Sylvie Schamm-Chardon

169
Documents
Affiliation actuelle
  • Matériaux et dispositifs pour l'Electronique et le Magnétisme (CEMES-MEM)

Présentation

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Publications

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Origin of strain in H+ ion implanted LiTaO3 single crystals

A. Louiset , S. Schamm-Chardon , O. Kononchuk , C. Magén , Nikolay Cherkashin

APL Materials, 2025, 13 (11), pp.111109. ⟨10.1063/5.0291228⟩

Article dans une revue hal-05363153v1
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Optically Induced Irreversible Ferroelastic and Ferroelectric Switching in Epitaxial BaTiO 3 Films on Silicon

Ibukun Olaniyan , Alfredo Blázquez Martínez , Valentin Väinö Hevelke , Sven Wiesner , Rong Wu et al. Article dans une revue hal-05327838v1
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Ferroelectricity in Single‐Crystalline BaTiO<sub>3</sub> Nanodisks on Silicon

Ibukun Olaniyan , Jürgen Albert , Beatriz Canabarro , Haidong Lu , Sven Wiesner et al.

Advanced Functional Materials, 2025, ⟨10.1002/adfm.202507905⟩

Article dans une revue hal-05202953v1
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Shaping single crystalline BaTiO 3 nanostructures by focused neon or helium ion milling

I I Olaniyan , S W Schmitt , J Albert , J Garcia Fernandez , Cécile Marcelot et al.

Nanotechnology, 2024, 35 (33), pp.335301. ⟨10.1088/1361-6528/ad4713⟩

Article dans une revue hal-04616424v1
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Switchable topological polar states in epitaxial BaTiO3 nanoislands on silicon

Ibukun Olaniyan , Iurii Tikhonov , Valentin Väinö Hevelke , Sven Wiesner , Leifeng Zhang et al.

Nature Communications, 2024, 15 (1), pp.10047. ⟨10.1038/s41467-024-54285-z⟩

Article dans une revue hal-04793436v1
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Quantitative mapping of strain and displacement fields over HR-TEM and HR-STEM images of crystals with reference to a virtual lattice

Nikolay Cherkashin , A. Louiset , A. Chmielewski , D.J. Kim , C. Dubourdieu et al.

Ultramicroscopy, 2023, 253, pp.113778. ⟨10.1016/j.ultramic.2023.113778⟩

Article dans une revue hal-04129547v1
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Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H + ions implanted LiTaO 3

Antonin Louiset , Sylvie Schamm-Chardon , Oleg Kononchuk , Nikolay Cherkashin

Applied Physics Letters, 2021, 118 (8), pp.082903. ⟨10.1063/5.0040729⟩

Article dans une revue hal-03154232v1
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Nano-analytical investigation of the forming process in an HfO2-based resistive switching memory

Gauthier Lefevre , Tristan Dewolf , Nicolas Guillaume , Serge Blonkowski , Christelle Charpin-Nicolle et al.

Journal of Applied Physics, 2021, 130 (24), pp.244501. ⟨10.1063/5.0072343⟩

Article dans une revue hal-03720298v1
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Structural and chemical investigation of interface related magnetoelectric effect in Ni/BiFe0.95Mn0.05O3 heterostructures

B. Negulescu , J. Wolfman , Christophe Daumont , Nazir Jaber , Pascal Andreazza et al.

Applied Surface Science, 2019, 481, pp.234-240. ⟨10.1016/j.apsusc.2019.02.232⟩

Article dans une revue hal-02070799v1
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Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy

F. Stumpf , A. A. Abu Quba , P. Singer , M. Rumler , Nikolay Cherkashin et al.

Journal of Applied Physics, 2018, 123 (12), pp.125104. ⟨10.1063/1.5022558⟩

Article dans une revue hal-01745004v1
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Nanoscale control of Si nanoparticles within a 2D hexagonal array embedded in SiO<sub>2</sub> thin films

Celia Castro , Gérard Benassayag , Béatrice Pécassou , Andrea Andreozzi , Gabriele Seguini et al.

Nanotechnology, 2017, 28 (1), pp.014001. ⟨10.1088/0957-4484/28/1/014001⟩

Article dans une revue hal-01745005v1
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Decoupling indirect topographic cross-talk in band excitation piezoresponse force microscopy imaging and spectroscopy

Sang Mo Yang , Lucie Mazet , M. Baris Okatan , Stephen Jesse , Gang Niu et al.

Applied Physics Letters, 2016, 108 (25), pp.252902 - 252902. ⟨10.1063/1.4954276⟩

Article dans une revue hal-01720447v1
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Evolution of shape, size, and areal density of a single plane of Si nanocrystals embedded in SiO2 matrix studied by atom probe tomography

Bin Han , Yasuo Shimizu , Gabriele Seguini , Elisa Arduca , Celia Castro et al.

RSC Advances, 2016, 6 (5), pp.3617-3622. ⟨10.1039/c5ra26710b⟩

Article dans une revue hal-01720446v1

Studying Thin Ge films and Ge/GeO2 interfaces by means of raman–brillouin scattering

Lama Yaacoub , Sylvie Schamm-Chardon , N.N. Ovsyuk , Antoine Zwick , Jesse Groenen

Bulletin of the Russian Academy of Sciences - Physics, 2015, 79 (11), pp.1397-1401. ⟨10.3103/S1062873815110246⟩

Article dans une revue hal-01720450v1

Backside versus frontside advanced chemical analysis of high-k/metal gate stacks

E. Martinez , B. Saidi , M. Veillerot , P. Caubet , J.-M. Fabbri et al.

Journal of Electron Spectroscopy and Related Phenomena, 2015, 203, pp.1-7. ⟨10.1016/j.elspec.2015.04.022⟩

Article dans une revue istex hal-01720448v1

Atomic scale characterization of SiO<inf>2</inf>/4H-SiC interfaces in MOSFETs devices

Anna Maria Beltrán , Sébastien Duguay , Christian Strenger , Anton J Bauer , Fuccio Cristiano et al.

Solid State Communications, 2015, 221, pp.28-32. ⟨10.1016/j.ssc.2015.08.017⟩

Article dans une revue hal-01720451v1
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Atomic-layer deposited thulium oxide as a passivation layer on germanium

I.Z. Mitrovic , S. Hall , M. Althobaiti , D. Hesp , V.R. Dhanak et al.

Journal of Applied Physics, 2015, 117 (21), pp.214104. ⟨10.1063/1.4922121⟩

Article dans une revue hal-01720449v1
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A review of molecular beam epitaxy of ferroelectric BaTiO3 films on Si, Ge and GaAs substrates and their applications

Lucie Mazet , Sang Mo Yang , Sergei Kalinin , Sylvie Schamm-Chardon , Catherine Dubourdieu

Science and Technology of Advanced Materials, 2015, 16 (3), pp.036005. ⟨10.1088/1468-6996/16/3/036005⟩

Article dans une revue hal-01489400v1
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Raman-Brillouin scattering from a thin Ge layer: Acoustic phonons for probing Ge/GeO<inf>2</inf> interfaces

Lama Yaacoub , Sylvie Schamm-Chardon , N.N. Ovsyuk , Antoine Zwick , Jesse Groenen

Applied Physics Letters, 2014, 104 (6), pp.061601. ⟨10.1063/1.4864790⟩

Article dans une revue hal-01720453v1
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Structural study and ferroelectricity of epitaxial BaTiO3 films on silicon grown by molecular beam epitaxy

Lucie Mazet , Romain Bachelet , Lamis Louahadj , David Albertini , Brice Gautier et al.

Journal of Applied Physics, 2014, 116 (21), pp.214102. ⟨10.1063/1.4902165⟩

Article dans une revue hal-01489886v1

Silicon crystallization in nanodot arrays organized by block copolymer lithography

Michele Perego , Andrea Andreozzi , Gabriele Seguini , Sylvie Schamm-Chardon , Celia Castro et al.

Journal of Nanoparticle Research, 2014, 16 (12), ⟨10.1007/s11051-014-2775-6⟩

Article dans une revue hal-01718638v1

Quantumdots for memory applications

P. Dimitrakis , P. Normand , V. Ioannou-Sougleridis , Caroline Bonafos , Sylvie Schamm-Chardon et al.

Physica Status Solidi A (applications and materials science), 2013, 210 (8), pp.1490-1504. ⟨10.1002/pssa.201300029⟩

Article dans une revue istex hal-01745006v1

In-plane organization of silicon nanocrystals embedded in SiO2 thin films

Celia Castro , Sylvie Schamm-Chardon , Béatrice Pécassou , A. Andreozzi , G. Seguini et al.

Nanotechnology, 2013, 24 (7), ⟨10.1088/0957-4484/24/7/075302⟩

Article dans une revue hal-01745011v1

Influence of La on the electrical properties of HfSiON: From diffusion to Vth shifts

M. Hackenberg , P. Pichler , S. Baudot , Z. Essa , M. Gro-Jean et al.

Microelectronic Engineering, 2013, 109, pp.200-203. ⟨10.1016/j.mee.2013.03.071⟩

Article dans une revue hal-01745012v1

Fabrication of well-ordered arrays of silicon nanocrystals using a block copolymer mask

Paolo Pellegrino , Michele Perego , Sylvie Schamm-Chardon , Gabriele Seguini , Andrea Andreozzi et al.

Physica Status Solidi A (applications and materials science), 2013, 210 (8), pp.1477-1484. ⟨10.1002/pssa.201300030⟩

Article dans une revue istex hal-01745010v1
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Scaling size of the interplay between quantum confinement and surface related effects in nanostructured silicon

G. Seguini , Celia Castro , Sylvie Schamm-Chardon , Gérard Benassayag , P. Pellegrino et al.

Applied Physics Letters, 2013, 103 (2), pp.023103. ⟨10.1063/1.4813743⟩

Article dans une revue hal-01745007v1

Implantation energy effect on photoluminescence spectroscopy of Si nanocrystals locally fabricated by stencil-masked ultra-low-energy ion-beam-synthesis in silica

Régis Diaz , C. Suarez , Arnaud Arbouet , Renaud Marty , Vincent Paillard et al.

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2012, 272, pp.53-56. ⟨10.1016/j.nimb.2011.01.031⟩

Article dans une revue istex hal-01745016v1

Extraction of the characteristics of Si nanocrystals by the charge pumping technique

Régis Diaz , Jérémie Grisolia , Gérard Benassayag , Sylvie Schamm-Chardon , Celia Castro et al.

Nanotechnology, 2012, 23 (8), ⟨10.1088/0957-4484/23/8/085206⟩

Article dans une revue istex hal-01745017v1

Si and Ge nanocrystals for future memory devices

Caroline Bonafos , Marzia Carrada , Gérard Benassayag , Sylvie Schamm-Chardon , Jesse Groenen et al.

Materials Science in Semiconductor Processing, 2012, 15 (6), pp.615-626. ⟨10.1016/j.mssp.2012.09.004⟩

Article dans une revue istex hal-01745013v1

Nano-Analytical and Electrical Characterization of 4H-SiC MOSFETs

Anna Maria Beltrán , Sylvie Schamm-Chardon , Vincent Mortet , Matthieu Lefebvre , Eléna Bedel-Pereira et al.

Materials Science Forum, 2012, 711, pp.134-138. ⟨10.4028/www.scientific.net/MSF.711.134⟩

Article dans une revue hal-01745014v1

Comparative Study of Electrical and Microstructural Properties of 4H-SiC MOSFETs

C. Strenger , V. Haeublein , T. Enbacher , A. J. Bauer , H. Ryssel et al.

Materials Science Forum, 2012, 717-720, pp.437-440. ⟨10.4028/www.scientific.net/MSF.717-720.437⟩

Article dans une revue hal-01745018v1

Silicon nanoclusters embedded into oxide host for non-volatile memory applications

L. Khomenkova , X. Portier , B. Sahu , A. Slaoui , Caroline Bonafos et al.

ECS Transactions, 2011, 35, pp. 37-45

Article dans une revue hal-00647540v1

The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition

A. Andreozzi , L. Lamagna , G. Seguini , M. Fanciulli , Sylvie Schamm-Chardon et al.

Nanotechnology, 2011, 22 (33), ⟨10.1088/0957-4484/22/33/335303⟩

Article dans une revue istex hal-01745020v1

Structural and electrical properties of Er-doped HfO2 and of its interface with Ge (001)

C. Wiemer , S. Baldovino , L. Lamagna , M. Perego , Sylvie Schamm-Chardon et al.

Microelectronic Engineering, 2011, 88 (4), pp.415-418. ⟨10.1016/j.mee.2010.10.032⟩

Article dans une revue istex hal-01745019v1

Combining HRTEM-EELS nano-analysis with capacitance-voltage measurements to evaluate high-kappa thin films deposited on Si and Ge as candidate for future gate dielectrics

Sylvie Schamm-Chardon , Pierre-Eugène Coulon , L. Lamagna , C. Wiemer , S. Baldovino et al.

Microelectronic Engineering, 2011, 88 (4), pp.419-422. ⟨10.1016/j.mee.2010.10.012⟩

Article dans une revue istex hal-01745022v1
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Calculated and experimental electron energy-loss spectra of La2O3, La(OH)(3), and LaOF nanophases in high permittivity lanthanum-based oxide layers

Lionel Calmels , Pierre-Eugène Coulon , Sylvie Schamm-Chardon

Applied Physics Letters, 2011, 98 (24), pp.243116. ⟨10.1063/1.3600783⟩

Article dans une revue hal-01745023v1
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The energy band alignment of Si nanocrystals in SiO2

G. Seguini , Sylvie Schamm-Chardon , P. Pellegrino , M. Perego

Applied Physics Letters, 2011, 99 (8), pp.082107. ⟨10.1063/1.3629813⟩

Article dans une revue hal-01745021v1
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Nanocrystallized tetragonal metastable ZrO2 thin films deposited by metal-organic chemical vapor deposition for 3D capacitors

Magali Brunet , Hicham Mafhoz Kotb , Laurent Bouscayrol , Emmanuel Scheid , Michel Andrieux et al.

Thin Solid Films, 2011, 519 (16), pp.5638-5644. ⟨10.1016/j.tsf.2011.03.006⟩

Article dans une revue hal-01443083v1
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O-3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates

L. Lamagna , C. Wiemer , M. Perego , S. N. Volkos , S. Baldovino et al.

Journal of Applied Physics, 2010, 108 (8), pp.084108. ⟨10.1063/1.3499258⟩

Article dans une revue hal-01745024v1

Ultra-low energy ion implantation of Si into HfO2 and HfSiO-based structures for non volatile memory applications

Caroline Bonafos , F. Gloux , Pierre-Eugène Coulon , Jesse Groenen , Sylvie Schamm-Chardon et al.

Materials Research Society Symposia Proceedings, 2010, 1250, p. G01-07

Article dans une revue hal-00562346v1
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Dielectric properties of Er-doped HfO2 (Er ~ 15%) grown by atomic layer deposition for high-kappa gate stacks

C. Wiemer , L. Lamagna , S. Baldovino , M. Perego , Sylvie Schamm-Chardon et al.

Applied Physics Letters, 2010, 96 (18), pp.182901. ⟨10.1063/1.3400213⟩

Article dans une revue hal-01745025v1

ZrO2 Thin Films Grown On 2D and 3D Silicon Surfaces By DLI-MOCVD For Electronic Devices

Karolina Galicka-Fau , Michel Andrieux , Corinne Legros , Michaële Herbst-Ghysel , Isabelle Gallet et al.

ECS Transactions, 2009, 25 (8), pp.1121-1128. ⟨10.1149/1.3207715⟩

Article dans une revue hal-01745028v1

Temperature-dependent low electric field charging of Si nanocrystals embedded within oxide-nitride-oxide dielectric stacks

N. Nikolaou , P. Dimitrakis , P. Normand , Sylvie Schamm-Chardon , Caroline Bonafos et al.

Nanotechnology, 2009, 20 (30), ⟨10.1088/0957-4484/20/30/305704⟩

Article dans une revue istex hal-01745029v1

Chemical/Structural Nanocharacterization and Electrical Properties of ALD-Grown La2O3/Si Interfaces for Advanced Gate Stacks

Sylvie Schamm-Chardon , Pierre-Eugène Coulon , S. Miao , S. N. Volkos , L. H. Lu et al.

Journal of The Electrochemical Society, 2009, 156 (1), pp.H1-H6. ⟨10.1149/1.3000594⟩

Article dans une revue hal-01745032v1
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Characterization of ZrO2 thin films deposited by MOCVD for high-density 3D capacitors. Broad experience on MOCVD techniques and high-k materials

Magali Brunet , Emmanuel Scheid , Karolina Galicka-Fau , Michel Andrieux , Corinne Legros et al.

Microelectronic Engineering, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩

Article dans une revue istex hal-01443057v1

Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers

F. Delachat , Marzia Carrada , G. Ferblantier , A. Slaoui , Caroline Bonafos et al.

Physica E: Low-dimensional Systems and Nanostructures, 2009, 41, pp. 994-997

Article dans une revue hal-00408918v1

ZrO 2 Thin Films Grown on 2D and 3D Silicon Surfaces by DLI-MOCVD for Electronic Devices

Karolina Galicka-Fau , Michel Andrieux , Corinne Legros , Michaële Herbst-Ghysel , Isabelle Gallet et al.

ECS Transactions, 2009, 25 (8), pp.1121-1128. ⟨10.1149/1.3207715⟩

Article dans une revue hal-05334763v1
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Thermally induced permittivity enhancement in La-doped ZrO2 grown by atomic layer deposition on Ge(100)

L. Lamagna , C. Wiemer , S. Baldovino , A. Molle , M. Perego et al.

Applied Physics Letters, 2009, 95 (12), pp.122902. ⟨10.1063/1.3227669⟩

Article dans une revue hal-01745026v1

Characterization of ZrO2 thin films deposited by MOCVD for high-density 3D capacitors

Magali Brunet , Emmanuel Scheid , Karolina Galicka-Fau , Michel Andrieux , Corinne Legros et al.

Microelectronic Engineering, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩

Article dans une revue istex hal-05334743v1

Ultra-low energy ion implantation of Si into HfO<sub>2</sub>-based structures for non volatile memory applications

Pierre-Eugène Coulon , K. Chan Shin Yu , Sylvie Schamm-Chardon , Gérard Benassayag , Béatrice Pécassou et al.

Materials Research Society Symposia Proceedings, 2009, 1160, pp.H01-03

Article dans une revue hal-00697605v1

Ultra-low-energy ion-beam-synthesis of Ge nanocrystals in thin ALD Al2O3 layers for memory applications

P. Dimitrakis , A. Mouti , Caroline Bonafos , Sylvie Schamm-Chardon , Gérard Benassayag et al.

Microelectronic Engineering, 2009, 86 (7-9), pp.1838-1841. ⟨10.1016/j.mee.2009.03.074⟩

Article dans une revue hal-01745030v1
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Atomic layer deposition of LaxZr1-xO2-delta (x=0.25) high-k dielectrics for advanced gate stacks

D. Tsoutsou , L. Lamagna , S. N. Volkos , A. Molle , S. Baldovino et al.

Applied Physics Letters, 2009, 94 (5), pp.53504 - 53504. ⟨10.1063/1.3075609⟩

Article dans une revue hal-01745031v1

Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing

Jérémie Grisolia , C. Dumas , Gérard Benassayag , Caroline Bonafos , Sylvie Schamm-Chardon et al.

Superlattices and Microstructures, 2008, 44 (4-5), pp.395-401. ⟨10.1016/j.spmi.2007.12.013⟩

Article dans une revue istex hal-01745035v1

Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing

D. Tsoutsou , G. Scarel , A. Debernardi , S. C. Capelli , S. N. Volkos et al.

Microelectronic Engineering, 2008, 85 (12), pp.2411-2413. ⟨10.1016/j.mee.2008.09.033⟩

Article dans une revue istex hal-01745039v1

Structural and optical properties of high density Si-ncs synthezised in SiNx:H by remote PECVD and annealing

Marzia Carrada , A. Zerga , A. Amann , J.J. Grob , J.P. Stoquert et al.

Mater. Sci. Eng. B, 2008, 147, pp.218-221

Article dans une revue hal-00250450v1

Structural and optical properties of high density Si-ncs synthesized in SiNx : H by remote PECVD and annealing

Marzia Carrada , A. Zerga , A. Amann , J. J. Grob , J. P. Stoquert et al.

Materials Science and Engineering: B, 2008, 147 (2-3), pp.218-221. ⟨10.1016/j.mseb.2007.09.042⟩

Article dans une revue istex hal-01745037v1

Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS

Sylvie Schamm-Chardon , Caroline Bonafos , H. Coffin , Nikolay Cherkashin , Marzia Carrada et al.

Ultramicroscopy, 2008, 108 (4), pp.346--357. ⟨10.1016/j.ultramic.2007.05.008⟩

Article dans une revue istex hal-01736064v1

KFM detection of charges injected by AFM into a thin SiO2 layer containing Si nanocrystals

C. Dumas , Laurence Ressier , Jérémie Grisolia , Arnaud Arbouet , Vincent Paillard et al.

Microelectronic Engineering, 2008, 85 (12), pp.2358-2361. ⟨10.1016/j.mee.2008.09.027⟩

Article dans une revue istex hal-01745038v1

Oxide-nitride-oxide memory stacks formed by low-energy Si ion implantation into nitride and wet oxidation

V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos et al.

Microelectronic Engineering, 2007, 84 (9-10), pp.1986--1989. ⟨10.1016/j.mee.2007.04.068⟩

Article dans une revue istex hal-01736069v1
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Field effect white and tunable electroluminescence from ion beam synthesized Si- and C-rich SiO2 layers

O. Jambois , Josep Carreras , A. Perez-Rodriguez , B. Garrido , Caroline Bonafos et al.

Applied Physics Letters, 2007, 91 (21), pp.211105 - 253124. ⟨10.1063/1.2807281⟩

Article dans une revue hal-01745044v1

Influence of the thickness of the tunnel layer on the charging characteristics of Si nanocrystals embedded in an ultra-thin SiO2 layer

C. Dumas , Jérémie Grisolia , Gérard Benassayag , Caroline Bonafos , Sylvie Schamm-Chardon et al.

Physica E: Low-dimensional Systems and Nanostructures, 2007, 38 (1-2), pp.80-84. ⟨10.1016/j.physe.2006.12.026⟩

Article dans une revue istex hal-01745045v1

Preparation and microstructures of BaTi1-xZrxO3 hetero-epitaxial thin films on SrTiO3 substrates

D. Wu , Philippe Sciau , Sylvie Schamm-Chardon , F. Gloux , M. Varela Fernandez

Journal of Physics D: Applied Physics, 2007, 40 (15), pp.4701-4706. ⟨10.1088/0022-3727/40/15/052⟩

Article dans une revue istex hal-01745042v1

Photoluminescence spectroscopy and transport electrical measurements reveal the quantized features of Si nanocrystals embedded in an ultra thin SiO2 layer

C. Dumas , Jérémie Grisolia , Marzia Carrada , Arnaud Arbouet , Vincent Paillard et al.

Physica Status Solidi C: Current Topics in Solid State Physics, 2007, 4, pp.311-315. ⟨10.1002/pssc.200673272⟩

Article dans une revue istex hal-01745040v1
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Wet oxidation of nitride layer implanted with low-energy Si ions for improved oxide-nitride-oxide memory stacks

V. Ioannou-Sougleridis , P. Dimitrakis , V.Em. Vamvakas , P. Normand , Caroline Bonafos et al.

Applied Physics Letters, 2007, 90 (26), pp.263513. ⟨10.1063/1.2752769⟩

Article dans une revue hal-01736066v1

Oxide-nitride-oxide dielectric stacks with Si nanoparticles obtained by low-energy ion beam synthesis

V. Ioannou-Sougleridis , P. Dimitrakis , V. Em Vamvakas , P. Normand , Caroline Bonafos et al.

Nanotechnology, 2007, 18 (21), ⟨10.1088/0957-4484/18/21/215204⟩

Article dans une revue istex hal-01745043v1
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White electroluminescence from C- and Si-rich thin silicon oxides

O. Jambois , B. Garrido , P. Pellegrino , Josep Carreras , A. Perez-Rodriguez et al.

Applied Physics Letters, 2006, 89 (25), pp.253124 - 253124. ⟨10.1063/1.2423244⟩

Article dans une revue hal-01745047v1
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Oxidation of Si nanocrystals fabricated by ultralow-energy ion implantation in thin SiO2 layers

H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag et al.

Journal of Applied Physics, 2006, 99 (4), pp.044302. ⟨10.1063/1.2171785⟩

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Materials science issues for the fabrication of nanocrystal memory devices by ultra low energy ion implantation

Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin et al.

Defect Diffus. Forum, 2006, 258-260, pp.531-541

Article dans une revue hal-00204809v1

Photoluminescence characterization of few-nanocrystals electronic devices

Arnaud Arbouet , Marzia Carrada , François Demangeot , Vincent Paillard , Gérard Benassayag et al.

Journal of Luminescence, 2006, 121 (2), pp.340-343. ⟨10.1016/j.jlumin.2006.08.070⟩

Article dans une revue hal-01745048v1

Photoluminescence characterization of few-nanocrystals electronic devices

A. Arbouet , M. Carrada , F. Demangeot , V. Paillard , Gérard Benassayag et al.

Journal of Luminescence, 2006, 121 (2), pp.340-343. ⟨10.1016/j.jlumin.2006.08.070⟩

Article dans une revue hal-04811979v1
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Fabrication of nanocrystal memories by ultra low energy ion implantation

Nikolay Cherkashin , Caroline Bonafos , H. Coffin , Marzia Carrada , Sylvie Schamm-Chardon et al.

Physica Status Solidi C: Current Topics in Solid State Physics, 2005, 2 (6), pp.1907--1911. ⟨10.1002/pssc.200460523⟩

Article dans une revue hal-01736090v1

Oxidation effects on transport characteristics of nanoscale MOS capacitors with an embedded layer of silicon nanocrystals obtained by low energy ion implantation

J Grisolia , M Shalchian , Gérard Benassayag , H. Coffin , Caroline Bonafos et al.

Materials Science and Engineering: B, 2005, 124, pp.494-498. ⟨10.1016/j.mseb.2005.08.082⟩

Article dans une revue istex hal-01745050v1

Si nanocrystals by ultra-low energy ion implantation for non-volatile memory applications

H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Marzia Carrada , Nikolay Cherkashin et al.

Materials Science and Engineering: B, 2005, 124-125, pp.499--503. ⟨10.1016/j.mseb.2005.08.129⟩

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Elaboration by spray pyrolysis and characterization in the VUV range of phosphor particles with spherical shape and micronic size

Nicolas Joffin , Bruno Caillier , Jeannette Dexpert-Ghys , Marc Verelst , Guy Baret et al.

Journal of Physics D: Applied Physics, 2005, 38 (17), pp.3261-3268. ⟨10.1088/0022-3727/38/17/S30⟩

Article dans une revue istex hal-00359209v1

Si nanocrystals by ultra-low-energy ion beam-synthesis for non-volatile memory applications

Caroline Bonafos , H. Coffin , Sylvie Schamm-Chardon , Nikolay Cherkashin , Gérard Benassayag et al.

Solid-State Electronics, 2005, 49 (11), pp.1734--1744. ⟨10.1016/j.sse.2005.10.001⟩

Article dans une revue istex hal-01736088v1

The effects of oxidation conditions on structural and electrical properties of silicon nanoparticles obtained by ultra-low-energy ion implantation

J Grisolia , M Shalchian , Gérard Benassayag , H. Coffin , Caroline Bonafos et al.

Nanotechnology, 2005, 16 (12), pp.2987-2992. ⟨10.1088/0957-4484/16/12/043⟩

Article dans une revue istex hal-01745049v1

The effects of oxidation conditions on structural and electrical properties of silicon nanoparticles obtained by ultra-low-energy ion implantation

Jérémie Grisolia , M Shalchian , Gérard Benassayag , H Coffin , Caroline Bonafos et al.

Nanotechnology, 2005, 16 (12), pp.2987-2992. ⟨10.1088/0957-4484/16/12/043⟩

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Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology

T. Müller , K.-H. Heinig , W. Möller , Caroline Bonafos , H. Coffin et al.

Applied Physics Letters, 2004, 85 (12), pp.2373-2375

Article dans une revue hal-01736097v1

Study of the chemical and structural organization of SIPOS films at the nanometer scale by TEM-EELS and XPS

Sylvie Schamm-Chardon , R Berjoan , P Barathieu

Materials Science and Engineering: B, 2004, 107 (1), pp.58-65. ⟨10.1016/j.mseb.2003.10.010⟩

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Multi-scale analysis of the dielectric properties and structure of resin/carbon-black nanocomposites

S. Paciornik , O. da Fonseca Martins Gomes , Arnaud Delarue , Sylvie Schamm-Chardon , Dominique Jeulin et al.

European Physical Journal: Applied Physics, 2003, 21 (1), pp.17-26. ⟨10.1051/epjap:2002107⟩

Article dans une revue istex hal-00166093v1

Study of the dielectric properties near the band gap by VEELS: gap measurement in bulk materials

Sylvie Schamm-Chardon , G. Zanchi

Ultramicroscopy, 2003, 96 (3-4), pp.559-564. ⟨10.1016/S0304-3991(03)00116-5⟩

Article dans une revue istex hal-01745053v1

Thermodynamic study and characterization of low pressure chemically vapor deposited silicon oxynitride films from tetraethylorthosilicate, dichlorosilane and ammonia gas mixtures

V Vamvakas , D Davazoglou , R Berjoan , Sylvie Schamm-Chardon , Constantin Vahlas

Thin Solid Films, 2003, 429 (1-2), pp.77-83. ⟨10.1016/S0040-6090(03)00061-0⟩

Article dans une revue istex hal-01745054v1

Multi-Dot Floating-Gates in MOSFETs for nonvolatile memories - Their ion beam synthesis and morphology

T. Müller , K.-H. Heinig , Caroline Bonafos , H. Coffin , Nikolay Cherkashin et al.

Materials Research Society Symposium - Proceedings, 2003, 792, pp.333-338. ⟨10.1557/PROC-792-R8.7⟩

Article dans une revue hal-01736111v1

Low pressure chemical vapor deposition of silicon oxynitride films using tetraethylorthosilicate, dichlorosilane and ammonia mixtures

V Vamvakas , R Berjoan , Sylvie Schamm-Chardon , D Davazoglou , Constantin Vahlas

Journal de Physique IV Proceedings, 2001, 11 (PR3), pp.231-238. ⟨10.1051/jp4:2001329⟩

Article dans une revue istex hal-01745057v1

VUV absorption coefficient measurements of borate matrices

B Moine , J Mugnier , D Boyer , R Mahiou , Sylvie Schamm-Chardon et al.

Journal of Alloys and Compounds, 2001, 323, pp.816-819. ⟨10.1016/S0925-8388(01)01151-3⟩

Article dans une revue istex hal-01745055v1

Contamination and the quantitative exploitation of EELS low-loss experiments

Sylvie Schamm-Chardon , G. Zanchi

Ultramicroscopy, 2001, 88 (3), pp.211-217. ⟨10.1016/S0304-3991(01)00070-5⟩

Article dans une revue istex hal-01745056v1

High-resolution electron microscopy investigations of stacking faults in Y1Ba2Cu3O7−δ metalorganic chemical vapor deposited thin films

C Grigis , Sylvie Schamm-Chardon , Dominique Dorignac

Journal of Materials Research, 1999, 14 (7), pp.2732-2738. ⟨10.1557/JMR.1999.0366⟩

Article dans une revue istex hal-01745058v1

Element and phase identification via fine structure analysis in EELS: application to MOCVD-Y1Ba2Cu3O7-delta thin films

C Grigis , Sylvie Schamm-Chardon

Ultramicroscopy, 1998, 74 (3), pp.159-167. ⟨10.1016/S0304-3991(98)00040-0⟩

Article dans une revue istex hal-01745060v1

Studies of LPCVD Al–Fe–O deposits by XPS, EELS and Mössbauer spectroscopies

C Labatut , R Berjoan , B Armas , Sylvie Schamm-Chardon , Jean Sévely et al.

Surface and Coatings Technology, 1998, 105 (1-2), pp.31-37. ⟨10.1016/S0257-8972(97)00562-8⟩

Article dans une revue istex hal-01745059v1

Structural characterization of amorphous SiCxNy chemical vapor deposited coatings

A Bendeddouche , R Berjoan , E Beche , T Merlemejean , Sylvie Schamm-Chardon et al.

Journal of Applied Physics, 1997, 81 (9), pp.6147-6154. ⟨10.1063/1.364396⟩

Article dans une revue hal-01745062v1
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Kinetic Processes in the CVD of SiC from CH3SiCl3-H2 in a Vertical Hot-Wall Reactor

F. Langlais , F. Loumagne , D. Lespiaux , Sylvie Schamm-Chardon , R. Naslain

Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-105-C5-112. ⟨10.1051/jphyscol:1995510⟩

Article dans une revue istex jpa-00253766v1

Correlations between gas phase supersaturation, nucleation process and physico-chemical characteristics of silicon carbide deposited from Si-C-H-Cl system on silica substrates

D Lespiaux , F Langlais , R Naslain , Sylvie Schamm-Chardon , Jean Sévely

Journal of Materials Science, 1995, 30 (6), pp.1500-1510. ⟨10.1007/BF00375255⟩

Article dans une revue istex hal-01745067v1
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HREM Characterization of Interfaces in Thin MOCVD Superconducting Films

Dominique Dorignac , Sylvie Schamm-Chardon , Ch. Grigis , J. Santiso , G. Garcia et al.

Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-927-C5-934. ⟨10.1051/jphyscol:19955110⟩

Article dans une revue jpa-00253779v1

Physicochemical properties of SiC-based ceramics deposited by low pressure chemical vapor deposition from CH3SiCl3H2

F Loumagne , F Langlais , R Naslain , Sylvie Schamm-Chardon , Dominique Dorignac et al.

Thin Solid Films, 1995, 254 (1-2), pp.75-82. ⟨10.1016/0040-6090(94)06237-F⟩

Article dans une revue istex hal-01745064v1
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Preparation of YBCO on YSZ Layers Deposited on Silicon and Sapphire by MOCVD : Influence of the Intermediate Layer on the Quality of the Superconducting Film

G. Garcia , J. Casado , J. Llibre , M. Doudkowski , J. Santiso et al.

Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-439-C5-447. ⟨10.1051/jphyscol:1995551⟩

Article dans une revue jpa-00253913v1

SiCN Amorphous Materials Chemical Vapour Deposited Using the Si(CH3)4-NH3-H2 System

A Bendeddouche , R Berjoan , E Beche , Sylvie Schamm-Chardon , Virginie Serin et al.

Journal de Physique IV Proceedings, 1995, 5 (C5), pp.793-800. ⟨10.1051/jphyscol:1995594⟩

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Chlorine and oxygen inhibition effects in the deposition of SiC-based ceramics from the Si-C-H-Cl system

D Lespiaux , F Langlais , R Naslain , Sylvie Schamm-Chardon , Jean Sévely

Journal of the European Ceramic Society, 1995, 15 (1), pp.81-88. ⟨10.1016/0955-2219(95)91303-6⟩

Article dans une revue istex hal-01745066v1

Preparation of YBCO on YSZ Layers Deposited on Silicon and Sapphire by MOCVD : Influence of the Intermediate Layer on the Quality of the Superconducting Film

G Garcia , J Casado , J Llibre , M Doudkowski , J Santiso et al.

Journal de Physique IV Proceedings, 1995, Proceedings of the Tenth European Conference on Chemical Vapour Deposition, 5 (C5), pp.439-445. ⟨10.1051/jphyscol:1995551⟩

Article dans une revue hal-01745063v1
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SiCN Amorphous Materials Chemical Vapour Deposited Using the Si(CH3)4-NH3-H2 System

A. Bendeddouche , R. Berjoan , E. Bêche , Sylvie Schamm-Chardon , V. Serin et al.

Journal de Physique IV Proceedings, 1995, 05 (C5), pp.C5-793-C5-800. ⟨10.1051/jphyscol:1995594⟩

Article dans une revue jpa-00253957v1

Y2O3 nanoprecipitates in YBCO thin films obtained by thermal- MOCVD

J Santiso , A Figueras , Sylvie Schamm-Chardon , C Grigis , Dominique Dorignac et al.

Physica C: Superconductivity and its Applications, 1994, 235, pp.619-620. ⟨10.1016/0921-4534(94)91533-4⟩

Article dans une revue istex hal-01745068v1

Y2O3 nanoprecipitate/YBaCuO matrix interfaces: HREM study

Dominique Dorignac , Sylvie Schamm-Chardon , C Grigis , Jean Sévely , J Santiso et al.

Physica C: Superconductivity and its Applications, 1994, 235, pp.617-618. ⟨10.1016/0921-4534(94)91532-6⟩

Article dans une revue istex hal-01745069v1

Compatibility between SiC filaments and aluminim in the K2ZrF6 wetting process and its effect on filament strength

Sylvie Schamm-Chardon , Y Lepetitcorps , R Naslain

Composites Science and Technology, 1991, 40 (2), pp.193-211. ⟨10.1016/0266-3538(91)90097-9⟩

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HREM identification of "one-dimensionally-disordered" polytypes in the SiC (CVI) matrix of SiC/SiC composites

Sylvie Schamm-Chardon , Annie Mazel , Dominique Dorignac , Jean Sévely

Microscopy, Microanalysis, Microstructures, 1991, 2 (1), pp.59-73. ⟨10.1051/mmm:019910020105900⟩

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The K2ZrF6 wetting process: Effect of surface chemistry on the ability of a SiC-Fiber preform to be impregnated by aluminum

Sylvie Schamm-Chardon , R Fedou , Jp Rocher , Jm Quenisset , R Naslain

Metallurgical Transactions a-Physical Metallurgy and Materials Science, 1991, 22 (9), pp.2133-2139. ⟨10.1007/BF02669881⟩

Article dans une revue istex hal-01745070v1

Partial phase diagram of the ternary reciprocal system KF-AlF3-Al2O3-K2O

Sylvie Schamm-Chardon , L Rabardel , J Grannec , R Naslain , C Bernard et al.

Calphad, 1990, 14 (4), pp.385-402. ⟨10.1016/0364-5916(90)90006-L⟩

Article dans une revue istex hal-01745073v1

Liquid-process production of composite-materials with aluminum-based matrix reinforced by fibers of carbon or silicon-carbide

Sylvie Schamm-Chardon , Jp Rocher , R Naslain

Memoires et Etudes Scientifiques de la revue de Metallurgie, 1988, 85 (9), pp.483

Article dans une revue hal-01745074v1

Nano-composite MOx materials for NVMs

Caroline Bonafos , L. Khomenkhova , F. Gourbilleau , Etienne Talbot , Abdelilah Slaoui et al.

Metal Oxides for Non-volatile Memory, chapitre 7, Elsevier, pp.201-244, 2022, ⟨10.1016/B978-0-12-814629-3.00007-6⟩

Chapitre d'ouvrage hal-03661308v1

Interdiffusion and Chemical Reaction at Interfaces by TEM/EELS

Sylvie Schamm-Chardon

in Transmission Electron Microscopy in Micro-Nanoelectronics, Nanoscience and Nanotechnology Series, ISTE Ltd and John Wiley & Sons, Inc., UK, pp. 135-163, 2013, ⟨10.1002/9781118579022.ch6⟩

Chapitre d'ouvrage hal-01745009v1
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Nanoparticle-based memories : concept and operation principles

P. Dimitrakis , Sylvie Schamm-Chardon , Caroline Bonafos , P. Normand

Applications of Nanomaterials, American Scientific Publishers, Chap. 2, 2012, 1-58883-181-7

Chapitre d'ouvrage hprints-01745475v1

Synthesis and Packaging of Nanocrystals by Ultra Low Energy Ion Implantation for Applications in Electronics, Optics and Plasmonics

Alain Claverie , Caroline Bonafos , Robert Carles , Sylvie Schamm-Chardon , Arnaud Arbouet et al.

Synthesis and Engineering of Nanostructures by Energetic Ions, Nova Science, Chap. 9, pp. 153-172, 2011

Chapitre d'ouvrage hprints-01745455v1

Local structure, composition and electronic properties of rare earth oxide thin films studied using advanced transmission electron microscopy techniques (TEM-EELS)

Sylvie Schamm-Chardon , Giovanna Scarel , Marco Fanciulli

Rare Earth Oxide Thin Films: Growth Characterization and Applications, 106, pp.153-177, 2007, ⟨10.1007/11499893_11⟩

Chapitre d'ouvrage istex hal-01745046v1

Morphological and Structural Aspects of Thin Films Prepared by Vapor Deposition

J. Caro , M. Doudkowsky , A. Figueras , J. Praxedas , G. Garcia et al.

Handbook of Surfaces and Interfaces of Materials, Elsevier, Vol. 4, Chap. 4, pp. 229-280, 2001, ⟨10.1016/B978-012513910-6/50050-5⟩

Chapitre d'ouvrage hprints-01745420v1

Fabrication by neon ion milling and ferroelectricity of BaTiO3 nanodisks on silicon

Ibukun Olaniyan , Dong-Jik Kim , Jürgen Albert , Haidong Lu , Beatriz Rodrigues Canabarro et al.

IMF 2023 - The 15th International Meeting on Ferroelectricity, Mar 2023, Tel AViv, Israel

Communication dans un congrès hal-04253512v1

Polarization pattern at the atomic scale in ferroelectric BaTiO3 under different boundary conditions by HRSTEM

Beatriz Rodrigues Canabarro , Ibukun Olaniyan , Dong Jik Kim , Sebastian Schmitt , César Magen et al.

IMF 2023 - The 15th International Meeting on Ferroelectricity, Mar 2023, Tel AViv, Israel

Communication dans un congrès hal-04253508v1

Curled polarization nanodomains in (BaTiO3/SrTiO3) epitaxial superlattices on silicon

Valentin Hevelke , Ines Häusler , Kasper Aas Hunnesta , Dong-Jik Kim , Adnan Hammud et al.

IMF 2023 - The 15th International Meeting on Ferroelectricity, Mar 2023, Tel AViv, Israel

Communication dans un congrès hal-04253505v1

Nano-analytical investigation of the forming process in an HfO2-based resistive switching memory

Gauthier Lefevre , Tristan Dewolf , Nicolas Guillaume , Serge Blonkowski , Christelle Charpin-Nicolle et al.

MAM 2022, Mar 2023, Leuven (BE), Belgium

Communication dans un congrès hal-04253479v1

Polarization pattern at the atomic scale in ferroelectric BaTiO3 under different boundary conditions by HRSTEM

Beatriz Rodrigues Canabarro , Teresa Hungria , Ibukun Olaniyan , Dong Jik Kim , Sebastian Schmitt et al.

CSBMM and CIASEM 2023, Nov 2023, Olinda, Brazil

Communication dans un congrès hal-04253523v1

Controlling the Schottky Barrier height via polar discontinuity at (La,Sr)MnO3 / SrTiO3 interface

J. Wolfman , A. Ruyter , B. Negulescu , M. Upadhyay , P. Andreazza et al.

EMRS Spring 2023, May 2023, Strasboug, France

Communication dans un congrès hal-04253518v1

Reversible charge transfer and band bending at metal/oxide junction using interface combinatorial engineering

J. Wolfman , A. Ruyter , B. Negulescu , M. Upadhyay , P. Andreazza et al.

MRM2023/IUMRS-ICA2023 Grand Meeting, Dec 2023, Kyoto (Japan), Japan

Communication dans un congrès hal-04253500v1

Reciprocal space-based method for quantitative mapping of strain, absolute and polarization related displacement fields in HR-STEM images of ferroelectrics

Nikolay Cherkashin , Antonin Louiset , Adrian Chmielewski , Dong Jik Kim , Catherine Dubourdieu et al.

IMF 2023 - The 15th International Meeting on Ferroelectricity, Mar 2023, Tel AViv, Israel

Communication dans un congrès hal-04253511v1

Fabrication of barium titanate nanopillars by neon ion milling

Ibukun Olaniyan , S.W. Schmitt , Javier Garcia-Fernandez , J. Albert , Veeresh Deshpande et al.

IEEE ISAF 2022, Jun 2022, Tours, France

Communication dans un congrès hal-03750458v1

Band structure tuning at (La,Sr)MnO3 / (Ba,Sr)TiO3 interface

Jérôme Wolfman , Antoine Ruyter , B. Negulescu , Pascal Andreazza , Xavier Wallart et al.

EMRS Spring 2022, May 2022, Virtual, France

Communication dans un congrès hal-03750429v1

Band structure and polar distortion tuning at (La,Sr)MnO3 / (Ba,Sr)TiO3 interface

J. Wolfman , A. Ruyter , B. Negulescu , Pascal Andreazza , X. Wallart et al.

IEEE ISAF 2022, Jun 2022, Tours (FR), France

Communication dans un congrès hal-04485893v1

Fabrication by neon ion milling and characterization of barium titanate nanopillars

Ibukun Olaniyan , S.W. Schmitt , Javier Garcia Fernandez , J. Albert , Veeresh Deshpande et al.

International Symposium on Applications of Ferroelectrics, ISAF 2021, May 2021, Sydney (AUSTRALIA), Australia

Communication dans un congrès hal-04618582v1

Deposition of Epitaxial and Composite Ferroelectrics Directly on Silicon

Catherine Dubourdieu , Lucie Mazet , M.M. Frank , E. Cartier , J. Bruley et al.

CIMTEC 2018 - 14th International Conference on Modern Materials and Technologies, Jun 2018, Perugia, Italy

Communication dans un congrès hal-02081495v1

Ferroelectric Capacitors with "Quasi-Amorphous" BaTiO3 Integrated on Silicon

Lucie Mazet , M.M. Frank , Sylvie Schamm-Chardon , E.A. Cartier , H. Miyazoe et al.

MRS Spring 2017,, Apr 2017, Phœnix, United States

Communication dans un congrès hal-02081556v1

Epitaxial BaTiO3 on SiGe: nanoscale characterization of the film and its interface with the semiconductor

Sylvie Schamm-Chardon , Cesar Magén , Juri Barthel , Lucie Mazet , Robin Cours et al.

EMRS Spring 2017, May 2017, Strasbourg, France

Communication dans un congrès hal-02081536v1

Investigation of switching mechanism in HfO2-based oxide resistive memories by in-situ Transmission Electron Microscopy (TEM) and Electron Energy Loss Spectroscopy (EELS)

T. Dewolf , D. Cooper , N. Bernier , V. Delaye , A. Grenier et al.

ISTFA 2017, Nov 2017, Pasadena, United States. pp.371-374

Communication dans un congrès hal-01998793v1

Ultra Low Energy Ion Beam Synthesis: An Original Method for the Fabrication of Nanocrystals in Dielectrics for Nanoelectronics, Nano-Optics and Plasmonic Applications

G. Ben Assayag , C. Carles , Caroline Bonafos , B. Pecassou , Xavier Hebras et al.

CMOS Emerging Technologies, CMOSET 2016, May 2016, Montreal, Canada

Communication dans un congrès hal-02079238v1

Nano-characterization of switching mechanism in HfO2-based oxide resistive memories by TEM-EELS-EDS

T. Dewolf , V. Delaye , N. Bernier , D. Cooper , N. Chevalier et al.

16th European Microscopy Congress, 2016, LYON, France

Communication dans un congrès hal-01882043v1

Characterization of Si Nanocrystals Embedded in SiO2 Matrix by Atom Probe Tomography

B. Han , Yasuo Shimizu , Gabriele Seguini , Elisa Arduca , Celia Castro et al.

EMN Meeting on Nanocrystals, Oct 2016, Xi'an, China

Communication dans un congrès hal-02082375v1

Epitaxial BaTiO3 on Silicon and Silicon Germanium: Nanoscale Characterization, Ferroelectricity and Integration into TiN-Gated Devices

Lucie Mazet , S.M. Yang , M.M. Frank , E.A. Cartier , H. Miyazoe et al.

MRS Spring 2016, Mar 2016, Phœnix, États-Unis

Communication dans un congrès hal-02083658v1

Structure of the interface in sub-nm EOT TmSiO/HfO2 gate stack

I.Z. Mitrovic , S.N. Supardan , D. Hesp , V.R. Danak , S. Hall et al.

19th Workshop on Dielectrics in Microelectronics (WODIM), Jun 2016, Catania, Italy

Communication dans un congrès hal-02082411v1

Microscopie électronique en transmission avancée pour l’étude des oxydes fonctionnels

Sylvie Schamm-Chardon

AFC 2016, Jul 2016, Marseille, France

Communication dans un congrès hal-01763015v1

Nanocrystal Memories

Panagiotis Dimitrakis , P. Normand , Vassilios Ioannou-Sougleridis , Caroline Bonafos , Sylvie Schamm-Chardon et al.

EMRS Spring 2015, May 2015, Lille, France

Communication dans un congrès hal-02081592v1

Molecular beam epitaxy of ferroelectric complex oxides on silicon

Catherine Dubourdieu , Lucie Mazet , S. Yang , Robin Cours , Romain Bachelet et al.

19th Conference on "Insulating Films on Semiconductors (INFOS), Jul 2015, Udine, Italy

Communication dans un congrès hal-01489594v1

Growth parameters and tetragonality at the nanoscale of MBE epitaxial BaTiO3 films on Si

Sylvie Schamm-Chardon , Cesar Magen , R. Guzman , Lucie Mazet , Robin Cours et al.

EMRS Spring 2015, May 2015, Lille, France

Communication dans un congrès hal-02081622v1

Structural study of BaTiO3 films grown on Si1-xGex substrates by molecular beam epitaxy: role of passivation

Lucie Mazet , Claude Botella , Robin Cours , Romain Bachelet , Guillaume Saint-Girons et al.

MRS 2015 Fall Meeting, Nov 2015, Boston, United States

Communication dans un congrès hal-01965449v1

Strain and Cation Stoichiometry in Epitaxial BaTiO3 Thin Films Grown on Silicon

Sylvie Schamm-Chardon , C. Magen , R. Guzman , Lucie Mazet , Robin Cours et al.

MRS 2015 Fall Meeting, Nov 2015, Boston, United States

Communication dans un congrès hal-01965445v1

Complex oxides on semiconductors for nanoelectronic applications

Lucie Mazet , Romain Bachelet , Guillaume Saint-Girons , Martin Hÿtch , Sylvie Schamm-Chardon et al.

TMS 2015 144th Annual Meeting, 2015, Orlando, Fl, USA, United States

Communication dans un congrès hal-01489569v1

Epitaxial growth of BaTiO3 on semiconductor substrates by molecular beam epitaxy for ferroelectric devices

Lucie Mazet , Romain Bachelet , Lamis Louahadj , Claude Botella , M. Frank et al.

EMRS 2014 Fall meeting, Sep 2014, Warsaw, Poland

Communication dans un congrès hal-01489916v1

Epitaxial growth of BaTiO3 on Si and SOI by molecular beam epitaxy for ferroelectric applications

Lucie Mazet , Romain Bachelet , Lamis Louahadj , Sylvie Schamm-Chardon , Martin Hÿtch et al.

ISAF 2014, May 2014, Penn State University in State College, PA, USA, United States

Communication dans un congrès hal-01489874v1

Epitaxy of ferroelectric complex oxides on semiconductors for field-effect devices

Lucie Mazet , Romain Bachelet , Guillaume Saint-Girons , Lamis Louahadj , David Albertini et al.

10th International Conference on Physics of Advanced Materials, Sep 2014, Iasi, Romania

Communication dans un congrès hal-01965375v1

Epitaxial growth by molecular beam epitaxy of ferroelectric BaTiO3 on silicon

Lucie Mazet , Romain Bachelet , Guillaume Saint-Girons , M. Yang , S. Kalinin et al.

Workshop “Les oxydes pour l’optique et la photonique”, 2014, Meudon, France

Communication dans un congrès hal-01489873v1

Monolithic integration of epitaxial BaTiO3 on Si and SiGe for ferroelectric devices

Lucie Mazet , Romain Bachelet , Guillaume Saint-Girons , David Albertini , Brice Gautier et al.

AVS 61st International Symposium, 2014, Baltimore, USA, United States

Communication dans un congrès hal-01490296v1

Local tetragonality of epitaxial BaTiO3 thin films on Si for ferroelectric applications

Sylvie Schamm-Chardon , Thibaud Denneulin , Martin Hÿtch , Lucie Mazet , Romain Bachelet et al.

IMC2014 - 18th International Microscopy congress, Sep 2014, Prague, Czech Republic

Communication dans un congrès hal-01489876v1

Nano-analytical investigation of 4H-SiC interfaces

Anna Maria Beltrán , H. Tan , Sylvie Schamm-Chardon , C. Strenger , Aj Bauer

Abstract book of EDGE 2013, May 2013, Sainte Maxime, France

Communication dans un congrès hal-00842516v1

Modifications of silicon nitride materials for SONOS memories

V. Ioannou-Sougleridis , P. Dimitrakis , P. Normand , N. Nikolaou , D. Simatos et al.

2013 International Semiconductor Conference (CAS), Oct 2013, Sinaia, Romania. pp.3-10, ⟨10.1109/SMICND.2013.6688073⟩

Communication dans un congrès hal-01745076v1
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Compositional characterization of SiC-SiO2 interfaces in MOSFETs

Anna Maria Beltrán , Sylvie Schamm-Chardon , Vincent Mortet , Eléna Bedel-Pereira , Fuccio Cristiano et al.

15Th European Microscopy Conference, Sep 2012, Manchester, United Kingdom. 2p

Communication dans un congrès hal-00720226v1
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EFTEM studies on the localization of silicon nanocrystals embedded in SiO2 for nano-devices

Celia Castro , A. Andreozzi , Gérard Benassayag , Anna Maria Beltrán , G. Seguini et al.

Proceeding of the 15th European Microscopy Conference, Sep 2012, Manchester, United Kingdom

Communication dans un congrès hal-00720334v1

Silicon nanoclusters embedded into oxide host for non-volatile memory applications

L. Khomenkova , X. Portier , B. Sahu , A. Slaoui , Caroline Bonafos et al.

219th ECS Meeting, May 2011, Montreal, Canada

Communication dans un congrès hal-00647561v1

Ultra-low energy ion implantation of Si into HfO2 and HfSiO-based structures for non volatile memory applications

Caroline Bonafos , F. Gloux , Pierre-Eugène Coulon , Jesse Groenen , Sylvie Schamm-Chardon et al.

Material Research Society (MRS) Spring Meeting, Symposium on Materials and Physics for Nonvolatile Memories II, Apr 2010, San Francisco, United States. pp.ISBN 978-1-60511-226-8

Communication dans un congrès hal-00590517v1

Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers

F. Delachat , Marzia Carrada , G. Ferblantier , A. Slaoui , Caroline Bonafos et al.

European Material Research Society (E-MRS) Spring Conference, Symposium on Frontiers in Silicon-Based Photonics, May 2008, STRASBOURG, France. pp.994-997

Communication dans un congrès hal-00408922v1

Ultra-Low Energy Ion Implantation of Si Into HfO(2)-Based Layers for Non Volatile Memory Applications

Pierre-Eugène Coulon , Kristel Chan Shin Yu , Sylvie Schamm-Chardon , Gérard Benassayag , Béatrice Pécassou et al.

Symposium H – Materials and Physics for Nonvolatile Memories, Apr 2009, San Francisco, United States. pp.3-10, ⟨10.1557/PROC-1160-H01-03⟩

Communication dans un congrès hal-01745027v1

Ultra-low energy ion implantation of Si and Ge into HfO2-based layers for non volatile memory applications

Pierre-Eugène Coulon , B.S. Sahu , Marzia Carrada , Sylvie Schamm-Chardon , Gérard Benassayag et al.

39th IEEE European Solid-State Device Research Conference (ESSDERC 2009), Sep 2009, ATHENES, Greece

Communication dans un congrès hal-00463965v1

Localized Silicon Nanocrystals Fabricated by Stencil Masked Low Energy Ion Implantation: Effect of the Stencil Aperture Size on the Implanted Dose

Régis Diaz , Carine Dumas , Jérémie Grisolia , Thierry Ondarçuhu , Sylvie Schamm-Chardon et al.

Symposium H – Materials and Physics for Nonvolatile Memories) , 2009, indéterminée, Unknown Region. pp.61-66, ⟨10.1557/PROC-1160-H04-05⟩

Communication dans un congrès hal-01745034v1

Low-Energy Ion-Beam-Synthesis of Semiconductor Nanocrystals in Very Thin High-k Layers for Memory Applications

Caroline Bonafos , Sylvie Schamm-Chardon , A. Mouti , P. Dimitrakis , V. Ioannou-Sougleridis et al.

15th Conference on Microscopy of Semiconducting Materials, Apr 2007, Cambridge, United Kingdom. pp.321-324, ⟨10.1007/978-1-4020-8615-1_70⟩

Communication dans un congrès istex hal-01745036v1

Crystalline Structure of HfZrO Thin Films and ZrO2 / HfO2 bi-Layers Grown by AVD for MOS Applications

Sandrine Lhostis , Clement Gaumer , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin et al.

ECS Transactions, 2008, Unknown, Unknown Region. ⟨10.1149/1.2911489⟩

Communication dans un congrès hal-01736062v1

Oxide-nitride-oxide dielectric stacks with embedded Si-nanoparticles fabricated by low-energy ion-beam-synthesis

Vassilios Ioannou-Sougleridis , Panagiotis Dimitrakis , Vassilios Em. Vamvakas , Pascal Normand , Caroline Bonafos et al.

Material Research Society 2007, Apr 2007, San Francisco, United States. pp. 121-125, ⟨10.1557/PROC-0997-I03-10⟩

Communication dans un congrès hal-01745041v1

Structural and optical properties of high density Si-ncs synthezised in SiNx:H by remote PECVD and annealing

Marzia Carrada , A. Zerga , A. Amann , J.J. Grob , J.P. Stoquert et al.

European Material Research Society (E-MRS) Spring Conference, Symposium on Semiconductor Nanostructures towards Electronic and Optoelectronic Device Applications, May 2007, Strasbourg, France

Communication dans un congrès hal-00250454v1

Electroluminescence from C- and Si- rich silicon oxides in continuous wave and pulsed excitation

O. Jambois , A. Perez-Rodriguez , P. Pellegrino , Josep Carreras , M. Peralvarez et al.

2007 Spanish Conference on Electron Devices, Jan 2007, Madrid, Spain. pp.1-4, ⟨10.1109/SCED.2007.383982⟩

Communication dans un congrès hal-01745077v1

Materials science issues for the fabrication of naocrystal memory devices by ultra low energy ion implantation

Alain Claverie , Caroline Bonafos , Gérard Benassayag , Sylvie Schamm-Chardon , Nikolay Cherkashin et al.

2nd International Conference on Diffusion in Solids and Liquids, DSL-2006, 2006, Aveiro, Portugal

Communication dans un congrès hal-00115744v1

Oxidation of Si nanocrystals fabricated by ultra-low energy ion implantation in thin SiO2 layers

H. Coffin , Caroline Bonafos , Sylvie Schamm-Chardon , Nikolay Cherkashin , Marc Respaud et al.

Symposium D – Materials and Processes for Nonvolatile Memories, 2005, indéterminée, Unknown Region. pp.281-286, ⟨10.1557/PROC-830-D6.6⟩

Communication dans un congrès hal-01736087v1

Manipulation of 2D arrays of Si nanocrystals by ultra-low-energy ion beam-synthesis for nonvolatile memories applications

Caroline Bonafos , Nikolay Cherkashin , Marzia Carrada , H. Coffin , Gérard Benassayag et al.

Symposium D – Materials and Processes for Nonvolatile Memories, 2005, indéterminée, Unknown Region. pp.217-222, ⟨10.1557/PROC-830-D5.2⟩

Communication dans un congrès hal-01736091v1

Elaboration of phosphor particles with spherical shape and micronic size

Nicolas Joffin , Jeannette Dexpert-Ghys , A Garcia , Marc Verelst , Sylvie Schamm-Chardon et al.

Light sources 2004 – Tenth International Symposium on the Science and Technology of Light Sources, Institute of Physics, 2004, Bristol, United Kingdom. pp. 165-166

Communication dans un congrès hal-01745052v1

Study of oxygen content and dielectric function of YBCO7-delta by EELS

Sylvie Schamm-Chardon , C Grigis , D Lessik , Jean Sévely

Electron Microscopy and Analysis Group Conference, EMAG’97, Sep 1997, Cambridge, United Kingdom. pp. 335-338, ⟨10.1046/j.1365-2818.1998.0381b.x⟩

Communication dans un congrès hal-01745061v1

CURLED POLARIZATION NANODOMAINS IN (BaTiO3/SrTiO3) EPITAXIAL SUPERLATTICES ON SILICON

Valentin Väinö Hevelke , Dong Jik Kim , Ines Häusler , Christoph Koch , Adnan Hammud et al.

Workshop on ferroelectric materials organized, Apr 2023, Norwegian University of Science and Technology, Norway

Poster de conférence hal-04253498v1

Organized Nanostructures and Nano-objects : Fabrication, characterization and applications - Preface

Michele Perego , Sylvie Schamm-Chardon , Paolo Pellegrino

France. Physica Status Solidi A (applications and materials science), 210 (8), pp.1476, 2013, ⟨10.1002/pssa.201370052⟩

N°spécial de revue/special issue hal-01745008v1