JM

Jean-François Michaud

58
Documents
Affiliation actuelle
  • GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN)

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Publications

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Argon Plasma Treatment of 4H-SiC Surface before Nickel Ohmic Contacts Formation by UV Laser Annealing

Clément Berger , Daniel Alquier , Jean François Michaud

Materials Science Forum, 2025, 1159, pp.31-36. ⟨10.4028/p-NWvo3B⟩

Article dans une revue hal-05247910v1
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How to Accurately Determine the Ohmic Contact Properties on n-Type 4H-SiC

Clément Berger , Daniel Alquier , Jean-François Michaud

Electronics, 2024, 13 (1), pp.217. ⟨10.3390/electronics13010217⟩

Article dans une revue hal-04378904v1

Silicon-carbide-based MEMS for gas detection applications

Jean-François Michaud , Marc Portail , Daniel Alquier , Dominique Certon , Isabelle Dufour

Materials Science in Semiconductor Processing, 2023, 171, pp.107986. ⟨10.1016/j.mssp.2023.107986⟩

Article dans une revue hal-04301385v1

Electrical, morphological and structural properties of Ti ohmic contacts formed on n-type 4H–SiC by laser thermal annealing

Clément Berger , Daniel Alquier , Micka Bah , Jean-François Michaud

Materials Science in Semiconductor Processing, 2022, 151, pp.106983. ⟨10.1016/j.mssp.2022.106983⟩

Article dans une revue hal-03755512v1
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Gas discrimination by simultaneous sound velocity and attenuation measurements using uncoated capacitive micromachined ultrasonic transducers

Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier , Dominique Certon et al.

Scientific Reports, 2022, 12 (1), pp.744. ⟨10.1038/s41598-021-04689-4⟩

Article dans une revue hal-03528025v1
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Broad bandwidth air-coupled micromachined ultrasonic transducers for gas sensing

Priyadarshini Shanmugam , L. Iglesias , J.F. Michaud , Daniel Alquier , L. Colin et al.

Ultrasonics, 2021, 114, pp.106410. ⟨10.1016/j.ultras.2021.106410⟩

Article dans une revue hal-03205726v1
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Proof of concept and preliminary results of gas detection by measuring the admittance at the resonance and anti-resonance of an uncoated CMUT

Luis Iglesias , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier , Dominique Certon et al.

Frontiers of Mechanical Engineering, 2020, 6, pp.14. ⟨10.3389/fmech.2020.00014⟩

Article dans une revue hal-02505916v1
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Investigation of the Young's Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates

Jaweb Ben Messaoud , Jean-François Michaud , Dominique Certon , Massimo Camarda , Nicolò Piluso et al.

Micromachines, 2019, 10, ⟨10.3390/mi10120801⟩

Article dans une revue hal-02374829v1

Turning the undesired voids in silicon into a tool: In-situ fabrication of free-standing 3C-SiC membranes

Rami Khazaka , Jean-François Michaud , Philippe Vennegues , Daniel Alquier , Marc Portail

Applied Physics Letters, 2017, 110 (8), ⟨10.1063/1.4977033⟩

Article dans une revue hal-01741061v1

Realization of minimum number of rotational domains in heteroepitaxied Si(110) on 3C-SiC(001)

Rami Khazaka , Marius Grundmann , Marc Portail , Philippe Vennegues , Marcin Zielinski et al.

Applied Physics Letters, 2016, 108 (1), ⟨10.1063/1.4939692⟩

Article dans une revue hal-01741073v1

Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

Emilie Bahette , Jean-François Michaud , Dominique Certon , Dominique Gross , Marie Perroteau et al.

Journal of Micromechanics and Microengineering, 2016, 26 (11), ⟨10.1088/0960-1317/26/11/115023⟩

Article dans une revue hal-01741067v1

On the interplay between Si(110) epilayer atomic roughness and subsequent 3C-SiC growth direction

Rami Khazaka , Jean-François Michaud , Philippe Vennegues , Luan Nguyen , Daniel Alquier et al.

Journal of Applied Physics, 2016, 120, pp.185306 - 141907. ⟨10.1063/1.4967741⟩

Article dans une revue hal-01740987v1

Toward high-quality 3C–SiC membrane on a 3C–SiC pseudo-substrate

Rami Khazaka , Emilie Bahette , Marc Portail , Daniel Alquier , Jean-François Michaud

Materials Letters, 2015, 160, pp.28-30. ⟨10.1016/j.matlet.2015.07.071⟩

Article dans une revue hal-01784769v1

Direct Insight into Grains Formation in Si Layers Grown on 3C-SiC by Chemical Vapor Deposition

Rami Khazaka , Marc Portail , Philippe Vennéguès , Daniel Alquier , Jean-François Michaud

Acta Materialia, 2015, 98, pp.336-342. ⟨10.1016/j.actamat.2015.07.052⟩

Article dans une revue istex hal-01784770v1
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Electrothermally driven high-frequency piezoresistive SiC cantilevers for dynamic atomic force microscopy

R. Boubekri , E. Cambril , L. Couraud , L. Bernardi , A. Madouri et al.

Journal of Applied Physics, 2014, 116, pp.054304. ⟨10.1063/1.4891833⟩

Article dans une revue hal-01715334v1

Progresses in cMUT Device Fabrication Using Low Temperature Processes

Emilie Bahette , Jean-François Michaud , Dominique Certon , Dominique Gross , Daniel Alquier

Journal of Micromechanics and Microengineering, 2014, 24 (4), pp.045020. ⟨10.1088/0960-1317/24/4/045020⟩

Article dans une revue hal-01831020v1

Original 3C-SiC micro-structure on a 3C-SiC pseudo-substrate

Jean-François Michaud , Marc Portail , Thierry Chassagne , Marcin Zielinski , Daniel Alquier

Microelectronic Engineering, 2013, 105, pp.65-67. ⟨10.1016/j.mee.2013.01.010⟩

Article dans une revue istex hal-01810899v1

Room light anodic etching of highly doped n-type 4 H-SiC in high-concentration HF electrolytes: Difference between C and Si crystalline faces

Gaël Gautier , Frédéric Cayrel , Marie Capelle , Jérôme Billoue , Xi Song et al.

Nanoscale Research Letters, 2012, 7 (1), pp.367-373. ⟨10.1186/1556-276X-7-367⟩

Article dans une revue hal-01810904v1

A New Approach for AFM Cantilever Elaboration with 3C-SiC

Sai Jiao , Jean-François Michaud , Marc Portail , A. Madouri , Thierry Chassagne et al.

Materials Letters, 2012, 77, pp.54-56. ⟨10.1016/j.matlet.2012.02.128⟩

Article dans une revue istex hal-01810915v1

Experimental Observation and Analytical Model of the Stress Gradient Inversion in 3C-SiC Layers on Silicon

M. Zielinski , Jean-François Michaud , Sai Jiao , Thierry Chassagne , Anne-Elisabeth Bazin et al.

Journal of Applied Physics, 2012, 111 (5), pp.053507. ⟨10.1063/1.3687370⟩

Article dans une revue hal-01810913v1

CW argon laser crystallization of silicon films: structural properties

J.F. Michaud , Régis Rogel , Tayeb Mohammed-Brahim , Michel Sarret

Journal of Non-Crystalline Solids, 2006, 352 (9-20), pp.998-1002

Article dans une revue hal-00437319v1

Low frequency noise model in N-MOS transistors operating from sub-threshold to above-threshold regions

Christophe Cordier , Abdelmalek Boukhenoufa , Laurent Pichon , Jean-François Michaud

Solid-State Electronics, 2005, 49 (8), pp.1376-1380

Article dans une revue hal-00772760v1

Low frequency noise model in N-MOS transistors operating from sub-threshold to above-threshold regions

J.F. Michaud , Christophe Cordier , Abdelmalek Boukhenoufa , Laurent Pichon

Solid-State Electronics, 2005, 49, issue 8, pp 1376-1380

Article dans une revue hal-00013581v1

Solid phase post-treatment of polysilicon films by a continuous argon laser

J.F. Michaud , Régis Rogel , Tayeb Mohammed-Brahim , Michel Sarret , Olivier Bonnaud

Thin Solid Films, 2005, 487, pp.81-84

Article dans une revue hal-00772824v1

Polysilicon thin-film transistors based on frequency doubled cw-Nd:YVO4 laser crystallized silicon

Amar Saboundji , Jean-François Michaud , Tayeb Mohammed-Brahim , France Le Bihan , G. Andrä et al.

Solid State Phenomena, 2003, 93, pp.55-60

Article dans une revue hal-00085671v1

Development of SiC-Based CMUTs for Harsh Environments: A Material Challenge

Quentin David , Khaoula Azaiez , Jean-François Michaud , Flavien Barcella , Sébastien Chenot et al.

EMRS Fall Meeting, 2025, Varsovie, Poland

Communication dans un congrès hal-05363490v1

Epitaxial growth and process developments for SiC-based CMUTs in harsh environments

Khaoula Azaiez , Quentin David , Jean-François Michaud , Flavien Barcella , Sébastien Chenot et al.

GDR MATEPI, 2025, Lille, France

Communication dans un congrès hal-05363506v1

Interest of cMUT technologies : from materials and processes to applications

D Alquier , J.-F. Michaud , F Barcella , L Colin , Etienne Lemaire et al.

IEEE International Conference on Microelectronic Test Structures ICMTS 2024, IEEE, Apr 2024, Edimbourg (Ecosse), United Kingdom

Communication dans un congrès hal-04518488v1

Laser Annealing: A New Strategy For SiC Power Device Contacts

Daniel Alquier , Clément Berger , Jean-François Michaud

NanoInnovation 2024, Airi - Associazione Italiana per la Ricerca Industriale, Sep 2024, ROME, Sapienza Univesità di Roma, Italy

Communication dans un congrès hal-04709991v1

Contact Strategies for SiC Power Devices

Daniel Alquier , Clément Berger , Jean-François Michaud

Materials for Advanced Metallization conference (MAM), Mar 2024, Milan (Italie), France

Communication dans un congrès hal-04515260v1
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Nickel Ohmic Contacts Formed on 4H-SiC by UV Laser Annealing

Jean-François Michaud , Clément Berger , Daniel Alquier

ICSCRM 2023, Sep 2023, Sorrento, Italy. pp.91, ⟨10.4028/p-xqh9xB⟩

Communication dans un congrès hal-04675210v1
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Cubic silicon carbide (3C-SiC) MEMS for gas detection

Jean-François Michaud , Marc Portail , Daniel Alquier , Dominique Certon , Isabelle Dufour

WOCSDICE - EXMATEC, May 2023, Palerme (Italie), France

Communication dans un congrès hal-04515241v1
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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility

Isabelle Dufour , Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Laurent Colin et al.

Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France

Communication dans un congrès hal-03778623v1

A New Approach in the Field of Hydrogen Gas Sensing Using MEMS Based 3C-SiC Microcantilevers

Priyadarshini Shanmugam , Luis Iglesias , Marc Portail , Isabelle Dufour , Dominique Certon et al.

13th European Conference on Silicon Carbide and Related Materials (ECSCRM 2020·2021) 2021-10-24, May 2022, Tours, France. pp.593-597, ⟨10.4028/p-m048qs⟩

Communication dans un congrès hal-03708472v1

Hydrogen Selective Gas Sensor Based on Attenuation Measurement of Acoustic Wave Using Uncoated CMUT

Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier , Dominique Certon et al.

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2021, Gainesville, United States. pp.398-401, ⟨10.1109/MEMS51782.2021.9375432⟩

Communication dans un congrès hal-03205733v1

Discrimination of Binary Gas Mixture Using CMUT Based Sound Attenuation Spectrum Gas Sensor

Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier , Dominique Certon et al.

18th International Meeting on Chemical Sensors IMCS 2021, May 2021, Chicago, United States. pp.1592-1592, ⟨10.1149/MA2021-01591592mtgabs⟩

Communication dans un congrès hal-03528047v1

Cmut Time of Flight Gas Sensor By Phase Shift Measurement

Luis Iglesias , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier , Dominique Certon et al.

18th International Meeting on Chemical Sensors IMCS 2020, 2020, Montreal, France. ⟨10.1149/MA2020-01312323mtgabs⟩

Communication dans un congrès hal-02476748v1
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Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures

Isabelle Dufour , Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier et al.

2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩

Communication dans un congrès hal-02481928v1
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High Frequency Gas Detection With an Uncoated CMUT Array by Impedance Resonant Frequency Measurement

Luis Iglesias Hernandez , Isabelle Dufour , Priyadarshini Shanmugam , Jean-François Michaud , Daniel Alquier et al.

IEEE SENSORS (2019), Oct 2019, Montréal, Canada. pp.1-4, ⟨10.1109/SENSORS43011.2019.8956767⟩

Communication dans un congrès hal-02476746v1

Gas detection in binary mixture by time of flight measurement made by the use of CMUTs

Luis Iglesias , Priyadarshini Shanmugam , Steven Pena , J.-F. Michaud , Daniel Alquier et al.

Workshop MUT 2019, 2019, Grenoble, France

Communication dans un congrès hal-02191737v1

CMUT enabled binary mixture gas sensing through time of flight measurement

Luis Iglesias , Priyadarshini Shanmugam , Steven Pena , Jean-François Michaud , Daniel Alquier et al.

The 16th International Workshop on Nanomechanical Sensors, 2019, Lausanne, Switzerland

Communication dans un congrès hal-02191746v1

Time of flight gas sensing with capacitive micro-machined ultrasonic transducers (CMUT’s)

Luis Iglesias , Priyadarshini Shanmugam , Steven Pena , Jean-François Michaud , Daniel Alquier et al.

Journées de l’école doctorale SPI Université de Bordeaux, Mar 2019, Bordeaux, France

Communication dans un congrès hal-02090954v1
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CMUT Based Air Coupled Transducers for Gas-Mixture Analysis

Priyadarshini Shanmugam , Luis Iglesias , Jean-François Michaud , Isabelle Dufour , Daniel Alquier et al.

2018 IEEE International Ultrasonics Symposium (IUS), Oct 2018, Kobe, Japan. pp.1-4, ⟨10.1109/ULTSYM.2018.8579789⟩

Communication dans un congrès hal-02013282v1

Influence of Aluminum Incorporation on Mechanical Properties of 3C-SiC Epilayers

Jean-François Michaud , Marcin Zielinski , Jaweb Ben Messaoud , Thierry Chassagne , Marc Portail et al.

International Conference on Silicon Carbide and Related Materials, Sep 2017, Washington, United States. pp.318-321, ⟨10.4028/www.scientific.net/MSF.924.318⟩

Communication dans un congrès hal-02017420v1

Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration

Jean-François Michaud , Rami Khazaka , M. Portail , G. Andrä , J. Bergmann et al.

Conférence MRS Spring Meeting, Apr 2016, Phoenix, United States. pp.3649 - 3654, ⟨10.1557/adv.2016.327⟩

Communication dans un congrès hal-01741555v1

Apparent noise parameter behavior in n-MOS transistors operating from subthreshold to above-threshold regions

Abdelmalek Boukhenoufa , Laurent Pichon , Christophe Cordier , Bogdan Cretu , Lehui Ding et al.

Proceedings of the 18th International Conference on noise in Physical Systems and 1/f Fluctuation ; ICNF 2005 ; CP780 Noise and Fluctuations, Sep 2005, Salamanca, Spain. pp.319-322

Communication dans un congrès hal-00773430v1

Cw Argon Laser Crystallization of Silicon Films : Structural properties

J.F. Michaud , Regis Rogel , Tayeb Mohammed-Brahim , Michel Sarret

Int. Conf. Amorphous and Nanocrystalline Semiconductors (ICANS'21), Sep 2005, Lisbonne, Portugal

Communication dans un congrès hal-00776201v1

Impact of the use of the second harmonic CW Nd:YVO4 laser to crystallize amorphous silicon films on the TFT performance

Amar Saboundji , Jean-François Michaud , Tayeb Mohammed-Brahim , Olivier Bonnaud , G. Andrä et al.

Proceedings of International Conference on AM-LCD 2004, Aug 2004, Tokyo, Japan

Communication dans un congrès hal-00870772v1

Modeling to the heating of a silicon thin film on a glass substrate during a cw argon laser crystallization process

G. Le Meur , B. Bourouga , J.F. Michaud , Tayeb Mohammed-Brahim

6th International Symposium on Heat Transfer, Jun 2004, pekin, China. pp.137-142

Communication dans un congrès hal-00848465v1

Continuous Argon Laser Crystallization of Patterned Silicon

Jean-François Michaud , Amar Saboundji , Regis Rogel , Tayeb Mohammed-Brahim , Michel Sarret et al.

The 11th International Displays Workshops IDW'04, Dec 2004, Niigata, Japan

Communication dans un congrès hal-00870482v1

Solid phase post-treatment of polysilicon films by a continuous argon laser

Jean-François Michaud , Regis Rogel , Tayeb Mohammed-Brahim , Michel Sarret , Olivier Bonnaud

POLYSE 2004, Sep 2004, Potdam, Germany

Communication dans un congrès hal-00870429v1

Cristallisation par laser argon continu de silicium amorphe déposé sur substrat de verre

Jean-François Michaud

JNRDM, May 2004, Marseille, France. pp.135-137

Communication dans un congrès hal-00906104v1

Cristallisation par laser continu de silicium amorphe déposé sur substrat de verre LPCVD

Jean-François Michaud

JNRDM, May 2003, Toulouse, France. Proceedings p 299

Communication dans un congrès hal-00921466v1
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SiC for Sensing in Harsh Environment

Marc Portail , Sylvain Kern , Clément Berger , Cécile Ghouila-Houri , Vincent Guigoz et al.

International Conference on Silicon Carbide and Related Materials, Sep 2024, Rayleigh, North Carolina, United States

Poster de conférence hal-04922976v1

3C-SiC — From Electronic to MEMS Devices

Jean-François Michaud , Marc Portail , Daniel Alquier

Advanced Silicon Carbide Devices and Processing, InTech, 2015

Chapitre d'ouvrage hal-02132700v1