier-Mckinstry
Conference papers
hal-01203229v1
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MicRheo : Détermination des propriétés rhéologiques d'un fluide à l'aide d'un microlevier
Yacine Amarouchene
,
Cédric Ayela
,
Benjamin Caillard
,
Annie Colin
,
Ahmad Darwiche
J3N 2012, 2012, Bordeaux, France
Conference papers
hal-00743799v1
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MEMS-based Measurement of Rheological Fluid Properties
Isabelle Dufour
,
Etienne Lemaire
,
Benjamin Caillard
,
Cédric Ayela
,
Claude Pellet
Journées nationales du GDR Micro Nano-Systèmes Micro Nano-Fluidique, 2012, Bordeaux, France
Conference papers
hal-00716590v1
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Integrative Technology-Based Approach of Microelectromechanical Systems (MEMS) for Biosensing Applications
Liviu Nicu
,
Thomas Alava
,
Thierry Leichle
,
Daisuke Saya
,
Jean Bernard Pourciel
EMBC'12, 2012, San Diego, United States. 4 p
Conference papers
hal-00865903v1
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Measurement of Rheological Fluid Properties using MEMS
Isabelle Dufour
,
Ahmad Darwiche
,
Etienne Lemaire
,
Benjamin Caillard
,
Yacine Amarouchene
Nanospain 2012, 2012, Santander, Spain
Conference papers
hal-00666635v1
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|
Integrative technology-based approach of microelectromechanical systems (MEMS) for biosensing applications
Liviu Nicu
,
Thomas Alava
,
Thierry Leichle
,
Daisuke Saya
,
Jean Bernard Pourciel
34th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2012, 2012, San Diego, CA, United States. pp.4475-4478, ⟨10.1109/EMBC.2012.6346960⟩
Conference papers
hal-00802629v1
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Can microcantilevers probe the high-frequency viscoelastic properties of fluids?
Etienne Lemaire
,
Mohamed Youssry
,
Benjamin Caillard
,
Cédric Ayela
,
Isabelle Dufour
8th International Workshop on Nanomechanical Sensing 2011, 2011, Dublin, Ireland. 2 p
Conference papers
hal-00564854v1
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The Microcantilever: a Versatile Tool for Measuring Fluid Properties
Isabelle Dufour
,
Abdelhamid Maali
,
Yacine Amarouchene
,
Cédric Ayela
,
Benjamin Caillard
8th International Workshop on Nanomechanical Sensing 2011, May 2011, Dublin, Ireland
Conference papers
hal-00564861v1
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|
MicRheo : Détermination des propriétés rhéologiques d'un fluide à l'aide d'un microlevier
Yacine Amarouchene
,
Cédric Ayela
,
Benjamin Caillard
,
Annie Colin
,
Ahmad Darwiche
J3N 2011, 2011, Strasbourg, France
Conference papers
hal-00648448v1
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|
Actuation and sensing integration challenges at the microscale : the Gordian Knot of the resonant bioMEMS realm
Liviu Nicu
,
Thomas Alava
,
Fabrice Mathieu
,
Cédric Ayela
,
Caroline Soyer
Conference papers
hal-00568981v1
|
|
Integrative technology-based approach of MEMS for biological applications
Liviu Nicu
,
Thomas Alava
,
Thierry Leichle
,
Daisuke Saya
,
Jean Bernard Pourciel
IEEE International Solid-State Circuits Conference, 2010, San Francisco, United States. 12 p
Conference papers
hal-00865906v1
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|
Actuation and sensing integration challenges at the microscale: the Gordian Knot of the resonant BioMEMS realm
Liviu Nicu
,
Thomas Alava
,
Fabrice Mathieu
,
Cédric Ayela
,
Caroline Soyer
2010 IEEE International Frequency Control Symposium, 2010, San Francisco, United States
Conference papers
hal-01228741v1
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|
Extended Lamb's model application to high-order resonances of micromachined circular membranes with integrated actuation and sensing capabilities
Liviu Nicu
,
Thomas Alava
,
Fabrice Mathieu
,
Caroline Soyer
,
Denis Remiens
Conference papers
hal-00800898v1
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|
MicRheo : Détermination des propriétés rhéologiques d'un fluide à l'aide d'un microlevier
Yacine Amarouchene
,
Cédric Ayela
,
Benjamin Caillard
,
Annie Colin
,
Isabelle Dufour
J3N 2010, 2010, Lille, France
Conference papers
hal-00648449v1
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|
MEMS-based multisensors platform with piezoelectric actuation and piezoresistive read-out capabilities for biosensing applications
Thomas Alava
,
Fabrice Mathieu
,
Denis Remiens
,
Caroline Soyer
,
Liviu Nicu
Biosensors 2010, 2010, Glasgow, United Kingdom
Conference papers
hal-00574487v1
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|
MicRheo : Détermination des propriétés rhéologiques d'un fluide à l'aide d'un microlevier
Yacine Amarouchene
,
Cédric Ayela
,
Benjamin Caillard
,
Annie Colin
,
Ahmad Darwiche
J3N 2009, 2009, Toulouse, France
Conference papers
hal-00648452v1
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|
Effet de la Touche Back dans un Modèle de Surfeur Aléatoire
Mohamed Bouklit
,
Fabrice Mathieu
JFT'03 : 1ère Journée Francophones de la Toile, Tours (France), pp. 101-110
Conference papers
lirmm-00269812v1
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BackRank: An Alternative for PageRank ?
Mohamed Bouklit
,
Fabrice Mathieu
WWW'05: 14th ACM International Conference on World Wide Web, 2005, pp.1122-1123
Conference papers
lirmm-00106130v1
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On-chip self-sensing function of 4x4 matrix micromachined resonating piezoelectric membranes for mass detection applications
M. Guirardel
,
Liviu Nicu
,
Daisuke Saya
,
S. Hinh
,
J. Sicard
2004 IEEE International Frequency Control Symposium and Exposition, Aug 2004, Montreal, Canada. pp.317-320, ⟨10.1109/FREQ.2004.1418472⟩
Conference papers
hal-00162779v1
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|
The Effet of the Back Button in a Random Walk Application to PageRank
Fabrice Mathieu
,
Mohamed Bouklit
WWW'O4: 13th ACM International Conference on World Wide Web, May 2004, New York (USA), pp.370-371
Conference papers
lirmm-00108955v1
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