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Martine LE BERRE
71
Documents
Identifiants chercheurs
- martineleberre
- 0000-0003-4935-7951
- IdRef : 084065826
Présentation
**Research summary**
Development of electronic nanocomponents
Functional oxide integration
Micro and nanotechnologies
High frequency passive components
**Keywords**
Micro Nano Electronics, Micro Nano Fabrication, MEMS, RF components, Thin films for microelectronics (BaM, YIG, PZT, PEO), Thin film characterization
**Teaching summary**
Martine LE BERRE teaches
(1) in the field of Microtechnologies and Microelectronics, at the Master level:
\- Lecture on the Technologies for Microelectronics, Elec. Eng. Dpt.
\- Lecture on MEMS, Materials Sci. Eng. Dpt.
\- Practical in Clean Room "Technologies for Microelectronics", Elec. Eng. Dpt.
(2) at the Bachelor level, in 2nd Year, courses on Electromagnetism and Waves in English
**Biography**
She graduated from Institut National des Sciences Appliquées (INSA) Rennes and studied one year as an exchange student in Germany. In 1994, she received a PhD from INSA Lyon for her work on the piezoresistivity of polycrystalline silicon. Since 1995 she has been working as an assistant professor at INL. She has been involved in the development of micromachined structures for Si-based MEMS (pressure sensors, micro-heat pipes arrays), their characterization as well as thin film characterization (PZT, SiC, BaM, YiG). After several studies on to the integration of ferrimagnetic oxides in microwave passive components, her latest projects contribute to the development of micro- and nanocomponents, e.g. components based on Local Anodic Oxidation by AFM or shadow-edge evaporation for nanogap fabrication.
She achieved the habilitation in 2006. She is or has been implicated in several national or regional research programs. She has supervised or co-supervised 12 PhD theses, 18 internships (Master level) and participated to 20 PhD thesis boards. Through her research activities she has authored or co-authored 39 articles referenced in ISI Web of Knowledge and participated to 49 international conferences. Her H-factor rates 13. She also acts as referee for journals such as IEEE Trans. Magn., J. Micromech. Microeng., Sensors & Actuators A, J. Appl. Phys.
Publications
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Front-Side Photon Detection improvement of SPAD integrated in FD-SOI CMOS Technology thanks to STI patterningISSW 2024 Te International Spad Sensor Workshop, 4-6 June 2024, Trento, Italy, Jun 2024, Trento, Italy
Communication dans un congrès
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How ALD deposition analysis can help PVD deposition process!9ème Workshop RAFALD, GDR RAFALD, Nov 2023, Lille (France), France
Communication dans un congrès
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PEALD of Pt nanoparticles: towards the development of single electron transistors and flexible strain sensorsRAFALD (Réseau des Acteurs Français de l’ALD), Nov 2018, Lyon, France
Communication dans un congrès
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Flexible Platinum Nanoparticle-based Piezoresistive Transducers Elaborated by Atomic Layer DepositionAVS 17th International Conference on Atomic Layer Deposition, Jan 2017, Denver, United States
Communication dans un congrès
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Pt nanoislands embedded in Al2O3 matrix: from ALD-based fabrication to structural to electrical characterizationEMRS Spring Meeting, Jan 2017, Strasbourg, France
Communication dans un congrès
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PEALD Platinum Nano-island SET Fabrication and Electrical CharacterizationAVS 17th International Conference on Atomic Layer Deposition, Jan 2017, Denver, United States
Communication dans un congrès
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On the irreversible transformation of Ti/TiOx/Ti junctions under electrical stressEnergy Materials and Nanotechnology, 2016, Prague, Czech Republic
Communication dans un congrès
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Shadow Edge Lithography coupled with ALD growth of Alumina and Platinum Nanoislands Towards the Fabrication of Single Electron TransistorsEMRS Fall Meeting, 2016, Warsaw, Poland
Communication dans un congrès
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Non-reciprocal Crib Transmission LineIEEE 16th International Conference on Communication Technology (ICCT), 2015, Beijing, China
Communication dans un congrès
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Oxydation locale d’une couche de titane par AFM pour la réalisation de composants mono-électroniques : étude paramétrée de différents modes de types de pointes17èmes Journées Nationales du Réseau Doctoral en Micro-Nanoélectronique, 2014, Lille, France
Communication dans un congrès
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Nano fabrication of oxide patterns using Atomic Force Microscopy on titanium towards the development of Nano devicesICQNM (Seventh International Conference on Quantum, Nano and Micro Technologies), Aug 2013, Barcelone, Spain
Communication dans un congrès
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Modélisation RLCG de lignes coplanaires sur un substrat Silicium pour applications CMOS15e Compatibilité Electromagnétique CEM 2010, Apr 2010, Limoges, France
Communication dans un congrès
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Dépôt de couches minces de YIG par ablation laser femtoseconde10èmes Journées de Caractérisation Micro-Ondes et Matériaux, Apr 2008, Limoges, France
Communication dans un congrès
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Study of the crystalline orientation and the magnetic properties of thin layers of barium hexaferrite6th European Magnetic Sensors & Actuators Conference EMSA'06, Jul 2006, Bilbao, Spain. pp.90
Communication dans un congrès
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Temperature sensor integration in all-silicon micro heat pipe arraysEurosensors XIX, Sep 2005, Barcelone, Spain
Communication dans un congrès
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Silicon micro heat pipes arrays for power electronic component temperature controlInternational Conference on Energy and Environment - CIEM, Oct 2005, Bucarest, Romania
Communication dans un congrès
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Réalisation de microcaloduc en silicium pour le refroidissement de l'électronique.1ères Journées de la Microfluidique de la société Française de Hydraulique, 2002, toulouse, France
Communication dans un congrès
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ALD growth of Platinum Nanoislands on Alumina for Single Electron Transistors ApplicationsALD growth of Platinum Nanoislands on Alumina for Single Electron Transistors Applications, 2016, Paris, France. 2016
Poster de conférence
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On the behavior of electrically stressed Ti/TiOx/Ti junctions fabricated by local anodic oxidationOn the behavior of electrically stressed Ti/TiOx/Ti junctions fabricated by local anodic oxidation, 2015, Lille, France. 2015
Poster de conférence
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Shadow Edge Evaporation for Single Electron TransistorsShadow Edge Evaporation for Single Electron Transistors, 2015, Lyon, France. 2015
Poster de conférence
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Oxydation locale d’une couche de titane par AFM pour la réalisation de composants mono-électroniques : étude paramétrée de différents modes de types de pointesJournées Nationales du Réseau Doctoral en Micro-Nanoélectronique, May 2014, Lille, France
Poster de conférence
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Oxydation par AFM de fines couches métalliques pour la réalisation de composants mono-électroniquesJournées Nationales du Réseau Doctoral en Micro-Nanoélectronique, Jun 2013, Grenoble, France
Poster de conférence
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Comparison of two conductive AFM probes for the local nano-oxidation of Ti thin filmsJournées Nationales sur les Technologies Emergentes en micro-nanofabrication, May 2013, Evian, France
Poster de conférence
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Use of Atomic Force Microscopy towards the Development of Nano Devices by Fabricating Oxide Patterns on Titanium thin FilmFirst French-German Summer School on Noncontact Atomic Force Microscopy, Oct 2013, Porquerolles, France
Poster de conférence
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Elaboration by AFM lithography of nanostructured Ti/TiOx/Ti tunnel junctionEuromat 2013 (European Congress & Exhibition on Advanced Materials and Processes), Sep 2013, Seville, Spain
Poster de conférence
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