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Sylvie Schamm-Chardon

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Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H + ions implanted LiTaO 3

Antonin Louiset , Sylvie Schamm-Chardon , Oleg Kononchuk , Nikolay Cherkashin
Applied Physics Letters, 2021, 118 (8), pp.082903. ⟨10.1063/5.0040729⟩
Journal articles hal-03154232v1
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Nano-analytical investigation of the forming process in an HfO2-based resistive switching memory

Gauthier Lefevre , Tristan Dewolf , Nicolas Guillaume , Serge Blonkowski , Christelle Charpin-Nicolle
Journal of Applied Physics, 2021, 130 (24), pp.244501. ⟨10.1063/5.0072343⟩
Journal articles hal-03720298v1
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Structural and chemical investigation of interface related magnetoelectric effect in Ni/BiFe0.95Mn0.05O3 heterostructures

B. Negulescu , J. Wolfman , Christophe Daumont , Nazir Jaber , Pascal Andreazza
Applied Surface Science, 2019, 481, pp.234-240. ⟨10.1016/j.apsusc.2019.02.232⟩
Journal articles hal-02070799v1
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Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy

F. Stumpf , A. A. Abu Quba , P. Singer , M. Rumler , Nikolay Cherkashin
Journal of Applied Physics, 2018, 123 (12), pp.125104. ⟨10.1063/1.5022558⟩
Journal articles hal-01745004v1

Nanoscale control of Si nanoparticles within a 2D hexagonal array embedded in SiO2 thin films

Celia Castro , Gérard Benassayag , Béatrice Pécassou , Andrea Andreozzi , Gabriele Seguini
Nanotechnology, 2017, 28 (1), ⟨10.1088/0957-4484/28/1/014001⟩
Journal articles hal-01745005v1
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Evolution of shape, size, and areal density of a single plane of Si nanocrystals embedded in SiO2 matrix studied by atom probe tomography

Bin Han , Yasuo Shimizu , Gabriele Seguini , Elisa Arduca , Celia Castro
RSC Advances, 2016, 6 (5), pp.3617-3622. ⟨10.1039/c5ra26710b⟩
Journal articles hal-01720446v1
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Decoupling indirect topographic cross-talk in band excitation piezoresponse force microscopy imaging and spectroscopy

Sang Mo Yang , Lucie Mazet , M. Baris Okatan , Stephen Jesse , Gang Niu
Applied Physics Letters, 2016, 108 (25), pp.252902 - 252902. ⟨10.1063/1.4954276⟩
Journal articles hal-01720447v1

Backside versus frontside advanced chemical analysis of high-k/metal gate stacks

E. Martinez , B. Saidi , M. Veillerot , P. Caubet , J.-M. Fabbri
Journal of Electron Spectroscopy and Related Phenomena, 2015, 203, pp.1-7. ⟨10.1016/j.elspec.2015.04.022⟩
Journal articles hal-01720448v1

Studying Thin Ge films and Ge/GeO2 interfaces by means of raman–brillouin scattering

Lama Yaacoub , Sylvie Schamm-Chardon , N.N. Ovsyuk , Antoine Zwick , Jesse Groenen
Bulletin of the Russian Academy of Sciences - Physics, 2015, 79 (11), pp.1397-1401. ⟨10.3103/S1062873815110246⟩
Journal articles hal-01720450v1
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A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications

Lucie Mazet , Sang Mo Yang , Sergei Kalinin , Sylvie Schamm-Chardon , Catherine Dubourdieu
Science and Technology of Advanced Materials, 2015, 16 (3), pp.036005. ⟨10.1088/1468-6996/16/3/036005⟩
Journal articles hal-01489400v1

Atomic scale characterization of SiO2/4H-SiC interfaces in MOSFETs devices

Anna Maria Beltrán , Sébastien Duguay , Christian Strenger , Anton J Bauer , Fuccio Cristiano
Solid State Communications, 2015, 221, pp.28-32. ⟨10.1016/j.ssc.2015.08.017⟩
Journal articles hal-01720451v1
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Atomic-layer deposited thulium oxide as a passivation layer on germanium

I.Z. Mitrovic , S. Hall , M. Althobaiti , D. Hesp , V.R. Dhanak
Journal of Applied Physics, 2015, 117 (21), pp.214104. ⟨10.1063/1.4922121⟩
Journal articles hal-01720449v1
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Raman-Brillouin scattering from a thin Ge layer: Acoustic phonons for probing Ge/GeO2 interfaces

Lama Yaacoub , Sylvie Schamm-Chardon , N.N. Ovsyuk , Antoine Zwick , Jesse Groenen
Applied Physics Letters, 2014, 104 (6), pp.061601. ⟨10.1063/1.4864790⟩
Journal articles hal-01720453v1
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Structural study and ferroelectricity of epitaxial BaTiO3 films on silicon grown by molecular beam epitaxy

Lucie Mazet , Romain Bachelet , Lamis Louahadj , David Albertini , Brice Gautier
Journal of Applied Physics, 2014, 116 (21), pp.214102. ⟨10.1063/1.4902165⟩
Journal articles hal-01489886v1

Silicon crystallization in nanodot arrays organized by block copolymer lithography

Michele Perego , Andrea Andreozzi , Gabriele Seguini , Sylvie Schamm-Chardon , Celia Castro
Journal of Nanoparticle Research, 2014, 16 (12), ⟨10.1007/s11051-014-2775-6⟩
Journal articles hal-01718638v1
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Scaling size of the interplay between quantum confinement and surface related effects in nanostructured silicon

G. Seguini , Celia Castro , Sylvie Schamm-Chardon , Gérard Benassayag , P. Pellegrino
Applied Physics Letters, 2013, 103 (2), pp.023103. ⟨10.1063/1.4813743⟩
Journal articles hal-01745007v1

In-plane organization of silicon nanocrystals embedded in SiO2 thin films

Celia Castro , Sylvie Schamm-Chardon , Béatrice Pécassou , A. Andreozzi , G. Seguini
Nanotechnology, 2013, 24 (7), ⟨10.1088/0957-4484/24/7/075302⟩
Journal articles hal-01745011v1

Influence of La on the electrical properties of HfSiON: From diffusion to Vth shifts

M. Hackenberg , P. Pichler , S. Baudot , Z. Essa , M. Gro-Jean
Microelectronic Engineering, 2013, 109, pp.200-203. ⟨10.1016/j.mee.2013.03.071⟩
Journal articles hal-01745012v1

Fabrication of well-ordered arrays of silicon nanocrystals using a block copolymer mask

Paolo Pellegrino , Michele Perego , Sylvie Schamm-Chardon , Gabriele Seguini , Andrea Andreozzi
physica status solidi (a), 2013, 210 (8), pp.1477-1484. ⟨10.1002/pssa.201300030⟩
Journal articles hal-01745010v1

Quantumdots for memory applications

P. Dimitrakis , P. Normand , V. Ioannou-Sougleridis , Caroline Bonafos , Sylvie Schamm-Chardon
physica status solidi (a), 2013, 210 (8), pp.1490-1504. ⟨10.1002/pssa.201300029⟩
Journal articles hal-01745006v1

Si and Ge nanocrystals for future memory devices

Caroline Bonafos , Marzia Carrada , Gérard Benassayag , Sylvie Schamm-Chardon , Jesse Groenen
Materials Science in Semiconductor Processing, 2012, 15 (6), pp.615-626. ⟨10.1016/j.mssp.2012.09.004⟩
Journal articles hal-01745013v1

Nano-Analytical and Electrical Characterization of 4H-SiC MOSFETs

Anna Maria Beltrán , Sylvie Schamm-Chardon , Vincent Mortet , Matthieu Lefebvre , Eléna Bedel-Pereira
Materials Science Forum, 2012, 711, pp.134-138. ⟨10.4028/www.scientific.net/MSF.711.134⟩
Journal articles hal-01745014v1

Comparative Study of Electrical and Microstructural Properties of 4H-SiC MOSFETs

C. Strenger , V. Haeublein , T. Enbacher , A. J. Bauer , H. Ryssel
Materials Science Forum, 2012, 717-720, pp.437-440. ⟨10.4028/www.scientific.net/MSF.717-720.437⟩
Journal articles hal-01745018v1

Implantation energy effect on photoluminescence spectroscopy of Si nanocrystals locally fabricated by stencil-masked ultra-low-energy ion-beam-synthesis in silica

Régis Diaz , C. Suarez , Arnaud Arbouet , Renaud Marty , Vincent Paillard
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2012, 272, pp.53-56. ⟨10.1016/j.nimb.2011.01.031⟩
Journal articles hal-01745016v1

Extraction of the characteristics of Si nanocrystals by the charge pumping technique

Régis Diaz , Jérémie Grisolia , Gérard Benassayag , Sylvie Schamm-Chardon , Celia Castro
Nanotechnology, 2012, 23 (8), ⟨10.1088/0957-4484/23/8/085206⟩
Journal articles hal-01745017v1
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Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors

Magali Brunet , Hicham Mafhoz Kotb , Laurent Bouscayrol , Emmanuel Scheid , Michel Andrieux
Thin Solid Films, 2011, 519 (16), pp.5638-5644. ⟨10.1016/j.tsf.2011.03.006⟩
Journal articles hal-01443083v1
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The energy band alignment of Si nanocrystals in SiO2

G. Seguini , Sylvie Schamm-Chardon , P. Pellegrino , M. Perego
Applied Physics Letters, 2011, 99 (8), pp.082107. ⟨10.1063/1.3629813⟩
Journal articles hal-01745021v1

Structural and electrical properties of Er-doped HfO2 and of its interface with Ge (001)

C. Wiemer , S. Baldovino , L. Lamagna , M. Perego , Sylvie Schamm-Chardon
Microelectronic Engineering, 2011, 88 (4), pp.415-418. ⟨10.1016/j.mee.2010.10.032⟩
Journal articles hal-01745019v1

Combining HRTEM-EELS nano-analysis with capacitance-voltage measurements to evaluate high-kappa thin films deposited on Si and Ge as candidate for future gate dielectrics

Sylvie Schamm-Chardon , Pierre-Eugène Coulon , L. Lamagna , C. Wiemer , S. Baldovino
Microelectronic Engineering, 2011, 88 (4), pp.419-422. ⟨10.1016/j.mee.2010.10.012⟩
Journal articles hal-01745022v1
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Calculated and experimental electron energy-loss spectra of La2O3, La(OH)(3), and LaOF nanophases in high permittivity lanthanum-based oxide layers

Lionel Calmels , Pierre-Eugène Coulon , Sylvie Schamm-Chardon
Applied Physics Letters, 2011, 98 (24), pp.243116. ⟨10.1063/1.3600783⟩
Journal articles hal-01745023v1

Silicon nanoclusters embedded into oxide host for non-volatile memory applications

L. Khomenkova , X. Portier , B. Sahu , A. Slaoui , Caroline Bonafos
ECS Transactions, 2011, 35, pp. 37-45
Journal articles hal-00647540v1

The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition

A. Andreozzi , L. Lamagna , G. Seguini , M. Fanciulli , Sylvie Schamm-Chardon
Nanotechnology, 2011, 22 (33), ⟨10.1088/0957-4484/22/33/335303⟩
Journal articles hal-01745020v1
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Dielectric properties of Er-doped HfO2 (Er ~ 15%) grown by atomic layer deposition for high-kappa gate stacks

C. Wiemer , L. Lamagna , S. Baldovino , M. Perego , Sylvie Schamm-Chardon
Applied Physics Letters, 2010, 96 (18), pp.182901. ⟨10.1063/1.3400213⟩
Journal articles hal-01745025v1
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O-3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates

L. Lamagna , C. Wiemer , M. Perego , S. N. Volkos , S. Baldovino
Journal of Applied Physics, 2010, 108 (8), pp.084108. ⟨10.1063/1.3499258⟩
Journal articles hal-01745024v1

Ultra-low energy ion implantation of Si into HfO2 and HfSiO-based structures for non volatile memory applications

Caroline Bonafos , F. Gloux , Pierre-Eugène Coulon , Jesse Groenen , Sylvie Schamm-Chardon
Materials Research Society Symposia Proceedings, 2010, 1250, p. G01-07
Journal articles hal-00562346v1

Ultra-low-energy ion-beam-synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications

P. Dimitrakis , A. Mouti , Caroline Bonafos , Sylvie Schamm-Chardon , Gérard Benassayag
Microelectronic Engineering, 2009, 86 (7-9), pp.1838-1841. ⟨10.1016/j.mee.2009.03.074⟩
Journal articles hal-01745030v1
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Atomic layer deposition of LaxZr1-xO2-delta (x=0.25) high-k dielectrics for advanced gate stacks

D. Tsoutsou , L. Lamagna , S. N. Volkos , A. Molle , S. Baldovino
Applied Physics Letters, 2009, 94 (5), pp.53504 - 53504. ⟨10.1063/1.3075609⟩
Journal articles hal-01745031v1

Ultra-low energy ion implantation of Si into HfO2-based structures for non volatile memory applications

Pierre-Eugène Coulon , K. Chan Shin Yu , Sylvie Schamm-Chardon , Gérard Benassayag , Béatrice Pécassou
Materials Research Society Symposia Proceedings, 2009, 1160, pp.H01-03
Journal articles hal-00697605v1

Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers

F. Delachat , Marzia Carrada , G. Ferblantier , A. Slaoui , Caroline Bonafos
Physica E: Low-dimensional Systems and Nanostructures, 2009, 41, pp. 994-997
Journal articles hal-00408918v1
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Thermally induced permittivity enhancement in La-doped ZrO2 grown by atomic layer deposition on Ge(100)

L. Lamagna , C. Wiemer , S. Baldovino , A. Molle , M. Perego
Applied Physics Letters, 2009, 95 (12), pp.122902. ⟨10.1063/1.3227669⟩
Journal articles hal-01745026v1

ZrO2 Thin Films Grown On 2D and 3D Silicon Surfaces By DLI-MOCVD For Electronic Devices

Karolina Galicka-Fau , Michel Andrieux , Corinne Legros , Michaële Herbst-Ghysel , Isabelle Gallet
ECS Transactions, 2009, 25 (8), pp.1121-1128. ⟨10.1149/1.3207715⟩
Journal articles hal-01745028v1

Temperature-dependent low electric field charging of Si nanocrystals embedded within oxide-nitride-oxide dielectric stacks

N. Nikolaou , P. Dimitrakis , P. Normand , Sylvie Schamm-Chardon , Caroline Bonafos
Nanotechnology, 2009, 20 (30), ⟨10.1088/0957-4484/20/30/305704⟩
Journal articles hal-01745029v1
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Characterization of ZrO2 thin films deposited by MOCVD for high-density 3D capacitors. Broad experience on MOCVD techniques and high-k materials

Magali Brunet , Emmanuel Scheid , Karolina Galicka-Fau , Michel Andrieux , Corinne Legros
Microelectronic Engineering, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩
Journal articles hal-01443057v1

Chemical/Structural Nanocharacterization and Electrical Properties of ALD-Grown La2O3/Si Interfaces for Advanced Gate Stacks

Sylvie Schamm-Chardon , Pierre-Eugène Coulon , S. Miao , S. N. Volkos , L. H. Lu
Journal of The Electrochemical Society, 2009, 156 (1), pp.H1-H6. ⟨10.1149/1.3000594⟩
Journal articles hal-01745032v1

KFM detection of charges injected by AFM into a thin SiO2 layer containing Si nanocrystals

C. Dumas , Laurence Ressier , Jérémie Grisolia , Arnaud Arbouet , Vincent Paillard
Microelectronic Engineering, 2008, 85 (12), pp.2358-2361. ⟨10.1016/j.mee.2008.09.027⟩
Journal articles hal-01745038v1

Structural and optical properties of high density Si-ncs synthesized in SiNx : H by remote PECVD and annealing

Marzia Carrada , A. Zerga , A. Amann , J. J. Grob , J. P. Stoquert
Materials Science and Engineering: B, 2008, 147 (2-3), pp.218-221. ⟨10.1016/j.mseb.2007.09.042⟩
Journal articles hal-01745037v1

Structural and optical properties of high density Si-ncs synthezised in SiNx:H by remote PECVD and annealing

Marzia Carrada , A. Zerga , A. Amann , J.J. Grob , J.P. Stoquert
Mater. Sci. Eng. B, 2008, 147, pp.218-221
Journal articles hal-00250450v1

Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing

D. Tsoutsou , G. Scarel , A. Debernardi , S. C. Capelli , S. N. Volkos
Microelectronic Engineering, 2008, 85 (12), pp.2411-2413. ⟨10.1016/j.mee.2008.09.033⟩
Journal articles hal-01745039v1

Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing

Jérémie Grisolia , C. Dumas , Gérard Benassayag , Caroline Bonafos , Sylvie Schamm-Chardon
Superlattices and Microstructures, 2008, 44 (4-5), pp.395-401. ⟨10.1016/j.spmi.2007.12.013⟩
Journal articles hal-01745035v1

Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS

Sylvie Schamm-Chardon , Caroline Bonafos , H. Coffin , Nikolay Cherkashin , Marzia Carrada
Ultramicroscopy, 2008, 108 (4), pp.346--357. ⟨10.1016/j.ultramic.2007.05.008⟩
Journal articles hal-01736064v1
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Field effect white and tunable electroluminescence from ion beam synthesized Si- and C-rich SiO2 layers

O. Jambois , Josep Carreras , A. Perez-Rodriguez , B. Garrido , Caroline Bonafos
Applied Physics Letters, 2007, 91 (21), pp.211105 - 253124. ⟨10.1063/1.2807281⟩
Journal articles hal-01745044v1

Influence of the thickness of the tunnel layer on the charging characteristics of Si nanocrystals embedded in an ultra-thin SiO2 layer

C. Dumas , Jérémie Grisolia , Gérard Benassayag , Caroline Bonafos , Sylvie Schamm-Chardon
Physica E: Low-dimensional Systems and Nanostructures, 2007, 38 (1-2), pp.80-84. ⟨10.1016/j.physe.2006.12.026⟩
Journal articles hal-01745045v1

Preparation and microstructures of BaTi1-xZrxO3 hetero-epitaxial thin films on SrTiO3 substrates

D. Wu , Philippe Sciau , Sylvie Schamm-Chardon , F. Gloux , M. Varela Fernandez
Journal of Physics D: Applied Physics, 2007, 40 (15), pp.4701-4706. ⟨10.1088/0022-3727/40/15/052⟩
Journal articles hal-01745042v1
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Wet oxidation of nitride layer implanted with low-energy Si ions for improved oxide-nitride-oxide memory stacks

V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos
Applied Physics Letters, 2007, 90 (26), pp.263513. ⟨10.1063/1.2752769⟩
Journal articles hal-01736066v1

Photoluminescence spectroscopy and transport electrical measurements reveal the quantized features of Si nanocrystals embedded in an ultra thin SiO2 layer

C. Dumas , Jérémie Grisolia , Marzia Carrada , Arnaud Arbouet , Vincent Paillard
physica status solidi (c), 2007, 4, pp.311-315. ⟨10.1002/pssc.200673272⟩
Journal articles hal-01745040v1

Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation

V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos
Microelectronic Engineering, 2007, 84 (9-10), pp.1986--1989. ⟨10.1016/j.mee.2007.04.068⟩
Journal articles hal-01736069v1

Oxide-nitride-oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis

V. Ioannou-Sougleridis , P. Dimitrakis , V. Em Vamvakas , P. Normand , Caroline Bonafos
Nanotechnology, 2007, 18 (21), ⟨10.1088/0957-4484/18/21/215204⟩
Journal articles hal-01745043v1

Materials science issues for the fabrication of nanocrystal memory devices by ultra low energy ion implantation

Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin
Defect Diffus. Forum, 2006, 258-260, pp.531-541
Journal articles hal-00204809v1

Photoluminescence characterization of few-nanocrystals electronic devices

Arnaud Arbouet , Marzia Carrada , François Demangeot , Vincent Paillard , Gérard Benassayag
Journal of Luminescence, 2006, 121 (2), pp.340-343. ⟨10.1016/j.jlumin.2006.08.070⟩
Journal articles hal-01745048v1
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White electroluminescence from C- and Si-rich thin silicon oxides

O. Jambois , B. Garrido , P. Pellegrino , Josep Carreras , A. Perez-Rodriguez
Applied Physics Letters, 2006, 89 (25), pp.253124 - 253124. ⟨10.1063/1.2423244⟩
Journal articles hal-01745047v1
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Oxidation of Si nanocrystals fabricated by ultralow-energy ion implantation in thin SiO2 layers

H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag
Journal of Applied Physics, 2006, 99 (4), pp.044302. ⟨10.1063/1.2171785⟩
Journal articles hal-01736074v1

The effects of oxidation conditions on structural and electrical properties of silicon nanoparticles obtained by ultra-low-energy ion implantation

J Grisolia , M Shalchian , Gérard Benassayag , H. Coffin , Caroline Bonafos
Nanotechnology, 2005, 16 (12), pp.2987-2992. ⟨10.1088/0957-4484/16/12/043⟩
Journal articles hal-01745049v1
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Elaboration by spray pyrolysis and characterization in the VUV range of phosphor particles with spherical shape and micronic size

Nicolas Joffin , Bruno Caillier , Jeannette Dexpert-Ghys , Marc Verelst , Guy Baret
Journal of Physics D: Applied Physics, 2005, 38 (17), pp.3261-3268. ⟨10.1088/0022-3727/38/17/S30⟩
Journal articles hal-00359209v1

Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications

Caroline Bonafos , H. Coffin , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag
Solid-State Electronics, 2005, 49 (11), pp.1734--1744. ⟨10.1016/j.sse.2005.10.001⟩
Journal articles hal-01736088v1

Oxidation effects on transport characteristics of nanoscale MOS capacitors with an embedded layer of silicon nanocrystals obtained by low energy ion implantation

J Grisolia , M Shalchian , Gérard Benassayag , H. Coffin , Caroline Bonafos
Materials Science and Engineering: B, 2005, 124, pp.494-498. ⟨10.1016/j.mseb.2005.08.082⟩
Journal articles hal-01745050v1
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Fabrication of nanocrystal memories by ultra low energy ion implantation

Nikolay Cherkashin , Caroline Bonafos , H. Coffin , Marzia Carrada , Sylvie Schamm-Chardon
physica status solidi (c), 2005, 2 (6), pp.1907--1911. ⟨10.1002/pssc.200460523⟩
Journal articles hal-01736090v1

Si nanocrystals by ultra-low energy ion implantation for non-volatile memory applications

H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Marzia Carrada , Nikolay Cherkashin
Materials Science and Engineering: B, 2005, 124-125, pp.499--503. ⟨10.1016/j.mseb.2005.08.129⟩
Journal articles hal-01736081v1

Study of the chemical and structural organization of SIPOS films at the nanometer scale by TEM-EELS and XPS

Sylvie Schamm-Chardon , R Berjoan , P Barathieu
Materials Science and Engineering: B, 2004, 107 (1), pp.58-65. ⟨10.1016/j.mseb.2003.10.010⟩
Journal articles hal-01745051v1
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Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology

T. Müller , K.-H. Heinig , W. Möller , Caroline Bonafos , H. Coffin
Applied Physics Letters, 2004, 85 (12), pp.2373-2375
Journal articles hal-01736097v1

Multi-Dot Floating-Gates in MOSFETs for nonvolatile memories - Their ion beam synthesis and morphology

T. Müller , K.-H. Heinig , Caroline Bonafos , H. Coffin , Nikolay Cherkashin
Materials Research Society Symposium - Proceedings, 2003, 792, pp.333-338. ⟨10.1557/PROC-792-R8.7⟩
Journal articles hal-01736111v1

Thermodynamic study and characterization of low pressure chemically vapor deposited silicon oxynitride films from tetraethylorthosilicate, dichlorosilane and ammonia gas mixtures

V Vamvakas , D Davazoglou , R Berjoan , Sylvie Schamm-Chardon , Constantin Vahlas
Thin Solid Films, 2003, 429 (1-2), pp.77-83. ⟨10.1016/S0040-6090(03)00061-0⟩
Journal articles hal-01745054v1

Study of the dielectric properties near the band gap by VEELS: gap measurement in bulk materials

Sylvie Schamm-Chardon , G. Zanchi
Ultramicroscopy, 2003, 96 (3-4), pp.559-564. ⟨10.1016/S0304-3991(03)00116-5⟩
Journal articles hal-01745053v1
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Multi-scale analysis of the dielectric properties and structure of resin/carbon-black nanocomposites

S. Paciornik , O. da Fonseca Martins Gomes , Arnaud Delarue , Sylvie Schamm-Chardon , Dominique Jeulin
European Physical Journal: Applied Physics, 2003, 21 (1), pp.17-26. ⟨10.1051/epjap:2002107⟩
Journal articles hal-00166093v1

Contamination and the quantitative exploitation of EELS low-loss experiments

Sylvie Schamm-Chardon , G. Zanchi
Ultramicroscopy, 2001, 88 (3), pp.211-217. ⟨10.1016/S0304-3991(01)00070-5⟩
Journal articles hal-01745056v1

VUV absorption coefficient measurements of borate matrices

B Moine , J Mugnier , D Boyer , R Mahiou , Sylvie Schamm-Chardon
Journal of Alloys and Compounds, 2001, 323, pp.816-819. ⟨10.1016/S0925-8388(01)01151-3⟩
Journal articles hal-01745055v1

Low pressure chemical vapor deposition of silicon oxynitride films using tetraethylorthosilicate, dichlorosilane and ammonia mixtures

V Vamvakas , R Berjoan , Sylvie Schamm-Chardon , D Davazoglou , Constantin Vahlas
Journal de Physique IV Proceedings, 2001, 11 (PR3), pp.231-238. ⟨10.1051/jp4:2001329⟩
Journal articles hal-01745057v1

High-resolution electron microscopy investigations of stacking faults in Y1Ba2Cu3O7−δ metalorganic chemical vapor deposited thin films

C Grigis , Sylvie Schamm-Chardon , Dominique Dorignac
Journal of Materials Research, 1999, 14 (7), pp.2732-2738. ⟨10.1557/JMR.1999.0366⟩
Journal articles hal-01745058v1

Studies of LPCVD Al–Fe–O deposits by XPS, EELS and Mössbauer spectroscopies

C Labatut , R Berjoan , B Armas , Sylvie Schamm-Chardon , Jean Sévely
Surface and Coatings Technology, 1998, 105 (1-2), pp.31-37. ⟨10.1016/S0257-8972(97)00562-8⟩
Journal articles hal-01745059v1

Element and phase identification via fine structure analysis in EELS: application to MOCVD-Y1Ba2Cu3O7-delta thin films

C Grigis , Sylvie Schamm-Chardon
Ultramicroscopy, 1998, 74 (3), pp.159-167. ⟨10.1016/S0304-3991(98)00040-0⟩
Journal articles hal-01745060v1

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

A Bendeddouche , R Berjoan , E Beche , T Merlemejean , Sylvie Schamm-Chardon
Journal of Applied Physics, 1997, 81 (9), pp.6147-6154. ⟨10.1063/1.364396⟩
Journal articles hal-01745062v1
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SiCN Amorphous Materials Chemical Vapour Deposited Using the Si(CH3)4-NH3-H2 System

A. Bendeddouche , R. Berjoan , E. Bêche , Sylvie Schamm-Chardon , V. Serin
Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-793-C5-800. ⟨10.1051/jphyscol:1995594⟩
Journal articles jpa-00253957v1
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Preparation of YBCO on YSZ Layers Deposited on Silicon and Sapphire by MOCVD : Influence of the Intermediate Layer on the Quality of the Superconducting Film

G. Garcia , J. Casado , J. Llibre , M. Doudkowski , J. Santiso
Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-439-C5-447. ⟨10.1051/jphyscol:1995551⟩
Journal articles jpa-00253913v1
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HREM Characterization of Interfaces in Thin MOCVD Superconducting Films

Dominique Dorignac , Sylvie Schamm-Chardon , Ch. Grigis , J. Santiso , G. Garcia
Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-927-C5-934. ⟨10.1051/jphyscol:19955110⟩
Journal articles jpa-00253779v1

Physicochemical properties of SiC-based ceramics deposited by low pressure chemical vapor deposition from CH3SiCl3H2

F Loumagne , F Langlais , R Naslain , Sylvie Schamm-Chardon , Dominique Dorignac
Thin Solid Films, 1995, 254 (1-2), pp.75-82. ⟨10.1016/0040-6090(94)06237-F⟩
Journal articles hal-01745064v1

SiCN Amorphous Materials Chemical Vapour Deposited Using the Si(CH3)4-NH3-H2 System

A Bendeddouche , R Berjoan , E Beche , Sylvie Schamm-Chardon , Virginie Serin
Journal de Physique IV Proceedings, 1995, 5 (C5), pp.793-800. ⟨10.1051/jphyscol:1995594⟩
Journal articles hal-01745065v1

Chlorine and oxygen inhibition effects in the deposition of SiC-based ceramics from the Si-C-H-Cl system

D Lespiaux , F Langlais , R Naslain , Sylvie Schamm-Chardon , Jean Sévely
Journal of the European Ceramic Society, 1995, 15 (1), pp.81-88. ⟨10.1016/0955-2219(95)91303-6⟩
Journal articles hal-01745066v1
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Kinetic Processes in the CVD of SiC from CH3SiCl3-H2 in a Vertical Hot-Wall Reactor

F. Langlais , F. Loumagne , D. Lespiaux , Sylvie Schamm-Chardon , R. Naslain
Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-105-C5-112. ⟨10.1051/jphyscol:1995510⟩
Journal articles jpa-00253766v1

Correlations between gas phase supersaturation, nucleation process and physico-chemical characteristics of silicon carbide deposited from Si-C-H-Cl system on silica substrates

D Lespiaux , F Langlais , R Naslain , Sylvie Schamm-Chardon , Jean Sévely
Journal of Materials Science, 1995, 30 (6), pp.1500-1510. ⟨10.1007/BF00375255⟩
Journal articles hal-01745067v1

Preparation of YBCO on YSZ Layers Deposited on Silicon and Sapphire by MOCVD : Influence of the Intermediate Layer on the Quality of the Superconducting Film

G Garcia , J Casado , J Llibre , M Doudkowski , J Santiso
Journal de Physique IV Proceedings, 1995, Proceedings of the Tenth European Conference on Chemical Vapour Deposition, 5 (C5), pp.439-445. ⟨10.1051/jphyscol:1995551⟩
Journal articles hal-01745063v1

Y2O3 nanoprecipitates in YBCO thin films obtained by thermal- MOCVD

J Santiso , A Figueras , Sylvie Schamm-Chardon , C Grigis , Dominique Dorignac
Physica C: Superconductivity and its Applications, 1994, 235, pp.619-620. ⟨10.1016/0921-4534(94)91533-4⟩
Journal articles hal-01745068v1

Y2O3 nanoprecipitate/YBaCuO matrix interfaces: HREM study

Dominique Dorignac , Sylvie Schamm-Chardon , C Grigis , Jean Sévely , J Santiso
Physica C: Superconductivity and its Applications, 1994, 235, pp.617-618. ⟨10.1016/0921-4534(94)91532-6⟩
Journal articles hal-01745069v1

The K2ZrF6 wetting process: Effect of surface chemistry on the ability of a SiC-Fiber preform to be impregnated by aluminum

Sylvie Schamm-Chardon , R Fedou , Jp Rocher , Jm Quenisset , R Naslain
Metallurgical Transactions a-Physical Metallurgy and Materials Science, 1991, 22 (9), pp.2133-2139. ⟨10.1007/BF02669881⟩
Journal articles hal-01745070v1
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HREM identification of "one-dimensionally-disordered" polytypes in the SiC (CVI) matrix of SiC/SiC composites

Sylvie Schamm-Chardon , Annie Mazel , Dominique Dorignac , Jean Sévely
Microscopy, Microanalysis, Microstructures, 1991, 2 (1), pp.59-73. ⟨10.1051/mmm:019910020105900⟩
Journal articles hal-01745071v1

Compatibility between SiC filaments and aluminim in the K2ZrF6 wetting process and its effect on filament strength

Sylvie Schamm-Chardon , Y Lepetitcorps , R Naslain
Composites Science and Technology, 1991, 40 (2), pp.193-211. ⟨10.1016/0266-3538(91)90097-9⟩
Journal articles hal-01745072v1

Partial phase diagram of the ternary reciprocal system KF-AlF3-Al2O3-K2O

Sylvie Schamm-Chardon , L Rabardel , J Grannec , R Naslain , C Bernard
Calphad, 1990, 14 (4), pp.385-402. ⟨10.1016/0364-5916(90)90006-L⟩
Journal articles hal-01745073v1

Liquid-process production of composite-materials with aluminum-based matrix reinforced by fibers of carbon or silicon-carbide

Sylvie Schamm-Chardon , Jp Rocher , R Naslain
Memoires et Etudes Scientifiques de la revue de Metallurgie, 1988, 85 (9), pp.483
Journal articles hal-01745074v1

Nano-composite MOx materials for NVMs

Caroline Bonafos , L. Khomenkhova , F. Gourbilleau , Etienne Talbot , Abdelilah Slaoui
Metal Oxides for Non-volatile Memory, chapitre 7, Elsevier, pp.201-244, 2022, ⟨10.1016/B978-0-12-814629-3.00007-6⟩
Book sections hal-03661308v1

Interdiffusion and Chemical Reaction at Interfaces by TEM/EELS

Sylvie Schamm-Chardon
in Transmission Electron Microscopy in Micro-Nanoelectronics, Nanoscience and Nanotechnology Series, ISTE Ltd and John Wiley & Sons, Inc., UK, pp. 135-163, 2013, ⟨10.1002/9781118579022.ch6⟩
Book sections hal-01745009v1
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Nanoparticle-based memories : concept and operation principles

P. Dimitrakis , Sylvie Schamm-Chardon , Caroline Bonafos , P. Normand
Applications of Nanomaterials, American Scientific Publishers, Chap. 2, 2012, 1-58883-181-7
Book sections hprints-01745475v1

Synthesis and Packaging of Nanocrystals by Ultra Low Energy Ion Implantation for Applications in Electronics, Optics and Plasmonics

Alain Claverie , Caroline Bonafos , Robert Carles , Sylvie Schamm-Chardon , Arnaud Arbouet
Synthesis and Engineering of Nanostructures by Energetic Ions, Nova Science, Chap. 9, pp. 153-172, 2011
Book sections hprints-01745455v1

Local structure, composition and electronic properties of rare earth oxide thin films studied using advanced transmission electron microscopy techniques (TEM-EELS)

Sylvie Schamm-Chardon , Giovanna Scarel , Marco Fanciulli
Rare Earth Oxide Thin Films: Growth Characterization and Applications, 106, pp.153-177, 2007, ⟨10.1007/11499893_11⟩
Book sections hal-01745046v1

Morphological and Structural Aspects of Thin Films Prepared by Vapor Deposition

J. Caro , M. Doudkowsky , A. Figueras , J. Praxedas , G. Garcia
Handbook of Surfaces and Interfaces of Materials, Elsevier, Vol. 4, Chap. 4, pp. 229-280, 2001, ⟨10.1016/B978-012513910-6/50050-5⟩
Book sections hprints-01745420v1