Jean-François Michaud
- GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (GREMAN)
Publications
Publications
Development of SiC-Based CMUTs for Harsh Environments: A Material ChallengeEMRS Fall Meeting, 2025, Varsovie, Poland |
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Epitaxial growth and process developments for SiC-based CMUTs in harsh environmentsGDR MATEPI, 2025, Lille, France |
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Interest of cMUT technologies : from materials and processes to applicationsIEEE International Conference on Microelectronic Test Structures ICMTS 2024, IEEE, Apr 2024, Edimbourg (Ecosse), United Kingdom |
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Laser Annealing: A New Strategy For SiC Power Device ContactsNanoInnovation 2024, Airi - Associazione Italiana per la Ricerca Industriale, Sep 2024, ROME, Sapienza Univesità di Roma, Italy |
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Contact Strategies for SiC Power DevicesMaterials for Advanced Metallization conference (MAM), Mar 2024, Milan (Italie), France |
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Nickel Ohmic Contacts Formed on 4H-SiC by UV Laser AnnealingICSCRM 2023, Sep 2023, Sorrento, Italy. pp.91, ⟨10.4028/p-xqh9xB⟩ |
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Cubic silicon carbide (3C-SiC) MEMS for gas detectionWOCSDICE - EXMATEC, May 2023, Palerme (Italie), France |
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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facilityJoint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France |
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A New Approach in the Field of Hydrogen Gas Sensing Using MEMS Based 3C-SiC Microcantilevers13th European Conference on Silicon Carbide and Related Materials (ECSCRM 2020·2021) 2021-10-24, May 2022, Tours, France. pp.593-597, ⟨10.4028/p-m048qs⟩ |
Hydrogen Selective Gas Sensor Based on Attenuation Measurement of Acoustic Wave Using Uncoated CMUT2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2021, Gainesville, United States. pp.398-401, ⟨10.1109/MEMS51782.2021.9375432⟩ |
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Discrimination of Binary Gas Mixture Using CMUT Based Sound Attenuation Spectrum Gas Sensor18th International Meeting on Chemical Sensors IMCS 2021, May 2021, Chicago, United States. pp.1592-1592, ⟨10.1149/MA2021-01591592mtgabs⟩ |
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Cmut Time of Flight Gas Sensor By Phase Shift Measurement18th International Meeting on Chemical Sensors IMCS 2020, 2020, Montreal, France. ⟨10.1149/MA2020-01312323mtgabs⟩ |
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Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩ |
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High Frequency Gas Detection With an Uncoated CMUT Array by Impedance Resonant Frequency MeasurementIEEE SENSORS (2019), Oct 2019, Montréal, Canada. pp.1-4, ⟨10.1109/SENSORS43011.2019.8956767⟩ |
Gas detection in binary mixture by time of flight measurement made by the use of CMUTsWorkshop MUT 2019, 2019, Grenoble, France |
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CMUT enabled binary mixture gas sensing through time of flight measurementThe 16th International Workshop on Nanomechanical Sensors, 2019, Lausanne, Switzerland |
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Time of flight gas sensing with capacitive micro-machined ultrasonic transducers (CMUT’s)Journées de l’école doctorale SPI Université de Bordeaux, Mar 2019, Bordeaux, France |
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CMUT Based Air Coupled Transducers for Gas-Mixture Analysis2018 IEEE International Ultrasonics Symposium (IUS), Oct 2018, Kobe, Japan. pp.1-4, ⟨10.1109/ULTSYM.2018.8579789⟩ |
Influence of Aluminum Incorporation on Mechanical Properties of 3C-SiC EpilayersInternational Conference on Silicon Carbide and Related Materials, Sep 2017, Washington, United States. pp.318-321, ⟨10.4028/www.scientific.net/MSF.924.318⟩ |
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Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaborationConférence MRS Spring Meeting, Apr 2016, Phoenix, United States. pp.3649 - 3654, ⟨10.1557/adv.2016.327⟩ |
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Apparent noise parameter behavior in n-MOS transistors operating from subthreshold to above-threshold regionsProceedings of the 18th International Conference on noise in Physical Systems and 1/f Fluctuation ; ICNF 2005 ; CP780 Noise and Fluctuations, Sep 2005, Salamanca, Spain. pp.319-322 |
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Cw Argon Laser Crystallization of Silicon Films : Structural propertiesInt. Conf. Amorphous and Nanocrystalline Semiconductors (ICANS'21), Sep 2005, Lisbonne, Portugal |
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Impact of the use of the second harmonic CW Nd:YVO4 laser to crystallize amorphous silicon films on the TFT performanceProceedings of International Conference on AM-LCD 2004, Aug 2004, Tokyo, Japan |
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Modeling to the heating of a silicon thin film on a glass substrate during a cw argon laser crystallization process6th International Symposium on Heat Transfer, Jun 2004, pekin, China. pp.137-142 |
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Continuous Argon Laser Crystallization of Patterned SiliconThe 11th International Displays Workshops IDW'04, Dec 2004, Niigata, Japan |
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Solid phase post-treatment of polysilicon films by a continuous argon laserPOLYSE 2004, Sep 2004, Potdam, Germany |
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Cristallisation par laser argon continu de silicium amorphe déposé sur substrat de verreJNRDM, May 2004, Marseille, France. pp.135-137 |
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Cristallisation par laser continu de silicium amorphe déposé sur substrat de verre LPCVDJNRDM, May 2003, Toulouse, France. Proceedings p 299 |
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SiC for Sensing in Harsh EnvironmentInternational Conference on Silicon Carbide and Related Materials, Sep 2024, Rayleigh, North Carolina, United States |
3C-SiC — From Electronic to MEMS DevicesAdvanced Silicon Carbide Devices and Processing, InTech, 2015 |
Dispositif et procédé de détection d’hydrogèneFrance, N° de brevet: FR2009222. 2020 |
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Dispositif et procédé d’identification d’une contamination gazeuseFrance, N° de brevet: FR2009223. 2020 |
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Carbure de silicium pour des applications en électronique de puissance et pour les MEMSSciences de l'ingénieur [physics]. Université de tours, 2023 |