Hugues Granier
Publications
Publications
Potential of BPN as a new negative photoresist for a very thick layer with high aspect ratioMicrosystem Technologies, 2014, 20 (10-11), pp.2089 - 2096. ⟨10.1007/s00542-014-2071-5⟩ |
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BPN a new thick negative photoresist with high aspect ratio for MEMS applicationsMicrosystem Technologies, 2012, 19 (3), pp.419 - 423. ⟨10.1007/s00542-012-1648-0⟩ |
Conventional micro and nanofabrication techniques and processesBordeaux Summer School - Innovative technologies and clinical applications in cancer research, Université de Bordeaux, Jun 2025, Bordeaux, France |
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How an international engineers exchange brings to a successful process/projectENRIS 2025, May 2025, Bologne (ITA), Italy |
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Opportunities and Challenges towards Portable Nanotechnology Processes over Open FacilitiesENRIS 2025, Euronanolab, May 2025, Bologne (ITA), Italy |
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Advantage and Challenge of Electrical Critical Dimension Test Structures for Electroplated High Aspect Ratio Nano Structures (HARNS) on Insulating MaterialsICTMS 2025, IEEE, Mar 2025, Matsue, Japan |
Epicentre: A RIBER/LAAS CNRS joint lab for optimization and automation of MBE processVCSEL Day 2024, LAAS-CNRS, Sep 2024, Toulouse, France |
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Packaging concerted action presentationMinapad 2024, Imaps France, Jun 2024, Grenoble, France |
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Chip or Wafer -Small quantity fabrication3rd European Symposium on Nanofabrication Research Infrastructure - ENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France |
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Micron-to-Submicron Cu electroplating in view of Agile-X LSI Chips Fabrication using Open FacilityENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France |
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Technology transfer of supercritical fluid deposition technology from research group to use in open nanotechnology facilitiesENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France |
Optimization of the energy consumption of the LAAS-CNRS micro and nanotechnologies platformENRIS 2023, C2N; Euronanolab; Renatech, May 2023, Saclay, France |
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Clean room engineers' exchanges: a win/win international collaborationENRIS, May 2023, Paris, Saclay, France |
Programme et Equipement Prioritaire de Recherche (PEPR) d’accélération électroniqueJournée Technique : Solutions Innovantes pour le Packaging Electronique, Dec 2022, Palaiseau, France |
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Auditable invoicing of audited rates: a methodology for funding of an academic platform operationsEuropean Nanofabrication Research Infrastrcutures Symposium, Jun 2019, Erschende, Netherlands |
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Presentation of “Renatech”, the French network of academic microfabrication clean-roomsENRIS (European Nanofabrication Research Infrastructure Symposium) 2017, Nordic Nanolab Network, May 2017, Trondheim, Norway |
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Les dépôts électrolytiques appliqués aux micro-dispositifs au LAASJournée Toulousaine d'Electrochimie (JTE 2016), Jul 2016, Toulouse, France |
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Comparisons of the new thick negative resist to Su8 resistSPIE Advanced Lithography, Feb 2011, San Jose, United States. ⟨10.1117/12.870496⟩ |
Temporary adhesives for wafer bonding: deep reactive ion etching applicationEuropean Microelectronics and Packaging Conference (EMPC 2009), Jun 2009, Rimini, Italy |
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New lateral DMOS and IGBT structures realized on a partial SOI substrate based on LEGO processBipolar/BiCMOS Circuits and Technology Meeting (BCTM2005), Oct 2005, Santa Barbara, United States. pp.74-77 |
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Action concertée PackagingJournées Nationales 2024 du PEPR électronique, Mar 2024, Grenoble, France. 2024 |
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Moyens de lithographies de la plateforme de Micro et Nanotechnologies du LAAS-CNRSRenatech Litho Gravure, Jan 2023, Lille, France. 2023 |
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Action concertée transverse PAC: PACkaging et interfaçage électroniqueLancement et première journée scientifique annuelle du PEPR Électronique, Mar 2023, Poitiers, France |
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Optimisation technologique des transistors bipolaires hyperfréquence de puissance à hétérojonction GaAs/GaAlAsMicro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 1995. Français. ⟨NNT : ⟩ |