Enora Vuillermet

Post-doctorante
25
Documents
Affiliation actuelle
  • Institut National des Sciences Appliquées de Lyon (INSA Lyon)
Identifiants chercheurs

Domaines de recherche

Matériaux Micro et nanotechnologies/Microélectronique Optique / photonique Electronique

Compétences

Fabrication de composants en salle blanche Raman OBIC Mesures électriques MEB AFM/KPFM Cathodoluminescence

Publications

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Publications

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Integration of bright color centers into arrays of silicon carbide nanopillars

Enora Vuillermet , N. Bercu , S. Kochtcheev , M. Lazar

Applied Physics Letters, 2025, Defects in Solids for Quantum Technologies, 127 (2), pp.024003. ⟨10.1063/5.0255612⟩

Article dans une revue hal-05169989v1
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Infrared photoinduced force near-field spectroscopy of silicon carbide

Kuan-Ting Wu , Youssef El-Helou , Elise Usureau , Enora Vuillermet , Michel Kazan et al.

Applied Surface Science, 2024, 684, pp.161798. ⟨10.1016/j.apsusc.2024.161798⟩

Article dans une revue hal-04796916v1
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Coupled Non-Destructive Methods, Kelvin Force Probe Microscopy and µ-Raman to Characterize Doping in 4H-SiC Power Devices

Enora Marion Vuillermet , Kuan Ting Wu , Anaël Sédilot , Regis Deturche , Nicolas Bercu et al.

Solid State Phenomena, 2024, 358, pp.13-21. ⟨10.4028/p-sUIlP5⟩

Article dans une revue hal-04211449v1
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Cathodoluminescence Characterization of Point Defects Generated through Ion Implantations in 4H-SiC

Enora Marion Vuillermet , Nicolas Bercu , Florence Etienne , Mihai Lazar

Coatings, 2023, 13 (6), pp.992. ⟨10.3390/coatings13060992⟩

Article dans une revue hal-04170818v1
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High Quality Single Crystal Recrystallization of Thin 4H-SiC Films Deposed by PVD Techniques, a way for New Emerging Fields

Elise Usureau , Enora Marion Vuillermet , Mihai Lazar , Aurore Andrieux , Alexandre Jacquemot

Solid State Phenomena, 2023, 343, pp.21-28. ⟨10.4028/p-w0ryrj⟩

Article dans une revue hal-04170908v1
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Light Extraction from 4H Silicon Carbide by Nanostructuring the Surface with High Temperature Annealing

Enora Marion Vuillermet , Elise Usureau , Mihai Lazar , Regis Deturche

Materials Science Forum, 2023, 1089, pp.37-44. ⟨10.4028/p-lu37l6⟩

Article dans une revue hal-04170897v1

Correlative Near-Field Characterizations with KPFM, sMIM and SCM to Characterize the Geometry of a N-Channel Failed SiC JFET

Rosine Coq Germanicus , Mahima Chaudhary , Enora Vuillermet , Mihai Lazar

ISTFA 2025, Nov 2025, Pasadena, France. pp.404-410, ⟨10.31399/asm.cp.istfa2025p0404⟩

Communication dans un congrès hal-05401738v1
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Physical and electrical characterization of wide band gap for power electronic application

Camille Sonneville , Enora Vuillermet , Ndembi Ignoumba-Ignoumba , Maroun Dagher , Nhan Tran et al.

Société Française de Physique, Jun 2025, Troyes, France

Communication dans un congrès hal-05097944v1
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Raman and photoluminescence characterization of β-Ga2O3 for power electronic application

Enora Vuillermet , Camille Sonneville , Changzi Lu , Pierre Brosselard , Jean-Marie Bluet et al.

WORKSHOP ON GALLIUM OXIDE AND RELATED MATERIALS, Sep 2025, Grenoble, France

Communication dans un congrès hal-05317962v1

Integration of micro-fabricated thermal flow rate sensors in a 4H-SiC substrate passivated by a MPECVD-grown diamond layer

Enora Vuillermet , Lionel Rousseau , Georges Hamaoui , Nizar Ben Moussa , E. Nefzaoui et al.

The 34th International Conference on Diamond and Carbon Materials (ICDCM 2024), Sep 2024, Dresde, Germany

Communication dans un congrès hal-05374887v1

SiC plasma etching technology processes for power and optoelectronic devices

Mihai Lazar , Nour Beydoun , Frédéric Marty , Elise Usureau , Enora Marion Vuillermet et al.

PESM 2024, IMEC Belgium, Jun 2024, Leuven (BE), Belgium

Communication dans un congrès hal-04797018v1
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Technology development for nano-pillars fabrication in silicon carbide to enhance light collection from color centers

Enora Vuillermet , Serguei Kochtcheev , Elise Usureau , Nicolas Bercu , Mihai Lazar

International Conference on Silicon Carbide and Related Materials (ICSCRM 2024), Sep 2024, Raleigh (North Carolina), United States

Communication dans un congrès hal-04796859v1
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Near-field characterization of Nb2CTx MXene by non-destructive nearfield microscopy

Kevin Kim , Camilo Pérez de la Vega , Youssef El Helou , Enora Vuillermet , Kuan-Ting Wu et al.

SPIE OPTO, Jan 2024, San Francisco California, United States. pp.33, ⟨10.1117/12.3009437⟩

Communication dans un congrès hal-04618601v1

La gravure plasma, une étape critique dans la technologie SiC. Mécanismes physico-chimiques et applications

Mihai Lazar , Nour Beydoun , Frédéric Marty , Elise Usureau , Enora Vuillermet et al.

Journées Renatech Litho/Gravure 2024, Jun 2024, Valbonne, France

Communication dans un congrès hal-04799422v1

Recrystallization of thin 4H-SiC films deposited by PVD techniques, a way for new emerging fields

Enora Marion Vuillermet , Elise Usureau , François Jomard , Léa Le Joncour , Aurore Andrieux et al.

C'Nano 2023: The Nanoscience meeting, Centre national de compétences en Nanosciences, Mar 2023, Poitiers, France

Communication dans un congrès hal-04171807v1
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Cathodoluminescence study of silicon vacancies color centers generated by ion implantation in 6H-SiC

Enora Marion Vuillermet , R. Haddadi , N. Bercu , L. Ottaviani , L. Giraudet et al.

IEEE 2023 International semiconductor conference (CAS) - 46th edition, NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES - IMT Bucharest; IEEE – Electron Devices Society, Oct 2023, Sinaia (Romania), Romania. pp.135-138, ⟨10.1109/CAS59036.2023.10303651⟩

Communication dans un congrès hal-04304522v1

Caractérisation du dopage de dispositifs de puissance en 4H-SiC par KPFM et spectroscopie µ-Raman

Anaël Sédilot , Enora Marion Vuillermet , Régis Deturche , Elise Usureau , Jérémie Béal et al.

24ème Forum des microscopies à sonde locale, Apr 2023, Obernai, France

Communication dans un congrès hal-04171760v1

Surface nano-structuration of 4H-SiC by controlled high-temperature annealing

Enora Marion Vuillermet , Elise Usureau , Régis Deturche , Mihai Lazar

The 6th International Workshop on Ultraviolet Materials and Devices (IWUMD 2023), Jun 2023, Metz, France

Communication dans un congrès hal-04171629v1
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Characterization of β-Ga2O3 and device fabrication

Enora Vuillermet , Changzi Lu , Camille Sonneville , Pierre Brosselard , Jean-Marie Bluet et al.

Société Française de Physique, Jun 2025, Troyes, France

Poster de conférence hal-05099267v1
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Technology development for nano-pillars fabrication in silicon carbide to enhance light collection from color centers

Enora Vuillermet , Serguei Kochtcheev , Elise Usureau , Nicolas Bercu , Mihai Lazar

Journées Renatech Litho/Gravure 2024, Jun 2024, Valbonne, France

Poster de conférence hal-04618701v1
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Characterization of silicon vacancies and divacancies in hexagonal silicon carbide formed by nitrogen and aluminum ion implantation

Enora Marion Vuillermet , Nicolas Bercu , Florence Etienne , Mihai Lazar , Louis Giraudet

C'Nano 2023: The Nanoscience meeting, Mar 2023, Poitiers, France.

Poster de conférence hal-04171800v1
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Coupled non-destructive methods, Scanning Electron Microscopy, Kelvin Force Probe microscopy and µ-Raman to characterize doping in 4H-SiC power devices

Enora Vuillermet , Kuan-Ting Wu , Anaël Sédilot , Régis Deturche , Nicolas Bercu et al.

5e édition des French Photonics Days, Oct 2023, Strasboug, France

Poster de conférence hal-04618679v1
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Recrystallisation of thin 4H-SiC films deposed by PVD

Elise Usureau , Enora Marion Vuillermet , Mihai Lazar , Aurore Andrieux , Alexandre Jacquemot

19th International Conference on Silicon Carbide and Related Materials (ICSCRM 2022), Sep 2022, Davos, Switzerland.

Poster de conférence hal-04171214v1
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Nanostructuring of 4H-SiC by high temperature annealing

Enora Marion Vuillermet , Elise Usureau , Mihai Lazar , Regis Deturche

19th International Conference on Silicon Carbide and Related Materials (ICSCRM 2022), Sep 2022, Davos, Switzerland.

Poster de conférence hal-04171193v1